CN219139708U - Active and passive micro-vibration prevention platform for precise instrument - Google Patents
Active and passive micro-vibration prevention platform for precise instrument Download PDFInfo
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- CN219139708U CN219139708U CN202223503116.6U CN202223503116U CN219139708U CN 219139708 U CN219139708 U CN 219139708U CN 202223503116 U CN202223503116 U CN 202223503116U CN 219139708 U CN219139708 U CN 219139708U
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- push rod
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- 230000002265 prevention Effects 0.000 title claims abstract description 11
- 229920001967 Metal rubber Polymers 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 16
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000002955 isolation Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides an active-passive micro-vibration prevention platform for a precision instrument, which comprises a top plate, a base and four drivers, wherein the four drivers are respectively arranged at four corners of the top of the base, the top of each driver is respectively connected with four corners of the bottom of the top plate, each driver comprises a supporting plate, a push rod and a supporting frame body, the push rod is vertically connected in the middle of the bottom of the supporting plate, a through hole is formed in the middle of the top of the supporting frame body, the push rod is inserted into the supporting frame body through the through hole, metal rubber is sleeved outside the push rod between the supporting plate and the supporting frame body, a metal spring is sleeved outside the metal rubber, the bottom of each push rod is connected with a piezoelectric driver, the bottom of each piezoelectric driver is connected with the inner side of the bottom of the supporting frame body, a position sensor and a speed sensor are further arranged at the bottom of the top plate, and a controller is arranged at the top of the base. The utility model has large bearing capacity and wide vibration isolation bandwidth, and has good vibration isolation effect on vibration interference of 0.5-150 Hz.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to an active and passive micro-vibration prevention platform for a precise instrument.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The micro-vibration caused by external environment vibration and internal reaction force of equipment is one of key factors limiting the measurement precision of ultra-precise instruments and the manufacturing precision of ultra-precise machining equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precise engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is a core of the vibration isolation platform, and aims at medium-high frequency vibration, passive vibration isolation is mostly adopted, and the vibration isolation device has a simple structure, is reliable in work, does not depend on a power supply, and can effectively isolate medium-high frequency vibration interference. For low-frequency or even ultra-low frequency vibration, active vibration isolation is mostly adopted. However, the environment where the precise instrument is located is complex, not only single low-frequency vibration or high-frequency vibration, but also the low-frequency vibration and the high-frequency vibration exist at the same time, and the vibration isolation requirement of the complex environment vibration is difficult to be met by the traditional vibration isolation device. Although the active and passive hybrid vibration isolation devices appear, the problems of narrow vibration isolation bandwidth, poor positioning accuracy of the system, small bearing capacity, weak vibration isolation capability for complex vibration environments and the like exist.
Disclosure of Invention
The utility model aims to provide an active-passive micro-vibration prevention platform for a precision instrument, which is used for solving the problems in the background technology.
The technical scheme of the utility model is realized as follows:
the utility model provides a little platform that shakes is prevented in initiative and passive for precision instrument, includes roof, base and driver, the driver is four angles of arranging respectively at the base top, the driver top is connected with four angles in roof bottom respectively, the driver includes backup pad, push rod and braced frame body, the push rod is connected perpendicularly in the middle of the backup pad bottom, the through-hole has been seted up in the middle of the braced frame body top, the push rod passes the through-hole and inserts in the braced frame body, between backup pad and the braced frame body, push rod outside cover is equipped with metal rubber, metal rubber outside cover is equipped with metal spring, the push rod bottom is connected with piezoelectric actuator, piezoelectric actuator bottom and braced frame body bottom inboard are connected, position sensor and speedtransmitter are still installed to the roof bottom, the controller is installed at the base top.
Further, the top plate and the base are both made of stainless steel plates into rectangular structures.
Further, the supporting frame body is made of stainless steel plates into a rectangular frame body.
Further, the metal rubber is pre-pressed metal rubber.
Further, the metal spring is a pre-pressed metal spring.
Further, the push rod is in sliding connection with the through hole.
Further, the controller is connected with the position sensor, the speed sensor and the piezoelectric driver through cables.
The beneficial effects of the utility model are as follows:
according to the utility model, the load bearing and high-frequency passive vibration isolation are realized through the metal rubber and the metal spring which are connected in parallel, the metal rubber has metal characteristics and elasticity, and the metal rubber and the metal spring are connected in parallel, so that the system bearing capacity is improved, and the micro-vibration prevention requirement of a 2000kg large-scale precise instrument can be met; in addition, low-frequency vibration isolation is realized through a piezoelectric driver; the driver can realize linear driving through the metal rubber, the metal spring and the piezoelectric driver which are arranged in parallel, and has accurate positioning and high stability. The utility model has large bearing capacity and wide vibration isolation bandwidth, and has good vibration isolation effect on vibration interference of 0.5-150 Hz.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a cross-sectional view of the driver of the present utility model.
In the figure, the device comprises a top plate, a 2-base, a 3-driver, a 301-supporting plate, a 302-push rod, a 303-supporting frame body, a 304-through hole, 305-metal rubber, 306-metal springs, 307-piezoelectric drivers, a 4-position sensor, a 5-speed sensor and a 6-controller.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1-2, the active-passive micro-vibration prevention platform for the precision instrument comprises a top plate 1, a base 2 and a driver 3, wherein the four drivers 3 are respectively arranged at four corners at the top of the base 2, the top of the driver 3 is respectively connected with four corners at the bottom of the top plate 1, the driver 3 comprises a supporting plate 301, a push rod 302 and a supporting frame 303, the push rod 302 is vertically connected in the middle of the bottom of the supporting plate 301, a through hole 304 is formed in the middle of the top of the supporting frame 303, the push rod 302 is inserted into the supporting frame 303 through the through hole 304, a metal rubber 305 is sleeved outside the push rod 302 between the supporting plate 301 and the supporting frame 303, a metal spring 306 is sleeved outside the metal rubber 305, the bottom of the push rod 302 is connected with a piezoelectric driver 307, the bottom of the piezoelectric driver 307 is connected with the inner side of the bottom of the supporting frame 303, a position sensor 4 and a speed sensor 5 are further mounted at the bottom of the top plate 1, and a controller 6 is mounted at the top of the base 2.
The top plate 1 and the base 2 are both made of stainless steel plates into rectangular structures.
The supporting frame 303 is made of stainless steel plate.
The metal rubber 305 is a pre-pressed metal rubber.
The metal spring 306 is a pre-pressed metal spring.
The pushrod 302 is slidably coupled to the through bore 304.
The controller 6 is connected with the position sensor 4, the speed sensor 5 and the piezoelectric driver 307 through cables.
When the device works, a precision instrument is placed on the top plate 1, vibration signals are collected through the position sensor 4 and the speed sensor 5, and then the signals are transmitted to the controller 6; in the high-frequency vibration source, high-frequency vibration isolation is realized through the metal rubber 305 and the metal spring 306 which are connected in parallel; at the time of low-frequency vibration source, the piezoelectric driver 307 is controlled by the controller 6 to drive so as to realize low-frequency vibration isolation.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (7)
1. The utility model provides a little platform that shakes is prevented in initiative for precision instruments, includes roof, base and driver, its characterized in that, the driver is four angles of arranging respectively at the base top, the driver top is connected with four angles in roof bottom respectively, the driver includes backup pad, push rod and supporting frame body, the push rod is connected perpendicularly in the middle of the backup pad bottom, the through-hole has been seted up in the middle of the supporting frame body top, the push rod passes the through-hole and inserts in the supporting frame body, between backup pad and the supporting frame body, the outside cover of push rod is equipped with metal rubber, metal rubber outside cover is equipped with metal spring, the push rod bottom is connected with piezoelectric actuator, piezoelectric actuator bottom and supporting frame body bottom inboard are connected, position sensor and speedtransmitter are still installed to the roof bottom, the controller is installed at the base top.
2. The active-passive micro vibration prevention platform for precision instruments according to claim 1, wherein the top plate and the base are made of stainless steel plates into rectangular structures.
3. The active-passive micro vibration prevention platform for a precision instrument according to claim 1, wherein the support frame is made of stainless steel plate.
4. The active-passive micro vibration prevention platform for a precision instrument according to claim 1, wherein the metal rubber is a pre-pressed metal rubber.
5. The active-passive anti-micro vibration platform for precision instruments according to claim 1, wherein the metal spring is a pre-stressed metal spring.
6. The active-passive anti-micro vibration platform for precision instruments according to claim 1, wherein the push rod is slidingly connected with the through hole.
7. The active-passive micro vibration prevention platform for a precision instrument according to claim 1, wherein the controller is connected with the position sensor, the speed sensor and the piezoelectric driver through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503116.6U CN219139708U (en) | 2022-12-28 | 2022-12-28 | Active and passive micro-vibration prevention platform for precise instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503116.6U CN219139708U (en) | 2022-12-28 | 2022-12-28 | Active and passive micro-vibration prevention platform for precise instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219139708U true CN219139708U (en) | 2023-06-06 |
Family
ID=86563915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223503116.6U Active CN219139708U (en) | 2022-12-28 | 2022-12-28 | Active and passive micro-vibration prevention platform for precise instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219139708U (en) |
-
2022
- 2022-12-28 CN CN202223503116.6U patent/CN219139708U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |