CN1608961B - 基板输送装置 - Google Patents

基板输送装置 Download PDF

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Publication number
CN1608961B
CN1608961B CN2004100856422A CN200410085642A CN1608961B CN 1608961 B CN1608961 B CN 1608961B CN 2004100856422 A CN2004100856422 A CN 2004100856422A CN 200410085642 A CN200410085642 A CN 200410085642A CN 1608961 B CN1608961 B CN 1608961B
Authority
CN
China
Prior art keywords
substrate
glass substrate
floating parts
described substrate
sidepiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2004100856422A
Other languages
English (en)
Chinese (zh)
Other versions
CN1608961A (zh
Inventor
中村郁三
加藤洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN1608961A publication Critical patent/CN1608961A/zh
Application granted granted Critical
Publication of CN1608961B publication Critical patent/CN1608961B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
CN2004100856422A 2003-10-17 2004-10-14 基板输送装置 Expired - Fee Related CN1608961B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003-357576 2003-10-17
JP2003357576A JP4373175B2 (ja) 2003-10-17 2003-10-17 基板搬送装置
JP2003357576 2003-10-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2010105651320A Division CN102060193B (zh) 2003-10-17 2004-10-14 基板输送装置

Publications (2)

Publication Number Publication Date
CN1608961A CN1608961A (zh) 2005-04-27
CN1608961B true CN1608961B (zh) 2011-01-26

Family

ID=34614430

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2010105651320A Expired - Fee Related CN102060193B (zh) 2003-10-17 2004-10-14 基板输送装置
CN2004100856422A Expired - Fee Related CN1608961B (zh) 2003-10-17 2004-10-14 基板输送装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2010105651320A Expired - Fee Related CN102060193B (zh) 2003-10-17 2004-10-14 基板输送装置

Country Status (4)

Country Link
JP (1) JP4373175B2 (ja)
KR (1) KR101213529B1 (ja)
CN (2) CN102060193B (ja)
TW (1) TWI386354B (ja)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100531209B1 (ko) * 2004-12-30 2005-11-29 지 . 텍 (주) 기판부상 반송장치
WO2007074798A1 (ja) * 2005-12-27 2007-07-05 Sharp Kabushiki Kaisha 基板処理装置への基板搬送方法
KR100721597B1 (ko) * 2006-03-31 2007-05-23 주식회사 태성기연 판유리 이송장치
JP2008016543A (ja) * 2006-07-04 2008-01-24 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4842746B2 (ja) * 2006-09-20 2011-12-21 オリンパス株式会社 基板搬送装置
WO2009113066A2 (en) 2008-03-11 2009-09-17 Coreflow Ltd. Method and system for locally controlling support of a flat object
JP2009256029A (ja) * 2008-04-15 2009-11-05 Toray Eng Co Ltd 板状部材の搬送装置および板状部材の搬送方法
KR101039294B1 (ko) * 2008-06-27 2011-06-07 건국대학교 산학협력단 비접촉식 소재 이송 시스템의 이송속도 제어방법
TWI400513B (zh) * 2008-07-10 2013-07-01 Shuz Tung Machinery Ind Co Ltd 面板雷射修補機及面板檢查方法
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
US9142631B2 (en) 2010-03-17 2015-09-22 Cree, Inc. Multilayer diffusion barriers for wide bandgap Schottky barrier devices
CN101941593B (zh) * 2010-09-02 2013-03-27 立晔科技股份有限公司 具有转向功能的芯片输送机台
KR101331067B1 (ko) * 2012-06-01 2013-11-19 한국미쯔보시다이아몬드공업(주) 취성 재료 기판의 수직 공급 로더 컨베이어 장치
WO2014132339A1 (ja) * 2013-02-26 2014-09-04 株式会社Ihi 搬送装置
JP6079529B2 (ja) * 2013-09-18 2017-02-15 三星ダイヤモンド工業株式会社 支持機構および搬送装置
JP6605871B2 (ja) * 2015-08-03 2019-11-13 東レエンジニアリング株式会社 基板浮上搬送装置
CN108946101B (zh) 2017-05-24 2020-08-28 台达电子工业股份有限公司 输送设备
US10427889B2 (en) 2017-05-24 2019-10-01 Delta Electronics, Inc. Transmission equipment
TWI684563B (zh) * 2017-05-24 2020-02-11 台達電子工業股份有限公司 輸送設備
WO2020076650A1 (en) 2018-10-10 2020-04-16 Kateeva, Inc. Systems and methods for supporting and conveying a substrate
DE102018125682B4 (de) * 2018-10-16 2023-01-19 Asm Assembly Systems Gmbh & Co. Kg Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils
CN110730611B (zh) * 2019-09-30 2020-12-08 云谷（固安）科技有限公司 曲面显示屏绑定装置及曲面显示屏绑定方法
CN112705971A (zh) * 2020-12-16 2021-04-27 福建中维动力科技股份有限公司 一种用于重卡板状零件翻转定位装置的进料机构
TWI792576B (zh) * 2021-09-23 2023-02-11 聯茂電子股份有限公司 運送裝置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1088177A (zh) * 1992-07-15 1994-06-22 明尼苏达矿产制造公司 物品处理***

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196817A (ja) * 1996-01-19 1997-07-31 Hitachi Electron Eng Co Ltd カラーフィルタ基板のハンドリング装置
JP4138909B2 (ja) * 1997-06-30 2008-08-27 株式会社シンクロン ボールローラー搬送システム
JP2000072251A (ja) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk 浮上搬送装置および浮上搬送システム
JP2000193604A (ja) * 1998-12-25 2000-07-14 Takano Co Ltd 基板用自動検査装置
JP3926593B2 (ja) * 2001-09-14 2007-06-06 大日本スクリーン製造株式会社 基板処理装置
JP3759450B2 (ja) * 2001-12-19 2006-03-22 株式会社白井▲鉄▼工所 液晶パネルの折割装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1088177A (zh) * 1992-07-15 1994-06-22 明尼苏达矿产制造公司 物品处理***

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
JP昭58-70548A 1983.04.27
JP特开2000-193604A 2000.07.14
JP特开2000-72251A 2000.03.07
JP特开2002-321820A 2002.11.08
JP特开2003-185987A 2003.07.03
JP特开平9-278181A 1997.10.28

Also Published As

Publication number Publication date
JP2005119818A (ja) 2005-05-12
TW200519011A (en) 2005-06-16
TWI386354B (zh) 2013-02-21
JP4373175B2 (ja) 2009-11-25
CN1608961A (zh) 2005-04-27
KR101213529B1 (ko) 2012-12-18
CN102060193B (zh) 2013-04-10
CN102060193A (zh) 2011-05-18
KR20050037365A (ko) 2005-04-21

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Granted publication date: 20110126

Termination date: 20141014

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