CN205139170U - Accelerometer servo circuit - Google Patents
Accelerometer servo circuit Download PDFInfo
- Publication number
- CN205139170U CN205139170U CN201520878774.4U CN201520878774U CN205139170U CN 205139170 U CN205139170 U CN 205139170U CN 201520878774 U CN201520878774 U CN 201520878774U CN 205139170 U CN205139170 U CN 205139170U
- Authority
- CN
- China
- Prior art keywords
- circuit
- amplifier
- differential capacitor
- mutual conductance
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Amplifiers (AREA)
Abstract
The utility model provides an accelerometer servo circuit, includes gauge outfit, servo amplifier, gauge outfit electric connection servo amplifier, the gauge outfit includes differential capacitance assembly, the differential capacitance assembly of torquer subassembly electric connection, servo amplifier includes voltage stabilizing circuit, leading transform amplifier, feedback RC network, mutual conductance compensated amplifier, and voltage stabilizing circuit, feedback RC network be the leading transform amplifier of electric connection respectively, leading transform amplifier electric connection mutual conductance compensated amplifier, mutual conductance compensated amplifier electric connection feedback RC network, differential capacitance assembly and leading transform amplifier electric connection, the output electric connection torquer subassembly of mutual conductance compensated amplifier. Its advantage is: its quiescent power dissipation electric current is lighter than 9mA, small in noise and reaches 80mA in 3mV, maximum output electric current, to the demand in the aspect of the power supply in the time of can satisfying field work, its accelerometer precision is higher, and stability is better, its application can be widened to characteristics such as its low -power consumption, low noise, wide range, will widen the range of application of accelerometer circuit.
Description
Technical field
The utility model belongs to technical field of sensor manufacture, is specifically related to a kind of accelerometer servo circuit.
Background technology
Quartz flexible accelerometer is one of Primary Component in inertial navigation system, and be the high-precision sensor of slotted line acceleration, its importance is more and more by people are understood.Be that the inertial navigation system of core is not operationally by the interference of radiowave with accelerometer, also the impact of not climate and magnetic variation, and have that structure is simple, volume is little, precision and highly sensitive, the feature such as good stability, power consumption are little, cost is low, not only can be widely used in the fields such as space flight, aviation, inertial navigation, and be more and more applied in multiple civil area such as oil, building, potential demand amount is comparatively large, has huge Social benefit and economic benefit.Along with China's rapid development of economy, quartz flexible accelerometer inclinator, level meter, oil well logging, tunneling, accurate inertial oriented survey, the demand in quality detection, disaster prevention etc. increase year by year, especially operation in the wild, is badly in need of the accelerometer of low-power consumption, low noise, large overload.
Utility model content
The technical problems to be solved in the utility model is: overcome the deficiencies in the prior art, provides the accelerometer servo circuit of a kind of low-power consumption, low noise, large overload.
The utility model solves the technical scheme that its technical matters adopts: a kind of accelerometer servo circuit, is characterized in that: comprise a gauge outfit, a servoamplifier, described gauge outfit electrically connects described servoamplifier; Described gauge outfit comprises a differential capacitor assembly, and a torquer electrical component connects described differential capacitor assembly; Described servoamplifier comprises a mu balanced circuit, a preposing conversion amplifier, feedback resistance-capacitance network, a mutual conductance compensator-amplifier unit, described mu balanced circuit, described feedback resistance-capacitance network electrically connect described preposing conversion amplifier respectively, described preposing conversion amplifier electric connects described mutual conductance compensator-amplifier unit, and described mutual conductance compensator-amplifier unit electrically connects described feedback resistance-capacitance network; Described differential capacitor assembly connects with described preposing conversion amplifier electric; The output terminal of described mutual conductance compensator-amplifier unit electrically connects described torquer assembly.
Preferably, described preposing conversion amplifier comprises a triangular-wave generator, a differential capacitor detecting device, a current integrator, an operational amplifier, and described triangular-wave generator, differential capacitor detecting device, current integrator, operational amplifier successively order electrically connect; Described operational amplifier electrically connects described mutual conductance compensator-amplifier unit; Described differential capacitor assembly and described triangular-wave generator electrically connect.
Preferably, described triangular-wave generator comprises a biasing circuit, a constant current source and change-over circuit thereof, an output circuit, and described biasing circuit, constant current source and change-over circuit thereof, output circuit successively order electrically connect; Described mu balanced circuit electrically connects described constant current source and change-over circuit thereof; Described output circuit electrically connects described differential capacitor detecting device; Described differential capacitor assembly and described biasing circuit electrically connect.
Preferably, described mu balanced circuit is electric resistance partial pressure type.
Preferably, described mu balanced circuit is two-way electric resistance partial pressure type mu balanced circuit.
Compared with prior art, the beneficial effects of the utility model are: static angle stability of the present utility model is less than 9mA, noise is less than 3mV, maximum output current reaches 80mA, the demand to power supply aspect when can meet field work; Servo circuit of the prior art can replace by completely, and make accelerometer precision higher, stability is better; Very strong facilitation is played for promotion whole market competitiveness, the development of periphery relevant industries can be driven simultaneously; The features such as its low-power consumption, low noise, wide range, can widen the application of this product greatly, and succeeding in developing of the correlation technique of this project, will widen the range of application of accelerometer circuit.
Accompanying drawing explanation
Fig. 1 is the circuit structure block diagram of the utility model embodiment.
Be labeled as in figure:
1, gauge outfit; 11, differential capacitor assembly; 12, torquer assembly; 2, servoamplifier; 21, mu balanced circuit;
22, preposing conversion amplifier; 221, triangular-wave generator; 2211, biasing circuit;
2212, constant current source and change-over circuit thereof; 2213, output circuit; 222, differential capacitor detecting device;
223, current integrator; 224, operational amplifier; 23, resistance-capacitance network is fed back; 24, mutual conductance compensator-amplifier unit.
Embodiment
Below in conjunction with accompanying drawing embodiment, the utility model is described further:
Embodiment one
As shown in Figure 1, a kind of accelerometer servo circuit, comprise gauge outfit 1, servoamplifier 2, gauge outfit 1 electrically connects servoamplifier 2; Gauge outfit comprises differential capacitor assembly 11, torquer assembly 12, and torquer assembly 12 electrically connects differential capacitor assembly 11; Servoamplifier 2 comprises two-way electric resistance partial pressure type mu balanced circuit 21, preposing conversion amplifier 22, feedback resistance-capacitance network 23, mutual conductance compensator-amplifier unit 24, two-way electric resistance partial pressure type mu balanced circuit 21, feedback resistance-capacitance network 23 electrically connect preposing conversion amplifier 22 respectively, preposing conversion amplifier 22 electrically connects mutual conductance compensator-amplifier unit 24, and mutual conductance compensator-amplifier unit 24 electrically connects feedback resistance-capacitance network 23; Differential capacitor assembly 11 and preposing conversion amplifier 22 electrically connect;
Preposing conversion amplifier 22 comprises triangular-wave generator 221, differential capacitor detecting device 222, current integrator 223, operational amplifier 224, and triangular-wave generator 221, differential capacitor detecting device 222, current integrator 223, operational amplifier 224 successively order electrically connect;
Triangular-wave generator comprises biasing circuit 2211, constant current source and change-over circuit thereof 2212, output circuit 2213, and biasing circuit 2211, constant current source and change-over circuit thereof 2212, output circuit 2213 successively order electrically connect; Two-way electric resistance partial pressure type mu balanced circuit 21 electrically connects constant current source and change-over circuit 2212 thereof; Output circuit 2213 electrically connects differential capacitor detecting device 222;
Feedback resistance-capacitance network 23 electrically connects operational amplifier 224, and operational amplifier 224 electrically connects mutual conductance compensator-amplifier unit 24, and mutual conductance compensator-amplifier unit 24 electrically connects feedback resistance-capacitance network 23; Differential capacitor assembly 11 and biasing circuit 2211 electrically connect.
Referring to Fig. 1, quartz flexible accelerometer is made up of gauge outfit 1 and servoamplifier 2 two parts.Quartz flexible accelerometer gauge outfit 1 is by differential capacitor assembly 11(quartz pendulous reed) and torquer assembly 12(subsides a pair torquer coil thereon) form, and servo circuit important function, be the change differential capacitor assembly 11 electric capacity in acceleration gauge outfit, with high fidelity convert corresponding voltage or current signal output to.
Capacitance detecting termination and torquer assembly 12 are connected with servoamplifier 2 respectively.Acceleration servoamplifier forms the circuit of degeneration factor, it becomes corresponding curtage the output transform of accelerometer gauge outfit, after amplifying, compensating, add to torquer assembly 12, to make Detection job make zero, measure and just accurately can measure acceleration by the electric current of torquer.
In order to meet the 175 DEG C of environment temperature requirements of circuit high temperature, mu balanced circuit is designed to electric resistance partial pressure type.
Feedback resistance-capacitance network 23 forms servoamplifier 2 in the circuit of degeneration factor, the output transform of accelerometer gauge outfit becomes corresponding curtage, torquer assembly 12 is added to after amplifying, compensating, to make Detection job make zero, measure and just accurately can measure acceleration by the electric current of torquer assembly 12; Regulate the adjustable closed loop amplitude versus frequency characte of capacitance-resistance of feedback resistance-capacitance network 23.
Mutual conductance compensator-amplifier unit 24 is used to the circuit voltage transformation being added in its input end being become output current, changes the parameter of feedback capacitance-resistance 23 network, can change the frequency characteristic of servoamplifier 2.
Triangular-wave generator 221 provides the voltage signal of constant variation in time for differential capacitor detecting device 222, ideally, its oscillation frequency is f=1/4R1C1, and triangular wave provides reference data for differential sensor 222, and its amplitude and frequency directly will affect the gain that differential capacitor is measured.
The effect of differential capacitor detecting device 222 is, the capacitance variations of differential capacitor assembly 11 is transformed into current signal; The basic circuit form of differential capacitor detecting device 222 is the current mirror circuits of being used widely in linear integrated circuit technique.
The performance index of preposing conversion amplifier 22 and mutual conductance compensator-amplifier unit 24, have critical effect to the performance of servo circuit.The main amplifying unit of preposing conversion amplifier 22 containing servo circuit, is integrated with the parts such as triangular-wave generator 221, differential capacitor detecting device 222, current integrator 223 and operational amplifier 224; Mutual conductance compensator-amplifier unit 24 is used to the circuit voltage transformation being added in its input end being become output current, can be changed the frequency characteristic of servoamplifier 2 by the parameter changing feedback network; The design of mutual conductance compensator-amplifier unit 24 completes, and considerably reduces the unit number of servoamplifier 2 integrated chip used, effectively reduces the pressure of Two-level ensemble, reduce secondary encapsulation difficulty, improve reliability.
The utility model adopts ceramic Semi-seal structure, and in order to meet high temperature requirement, metal shell adopts stainless steel, better can carry out welding with accelerometer gauge outfit.Ceramic cover plate, ceramic substrate and metal shell adopt high-temp glue bonding.The pressure welding of chip bonding fine aluminium silk.Ensure reliability under its product high temperature.
Principle of work of the present utility model and the course of work as follows:
As shown in Figure 1, the difference of the electric capacity of preposing conversion amplifier 22 degree of will speed up meter gauge outfit 1 is transformed into voltage signal and exports, and then converts current signal to through mutual conductance compensator-amplifier unit 24 and exports.
When having acceleration or tilting action in accelerometer, quartz pendulous reed departs from equilibrium position due to inertia effect, so the capacitance values of differential capacitor assembly 11 changes, differential capacitor detecting device 222 just exports a DC current proportional with input acceleration, this electric current after current integrator 223, operational amplifier 224, mutual conductance compensator-amplifier unit 24, for torquer provides accurate balanced balanced current to be again in dynamic balance state to make assembly.The important function of of servoamplifier 2 is that the capacitance variations of differential capacitor is converted to corresponding voltage or current signal.
When there being acceleration effect along accelerometer axis, the electric capacity of differential capacitance sensor one side increases, and the electric capacity of the opposing party reduces.When experiencing reciprocal acceleration signal, then the electric capacity of a side reduces, and the electric capacity of the opposing party increases.Circuit utilizes preposing conversion amplifying circuit to form current mirror circuit and achieves detection to differential capacitor.After acceierometer sensor experiences input acceleration, differential capacitor detecting device 222 just can export and differential capacitor assembly 11(quartz pendulous reed) the proportional output current of displacement, this electric current is directly proportional to acceleration, and polarity depends on the direction of input acceleration.Current waveform on electric capacity CA, CB of accelerometer capacitive transducer is square wave, and its size of current is:
ICA=CA×△V/△t
ICB=CB×△V/△t
The output current of detector output end is;
Iout=ICA-ICB=(CA-CB)×△V/△t，
Can draw thus, the output current of differential capacitor detecting device 222 and benchmark triangle wave voltage over time rate are directly proportional, and are directly proportional to the differential capacitor of capacitive transducer.
Current integrator 223 is transformed into voltage the current signal coming from differential capacitor detecting device 222 and completes the frequency compensation effect to system together with operational amplifier 224, mutual conductance compensator-amplifier unit 24.System is made to meet certain quiet, dynamic indicator.
Mutual conductance compensator-amplifier unit 24 is used to the circuit voltage transformation being added in its input end being become output current, and the parameter changing feedback network can change the frequency characteristic of servoamplifier 2.
For reducing noise, adapting to the needs of multiple gauge outfit, considering the discreteness of preposing conversion amplifier 22 simultaneously, the components and parts used of corrective network are suitably adjusted, stability and the frequency response of system can be improved.
Above, be only preferred embodiment of the present utility model, be not restriction the utility model being made to other form, any those skilled in the art may utilize the technology contents of above-mentioned announcement to be changed or be modified as the Equivalent embodiments of equivalent variations.But everyly do not depart from technical solutions of the utility model content, any simple modification, equivalent variations and the remodeling done above embodiment according to technical spirit of the present utility model, still belong to the protection domain of technical solutions of the utility model.
Claims (5)
1. an accelerometer servo circuit, is characterized in that: comprise a gauge outfit, a servoamplifier, described gauge outfit electrically connects described servoamplifier; Described gauge outfit comprises a differential capacitor assembly, and a torquer electrical component connects described differential capacitor assembly;
Described servoamplifier comprises a mu balanced circuit, a preposing conversion amplifier, feedback resistance-capacitance network, a mutual conductance compensator-amplifier unit, described mu balanced circuit, described feedback resistance-capacitance network electrically connect described preposing conversion amplifier respectively, described preposing conversion amplifier electric connects described mutual conductance compensator-amplifier unit, and described mutual conductance compensator-amplifier unit electrically connects described feedback resistance-capacitance network;
Described differential capacitor assembly connects with described preposing conversion amplifier electric; The output terminal of described mutual conductance compensator-amplifier unit electrically connects described torquer assembly.
2. accelerometer servo circuit according to claim 1, it is characterized in that: described preposing conversion amplifier comprises a triangular-wave generator, a differential capacitor detecting device, a current integrator, an operational amplifier, described triangular-wave generator, differential capacitor detecting device, current integrator, operational amplifier successively order electrically connect;
Described operational amplifier electrically connects described mutual conductance compensator-amplifier unit; Described differential capacitor assembly and described triangular-wave generator electrically connect.
3. accelerometer servo circuit according to claim 2, it is characterized in that: described triangular-wave generator comprises a biasing circuit, a constant current source and change-over circuit thereof, an output circuit, described biasing circuit, constant current source and change-over circuit thereof, output circuit successively order electrically connect;
Described mu balanced circuit electrically connects described constant current source and change-over circuit thereof; Described output circuit electrically connects described differential capacitor detecting device; Described differential capacitor assembly and described biasing circuit electrically connect.
4., according to the arbitrary described accelerometer servo circuit of claims 1 to 3, it is characterized in that: described mu balanced circuit is electric resistance partial pressure type.
5. accelerometer servo circuit according to claim 4, is characterized in that: described mu balanced circuit is two-way electric resistance partial pressure type mu balanced circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520878774.4U CN205139170U (en) | 2015-11-06 | 2015-11-06 | Accelerometer servo circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520878774.4U CN205139170U (en) | 2015-11-06 | 2015-11-06 | Accelerometer servo circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205139170U true CN205139170U (en) | 2016-04-06 |
Family
ID=55624950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520878774.4U Active CN205139170U (en) | 2015-11-06 | 2015-11-06 | Accelerometer servo circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205139170U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897250A (en) * | 2016-04-08 | 2016-08-24 | 青岛航天半导体研究所有限公司 | I/F conversion circuit |
| CN109324210A (en) * | 2018-12-13 | 2019-02-12 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Compensating controller and mems accelerometer closed loop servo specific integrated circuit |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111830594A (en) * | 2020-06-23 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Electromagnetic force application type accelerometer servo system testing device, compensation system and method |
| CN112327005A (en) * | 2020-11-06 | 2021-02-05 | 上海寰宇乾堃航天科技有限公司 | Health monitoring device for quartz accelerometer |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
-
2015
- 2015-11-06 CN CN201520878774.4U patent/CN205139170U/en active Active
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897250B (en) * | 2016-04-08 | 2019-04-16 | 青岛航天半导体研究所有限公司 | A kind of I/F conversion circuit |
| CN105897250A (en) * | 2016-04-08 | 2016-08-24 | 青岛航天半导体研究所有限公司 | I/F conversion circuit |
| CN109324210A (en) * | 2018-12-13 | 2019-02-12 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Compensating controller and mems accelerometer closed loop servo specific integrated circuit |
| CN109324210B (en) * | 2018-12-13 | 2024-03-15 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | Compensation controller and MEMS accelerometer closed loop servo special integrated circuit |
| CN111024983B (en) * | 2019-12-18 | 2023-12-29 | 青岛航天半导体研究所有限公司 | Realization method of high-temperature quartz flexible accelerometer servo circuit |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111024982B (en) * | 2019-12-18 | 2024-01-30 | 青岛航天半导体研究所有限公司 | Servo circuit of high-temperature quartz flexible accelerometer |
| CN111830594A (en) * | 2020-06-23 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Electromagnetic force application type accelerometer servo system testing device, compensation system and method |
| CN112327005A (en) * | 2020-11-06 | 2021-02-05 | 上海寰宇乾堃航天科技有限公司 | Health monitoring device for quartz accelerometer |
| CN112327005B (en) * | 2020-11-06 | 2022-08-30 | 上海寰宇乾堃航天科技有限公司 | Health monitoring device for quartz accelerometer |
| CN113063965B (en) * | 2021-03-23 | 2023-06-13 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205139170U (en) | Accelerometer servo circuit | |
| CN104296919B (en) | A kind of non-linear compensation circuit of resistance bridge type sensor | |
| CN201749128U (en) | Servo circuit of quartz flexible accelerometer | |
| CN101936791B (en) | Digital pressure gauge | |
| CN103471641B (en) | A kind of temperature drift auto-correction method of current vortex sensor | |
| CN101592677B (en) | Digital closed loop servo circuit applied to quartz flexible accelerometer | |
| CN204515105U (en) | A kind of high-performance anisotropic magnetoresistive transducer integrated chip | |
| CN206514804U (en) | A kind of label type wireless senser | |
| JPH03503804A (en) | Precision capacitive transducer circuit and method | |
| CN109186638B (en) | Accelerometer servo circuit with controllable current scale factor and manufacturing process thereof | |
| CN103558417A (en) | Detection method and device thereof for charge balance type micro-accelerometer gauge head differential capacitor | |
| CN101551420A (en) | A weak capacitive detection circuit of MEMS device | |
| CN203104396U (en) | Servo loop of flexible gyroscope | |
| CN109738670A (en) | A kind of MEMS capacitive accelerometer characteristic parameter measuring system and measurement method | |
| CN201444169U (en) | Differential Hall unit | |
| CN101419243A (en) | Isotropy equilibrium acceleration sensor | |
| CN203519643U (en) | Differential type force balance acceleration sensor | |
| Pintér et al. | Interface circuit for measuring small capacitance changes in sensor networks | |
| CN105652099A (en) | Micro capacitance difference detection method based on switching circuit | |
| CN203550961U (en) | Low-cost flexible gyroscopic force balancing circuit | |
| CN104678126A (en) | Phase-shift temperature compensation method based on parasitic resistance for micro-mechanical capacitive accelerometer | |
| CN110082564B (en) | Tunnel reluctance type accelerometer closed-loop control circuit based on feedback capacitance torquer | |
| CN107525828A (en) | A kind of C/V integrated capacitances type humidity sensor interface circuit | |
| CN114264843B (en) | Servo circuit for wide-range quartz flexible accelerometer | |
| CN102435167A (en) | Method for pre-processing control information of imaging load stabilizing system based on complementary filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |