CN206479554U - A kind of high-precision quartz flexibility acceleration sensor - Google Patents
A kind of high-precision quartz flexibility acceleration sensor Download PDFInfo
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- CN206479554U CN206479554U CN201621433591.2U CN201621433591U CN206479554U CN 206479554 U CN206479554 U CN 206479554U CN 201621433591 U CN201621433591 U CN 201621433591U CN 206479554 U CN206479554 U CN 206479554U
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Abstract
The utility model discloses a kind of high-precision quartz flexibility acceleration sensor.The sensor includes gauge outfit and servo circuit, and gauge outfit includes detection quality pendulum component, electromagnetic torque device and differential capacitance sensor；Servo circuit includes sine-wave generator, rectifier circuit, amplifier circuit, feedback network and three terminal regulator.Three terminal regulator includes the first three terminal regulator and the second three terminal regulator.Wherein, detection quality pendulum component is connected with electromagnetic torque device；Differential capacitance sensor is connected with rectifier circuit；First three terminal regulator is connected with sine-wave generator and amplifier circuit respectively；Sine-wave generator is connected with rectifier circuit；Rectifier circuit is connected with amplifier circuit；Second three terminal regulator is connected with amplifier circuit；Amplifier circuit is connected with feedback network and electromagnetic torque device respectively.The servo circuit can differentiate the slight change of gauge outfit, and the torquer coil of gauge outfit is fed back to as an electrical current, so as to improve the operating accuracy of quartz flexibility acceleration sensor.
Description
Technical field
The utility model is related to a kind of acceleration transducer, more particularly to a kind of high-precision quartz flexible acceleration sensing
Device, belongs to sensor technical field.
Background technology
Quartz flexibility acceleration sensor is one of main element of inertial navigation system, is widely used in space flight, boat
The fields such as the navigational guidance and control of empty, navigation and armament systems.The quartz flexibility acceleration sensor is a kind of mechanical pendulum-type
Acceleration transducer, is mainly easy to the electric signal of measurement to measure, has by the way that acceleration this physical signalling is transformed into
Precision is high, sensitivity is high, it is low in energy consumption the characteristics of, while its simple in construction, small volume, lightweight, be easy to use and change.
Quartz flexibility acceleration sensor is made up of gauge outfit and servo circuit.Wherein, servo circuit is mainly used in gauge outfit
The electric capacity minor variations that the extraneous acceleration of sensing is produced are converted to corresponding electric current output.In the prior art, servo electricity
Road is typically made up of modem, power amplifier, three terminal regulator and capacitance resistance ware.But, the servo in existing product
Circuit operation principle is complicated, and circuit link is various, and inconvenience of breaking down is overhauled, and can not accurately differentiate the small of gauge outfit
Change, so as to influence the operating accuracy of quartz flexibility acceleration sensor.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of high-precision quartz flexibility acceleration sensor.
To realize above-mentioned purpose, the utility model uses following technical scheme：
A kind of high-precision quartz flexibility acceleration sensor, including gauge outfit and servo circuit, the gauge outfit include detection
Quality pendulum component, electromagnetic torque device and differential capacitance sensor；
Wherein, the servo circuit includes sine-wave generator, rectifier circuit, amplifier circuit, feedback network and three
Voltage-stablizer is held, the three terminal regulator includes the first three terminal regulator and the second three terminal regulator, wherein, the detection quality pendulum
Component is connected with the electromagnetic torque device, and the differential capacitance sensor is connected with the rectifier circuit, the one or three end
Voltage-stablizer is connected with the sine-wave generator and the amplifier circuit respectively, the sine-wave generator and the rectifier bridge
Circuit is connected, and the rectifier circuit is connected with the amplifier circuit, second three terminal regulator and amplifier electricity
Road is connected, and the amplifier circuit is connected with the feedback network and the electromagnetic torque device respectively.
Wherein more preferably, the sine-wave generator is LC oscillators.
Wherein more preferably, the LC oscillators include the first electric capacity, the second electric capacity, the 3rd electric capacity, the 4th electric capacity, inductance,
First resistor, second resistance, 3rd resistor, the first diode, triode and operating voltage；Wherein, the operating voltage difference
It is connected with one end of first electric capacity, the inductance, the 3rd electric capacity and the first resistor；First electric capacity it is another
The one end of one end respectively with one end of second electric capacity, the emitter stage of the triode and the 3rd resistor is connected, described
Second electric capacity is connected with one end of the 4th electric capacity and the colelctor electrode of the triode respectively；The inductance in parallel is described
The two ends of one electric capacity and second electric capacity；The other end of the first resistor other end respectively with the 3rd electric capacity, institute
The base stage for stating triode is connected with the anode of first diode；The negative electrode of first diode and the second resistance
One end is connected, and the other end of the second resistance and the 3rd resistor is all connected with the first ground terminal.
Wherein more preferably, the other end of the 4th electric capacity is connected with the input of rectifier circuit.
Wherein more preferably, the rectifier circuit includes the second diode, the 3rd diode, the 4th diode, the five or two
Pole pipe, the 5th electric capacity, the 6th electric capacity, the 7th electric capacity, the 8th electric capacity, the first tunable capacitor, the second tunable capacitor, the 4th resistance,
5th resistance and the 6th resistance；Wherein, second tunable capacitor is connected with the positive terminal of the differential pick-up, described
First tunable capacitor is connected with the negative terminals of the differential pick-up, the input of the rectifier circuit respectively with it is described
5th electric capacity is connected with one end of the 6th electric capacity, the other end of the 5th electric capacity respectively with second tunable capacitor
One end, the negative electrode of second diode are connected with the anode of the 4th diode, the other end difference of the 6th electric capacity
One end, the anode of the 3rd diode and the negative electrode of the 5th diode with first tunable capacitor are connected；It is described
The other end of first tunable capacitor and second tunable capacitor is connected with second ground terminal respectively, second ground terminal
Also it is connected respectively with the anode of second diode and the negative electrode of the 3rd diode；The negative electrode of 4th diode point
One end not with the 4th resistance and the 7th electric capacity is connected, the other end and the 3rd ground terminal of the 7th electric capacity
It is connected, the one end of the other end of the 4th resistance respectively with the 5th resistance and the 6th resistance is connected, the described 5th
The anode of diode is connected with the other end of the 5th resistance and one end of the 8th electric capacity respectively, the 8th electric capacity
The other end is connected with the 4th ground terminal.
Wherein more preferably, the 5th electric capacity and the 6th electric capacity have identical capacitance.
Wherein more preferably, second tunable capacitor is connected with the positive terminal (C+) of differential pick-up, and described first
Tunable capacitor is connected with the negative terminals (C-) of differential pick-up.
Wherein more preferably, the other end of the 6th resistance be current output terminal, the current output terminal respectively with amplification
The positive input of device circuit is connected with reverse input end.
Wherein more preferably, first three terminal regulator is W7809, and second three terminal regulator is W7909.
Wherein more preferably, first three terminal regulator respectively with the first electric capacity, inductance, the 3rd electric capacity and first resistor
One end is connected.
Quartz flexibility acceleration sensor provided by the utility model, its servo circuit principle is simple, circuit link phase
To less, the slight change of gauge outfit can be accurately differentiated, the operating accuracy of quartz flexibility acceleration sensor is effectively increased.
Brief description of the drawings
Fig. 1 be the utility model in, the overall work principle schematic of servo circuit；
Fig. 2 be the utility model in, the circuit theory schematic diagram of the sine-wave generator in servo circuit；
Fig. 3 be the utility model in, the principle schematic of the rectifier circuit in servo circuit；
Fig. 4 is the operation principle schematic diagram of quartz flexibility acceleration sensor.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
As shown in Figure 1 and Figure 4, high-precision quartz flexibility acceleration sensor provided by the utility model includes gauge outfit
With servo circuit 8.Wherein, gauge outfit includes detection quality pendulum component 301, electromagnetic torque device 302 and differential capacitance sensor 303.
The concrete structure of the gauge outfit is prior art, is not just specifically illustrated herein.
Servo circuit 8 is steady including sine-wave generator 2, rectifier circuit 4, amplifier circuit 6, the end of feedback network 7 and three
Depressor.Three terminal regulator includes the first three terminal regulator 1 and the second three terminal regulator 5.Wherein, detection quality pendulum component 301 with
Electromagnetic torque device 302 is connected；Differential capacitance sensor 303 is connected with rectifier circuit 4；First three terminal regulator 1 respectively with just
String wave producer 2 is connected with amplifier circuit 6；Sine-wave generator 2 is connected with rectifier circuit 4；Rectifier circuit 4 and amplification
Device circuit 6 is connected；Second three terminal regulator 5 is connected with amplifier circuit 6；Amplifier circuit 6 respectively with feedback network 7 and electromagnetism
Torquer 302 is connected.
In one embodiment of this servo circuit, the first three terminal regulator 1 is W7809, second three terminal regulator 5
For W7909.The two three terminal regulators belong to linear Integrated voltage-stablizer.Moreover, they all only have 3 leading-out terminals, 3 are drawn
Go out terminal respectively input, output and ground.By to the defeated of the first three terminal regulator 1 and the second three terminal regulator 5
Enter end and direct-current working volts are provided, make the first three terminal regulator 1 and the second three terminal regulator 5 respectively can be defeated from respective output end
Go out+9V and -9V DC voltage.
In one embodiment of this servo circuit, amplifier circuit 6 is operation amplifier circuit.Operational amplifier electricity
Road has positive input, opposite direction input, positive DC offset voltage end, negative DC offset voltage end and output end.
Positive input, opposite direction input are connected with the output end of rectifier circuit.Positive DC offset voltage end and the one or three end
The output end of voltage-stablizer 1 is connected；Negative DC offset voltage end is connected with the output end of the second three terminal regulator 5.Operation amplifier
The output end of device circuit is connected with electromagnetic torque device 302 and feedback network 7 respectively.Wherein, the first three terminal regulator 1 and are passed through
Two three terminal regulators 5 provide operating voltage for operational amplifier, can self-rectifying in future bridge circuit 4 current signal carry out
Amplification, and the current signal after amplification is fed back into feedback network 7 and electromagnetic torque device 2 respectively.Feedback network 7 is by after amplification
Integrated error signal in current signal feeds back to front stage circuits, and is superimposed with input signal progress after-treatment.
In one embodiment of this servo circuit, sine-wave generator is L C oscillators.As shown in Fig. 2 it includes
One electric capacity 101, the second electric capacity 102, the 3rd electric capacity 104, the 4th electric capacity 110, inductance 103, first resistor 105, second resistance
108th, 3rd resistor 109, the first diode 107, triode 106 and operating voltage.It is whole LC by the first three terminal regulator 1
Oscillator offer+9V operating voltage.First three terminal regulator 1 respectively with the first electric capacity 101, inductance 103, the 3rd electric capacity
104 are connected with one end of first resistor 105；The other end of first electric capacity 101 one end respectively with the second electric capacity 102, triode
106 emitter stage is connected with one end of 3rd resistor 109.Second electric capacity 102 one end respectively with the 4th electric capacity 110 and triode
106 colelctor electrode is connected；The other end of 4th electric capacity 110 is connected with the input 111 of rectifier circuit 4.Inductance 103 is connected in parallel on
The two ends of first electric capacity 101 and the second electric capacity 102 form a frequency selection circuit.The other end of first resistor 105 is respectively with the 3rd
The other end of electric capacity 104, the base stage of triode 106 are connected with the anode of the first diode 107.The negative electrode of first diode 107
It is connected with one end of second resistance 108, the other end of second resistance 108 and 3rd resistor 109 is all connected with the first ground terminal.Its
In, triode is preferably NPN type.The electric capacity 104 of first resistor 105 and the 3rd is connected in parallel and provides biased electrical for triode 106
Pressure.Whole LC oscillators are by adjusting frequency selection circuit, also, by calculation formulaCorresponding frequency can be drawn,
C in formula is the first electric capacity 101 and the capacitance sum of the second electric capacity 102, and L is the inductance value of inductance 103.So, select respectively
The inductance 103, the first electric capacity 101 and the second electric capacity 102 of predetermined value are taken, it is that 1MH z, peak-to-peak value are 4.4V that can produce frequency
High_frequency sine wave signal provide an excitation power supply with time constant variation for rectifier circuit, enable rectifier circuit
The minor variations of gauge outfit are told, the faint capacitance change of differential capacitance sensor in gauge outfit can be told.
The principle of rectifier circuit is as shown in figure 3, it includes the second diode 205, the 3rd diode 206, the four or two pole
Pipe 207, the 5th diode 208, the 5th electric capacity 201, the 6th electric capacity 202, the 7th electric capacity 211, the 8th electric capacity 212, first is adjustable
Electric capacity 203, the second tunable capacitor 204, the 4th resistance 209, the 5th resistance 210 and the 6th resistance 213.Wherein, the second adjustable electric
Hold 204 with the positive terminal (C+) of differential pick-up 303 to be connected, the negative pole of the first tunable capacitor 203 and differential pick-up 303
Terminals (C-) are connected.5th electric capacity 201 and the 6th electric capacity 202 have identical capacitance.The input of rectifier circuit
111 one end respectively with the 5th electric capacity 201 and the 6th electric capacity 202 is connected, and the other end of the 5th electric capacity 201 is adjustable with second respectively
The anode of one end of electric capacity 204, the negative electrode of the second diode 205 and the 4th diode 207 is connected；6th electric capacity 202 it is another
End is connected with one end of the first tunable capacitor 203, the anode of the 3rd diode 206 and the negative electrode of the 5th diode 208 respectively.The
The other end of one tunable capacitor 203 and the second tunable capacitor 204 is connected with the second ground terminal respectively, and second ground terminal is also distinguished
It is connected with the anode of the second diode 205 and the negative electrode of the 3rd diode 206.The negative electrode of 4th diode 207 is respectively with the 4th
Resistance 209 is connected with one end of the 7th electric capacity 211, and the other end of the 7th electric capacity 211 is connected with the 3rd ground terminal, the 4th resistance
The one end of 209 other end respectively with the 5th resistance 210 and the 6th resistance 213 is connected；The other end of 6th resistance 213 is electric current
Output end.The current output terminal is connected with the positive input and reverse input end of operation amplifier circuit respectively.Five or two pole
The anode of pipe 208 is connected with the other end of the 5th resistance 210 and one end of the 8th electric capacity 212 respectively；8th electric capacity 212 it is another
End is connected with the 4th ground terminal.
The small capacitance change of differential capacitance sensor can be converted to current signal by the rectifier circuit.It is on duty
The input of dynamic condenser sensor is timing, and the second tunable capacitor 204 is charged, and the electric current in rectifier circuit is through the 4th diode
207th, the 4th resistance 209 and the branch road of the 6th resistance 213 pass to operational amplifier and further amplified.When differential capacitor sensing
When device input is bears, the first tunable capacitor 203 is charged, and the electric current in rectifier circuit is through the electricity of the 5th diode the 208, the 5th
Resistance 210 and the branch road of the 6th resistance 213 pass to operational amplifier and further amplified.
The course of work of the present utility model is such：Input shaft of the extraneous acceleration along quartz flexibility acceleration sensor
Effect, resulting inertia force acts on detection quality pendulum component, causes its position to change, so as to cause differential capacitor
The capacitance variation of sensor.The change of this capacitance is transferred in the rectifier circuit of servo circuit, and rectifier circuit will
Capacitance change is converted to current signal and exported to operation amplifier circuit；Operation amplifier circuit enters faint current signal
Row amplifies, and the current signal of amplification is fed back into the torquer coil and feedback network of sensor gauge outfit, so as to produce electromagnetism
Torque so that detection quality pendulum component comes back to equilbrium position.It can obtain outside by measuring the voltage at sampling resistor two ends
The size of boundary's acceleration.
High-precision quartz flexibility acceleration sensor provided by the utility model is described in detail above,
But it is not limitation of the utility model.For those of ordinary skill in the art, without departing substantially from the utility model essence essence
To any obvious change that it is done on the premise of god, it will all constitute to the utility model infringement of patent right, will hold
Carry on a shoulder pole corresponding legal liabilities.
Claims (10)
1. a kind of high-precision quartz flexibility acceleration sensor, including gauge outfit and servo circuit, the gauge outfit include detection matter
Amount pendulum component, electromagnetic torque device and differential capacitance sensor；It is characterized in that：
The servo circuit includes sine-wave generator, rectifier circuit, amplifier circuit, feedback network and three terminal regulator,
The three terminal regulator includes the first three terminal regulator and the second three terminal regulator, wherein, the detection quality pendulum component and institute
State electromagnetic torque device to be connected, the differential capacitance sensor is connected with the rectifier circuit, first three terminal regulator point
It is not connected with the sine-wave generator and the amplifier circuit, the sine-wave generator and the rectifier circuit phase
Even, the rectifier circuit is connected with the amplifier circuit, and second three terminal regulator is connected with the amplifier circuit,
The amplifier circuit is connected with the feedback network and the electromagnetic torque device respectively.
2. quartz flexibility acceleration sensor as claimed in claim 1, it is characterised in that：
The sine-wave generator is LC oscillators.
3. quartz flexibility acceleration sensor as claimed in claim 2, it is characterised in that：
The LC oscillators include the first electric capacity, the second electric capacity, the 3rd electric capacity, the 4th electric capacity, inductance, first resistor, the second electricity
Resistance, 3rd resistor, the first diode, triode and operating voltage；Wherein, the operating voltage respectively with first electric capacity,
The inductance, the 3rd electric capacity are connected with one end of the first resistor；The other end of first electric capacity respectively with it is described
One end of second electric capacity, the emitter stage of the triode are connected with one end of the 3rd resistor, second electric capacity respectively with
One end of 4th electric capacity is connected with the colelctor electrode of the triode；The inductance in parallel is in first electric capacity and described the
The two ends of two electric capacity；The other end of the first resistor other end respectively with the 3rd electric capacity, the base stage of the triode
It is connected with the anode of first diode；The negative electrode of first diode is connected with one end of the second resistance, described
The other end of second resistance and the 3rd resistor is all connected with the first ground terminal.
4. quartz flexibility acceleration sensor as claimed in claim 3, it is characterised in that：
The other end of 4th electric capacity is connected with the input of rectifier circuit.
5. quartz flexibility acceleration sensor as claimed in claim 1, it is characterised in that：
The rectifier circuit includes the second diode, the 3rd diode, the 4th diode, the 5th diode, the 5th electric capacity, the
Six electric capacity, the 7th electric capacity, the 8th electric capacity, the first tunable capacitor, the second tunable capacitor, the 4th resistance, the 5th resistance and the 6th electricity
Resistance；Wherein, second tunable capacitor is connected with the positive terminal of the differential pick-up, first tunable capacitor and institute
The negative terminals for stating differential pick-up are connected, the input of the rectifier circuit respectively with the 5th electric capacity and described the
One end of six electric capacity is connected, the other end of the 5th electric capacity one end respectively with second tunable capacitor, the described 2nd 2
The negative electrode of pole pipe is connected with the anode of the 4th diode, the other end of the 6th electric capacity respectively with first adjustable electric
One end of appearance, the anode of the 3rd diode are connected with the negative electrode of the 5th diode；First tunable capacitor and institute
The other end for stating the second tunable capacitor is connected with the second ground terminal respectively, second ground terminal also respectively with the two or two pole
The anode of pipe is connected with the negative electrode of the 3rd diode；The negative electrode of 4th diode respectively with the 4th resistance and institute
State the 7th electric capacity one end be connected, the other end of the 7th electric capacity is connected with the 3rd ground terminal, the 4th resistance it is another
One end respectively with the 5th resistance and the 6th resistance is held to be connected, the anode of the 5th diode is respectively with described the
The other end of five resistance is connected with one end of the 8th electric capacity, and the other end of the 8th electric capacity is connected with the 4th ground terminal.
6. quartz flexibility acceleration sensor as claimed in claim 5, it is characterised in that：
5th electric capacity and the 6th electric capacity have identical capacitance.
7. quartz flexibility acceleration sensor as claimed in claim 5, it is characterised in that：
Second tunable capacitor is connected with the positive terminal (C+) of the differential pick-up, first tunable capacitor and institute
The negative terminals (C-) for stating differential pick-up are connected.
8. quartz flexibility acceleration sensor as claimed in claim 5, it is characterised in that：
The other end of 6th resistance is current output terminal, and the current output terminal is inputted with the forward direction of amplifier circuit respectively
End is connected with reverse input end.
9. quartz flexibility acceleration sensor as claimed in claim 1, it is characterised in that：
First three terminal regulator is W7809, and second three terminal regulator is W7909.
10. quartz flexibility acceleration sensor as claimed in claim 1, it is characterised in that：
The one end of first three terminal regulator respectively with the first electric capacity, inductance, the 3rd electric capacity and first resistor is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621433591.2U CN206479554U (en) | 2016-12-26 | 2016-12-26 | A kind of high-precision quartz flexibility acceleration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621433591.2U CN206479554U (en) | 2016-12-26 | 2016-12-26 | A kind of high-precision quartz flexibility acceleration sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109459168A (en) * | 2018-09-30 | 2019-03-12 | 江苏大学 | A kind of electromagnetic balance formula pull pressure sensor |
| CN110579626A (en) * | 2019-10-22 | 2019-12-17 | 西安微电子技术研究所 | Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof |
-
2016
- 2016-12-26 CN CN201621433591.2U patent/CN206479554U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109459168A (en) * | 2018-09-30 | 2019-03-12 | 江苏大学 | A kind of electromagnetic balance formula pull pressure sensor |
| CN110579626A (en) * | 2019-10-22 | 2019-12-17 | 西安微电子技术研究所 | Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof |
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