CN201420112Y - 一种SiC体单晶的生长装置 - Google Patents
一种SiC体单晶的生长装置 Download PDFInfo
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- CN201420112Y CN201420112Y CN2009200330237U CN200920033023U CN201420112Y CN 201420112 Y CN201420112 Y CN 201420112Y CN 2009200330237 U CN2009200330237 U CN 2009200330237U CN 200920033023 U CN200920033023 U CN 200920033023U CN 201420112 Y CN201420112 Y CN 201420112Y
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- plumbago crucible
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CN2009200330237U CN201420112Y (zh) | 2009-05-11 | 2009-05-11 | 一种SiC体单晶的生长装置 |
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CN201420112Y true CN201420112Y (zh) | 2010-03-10 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102534763A (zh) * | 2012-01-17 | 2012-07-04 | 山东天岳先进材料科技有限公司 | 一种物理气相沉积法生长大尺寸碳化硅单晶的石墨坩埚及其应用 |
CN102586858A (zh) * | 2012-04-01 | 2012-07-18 | 北京华进创威电子有限公司 | 一种双坩埚感应加热物理气相传输生长单晶的装置 |
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- 2009-05-11 CN CN2009200330237U patent/CN201420112Y/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102534763A (zh) * | 2012-01-17 | 2012-07-04 | 山东天岳先进材料科技有限公司 | 一种物理气相沉积法生长大尺寸碳化硅单晶的石墨坩埚及其应用 |
CN102586858A (zh) * | 2012-04-01 | 2012-07-18 | 北京华进创威电子有限公司 | 一种双坩埚感应加热物理气相传输生长单晶的装置 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: XI AN XINJING ELECTRO-OPTICS SCIENCE + TECHNOLOGY Free format text: FORMER OWNER: XI AN UNIV. OF SCIENCE AND ENGINEERING Effective date: 20120517 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 710048 XI AN, SHAANXI PROVINCE TO: 710100 XI AN, SHAANXI PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20120517 Address after: 710100, Xi'an aerospace industry base, No. two, industrial road, Shaanxi 55, China Patentee after: Xi'an Xin Jing Optoelectronics Technology Co., Ltd. Address before: 710048 Shaanxi city of Xi'an Province Jinhua Road No. 5 Patentee before: Xi'an University of Technology |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100310 Termination date: 20150511 |
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EXPY | Termination of patent right or utility model |