CN116066510B - Six-degree-of-freedom double-layer driving active vibration isolation device - Google Patents
Six-degree-of-freedom double-layer driving active vibration isolation device Download PDFInfo
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- CN116066510B CN116066510B CN202310110289.1A CN202310110289A CN116066510B CN 116066510 B CN116066510 B CN 116066510B CN 202310110289 A CN202310110289 A CN 202310110289A CN 116066510 B CN116066510 B CN 116066510B
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- vibration isolation
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- 238000002955 isolation Methods 0.000 title claims abstract description 35
- 239000002184 metal Substances 0.000 claims description 20
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/04—Frequency effects
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention provides a six-degree-of-freedom double-layer driving active vibration isolation device which comprises a top plate, driving legs and a base, wherein a supporting plate is further arranged between the top plate and the base, the top plate is connected with the supporting plate through six driving legs, the supporting plate is connected with the base through six driving legs, hinges are further arranged between the driving legs and the top plate and between the supporting plate and the base, a first position sensor and a first speed sensor are arranged at the bottom of the top plate, a second position sensor and a second speed sensor are arranged at the bottom of the supporting plate, and a controller is arranged at the top of the base. According to the invention, the top plate, the supporting plate and the bottom plate are designed into a double-layer structure, and each layer of structure is connected through six driving legs, so that six-degree-of-freedom vibration control can be realized, the positioning accuracy and vibration isolation bandwidth of the system are further improved by the design of twelve driving legs of the double-layer structure, and the vibration isolation structure has a good vibration isolation effect on vibration interference of 0.2 Hz-250 Hz.
Description
Technical Field
The invention relates to the technical field of vibration isolation devices, in particular to a six-degree-of-freedom double-layer driving active vibration isolation device.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The micro-vibration caused by external environment vibration and internal reaction force of equipment is one of key factors limiting the measurement precision of ultra-precise instruments and the manufacturing precision of ultra-precise machining equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precise engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration frequency of the interference generated by the ultra-precise measuring instrument and the ultra-precise machining manufacturing equipment is mainly in the low-frequency vibration within 0.8-100 Hz. The passive vibration isolator is in principle dependent on reducing the natural frequency thereof, filtering out the vibration from the outside, and the vibration isolation effect depends on the natural frequency thereof. But the natural frequency is proportional to the arithmetic square root of the stiffness of the vibration isolator, i.e., the smaller the natural frequency, the smaller the stiffness. Passive isolators are not capable of suppressing the source of disturbance vibration due to load. The vibration isolation system with active control is very effective in solving ultra-low frequency micro amplitude vibration isolation, and meanwhile, the disturbance caused by the load can be restrained by selecting a proper structure and a control strategy.
However, the precise instrument is in a complex environment, not only single low-frequency vibration or high-frequency vibration, but also the low-frequency vibration and the high-frequency vibration exist at the same time, and the vibration isolation requirement of the complex environment vibration is difficult to be met by the traditional vibration isolation device. Often, the occupied space is large, the vibration isolation belt is narrow, and the positioning accuracy of the system is not ideal. And the vibration isolation capability of the complex vibration environment is weak.
Disclosure of Invention
The invention aims to provide a six-degree-of-freedom double-layer driving active vibration isolation device so as to solve the problems in the background technology.
The technical scheme of the invention is realized as follows:
The utility model provides a six-degree-of-freedom double-deck drive initiative vibration isolation mounting, includes roof, actuating leg and base, still install the backup pad between roof and the base, be connected through six actuating legs between roof and the backup pad, be connected through six actuating legs between backup pad and the base, the actuating leg includes the shell, shell internally mounted has the support sleeve, support sleeve top rigid coupling has first apron, annular bottom plate is installed to support sleeve bottom, the pull rod is installed to support sleeve inside left and right sides, the second apron is installed at the pull rod top, the pull rod bottom is connected with annular bottom plate top, install the guide post in the middle of the second apron bottom, the outside cover of guide post is equipped with first metal spring, first metal spring lower part inboard cover is equipped with the supporting leg, the rigid coupling has the supporting seat on the supporting leg, the supporting seat top is connected with first metal spring bottom, be connected with piezoelectric actuator between guide post bottom and the supporting leg top, the supporting leg outside, the supporting seat below installs the slider, slider top and annular bottom plate connection, the second motor is installed to the second bottom plate, the second speed sensor is installed to the second bottom plate, the second speed sensor is installed to the top on the shell bottom, the top is installed to the second speed sensor bottom the second bottom, the top is installed to the second speed sensor is installed to the top on the top of the top, the top is installed to the second speed sensor is installed to the top is equipped with the voice coil respectively, and the top of the base is provided with a controller.
Further, the top plate, the supporting plate and the base are all made of stainless steel plates into a hexagonal structure.
Further, the center line of the top plate and the center line of the base are on the same vertical plane, all sides are parallel and corresponding, and the supporting plate and the base are arranged in a mirror image mode.
Further, the six corner bottoms of the top plate are respectively provided with a first hinge, the six corner tops of the support plate are respectively provided with a second hinge, the six corner bottoms of the support plate and the second hinge are respectively provided with a third hinge on the same vertical line, and the six corner tops of the base are respectively provided with a fourth hinge.
Further, each of the top and the bottom of the driving leg between the top plate and the supporting plate is connected with a first hinge and a second hinge in sequence, and each of the top and the bottom of the driving leg between the supporting plate and the base is connected with a third hinge and a fourth hinge in sequence.
Further, the top plate is provided with a connecting hole.
Further, the shell is made of stainless steel plates and is of a cylindrical structure with two ends blocked.
Further, the support sleeve is made of stainless steel plate into a cylindrical structure.
Further, the support table is made of round steel.
Further, the controller is connected with the first position sensor, the first speed sensor, the second position sensor, the second speed sensor and the driving leg through cables.
The beneficial effects of the invention are as follows:
According to the invention, the top plate, the supporting plate and the bottom plate are designed into a double-layer structure, and each layer of structure is connected through six driving legs, so that six-degree-of-freedom vibration control can be realized, the lower layer structure mainly realizes vibration control, the upper layer structure mainly realizes platform stability, the positioning precision and vibration isolation bandwidth of the system are further improved by the design of twelve driving legs of the double-layer structure, and the vibration isolation device has a good vibration isolation effect on vibration interference of 0.2 Hz-250 Hz.
The driving legs of the invention adopt the active and passive parallel connection mode to enlarge vibration isolation bandwidth, reduce the load of the active vibration isolator, improve positioning accuracy and prolong the service life of the system; in addition, the passive vibration control adopts a mode of connecting the first metal spring and the second metal spring in parallel, so that the high-frequency vibration control precision is improved, the vibration control of high frequency 250 Hz can be realized, the active vibration control adopts a mode of connecting the piezoelectric driver and the voice coil motor in parallel, the low-frequency vibration control precision is improved, the vibration control of lower frequency 0.2Hz can be realized, the vibration isolation belt of the system is wider, the application range is wide, and the positioning is accurate.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic view of the structure of the driving leg of the present invention.
In the drawing, the top plate, the 2-driving leg, the 201-housing, the 202-supporting sleeve, the 203-first cover plate, the 204-annular bottom plate, the 205-pull rod, the 206-second cover plate, the 207-guiding column, the 208-first metal spring, the 209-supporting leg, the 210-supporting seat, the 211-piezoelectric driver, the 212-sliding block, the 213-second metal spring, the 214-voice coil motor, the 215-supporting table, the 216-guide rod, the 3-supporting plate, the 4-base, the 501-first hinge, the 502-second hinge, the 503-third hinge, the 504-fourth hinge, the 6-first position sensor, the 7-first speed sensor, the 8-second position sensor, the 9-second speed sensor, the 10-controller and the 11-connecting hole are arranged.
Description of the embodiments
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-2, a six-degree-of-freedom double-layer driving active vibration isolation device comprises a top plate 1, driving legs 2 and a base 4, wherein a supporting plate 3 is further installed between the top plate 1 and the base 4, the top plate 1 and the supporting plate 3 are connected through six driving legs 2, the supporting plate 3 and the base 4 are connected through six driving legs 2, a hinge 5 is further installed between the driving legs 2 and the top plate 1 and the supporting plate 3 and between the supporting plate 3 and the base 4, the driving legs 2 comprise a shell 201, a supporting sleeve 202 is installed in the shell 201, a first cover plate 203 is fixedly connected to the top of the supporting sleeve 202, an annular bottom plate 204 is installed at the bottom of the supporting sleeve 202, pull rods 205 are installed at the left side and the right side of the inside of the supporting sleeve 202, second cover plates 206 are installed at the top of the pull rods 205, the bottom of the pull rods 205 is connected with the top of the annular bottom plate 204, a guide post 207 is arranged in the middle of the bottom of the second cover plate 206, a first metal spring 208 is sleeved outside the guide post 207 at the bottom of the second cover plate 206, a supporting leg 209 is sleeved inside the lower part of the first metal spring 208, a supporting seat 210 is fixedly connected to the supporting leg 209, the top of the supporting seat 210 is connected with the bottom of the first metal spring 208, a piezoelectric driver 211 is connected between the bottom of the guide post 207 and the top of the supporting leg 209, a sliding block 212 is arranged below the supporting seat 210 outside the supporting leg 209, the top of the sliding block 212 is connected with an annular bottom plate 204, a second metal spring 213 is arranged outside the bottom of the sliding block 212 and the supporting leg 209, the bottom of the second metal spring 213 is fixedly connected inside the bottom of the outer shell 201, voice coil motors 214 are respectively arranged at the bottoms of the left side and the right side of the annular bottom plate 204, the voice coil motors 214 are arranged on the supporting table 215, the bottom of the supporting table 215 is fixedly connected to the inner side of the bottom of the shell 201, a guide rod 216 is installed in the middle of the top of the first cover plate 203, the guide rod 216 penetrates through the top of the shell 201 to be in sliding connection with the shell 201, a first position sensor 6 and a first speed sensor are installed at the bottom of the top plate 1, a second position sensor 8 and a second speed sensor 9 are installed at the bottom of the supporting plate 3, and a controller 10 is installed at the top of the base 4.
The top plate 1, the supporting plate 3 and the base 4 are all made of stainless steel plates into a hexagonal structure.
The central lines of the top plate 1 and the base 4 are on the same vertical plane, the sides of the top plate are parallel and corresponding, and the supporting plate 3 and the base 4 are arranged in a mirror image mode.
The six corner bottoms of the top plate 1 are respectively provided with a first hinge 501, the six corner tops of the support plate 3 are respectively provided with a second hinge 502, the six corner bottoms of the support plate 3 and the second hinge 502 are respectively provided with a third hinge 503 on the same vertical line, and the six corner tops of the base 4 are respectively provided with a fourth hinge 504.
The top and the bottom of each driving leg 2 between the top plate 1 and the supporting plate 3 are respectively connected with a first hinge 501 and a second hinge 502 in sequence, and the top and the bottom of each driving leg 2 between the supporting plate 3 and the base 4 are respectively connected with a third hinge 503 and a fourth hinge 504 in sequence.
The top plate 1 is provided with a connecting hole 11.
The housing 201 is made of stainless steel plate and has a cylindrical structure with two ends sealed.
The support sleeve 202 is made of stainless steel plate in a cylindrical structure.
The support table 215 is made of round steel.
The controller 10 is connected to the first position sensor 6, the first speed sensor 7, the second position sensor 8, the second speed sensor 9, and the driving leg 2 via cables.
During operation, the precision instrument is placed on the top plate 1, vibration signals of the top plate 1 are collected through the first position sensor 6 and the first speed sensor 7, vibration signals of the support plate 3 are collected through the second position sensor 8 and the second speed sensor 9, vibration control of the support plate 3 is achieved through the driving leg 2 between the support plate 3 and the base 4, and stability of the top plate 1 is achieved through the driving leg 2 between the support plate 3 and the top plate 2.
When the driving leg 2 works, firstly, a vibration source is transmitted to the driving leg 2, and when in high-frequency vibration source, the driving leg 2 is transmitted to the supporting sleeve 202 through the guide rod 216, then the pull rod 205 is driven, high-frequency vibration control is realized through the first metal spring 208, and meanwhile, the sliding block 207 is driven to move up and down through the annular bottom plate 204, so that high-frequency vibration control is further realized through the second metal spring 213 connected with the first metal spring 208 in parallel; in the low-frequency vibration source, the driving leg 2 is transmitted to the supporting sleeve 202 through the guide rod 216, then drives the pull rod 205, realizes low-frequency vibration control through the piezoelectric driver 211, and simultaneously transmits the vibration source to the voice coil motor 214 through the annular bottom plate 204, and further realizes low-frequency vibration control through the voice coil motor 214 connected with the piezoelectric driver 211 in parallel.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (10)
1. The six-degree-of-freedom double-layer driving active vibration isolation device comprises a top plate, driving legs and a base, and is characterized in that a supporting plate is further arranged between the top plate and the base, the top plate is connected with the supporting plate through six driving legs, the supporting plate is connected with the base through six driving legs, a hinge is further arranged between the driving legs and the top plate and between the supporting plate and the base, the driving legs comprise a shell, a supporting sleeve is internally arranged in the shell, a first cover plate is fixedly connected to the top of the supporting sleeve, an annular bottom plate is arranged at the bottom of the supporting sleeve, pull rods are arranged at the left side and the right side of the inside of the supporting sleeve, a second cover plate is arranged at the top of each pull rod, the bottom of each pull rod is connected with the top of the annular bottom plate, a guide post is arranged in the middle of the bottom of each second cover plate, the second cover plate bottom and the outside of the guide post are sleeved with a first metal spring, the inner side of the lower part of the first metal spring is sleeved with a supporting leg, the supporting leg is fixedly connected with a supporting seat, the top of the supporting seat is connected with the bottom of the first metal spring, a piezoelectric driver is connected between the bottom of the guide post and the top of the supporting leg, a sliding block is arranged below the supporting seat and outside the supporting leg, the top of the sliding block is connected with an annular bottom plate, the second metal spring is arranged at the bottom of the sliding block and the outside of the supporting leg, the bottom of the second metal spring is fixedly connected with the inner side of the bottom of the shell, voice coil motors are respectively arranged at the bottoms of the left side and the right side of the annular bottom plate, the bottom of the voice coil motors is arranged on a supporting table, the bottom of the supporting table is fixedly connected with the inner side of the bottom of the shell, a guide rod is arranged in the middle of the top of the first cover plate, the guide rod penetrates through the top of the shell and is in sliding connection with the shell, the first position sensor and the first speed sensor are installed at the bottom of the top plate, the second position sensor and the second speed sensor are installed at the bottom of the supporting plate, and the controller is installed at the top of the base.
2. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the top plate, the supporting plate and the base are all made of stainless steel plates into a hexagonal structure.
3. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the top plate and the center line of the base are on the same vertical plane, the sides of the top plate and the center line of the base are parallel and correspond to each other, and the supporting plate and the base are arranged in a mirror image mode.
4. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the six corner bottoms of the top plate are respectively provided with a first hinge, the six corner tops of the support plate are respectively provided with a second hinge, the six corner bottoms of the support plate and the second hinge are respectively provided with a third hinge on the same vertical line, and the six corner tops of the base are respectively provided with a fourth hinge.
5. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the top and the bottom of each driving leg between the top plate and the supporting plate are sequentially connected with a first hinge and a second hinge respectively, and the top and the bottom of each driving leg between the supporting plate and the base are sequentially connected with a third hinge and a fourth hinge respectively.
6. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the top plate is provided with a connecting hole.
7. The six-degree-of-freedom double-layer driving active vibration isolation device according to claim 1, wherein the housing is made of stainless steel plates and has a cylindrical structure with two ends blocked.
8. The six degree of freedom double-deck driving active vibration isolation device of claim 1 wherein the support sleeve is formed of stainless steel sheet in a cylindrical configuration.
9. The six degree of freedom double-deck drive active vibration isolation apparatus of claim 1 wherein the support table is made of round steel.
10. The six degree-of-freedom double-layer driving active vibration isolation device of claim 1, wherein the controller is connected to the first position sensor, the first speed sensor, the second position sensor, the second speed sensor, the driving leg by cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310110289.1A CN116066510B (en) | 2023-02-14 | 2023-02-14 | Six-degree-of-freedom double-layer driving active vibration isolation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310110289.1A CN116066510B (en) | 2023-02-14 | 2023-02-14 | Six-degree-of-freedom double-layer driving active vibration isolation device |
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| CN116066510A CN116066510A (en) | 2023-05-05 |
| CN116066510B true CN116066510B (en) | 2024-05-24 |
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| CN211315592U (en) * | 2019-12-27 | 2020-08-21 | 武汉飞令机器人科技有限公司 | Six-axis parallel structure liquid crystal instrument screen electromagnetic type anti-shake and vibration-proof device |
| CN213809689U (en) * | 2020-12-04 | 2021-07-27 | 南京全控航空科技有限公司 | Six-axis double-layer rotation self-balancing motion platform |
| CN217333507U (en) * | 2021-12-31 | 2022-08-30 | 南通赋助智能设备有限公司 | Anti-rolling simulator based on double-layer six-degree-of-freedom |
| CN218094025U (en) * | 2022-09-23 | 2022-12-20 | 大连地拓重工有限公司 | Stewart structure-based large-load active and passive micro-vibration prevention platform |
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2023
- 2023-02-14 CN CN202310110289.1A patent/CN116066510B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007046445A (en) * | 2005-06-30 | 2007-02-22 | Tatsuji Ishimaru | Double layer seismic response control device |
| CN102155516A (en) * | 2011-01-24 | 2011-08-17 | 北京航空航天大学 | Eight-rod-redundant-configuration and six-degree-of-freedom active vibration control device |
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|---|---|
| CN116066510A (en) | 2023-05-05 |
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