CN219345368U - Three-degree-of-freedom active micro-vibration prevention base - Google Patents
Three-degree-of-freedom active micro-vibration prevention base Download PDFInfo
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- CN219345368U CN219345368U CN202223503102.4U CN202223503102U CN219345368U CN 219345368 U CN219345368 U CN 219345368U CN 202223503102 U CN202223503102 U CN 202223503102U CN 219345368 U CN219345368 U CN 219345368U
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- 230000002265 prevention Effects 0.000 title claims abstract description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Abstract
The utility model provides a three-degree-of-freedom active micro-vibration prevention base which comprises a top plate, an air spring and a base, wherein the air spring is arranged in the middle of the top of the base, the top of the air spring is connected with a supporting plate, the middle of the top of the supporting plate and the middle of the bottom of the top plate are connected with spherical hinges, a vertical Lorentz motor is arranged at the front and back positions of the top of the supporting plate, a left-right Xiang Luolun-z motor is arranged on the right side of the top of the supporting plate, a front-back Lorentz motor is arranged on the left side of the top of the supporting plate, a position sensor and a speed sensor are arranged at the bottom of the top plate, and a controller is arranged at the top of the supporting plate. The utility model can adjust the supporting force according to the load size, has wide application range, accurate positioning and vibration isolation bandwidth, and has better vibration isolation effect on the vibration interference of 0.5 Hz-150 Hz.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to a three-degree-of-freedom active micro-vibration prevention base.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The environment where the precise instrument is located is complex, not only single low-frequency vibration or high-frequency vibration, but also the low-frequency vibration and the high-frequency vibration exist at the same time, and the vibration isolation requirement of the complex environment vibration is difficult to be met by the traditional vibration isolation device. Although the active and passive hybrid vibration isolation devices appear, the problems of narrow vibration isolation bandwidth, poor positioning accuracy of the system, weak vibration isolation capability for complex vibration environments and the like exist.
Disclosure of Invention
The utility model aims to provide a three-degree-of-freedom active micro-vibration prevention base to solve the problems in the background technology.
The technical scheme of the utility model is realized as follows:
the utility model provides a three degree of freedom initiative micro-vibration prevention base, includes roof, air spring and base, air spring installs in the middle of the base top, the air spring top is connected with the backup pad, be connected with spherical hinge in the middle of the backup pad top and the roof bottom, vertical lorentz motor is installed to the position around the backup pad top, xiang Luolun z motor is installed on left and right sides in backup pad top right side, around the backup pad top left side is installed to the lorentz motor, position sensor and speed sensor are installed to the roof bottom, the controller is installed at the backup pad top.
Further, the top plate, the base and the support plate are all made of stainless steel plates with circular structures having the same diameters.
Further, a proportional valve is arranged on one side of the air spring.
Further, the controller is connected with the position sensor, the speed sensor, the proportional valve, the vertical lorentz motor, the left and right Xiang Luolun lorentz motors and the front and back lorentz motors through cables.
The beneficial effects of the utility model are as follows:
according to the utility model, the bearing is realized through the spherical hinge and the air spring, the air inflow is regulated through controlling the proportional valve, so that the load supporting force is changed, the vertical positioning can be realized, and the accurate vibration isolation of three degrees of freedom in the vertical direction and the horizontal direction is realized through the vertical lorentz motor, the left and right Xiang Luolun lorentz motors and the front and rear lorentz motors. The utility model can adjust the supporting force according to the load size, has wide application range, accurate positioning and vibration isolation bandwidth, and has better vibration isolation effect on the vibration interference of 0.5 Hz-150 Hz.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
In the figure, a top plate, a 2-air spring, a 3-base, a 4-supporting plate, a 5-spherical hinge, a 6-vertical Lorentz motor, a 7-left and right Xiang Luolun-z motor, an 8-front and back Lorentz motor, a 9-position sensor, a 10-speed sensor, an 11-controller and a 12-proportional valve are arranged.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1, the three-degree-of-freedom active micro-vibration prevention base comprises a top plate 1, an air spring 2 and a base 3, wherein the air spring 2 is installed in the middle of the top of the base 3, the top of the air spring 2 is connected with a supporting plate 4, a spherical hinge 5 is connected between the middle of the top of the supporting plate 4 and the bottom of the top plate 1, a vertical lorentz motor 6 is installed at the front-back position of the top of the supporting plate 4, a left-right Xiang Luolun lorentz motor 7 is installed at the right side of the top of the supporting plate 4, a front-back lorentz motor 8 is installed at the left side of the top of the supporting plate 4, a position sensor 9 and a speed sensor 10 are installed at the bottom of the top plate 1, and a controller 11 is installed at the top of the supporting plate 4.
The top plate, the base and the supporting plate are all made of stainless steel plates and have circular structures with the same diameters.
A proportional valve 12 is arranged on one side of the air spring 2.
The controller 11 is connected with the position sensor 9, the speed sensor 10, the proportional valve 12, the vertical lorentz motor 6, the left and right Xiang Luolun lorentz motors 7 and the front and back lorentz motor 8 through cables.
When the device works, a precise instrument is placed on the top plate 1, the air spring 2 bears load, the position sensor 4 and the speed sensor 5 collect vibration signals, then the signals are transmitted to the controller 6, the controller 6 controls the flow of the air of the proportional valve 12, and further the load supporting force is controlled, so that the vertical positioning is realized; the vibration isolation of three degrees of freedom in the vertical direction and the horizontal direction is realized by controlling the driving of the vertical lorentz motor 6, the left and right Xiang Luolun lorentz motors 7 and the front and back lorentz motors 8 through the controller.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (4)
1. The utility model provides a three degree of freedom initiative micro-vibration prevention base, includes roof, air spring and base, its characterized in that, air spring installs in the middle of the base top, the air spring top is connected with the backup pad, be connected with spherical hinge in the middle of the backup pad top and the roof bottom, vertical lorentz motor is installed to backup pad top front and back position, xiang Luolun z motor is installed on backup pad top right side, forward lorentz motor is installed in backup pad top left side, position sensor and speed sensor are installed to the roof bottom, the controller is installed at the backup pad top.
2. The three degree of freedom active anti-micro vibration base of claim 1 wherein the top plate, base and support plate are all made of stainless steel plate with the same diameter circular structure.
3. The three degree of freedom active anti-micro vibration base of claim 1 wherein a proportional valve is mounted to one side of the air spring.
4. The three degree of freedom active anti-micro-vibration base of claim 1 wherein the controller is connected to the position sensor, the speed sensor, the proportional valve, the vertical lorentz motor, the left and right Xiang Luolun lorentz motors and the front and rear lorentz motors by cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503102.4U CN219345368U (en) | 2022-12-28 | 2022-12-28 | Three-degree-of-freedom active micro-vibration prevention base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503102.4U CN219345368U (en) | 2022-12-28 | 2022-12-28 | Three-degree-of-freedom active micro-vibration prevention base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219345368U true CN219345368U (en) | 2023-07-14 |
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ID=87098282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223503102.4U Active CN219345368U (en) | 2022-12-28 | 2022-12-28 | Three-degree-of-freedom active micro-vibration prevention base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219345368U (en) |
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2022
- 2022-12-28 CN CN202223503102.4U patent/CN219345368U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |