CN114264843B - Servo circuit for wide-range quartz flexible accelerometer - Google Patents
Servo circuit for wide-range quartz flexible accelerometer Download PDFInfo
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- CN114264843B CN114264843B CN202111549321.3A CN202111549321A CN114264843B CN 114264843 B CN114264843 B CN 114264843B CN 202111549321 A CN202111549321 A CN 202111549321A CN 114264843 B CN114264843 B CN 114264843B
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Abstract
A servo circuit for a wide-range quartz flexible accelerometer relates to the technical field of acceleration sensors. The servo circuit comprises a waveform generator, a differential capacitance detector, a current integrator, a preamplifier, a transconductance compensation amplifier, a buffer, a positive-end voltage stabilizer, a negative-end voltage stabilizer, a positive power supply protector and a negative power supply protector. The waveform generator generates a triangular wave voltage signal, the triangular wave voltage signal is provided for the differential capacitance detector to convert the detected differential capacitance variation into a direct current signal, the direct current voltage signal is provided for the current integrator to convert the input direct current signal into a direct current voltage signal, the direct current voltage signal is amplified by the preamplifier, the direct current voltage signal is provided for the transconductance compensation amplifier to compensate the frequency of the system, the voltage signal is converted into an output current, the output current is amplified by the buffer and output, and the output current is proportional to the input acceleration. The problem of current quartz accelerometer servo circuit drive capability is little and lead to accelerometer range to be little is solved. The method is applied to the technical field of quartz accelerometer servo circuits.
Description
Technical Field
The invention relates to the technical field of acceleration sensors, in particular to a servo circuit for a wide-range quartz flexible accelerometer, which belongs to the field of quartz flexible acceleration sensors.
Background
Current quartz flexible accelerometers are composed primarily of a servo circuit portion and a mechanical gauge outfit portion, as shown in fig. 1. The mechanical gauge outfit consists of a torquer, a quartz swinging piece and a differential capacitor. The quartz flexible accelerometer servo circuit mainly comprises a triangular wave generator, a differential capacitance detector, a current integrator, a pre-amplifier and a transconductance compensation amplifier. When the mechanical gauge outfit has acceleration, the internal quartz pendulums deviate from the balance position due to inertia, and a differential capacitor related to the acceleration is generated inside. The quartz flexible accelerometer servo circuit converts an input differential capacitor into a current signal with the corresponding size, the current signal is converted into a voltage signal through a follow-up current integrating circuit, the voltage signal is amplified through a preamplifier, the voltage is converted into direct current through a transconductance compensation amplifier and is output, the direct current is finally fed back to a moment coil, the generated electromagnetic moment pulls the quartz flexible pendulum piece back to an equilibrium position without acceleration, and the value of the acceleration is reflected by the feedback current at the voltage of a sampling resistor.
When the mechanical gauge outfit senses a larger acceleration, a larger differential capacitor is generated inside, and after the differential capacitor is integrated by a servo circuit and amplified by a front stage, the output voltage can not be continuously increased along with the increase of the acceleration when reaching the maximum swing, so that a larger error occurs in the accelerometer measurement.
At present, the range of the quartz flexible accelerometer is mainly concentrated between +/-30 and +/-50 g, so that the quartz flexible accelerometer can only meet the use of small and medium range acceleration detection, and cannot meet the requirement of large range acceleration detection in practical application. Along with the great use of quartz flexible accelerometers in the fields of ships, military aircraft, missiles, civil aviation, bridge and high-rise inclinometry, drilling measurement and the like, higher requirements are put on the range of the quartz accelerometer. Especially in the field of inertial navigation systems and drilling measurements.
For this purpose, the present invention has been made.
Disclosure of Invention
The purpose of the invention is that: the problem that when acceleration is increased to a certain degree, the output voltage of a servo circuit is not increased continuously along with the increase of the acceleration when the acceleration of the traditional quartz flexible accelerometer reaches the maximum swing, and the accelerometer has a large error in measurement, so that the measuring range of the accelerometer is small is solved.
The technical conception of the invention is as follows: in the original accelerometer servo circuit, a buffer technology and a dual-power technology are adopted to enlarge the maximum swing of the output voltage of the servo circuit, so that the measuring range of the accelerometer is greatly improved.
To this end, the present invention provides a servo circuit for a wide range quartz flexible accelerometer, as shown in FIG. 2. The servo circuit comprises a waveform generator, a differential capacitance detector, a current integrator, a preamplifier, a transconductance compensation amplifier, a buffer, a positive-end voltage stabilizer, a negative-end voltage stabilizer, a positive power supply protector and a negative power supply protector;
the waveform generator is connected with the differential capacitance detector and provides an alternating voltage signal for the differential capacitance detector;
the differential capacitance detector is connected with the current integrator and provides a direct current signal for the current integrator;
the current integrator is connected with the pre-amplifier and provides a direct-current voltage signal for the pre-amplifier;
the pre-amplifier is connected with the transconductance compensation amplifier and provides a voltage signal for the transconductance amplifier;
the buffer is connected with the transconductance compensation amplifier and outputs a current signal;
the positive-end voltage stabilizer is respectively connected with the waveform generator, the differential capacitance detector, the current integrator and the preamplifier to provide a positive power supply;
the negative terminal voltage stabilizer is respectively connected with the waveform generator, the differential capacitance detector, the current integrator and the preamplifier to provide a negative power supply;
the positive power supply protector is connected with the positive-side voltage stabilizer and is used for providing power supply protection for the positive-side voltage stabilizer;
the negative power supply protector is connected with the negative terminal voltage stabilizer and used for providing power supply protection for the negative terminal voltage stabilizer;
each component can be integrated by adopting the existing semiconductor integrated circuit technology, and the whole servo circuit is realized by adopting a multi-chip hybrid integrated circuit technical scheme.
The working principle of the servo circuit of the wide-range quartz accelerometer is as follows: the waveform generator generates a triangular wave voltage signal, the triangular wave voltage signal is provided for the differential capacitance detector, the differential capacitance detector converts the detected differential capacitance variation into a direct current signal and provides the direct current signal for the current integrator, the current integrator converts the input direct current signal into a direct current voltage signal, the direct current voltage signal is amplified by the preamplifier and provided for the transconductance compensation amplifier, the transconductance compensation amplifier compensates the frequency of the system and converts the voltage signal into an output current, the output current is buffered and amplified by the buffer and finally output, the current is proportional to the input acceleration, and the detection of the acceleration variation of the detected object is realized.
Compared with the prior art, the invention has the advantages that:
through the internal compensation, diffusion and flow expansion design of the quartz flexible accelerometer servo circuit, a reliable and stable output large current is generated, the output current capacity of the circuit is greatly improved, and the large-range quartz flexible accelerometer can be effectively driven to realize the detection of large acceleration.
The invention is widely applied to occasions with requirements on acceleration wide range.
Drawings
FIG. 1 is a schematic block diagram of a conventional quartz accelerometer.
FIG. 2 is a schematic diagram of a servo circuit according to the present invention.
FIG. 3 is a schematic diagram of the overall circuit structure of the servo circuit of the present invention.
In the figure: u1 is a triangular wave waveform generation unit circuit, U2 is a differential capacitance detection unit circuit, U3 is a current integration unit circuit, U4 is a pre-amplification unit circuit, U5 is a transconductance compensation amplification unit circuit, U6 is a power operational amplifier, U7 is a three-terminal fixed output positive power supply voltage stabilizing unit circuit, U8 is a three-terminal fixed output negative power supply voltage stabilizing unit circuit, and T1 is a constant current source circuit;
q1 is NPN triode; q2 is PNP triode;
d1 and D2 are rectifier diodes, and D3 and D4 are high-speed switch diodes;
r1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12 and R13 are fixed resistors;
c1, C2, C3, C4, C5, C6, C7, C8, C9, C10, C11 are fixed capacitances;
CA. CB is a load capacitor end;
VCC is the positive power supply terminal, VEE is the negative power supply terminal.
Description of the embodiments
As shown in fig. 3, a specific embodiment of the servo circuit of the wide range quartz accelerometer according to the invention is as follows:
the waveform generation unit circuits U1, R1 and C1 form a triangular wave generator with adjustable amplitude and frequency, a triangular wave voltage signal is generated and is provided for the differential capacitance detection unit circuit U2, the differential capacitance detection unit circuit U2 converts the detected differential capacitance into a direct current signal, the current integration unit circuits U3, R2, C2 and C3 form a current integrator, the tiny current signal detected by the differential capacitance detection unit circuit U2 is integrated and converted into a voltage signal, wherein C2 is used for circuit frequency compensation, the pre-amplification unit circuits U4, C5, D3, D4 and T1 and the transconductance compensation amplification unit circuit U5 form a two-stage amplification circuit, the tiny voltage signal output by the current integration unit circuit U3 is amplified, and the frequency of the system is compensated by a feedback network formed by the R3, R4, R5, R6, R7, C6 and C7, so that the system meets set static and dynamic indexes. The voltage stabilizing unit circuits U7, C8 and C9 form a positive power supply voltage stabilizing circuit to generate a stable positive power supply and provide the positive power supply for the waveform generating unit circuit U1, the differential capacitance detecting unit circuit U2, the current integrating unit circuit U3 and the pre-amplifying unit circuit U4, wherein the C8 and C9 mainly filter the power supply. The voltage stabilizing unit circuits U8, C10 and C11 form a negative power supply voltage stabilizing circuit to generate a stable negative power supply, and the negative power supply is provided for the waveform generating unit circuit U1, the differential capacitance detecting unit circuit U2, the current integrating unit circuit U3 and the pre-amplifying unit circuit U4, wherein the power supplies are mainly filtered by the C10 and C11. D1 and D2 protect the power supply end of the whole circuit and prevent the influence of current backflow and power supply reverse connection on the circuit. The diffusion circuit formed by Q1, Q2, R8, R9, R10 and R11 enables the output swing amplitude of the transconductance compensation amplifying unit circuit U5 to be enlarged, the buffer unit circuits U6, R12 and R13 form a buffer current-spreading circuit, the output current of the transconductance compensation amplifying unit circuit U5 is amplified and outputted, the current signal is in direct proportion to the acceleration in the accelerometer, and finally the detection of the acceleration change is realized.
The waveform generation unit circuit U1 is a triangular wave generator.
The differential capacitance detection unit circuit U2 is a high-precision differential capacitance detector.
The current integrating unit circuit U3 is a low offset current integrator.
The pre-amplifying unit circuit U4 is a compensation operational amplifier.
The transconductance compensation amplifying unit circuit U5 is a high-output impedance operational amplifier.
The operational amplifier unit circuit U6 is a power operational amplifier.
The voltage stabilizing unit circuit U7 is a three-terminal fixed output positive power supply voltage stabilizing unit circuit.
The voltage stabilizing unit circuit U8 is a three-terminal fixed output negative power supply voltage stabilizing unit circuit.
The fixed resistors R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12 and R13 are metal film resistors.
The fixed capacitors C1, C2, C3, C4, C5, C6, C7, C8, C9, C10 and C11 are inorganic ceramic dielectric capacitors.
The triode Q1 is a high-voltage NPN triode.
The triode Q2 is a high-voltage PNP triode.
The diodes D1 and D2 are rectifier diodes.
The diodes D3 and D4 are high-speed switching diodes.
R1=3KΩ，R2=28KΩ，R3=10KΩ，R4=10KΩ，R5=4KΩ，R6=15KΩ，R7=15KΩ，R8=100Ω，R9=10KΩ，R10=10KΩ；R11=100Ω；R12=10KΩ；R13=200Ω；C1=75pF，C2=47pF，C3=680pF，C4=68pF，C5=1nF，C6=0.22μF，C7=0.22μF，C8=C9=C10=C11=0.1μF。
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments disclosed herein. It will be understood by those skilled in the art that various changes in detail may be effected therein without departing from the scope of the invention as defined by the claims appended hereto.
Claims (9)
1. A servo circuit for a wide-range quartz flexible accelerometer is characterized by comprising a waveform generator, a differential capacitance detector, a current integrator, a preamplifier, a transconductance compensation amplifier, a buffer, a positive-side voltage stabilizer, a negative-side voltage stabilizer, a positive power supply protector and a negative power supply protector;
the waveform generator is connected with the differential capacitance detector and provides a voltage signal for the differential capacitance detector;
one end of the differential capacitance detector is connected with the waveform generator, and the other end of the differential capacitance detector is connected with the current integrator to provide error current for the integrator;
one end of the current integrator is connected with the differential capacitance detector, and the other end of the current integrator is connected with the preamplifier to provide input voltage for the preamplifier;
one end of the preamplifier is connected with the current integrator, and the other end of the preamplifier is connected with the transconductance compensation amplifier to provide input voltage for the transconductance compensation amplifier;
one end of the transconductance compensation amplifier is connected with the preamplifier, and the other end of the transconductance compensation amplifier is connected with the buffer to provide a current signal for the buffer;
one end of the buffer is connected with the transconductance compensation amplifier, and the other end of the buffer outputs a current signal;
the positive-side voltage stabilizer is respectively connected with the waveform generator, the differential capacitance detector, the current integrator and the preamplifier to provide positive power supply voltage for the waveform generator, the differential capacitance detector, the current integrator and the preamplifier; the other end is connected with the positive power supply protector;
the positive power supply protector is connected with the positive-side voltage stabilizer and provides unidirectional voltage for the positive-side voltage stabilizer;
the negative terminal voltage stabilizer is respectively connected with the waveform generator, the differential capacitance detector, the current integrator and the preamplifier to provide negative power supply voltage for the waveform generator, the differential capacitance detector, the current integrator and the preamplifier; the other end is connected with the negative power supply protector;
the negative power supply protector is connected with the negative terminal voltage stabilizer and provides unidirectional voltage for the negative terminal voltage stabilizer;
the servo circuit is specifically characterized in that:
(1) The waveform generator includes: a waveform generation unit circuit U1, a fixed resistor R1 and a fixed capacitor C1;
one end of the fixed resistor R1 is connected with the waveform generation unit circuit U1, and the other end of the fixed resistor R is grounded; one end of the fixed capacitor C1 is connected with the waveform generation unit circuit U1, and the other end of the fixed capacitor C is grounded;
(2) The differential capacitance detector is a differential capacitance detection unit circuit U2, one end of the differential capacitance detector is connected with the waveform generation unit circuit U1, and the other end of the differential capacitance detector is connected with a current integration unit circuit U3;
(3) The current integrator includes: a current integration unit circuit U3, a fixed resistor R2 and fixed capacitors C2 and C3;
the reverse input end of the current integration unit circuit U3 is connected with the capacitance detection unit circuit U2, the homodromous input end of the current integration unit circuit U3 is connected with the ground, the fixed resistor R2 and the fixed capacitor C3 are connected between the reverse input end and the output end of the current integration unit circuit U3 in parallel, and the fixed capacitor C2 is connected between the output end and the compensation end of the current integration unit circuit U3 in a bridging mode;
(4) The preamplifier includes: a pre-amplifying unit circuit U4, fixed capacitors C4, C5, diodes D3, D4 and a constant current source T1;
the fixed capacitor C4 is connected between the output end and the compensation end of the pre-amplifying unit circuit U4, the anode of the diode D3 is connected with the output end of the pre-amplifying unit circuit U4, the cathode of the diode D3 is connected with the anode of the diode D4, the constant current source T1 is connected between the cathode of the diode D4 and the ground in series, and the fixed capacitor C5 is connected between the reverse input end and the output end of the pre-amplifying unit circuit U4 in a bridging manner;
(5) The transconductance compensation amplifier includes: transconductance compensation amplifying unit circuit U5, triode Q1, triode Q2, fixed resistors R3, R4, R5, R6, R7, R8, R9, R10, R11, fixed capacitors C6, C7;
the VIN+ end of the transconductance compensation amplifying unit circuit U5 is connected with the output end of the pre-amplifying unit circuit U4, the VIN-end of the transconductance compensation amplifying unit circuit U5 is connected with the cathode of the diode D4, the collector of the triode Q1 is connected with the cathode of the diode D1, the emitter of the triode Q1 is connected with the V+ end of the transconductance compensation amplifying unit circuit U5, one end of the fixed resistor R8 is connected with the base of the triode Q1, the other end of the fixed resistor R8 is connected with VCC, one end of the fixed resistor R9 is connected with the base of the triode Q1, the other end of the fixed resistor R9 is connected with the COM end of the transconductance compensation amplifying unit circuit U5, the collector of the triode Q2 is connected with the anode of the diode D2, the emitter of the triode Q2 is connected with the V-end of the transconductance compensation amplifying unit circuit U5, one end of the fixed resistor R11 is connected with the base of the triode Q2, the other end of the fixed resistor R11 is connected with the base of the triode Q2, and the other end of the collector of the fixed resistor R10 is connected with the base of the triode Q10;
(6) The buffer includes: an operational amplification unit circuit U6, fixed resistors R12, R13;
the inverting input end and the output end of the operational amplification unit circuit U6 are in short circuit, the homodromous input end of the operational amplification unit circuit U6 is connected with the output end of the transconductance compensation amplification unit circuit U5, one end of the fixed resistor R12 is connected with the homophase input end of the transconductance compensation amplification unit circuit U5, and the other end of the fixed resistor R12 and one end of the fixed resistor R13 are connected to the output end I together O The fixed electricityThe other end of the resistor R13 is connected with the output end of the operational amplification unit circuit U6;
(7) The positive side voltage stabilizer comprises: the voltage stabilizing unit circuit U7 is used for fixing the capacitors C8 and C9;
the fixed capacitor C8 is connected between the input end of the voltage stabilizing unit circuit U7 and the ground in a bridging manner, the fixed capacitor C9 is connected between the output end of the voltage stabilizing unit circuit U7 and the ground in a bridging manner, and the output end of the voltage stabilizing unit circuit U7 is respectively connected with the positive power supply end of the waveform generating unit circuit U1, the positive power supply end of the differential capacitor detection unit circuit U2, the positive power supply end of the current integration unit circuit U3 and the positive power supply end of the pre-amplifying unit circuit U4;
(8) The negative side voltage regulator includes: the voltage stabilizing unit circuit U8 is used for fixing the capacitors C10 and C11;
the fixed capacitor C10 is connected between the input end of the voltage stabilizing unit circuit U8 and the ground in a bridging manner, the fixed capacitor C11 is connected between the output end of the voltage stabilizing unit circuit U8 and the ground in a bridging manner, and the output end of the voltage stabilizing unit circuit U8 is respectively connected with the negative power supply end of the waveform generating unit circuit U1, the negative power supply end of the differential capacitor detection unit circuit U2, the negative power supply end of the current integration unit circuit U3 and the negative power supply end of the pre-amplifying unit circuit U4;
(9) The positive power supply protector includes: a diode D1;
the anode of the diode D1 is connected with VCC, and the cathode of the diode D1 is connected with the input end of the voltage stabilizing unit circuit U7;
(10) The negative power supply protector includes: a diode D2;
the cathode of the diode D2 is connected with the VEE, and the anode of the diode D2 is connected with the input end of the voltage stabilizing unit circuit U8.
2. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein the waveform generator is a triangular wave generator.
3. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein the differential capacitance detector is a high precision differential capacitance detector.
4. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein the current integrator is a low offset current integrator.
5. The servo circuit for a wide range quartz flexible accelerometer of claim 1, wherein the fixed resistors R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13 are metal film resistors.
6. The servo circuit for a wide range quartz flexible accelerometer of claim 1, wherein the fixed capacitances C1, C2, C3, C4, C5, C6, C7, C8, C9, C10, C11, C12 are inorganic ceramic dielectric capacitances.
7. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein said waveform generation unit circuit U1 is a triangular wave generator; the differential capacitance detection unit circuit U2 is a high-precision differential capacitance detector; the current integration unit circuit U3 is a low offset current integrator; the pre-amplifying unit circuit U4 is a compensation operational amplifier; the transconductance compensation amplifying unit circuit U5 is a high-output impedance operational amplifier; the operational amplification unit circuit U6 is a power operational amplifier; the voltage stabilizing unit circuit U7 is a three-terminal fixed output positive power supply voltage stabilizing unit circuit; the voltage stabilizing unit circuit U8 is a three-terminal fixed output negative power supply voltage stabilizing unit circuit.
8. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein said transistor Q1 is a high voltage NPN transistor; the triode Q2 is a high-voltage PNP triode.
9. A servo circuit for a wide range quartz flexible accelerometer according to claim 1, wherein said diodes D1, D2 are rectifier diodes; the diodes D3 and D4 are high-speed switching diodes.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
| CN209656731U (en) * | 2019-04-23 | 2019-11-19 | 青岛航天半导体研究所有限公司 | A kind of quartz flexible accelerometer numeral output servo circuit |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
| EP3862757A1 (en) * | 2020-02-07 | 2021-08-11 | Atlantic Inertial Systems Limited | Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105759075B (en) * | 2016-02-25 | 2017-09-19 | 中国科学院地质与地球物理研究所 | A kind of high-precision flexure accelerometers |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201749128U (en) * | 2010-08-18 | 2011-02-16 | 中国电子科技集团公司第四十三研究所 | Servo circuit of quartz flexible accelerometer |
| CN209656731U (en) * | 2019-04-23 | 2019-11-19 | 青岛航天半导体研究所有限公司 | A kind of quartz flexible accelerometer numeral output servo circuit |
| EP3862757A1 (en) * | 2020-02-07 | 2021-08-11 | Atlantic Inertial Systems Limited | Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
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