CN219139701U - Rigidity-variable double-freedom-degree active micro-vibration prevention base - Google Patents
Rigidity-variable double-freedom-degree active micro-vibration prevention base Download PDFInfo
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- CN219139701U CN219139701U CN202223503117.0U CN202223503117U CN219139701U CN 219139701 U CN219139701 U CN 219139701U CN 202223503117 U CN202223503117 U CN 202223503117U CN 219139701 U CN219139701 U CN 219139701U
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- 230000002265 prevention Effects 0.000 title abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910000838 Al alloy Inorganic materials 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims 5
- 238000002955 isolation Methods 0.000 abstract description 23
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model provides a rigidity-variable double-degree-of-freedom active micro-vibration prevention base which comprises a support frame body, a base and a support rod, wherein a through hole is formed in the bottom of the support frame body, the support rod is connected in the middle of the top of the base, the support rod penetrates through the through hole and is inserted into the support frame body, the top of the support rod is vertically welded with a support plate, the left side surface and the right side surface of the support plate are respectively provided with a permanent magnet A, the inner side of the support frame body in the parallel direction of the permanent magnet A is respectively provided with an electromagnet A, the left side and the right side direction of the support rod and the bottom of the support plate are respectively provided with a permanent magnet B, the inner side of the bottom of the support frame body in the perpendicular direction of the permanent magnet B is provided with an electromagnet B, the left side direction and the right side direction of the support rod and the bottom of the support frame body are respectively provided with a flexible hinge, and the bottom of the flexible hinge is provided with an air spring. The utility model has the advantages of simple structure, high stability, accurate positioning, wide vibration isolation band and good vibration isolation effect on the vibration interference of 0.5-150 Hz.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to a rigidity-variable active micro-vibration prevention base with double degrees of freedom.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The micro-vibration caused by external environment vibration and internal reaction force of equipment is one of key factors limiting the measurement precision of ultra-precise instruments and the manufacturing precision of ultra-precise machining equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precise engineering, ultra-precise manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is a core of the vibration isolation platform, and aims at medium-high frequency vibration, passive vibration isolation is mostly adopted, and the vibration isolation device has a simple structure, is reliable in work, does not depend on a power supply, and can effectively isolate medium-high frequency vibration interference. For low-frequency or even ultra-low frequency vibration, active vibration isolation is mostly adopted. However, the environment where the precise instrument is located is not single high-frequency vibration or low-frequency vibration, and is a complex vibration environment with multiple frequencies, but the existing vibration isolation platform is more aimed at single high-frequency vibration or low-frequency vibration, so that the precise vibration isolation platform is difficult to deal with complex and changeable working environments, has poor vibration isolation effect and is not accurate enough to position.
In addition, the passive vibration isolation is generally suitable for a simpler working environment, the rigidity of the passive material is generally invariable, and the rigidity cannot be adjusted according to the vibration isolation requirement of a precise instrument.
Disclosure of Invention
The utility model aims to provide a rigidity-variable active micro-vibration prevention base with double degrees of freedom, so as to solve the problems in the prior art.
The technical scheme of the utility model is realized as follows:
the utility model provides a little base that shakes is prevented in initiative of two degrees of freedom of variable rigidity, includes supporting frame body, base and bracing piece, the through-hole has been seted up to supporting frame body bottom, the bracing piece is connected in the middle of the base top, the bracing piece passes in the through-hole inserts the supporting frame body, the perpendicular welding in bracing piece top has the backup pad, permanent magnet A is installed respectively to backup pad left and right sides face, electro-magnet A is installed respectively to permanent magnet A parallel direction supporting frame body inboard, permanent magnet B is installed respectively in bracing piece left and right sides direction, backup pad bottom, electro-magnet B is installed to permanent magnet B perpendicular direction supporting frame body bottom inboard, flexible hinge is installed respectively to bracing piece left and right sides direction, supporting frame body bottom, air spring is installed to flexible hinge bottom, the air spring bottom is connected with the metal bellows, the metal bellows outside is connected with additional air chamber, position sensor and speedtransmitter are installed to supporting frame body bottom inboard, the controller is installed at the base top.
Further, the support frame is made of aluminum alloy plate into a rectangular frame.
Further, the supporting rod is made of an aluminum alloy round tube.
Further, the support plate is made of aluminum alloy plate into a rectangular structure.
Further, the additional air chambers are respectively arranged at the left side and the right side of the base, and the additional air chambers are connected with the metal corrugated pipe through pipelines.
Further, the controller is connected with the electromagnet A, the electromagnet B, the position sensor and the speed sensor through cables.
The beneficial effects of the utility model are as follows:
according to the utility model, the bearing is realized by connecting the air spring and the metal corrugated pipe in series in the vertical direction, and the vertical rigidity of the air spring is adjusted by the additional air chamber according to the installation requirements of different precise instruments, so that the application range is wide; the vibration isolation is realized by adopting an air spring and a magnetic levitation mechanism in parallel connection in the vertical direction, the high-frequency passive vibration isolation is realized by the air spring, and the low-frequency vibration isolation is realized by the magnetic levitation mechanism formed by the electromagnet B and the permanent magnet B; the horizontal upward flexible hinge and the metal corrugated pipe form a horizontal negative stiffness system, and then the horizontal downward low-frequency active vibration isolation is realized through a magnetic levitation mechanism formed by the parallel electromagnet A and the permanent magnet A. The utility model has the advantages of simple structure, high stability, accurate positioning, wide vibration isolation band and good vibration isolation effect on the vibration interference of 0.5-150 Hz.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
In the figure, the device comprises a 1-supporting frame body, a 2-base, a 3-through hole, a 4-supporting rod, a 5-supporting plate, a 6-permanent magnet A, a 7-electromagnet A, an 8-permanent magnet B, a 9-electromagnet B, a 10-flexible hinge, an 11-air spring, a 12-metal corrugated pipe, a 13-additional air chamber, a 14-position sensor, a 15-speed sensor and a 16-controller.
Detailed Description
The technical solutions of the present utility model will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1, a rigidity-variable active micro-vibration prevention base with double degrees of freedom comprises a supporting frame body 1, a base 2 and a supporting rod 3, wherein a through hole 4 is formed in the bottom of the supporting frame body 3, the supporting rod 3 is connected in the middle of the top of the base 2, the supporting rod 3 is inserted into the supporting frame body 1 through the through hole 4, a supporting plate 55 is vertically welded at the top of the supporting rod 3, permanent magnets A6 are respectively arranged on the left side surface and the right side surface of the supporting plate 5, electromagnets A7 are respectively arranged on the inner side of the supporting frame body 1 in the parallel direction of the permanent magnets A6, permanent magnets B8 are respectively arranged on the left side and the right side surface of the supporting rod 3 and the bottom of the supporting plate 5, an electromagnet B9 is respectively arranged on the inner side of the bottom of the supporting frame body 1 in the perpendicular direction of the permanent magnets B8, a flexible hinge 10 is respectively arranged on the bottom of the left side surface and the right side surface of the supporting frame body 1, an air spring 11 is arranged on the bottom of the flexible hinge 10, a metal corrugated pipe 12 is connected with an additional 13, a position sensor 14 and an air chamber 15 are respectively arranged on the inner side of the bottom of the supporting frame body 1, and an air chamber 16 is arranged on the top of the supporting frame 1.
The support frame 1 is made of aluminum alloy plate into a rectangular frame.
The supporting rod 3 is made of an aluminum alloy round tube.
The support plate 5 is made of aluminum alloy plate in a rectangular structure.
The additional air chambers 13 are respectively arranged at the left side and the right side of the base 2, and the additional air chambers 13 are connected with the metal corrugated pipe 12 through pipelines.
The controller 16 is connected with the electromagnet A7, the electromagnet B9, the position sensor 14 and the speed sensor 15 through cables.
When the air conditioner is installed, the precise instrument is placed on the supporting frame body 1, and firstly, the vertical rigidity of the system is adjusted by adjusting the inflation amount of the additional air chamber 13 according to the installation requirement of the precise instrument, so that the air conditioner meets the installation requirement; in operation, signals are collected through the position sensor 14 and the degree sensor 15 and then transmitted to the controller 16; in the vertical direction, the magnetic field intensity of the electromagnet B9 is controlled by the controller 16 to realize vertical low-frequency active vibration isolation, and the through hole air spring 11 realizes vertical high-frequency passive vibration isolation; in the horizontal direction, the magnetic field intensity of the electromagnet A7 is controlled by the controller 16 to realize horizontal low-frequency active vibration isolation.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (6)
1. The utility model provides a little base that shakes is prevented in initiative of two degrees of freedom of variable rigidity, includes supporting frame body, base and bracing piece, its characterized in that, the through-hole has been seted up to supporting frame body bottom, the bracing piece is connected in the middle of the base top, the bracing piece passes the through-hole and inserts in the supporting frame body, the perpendicular welding in bracing piece top has the backup pad, permanent magnet A is installed respectively to backup pad left and right sides face, permanent magnet A installs electro-magnet A respectively in the parallel direction supporting frame body inboard, electro-magnet B is installed respectively to bracing piece left and right sides direction, backup pad bottom, electro-magnet B is installed to the inboard of permanent magnet B vertical direction supporting frame body bottom, flexible hinge is installed respectively in bracing piece left and right sides direction, the supporting frame body bottom, air spring bottom is connected with the metal bellows, the metal bellows outside is connected with additional air chamber, position sensor and speedtransmitter are installed to supporting frame body bottom inboard, the controller is installed at the base top.
2. The dual degree of freedom active anti-micro vibration mount of claim 1 wherein the support frame is a rectangular frame made of aluminum alloy sheet.
3. The dual degree of freedom active anti-micro-vibration mount of claim 1 wherein the support bar is made of round tubes of aluminum alloy.
4. The dual degree of freedom active anti-micro vibration mount of claim 1 wherein the support plate is made of aluminum alloy sheet in a rectangular configuration.
5. The dual degree of freedom active anti-micro-vibration base with variable rigidity according to claim 1, wherein the additional air chambers are respectively arranged at the left side and the right side of the base, and the additional air chambers are connected with the metal corrugated pipe through pipelines.
6. The dual degree of freedom active anti-micro-vibration base of claim 1 wherein the controller is connected to electromagnet a, electromagnet B, position sensor, speed sensor by cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503117.0U CN219139701U (en) | 2022-12-28 | 2022-12-28 | Rigidity-variable double-freedom-degree active micro-vibration prevention base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223503117.0U CN219139701U (en) | 2022-12-28 | 2022-12-28 | Rigidity-variable double-freedom-degree active micro-vibration prevention base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219139701U true CN219139701U (en) | 2023-06-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223503117.0U Active CN219139701U (en) | 2022-12-28 | 2022-12-28 | Rigidity-variable double-freedom-degree active micro-vibration prevention base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219139701U (en) |
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2022
- 2022-12-28 CN CN202223503117.0U patent/CN219139701U/en active Active
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Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |