TW200519011A - Substrate conveying system - Google Patents

Substrate conveying system

Info

Publication number
TW200519011A
TW200519011A TW093131010A TW93131010A TW200519011A TW 200519011 A TW200519011 A TW 200519011A TW 093131010 A TW093131010 A TW 093131010A TW 93131010 A TW93131010 A TW 93131010A TW 200519011 A TW200519011 A TW 200519011A
Authority
TW
Taiwan
Prior art keywords
substrate
floating block
conveying
conveying system
substrate conveying
Prior art date
Application number
TW093131010A
Other languages
Chinese (zh)
Other versions
TWI386354B (en
Inventor
Yuzo Nakamura
Hiroshi Kato
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200519011A publication Critical patent/TW200519011A/en
Application granted granted Critical
Publication of TWI386354B publication Critical patent/TWI386354B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)

Abstract

A substrate conveying system comprising: a substrate floating block (1, 11, 16) that floats a substrate (3) in a non-contact state; a conveying mechanism that conveys the substrate which has floated above the substrate floating block (1, 11, 16) by holding end portions of the substrate (3); and a substrate support mechanism (49) provided at or close to both side portions of the substrate floating block (1, 11, 16) in a direction perpendicular to a conveying direction (C) of the substrate (3), and supporting from below both end portions of the substrate (3) that protrude in the above perpendicular direction beyond both side portions of the substrate floating block (1, 11, 16). When floating and conveying the substrate above the substrate floating block, the substrate can be conveyed horizontally without contacting the substrate floating block.
TW093131010A 2003-10-17 2004-10-13 Substrate conveying system TWI386354B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003357576A JP4373175B2 (en) 2003-10-17 2003-10-17 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200519011A true TW200519011A (en) 2005-06-16
TWI386354B TWI386354B (en) 2013-02-21

Family

ID=34614430

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093131010A TWI386354B (en) 2003-10-17 2004-10-13 Substrate conveying system

Country Status (4)

Country Link
JP (1) JP4373175B2 (en)
KR (1) KR101213529B1 (en)
CN (2) CN102060193B (en)
TW (1) TWI386354B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395701B (en) * 2008-04-15 2013-05-11 Toray Eng Co Ltd Transfer device of plate member and transfer method of plate member
TWI400513B (en) * 2008-07-10 2013-07-01 Shuz Tung Machinery Ind Co Ltd Laser repair apparatus for a panel
TWI792576B (en) * 2021-09-23 2023-02-11 聯茂電子股份有限公司 Conveying device

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100531209B1 (en) * 2004-12-30 2005-11-29 지 . 텍 (주) A glass panel conveyance apparatus having the function for rising to the surface
WO2007074798A1 (en) * 2005-12-27 2007-07-05 Sharp Kabushiki Kaisha Method of conveying substrate to substrate processing device
KR100721597B1 (en) * 2006-03-31 2007-05-23 주식회사 태성기연 Apparatus for transferring of glass panel
JP2008016543A (en) * 2006-07-04 2008-01-24 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
JP4842746B2 (en) * 2006-09-20 2011-12-21 オリンパス株式会社 Substrate transfer device
JP2011519796A (en) * 2008-03-11 2011-07-14 コアフロー リミテッド Method and system for locally controlling the support of a flat object
KR101039294B1 (en) * 2008-06-27 2011-06-07 건국대학교 산학협력단 Method for transfer speed control of Non-contact web transport system
KR100928674B1 (en) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 Noncontact type suction gripping device and noncontact type suction gripping flame with the same
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
US9142631B2 (en) 2010-03-17 2015-09-22 Cree, Inc. Multilayer diffusion barriers for wide bandgap Schottky barrier devices
CN101941593B (en) * 2010-09-02 2013-03-27 立晔科技股份有限公司 Chip conveyer table with turning function
KR101331067B1 (en) * 2012-06-01 2013-11-19 한국미쯔보시다이아몬드공업(주) Conveyor having vertical supplying loader for brittle material substrate
JP6032348B2 (en) * 2013-02-26 2016-11-24 株式会社Ihi Transport device
JP6079529B2 (en) * 2013-09-18 2017-02-15 三星ダイヤモンド工業株式会社 Support mechanism and transfer device
JP6605871B2 (en) * 2015-08-03 2019-11-13 東レエンジニアリング株式会社 Substrate floating transfer device
CN112027619A (en) 2017-05-24 2020-12-04 台达电子工业股份有限公司 Conveying equipment
TWI684563B (en) * 2017-05-24 2020-02-11 台達電子工業股份有限公司 Transmission equipment
US10427889B2 (en) 2017-05-24 2019-10-01 Delta Electronics, Inc. Transmission equipment
WO2020076650A1 (en) * 2018-10-10 2020-04-16 Kateeva, Inc. Systems and methods for supporting and conveying a substrate
DE102018125682B4 (en) * 2018-10-16 2023-01-19 Asm Assembly Systems Gmbh & Co. Kg Ejector device and method for assisting detachment of an electrical component arranged on a holding film
CN110730611B (en) * 2019-09-30 2020-12-08 云谷（固安）科技有限公司 Curved surface display screen binding device and curved surface display screen binding method
CN112705971A (en) * 2020-12-16 2021-04-27 福建中维动力科技股份有限公司 Feeding mechanism for heavy truck plate-shaped part overturning and positioning device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
JPH09196817A (en) * 1996-01-19 1997-07-31 Hitachi Electron Eng Co Ltd Handling device for color filter board
JP4138909B2 (en) * 1997-06-30 2008-08-27 株式会社シンクロン Ball roller transport system
JP2000072251A (en) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk Flotation carrier device and flotation carrier system
JP2000193604A (en) * 1998-12-25 2000-07-14 Takano Co Ltd Automatic inspection device for substrate
JP3926593B2 (en) * 2001-09-14 2007-06-06 大日本スクリーン製造株式会社 Substrate processing equipment
JP3759450B2 (en) * 2001-12-19 2006-03-22 株式会社白井▲鉄▼工所 LCD panel folding device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395701B (en) * 2008-04-15 2013-05-11 Toray Eng Co Ltd Transfer device of plate member and transfer method of plate member
TWI400513B (en) * 2008-07-10 2013-07-01 Shuz Tung Machinery Ind Co Ltd Laser repair apparatus for a panel
TWI792576B (en) * 2021-09-23 2023-02-11 聯茂電子股份有限公司 Conveying device

Also Published As

Publication number Publication date
JP4373175B2 (en) 2009-11-25
JP2005119818A (en) 2005-05-12
CN1608961B (en) 2011-01-26
CN1608961A (en) 2005-04-27
KR20050037365A (en) 2005-04-21
KR101213529B1 (en) 2012-12-18
TWI386354B (en) 2013-02-21
CN102060193B (en) 2013-04-10
CN102060193A (en) 2011-05-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees