CN1696717A - 电容差检测电路和微机电***传感器 - Google Patents
电容差检测电路和微机电***传感器 Download PDFInfo
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- CN1696717A CN1696717A CNA2005100663443A CN200510066344A CN1696717A CN 1696717 A CN1696717 A CN 1696717A CN A2005100663443 A CNA2005100663443 A CN A2005100663443A CN 200510066344 A CN200510066344 A CN 200510066344A CN 1696717 A CN1696717 A CN 1696717A
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- 239000003990 capacitor Substances 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 53
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- 230000008859 change Effects 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims description 30
- 230000010355 oscillation Effects 0.000 claims description 15
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (33)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP144906/2004 | 2004-05-14 | ||
JP2004144906A JP4437699B2 (ja) | 2004-05-14 | 2004-05-14 | センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1696717A true CN1696717A (zh) | 2005-11-16 |
CN100374868C CN100374868C (zh) | 2008-03-12 |
Family
ID=34940701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100663443A Expired - Fee Related CN100374868C (zh) | 2004-05-14 | 2005-04-22 | 电容差检测电路和微机电***传感器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7119550B2 (zh) |
EP (2) | EP1596208B1 (zh) |
JP (1) | JP4437699B2 (zh) |
KR (1) | KR100665638B1 (zh) |
CN (1) | CN100374868C (zh) |
DE (1) | DE602005015642D1 (zh) |
TW (1) | TWI275808B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101776721A (zh) * | 2010-02-10 | 2010-07-14 | 哈尔滨工业大学 | 电容容差性故障检测仪 |
CN102376258A (zh) * | 2010-08-16 | 2012-03-14 | 上海天马微电子有限公司 | 电子纸驱动控制电路 |
CN102160185B (zh) * | 2008-09-22 | 2013-04-03 | 阿尔卑斯电气株式会社 | Mems传感器 |
CN103063949A (zh) * | 2012-12-18 | 2013-04-24 | 上海集成电路研发中心有限公司 | 一种电容失配检测电路及方法 |
CN104344844A (zh) * | 2013-07-23 | 2015-02-11 | 飞思卡尔半导体公司 | 使用调制波形的mems参数识别 |
WO2015039330A1 (en) * | 2013-09-22 | 2015-03-26 | Telefonaktiebolaget L M Ericsson (Publ) | Pll and adaptive compensation method in pll |
CN105004259A (zh) * | 2015-07-31 | 2015-10-28 | 华南理工大学 | 一种电容式mems传感器检测电路 |
CN106233090A (zh) * | 2014-04-23 | 2016-12-14 | 株式会社电装 | 角速度传感器 |
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US7765095B1 (en) | 2000-10-26 | 2010-07-27 | Cypress Semiconductor Corporation | Conditional branching in an in-circuit emulation system |
US8103496B1 (en) | 2000-10-26 | 2012-01-24 | Cypress Semicondutor Corporation | Breakpoint control in an in-circuit emulation system |
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US8176296B2 (en) | 2000-10-26 | 2012-05-08 | Cypress Semiconductor Corporation | Programmable microcontroller architecture |
US7406674B1 (en) | 2001-10-24 | 2008-07-29 | Cypress Semiconductor Corporation | Method and apparatus for generating microcontroller configuration information |
US8078970B1 (en) | 2001-11-09 | 2011-12-13 | Cypress Semiconductor Corporation | Graphical user interface with user-selectable list-box |
US8042093B1 (en) | 2001-11-15 | 2011-10-18 | Cypress Semiconductor Corporation | System providing automatic source code generation for personalization and parameterization of user modules |
US6971004B1 (en) | 2001-11-19 | 2005-11-29 | Cypress Semiconductor Corp. | System and method of dynamically reconfiguring a programmable integrated circuit |
US7774190B1 (en) | 2001-11-19 | 2010-08-10 | Cypress Semiconductor Corporation | Sleep and stall in an in-circuit emulation system |
US7770113B1 (en) | 2001-11-19 | 2010-08-03 | Cypress Semiconductor Corporation | System and method for dynamically generating a configuration datasheet |
US8069405B1 (en) | 2001-11-19 | 2011-11-29 | Cypress Semiconductor Corporation | User interface for efficiently browsing an electronic document using data-driven tabs |
US7844437B1 (en) | 2001-11-19 | 2010-11-30 | Cypress Semiconductor Corporation | System and method for performing next placements and pruning of disallowed placements for programming an integrated circuit |
US8103497B1 (en) | 2002-03-28 | 2012-01-24 | Cypress Semiconductor Corporation | External interface for event architecture |
US7308608B1 (en) | 2002-05-01 | 2007-12-11 | Cypress Semiconductor Corporation | Reconfigurable testing system and method |
US7761845B1 (en) | 2002-09-09 | 2010-07-20 | Cypress Semiconductor Corporation | Method for parameterizing a user module |
US6995622B2 (en) * | 2004-01-09 | 2006-02-07 | Robert Bosh Gmbh | Frequency and/or phase compensated microelectromechanical oscillator |
US7295049B1 (en) | 2004-03-25 | 2007-11-13 | Cypress Semiconductor Corporation | Method and circuit for rapid alignment of signals |
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US7400183B1 (en) | 2005-05-05 | 2008-07-15 | Cypress Semiconductor Corporation | Voltage controlled oscillator delay cell and method |
US8089461B2 (en) | 2005-06-23 | 2012-01-03 | Cypress Semiconductor Corporation | Touch wake for electronic devices |
US20070089513A1 (en) * | 2005-09-30 | 2007-04-26 | Rosenau Steven A | Resonator based transmitters for capacitive sensors |
US7466145B2 (en) * | 2005-10-12 | 2008-12-16 | Hioki Denki Kabushiki Kaisha | Voltage measuring apparatus and power measuring apparatus |
US7307485B1 (en) * | 2005-11-14 | 2007-12-11 | Cypress Semiconductor Corporation | Capacitance sensor using relaxation oscillators |
WO2007068283A1 (en) * | 2005-12-12 | 2007-06-21 | Semtech Neuchâtel SA | Sensor interface |
US8085067B1 (en) | 2005-12-21 | 2011-12-27 | Cypress Semiconductor Corporation | Differential-to-single ended signal converter circuit and method |
US7312616B2 (en) | 2006-01-20 | 2007-12-25 | Cypress Semiconductor Corporation | Successive approximate capacitance measurement circuit |
US8067948B2 (en) | 2006-03-27 | 2011-11-29 | Cypress Semiconductor Corporation | Input/output multiplexer bus |
US8144125B2 (en) | 2006-03-30 | 2012-03-27 | Cypress Semiconductor Corporation | Apparatus and method for reducing average scan rate to detect a conductive object on a sensing device |
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- 2005-03-29 TW TW094109859A patent/TWI275808B/zh active
- 2005-04-04 EP EP05252101A patent/EP1596208B1/en not_active Expired - Fee Related
- 2005-04-04 DE DE602005015642T patent/DE602005015642D1/de active Active
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CN102160185B (zh) * | 2008-09-22 | 2013-04-03 | 阿尔卑斯电气株式会社 | Mems传感器 |
CN101776721A (zh) * | 2010-02-10 | 2010-07-14 | 哈尔滨工业大学 | 电容容差性故障检测仪 |
CN102376258A (zh) * | 2010-08-16 | 2012-03-14 | 上海天马微电子有限公司 | 电子纸驱动控制电路 |
CN102376258B (zh) * | 2010-08-16 | 2014-11-12 | 上海天马微电子有限公司 | 电子纸驱动控制电路 |
CN103063949A (zh) * | 2012-12-18 | 2013-04-24 | 上海集成电路研发中心有限公司 | 一种电容失配检测电路及方法 |
CN104344844B (zh) * | 2013-07-23 | 2018-03-20 | 恩智浦美国有限公司 | 使用调制波形的mems参数识别 |
CN104344844A (zh) * | 2013-07-23 | 2015-02-11 | 飞思卡尔半导体公司 | 使用调制波形的mems参数识别 |
WO2015039330A1 (en) * | 2013-09-22 | 2015-03-26 | Telefonaktiebolaget L M Ericsson (Publ) | Pll and adaptive compensation method in pll |
US9496881B2 (en) | 2013-09-22 | 2016-11-15 | Telefonaktiebolaget Lm Ericsson (Publ) | PLL and adaptive compensation method in PLL |
CN106233090A (zh) * | 2014-04-23 | 2016-12-14 | 株式会社电装 | 角速度传感器 |
CN106233090B (zh) * | 2014-04-23 | 2019-05-17 | 株式会社电装 | 角速度传感器 |
CN105004259A (zh) * | 2015-07-31 | 2015-10-28 | 华南理工大学 | 一种电容式mems传感器检测电路 |
CN105004259B (zh) * | 2015-07-31 | 2018-11-02 | 华南理工大学 | 一种电容式mems传感器检测电路 |
Also Published As
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US20050253596A1 (en) | 2005-11-17 |
JP4437699B2 (ja) | 2010-03-24 |
DE602005015642D1 (de) | 2009-09-10 |
EP1857826A2 (en) | 2007-11-21 |
US7119550B2 (en) | 2006-10-10 |
TWI275808B (en) | 2007-03-11 |
EP1596208A1 (en) | 2005-11-16 |
CN100374868C (zh) | 2008-03-12 |
JP2005326285A (ja) | 2005-11-24 |
KR100665638B1 (ko) | 2007-01-10 |
EP1857826B1 (en) | 2013-08-07 |
TW200537107A (en) | 2005-11-16 |
EP1596208B1 (en) | 2009-07-29 |
KR20060047687A (ko) | 2006-05-18 |
EP1857826A3 (en) | 2007-12-26 |
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