CN113218633B - X-ray tube performance testing mechanism - Google Patents
X-ray tube performance testing mechanism Download PDFInfo
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- CN113218633B CN113218633B CN202110490971.9A CN202110490971A CN113218633B CN 113218633 B CN113218633 B CN 113218633B CN 202110490971 A CN202110490971 A CN 202110490971A CN 113218633 B CN113218633 B CN 113218633B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
Abstract
The invention discloses an X-ray tube performance testing mechanism which comprises a vacuum cavity, a cold cathode testing assembly, a grid lifting assembly, a liquid cooling anode assembly and a focal spot testing assembly, wherein a cabin door is arranged on the vacuum cavity, and an object carrying platform is arranged in the vacuum cavity. The X-ray tube performance testing mechanism has the characteristics of adjustable cathodes and grids and replaceable anodes, can be used for verifying various simulation data of the cold cathode X-ray tube before preparation, can conveniently adjust various parameters of the performance of the X-ray tube under the condition of not preparing the tube, and can also be used for testing the cold cathode performance of different batches under different preparation processes such as a graphite arc method, a solid phase pyrolysis method, chemical vapor deposition, pyrolytic polymer, silk-screen printing and the like. The characteristics can greatly shorten the development time of the cold cathode X-ray tube and save the tube manufacturing verification cost; and the quality of the cold cathode is checked, and the working stability and the yield of the cold cathode X-ray tube are improved.
Description
Technical Field
The invention belongs to the technical field of performance detection equipment of an X-ray tube, and particularly relates to a performance testing mechanism of the X-ray tube.
Background
In the field emission technology, when a cathode made of a pointed cone array and a novel material represented by diamond, diamond-like carbon, carbon nanotube and carbon fiber is used, and a certain electric field is applied to a field emission cathode substrate coating layer, the height and the width of a surface potential barrier of a cathode coating material are reduced, and due to a tunneling effect, a part of high-energy electrons near a Fermi level can pass through the cathode surface potential barrier and overflow the surface to fly to an anode, so that current is formed. The process does not need extra energy to excite electrons, and has the characteristics of quick response, small energy loss, high emission efficiency and the like.
Although field emission cathodes have shown excellent performance and great potential for development as X-ray tube electron sources, there are many problems to be solved. Such as: the coating layer material on the surface of the cathode is not only graphene or carbon nano tube, but also is easily affected by external factors in the growth process, the growth uniformity is difficult to guarantee, and the current emission density of each cold cathode is inconsistent. Secondly, the cold cathode ray tube works for a long time, and the stability needs to be improved. On one hand, the cold cathode has a small diameter, so that the contact area of the coating layer and the substrate is small, poor contact is caused at the joint, the resistance at the joint is increased, and the heat generated during continuous operation can possibly cause the damage of part of the coating layer. On the other hand, secondary electron back-bombardment which may be generated in the long-time working process also causes continuous accumulation of heat, and finally burns out the surface coating layer, so that the emission current density is reduced, the number of X-rays generated by the electron beam hitting on the tungsten target is reduced, and the output power is reduced. In these situations, the purpose of increasing/decreasing the tube current and the size of the focal spot is achieved by replacing parts such as a focusing electrode, a grid electrode and an anode, or adjusting the cathode-grid electrode distance, the grid electrode-anode distance and the like, so that more electron beams are converged and hit on the target material to ensure the stability of the output power.
Because the quantum state of the field emission cathode when emitting electrons is difficult to accurately simulate through the prior art, the simulation result can be verified after the tube is manufactured every time, and then the size structure is finely adjusted, so that the required time is long and the cost is high.
Disclosure of Invention
In order to overcome the defects, the invention provides the X-ray tube performance testing mechanism, the performance of the X-ray tube can be adjusted and tested without welding, the operation is simple, the I-V characteristic and the focal spot size are more conveniently adjusted, various process data of the focal spot size are collected, and the cold cathode X-ray tube with more excellent performance is convenient to prepare. Meanwhile, the carbon nanotube cathodes can be aged in the process, various preparation processes and different batches of carbon nanotube cathodes are screened, and the yield of X-ray tube products is improved.
The technical scheme adopted by the invention for solving the technical problem is as follows: an X-ray tube performance testing mechanism comprises a vacuum cavity, wherein a cabin door is arranged on the vacuum cavity, an object carrying platform capable of being adjusted in a lifting mode is arranged in the vacuum cavity, a cold cathode testing assembly, a grid lifting assembly, a liquid cooling anode assembly and a focal spot testing assembly are arranged on the object carrying platform, the cold cathode testing assembly comprises a rotatable cold cathode testing platform arranged on the object carrying platform, a rotary driving assembly used for driving the cold cathode testing platform to rotate, a plurality of cold cathode assemblies capable of being fixed on the cold cathode testing platform, and a negative high-voltage cable assembly used for providing negative high voltage for the plurality of cold cathode assemblies on the cold cathode testing platform; the grid lifting assembly comprises a plurality of grid lifting brackets arranged on the loading platform, a lifting driving mechanism used for driving each grid lifting bracket to lift, and a grid fixed on the grid lifting brackets; the liquid cooling anode assembly comprises an anode support arranged on the carrying platform, an anode positioning piece fixed at the top of the anode support, an anode fixed on the anode positioning piece, and a positive high-voltage cable assembly for providing positive high voltage for the anode, wherein a central shaft of the anode, a central shaft of the grid and a central shaft of a cold cathode in the cold cathode assembly are positioned at the same axial position; the focal spot test assembly comprises a pinhole diaphragm arranged on the object carrying platform and positioned on one side of the anode positioning piece, and an X-ray camera arranged outside the vacuum cavity and positioned on the same horizontal line with the pinhole diaphragm.
As a further improvement of the invention, the vacuum cavity is a hollow cavity structure formed by symmetrically arranging two hemispheres at two ends of a cylinder respectively, the cabin door is arranged at the front part of the vacuum cavity, and an observation window is arranged on the cabin door; and a camera fixing clamp for fixing the X-ray camera is arranged outside the observation window.
As a further improvement of the invention, the cold cathode test platform is in a disc shape, and a plurality of cathode mounting clamping grooves are uniformly arranged on the periphery of the cold cathode test platform.
As a further improvement of the invention, the cold cathode component comprises a cathode base, a focusing electrode and a cold cathode, wherein a cathode base clamping groove is arranged in the middle of the cathode base and matched with a cathode mounting clamping groove on the platform support; the center of the top of the cathode base is provided with a cathode positioning groove, the bottom of the cold cathode is clamped in the cathode positioning groove, and the focusing electrode is buckled on the periphery of the cold cathode.
As a further improvement of the present invention, the object carrying platform is arranged on an object carrying lifting support, an object carrying lifting motor is fixed in the vacuum cavity, and the object carrying lifting motor can drive the object carrying platform to lift through the object carrying lifting support.
As a further improvement of the present invention, the rotation driving assembly includes a rotation motor fixed on the object carrying platform and a cold cathode platform supporting frame movably penetrating the object carrying platform, the rotation motor can drive the cathode platform supporting frame to rotate by a set angle relative to the object carrying platform, and the cold cathode testing platform is fixed on the upper end portion of the cathode platform supporting frame.
As a further improvement of the present invention, the lifting driving mechanism includes a lifting motor fixed on the carrying platform, the grid lifting support is movably arranged on the carrying platform, and the lifting motor is in transmission connection with the bottom of the grid lifting support.
As a further improvement of the invention, the anode comprises quick-plug connectors, an anode base, a replaceable anode and a target material, wherein the two quick-plug connectors are fixed on one end face of the anode base, the replaceable anode is fixed on the other end face of the anode base through threads, and the target material is brazed at the center of the replaceable anode.
As a further improvement of the invention, the bottom of the vacuum cavity is provided with at least 1 vacuum gauge, 1 air inflation/deflation pressure relief pipeline and 5 vacuum electrodes, and the at least 5 vacuum electrodes are respectively connected with a negative high-voltage power supply, a positive high-voltage power supply and a zero line as required; the vacuum cavity is of a double-layer structure, and a temperature control system and a vacuum pumping system are arranged on the vacuum cavity.
As a further improvement of the invention, a liquid cooling pipeline is arranged on the vacuum cavity and connected to the liquid cooling anode assembly.
The beneficial effects of the invention are: the X-ray tube performance testing mechanism has the characteristics of adjustable cathodes and grids and replaceable anodes, can be used for verifying various simulation data of the cold cathode X-ray tube before preparation, can conveniently adjust various parameters of the performance of the X-ray tube under the condition of not preparing the tube, and can also be used for testing the cold cathode performance of different batches under different preparation processes such as a graphite arc method, a solid phase pyrolysis method, chemical vapor deposition, pyrolytic polymer, silk-screen printing and the like. The characteristics can greatly shorten the development time of the cold cathode X-ray tube and save the tube manufacturing verification cost; and the quality of the cold cathode is checked, and the working stability and the yield of the cold cathode X-ray tube are improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic view of the structure of FIG. 2 from another view angle;
FIG. 4 is a schematic view of a cold cathode assembly according to the present invention;
FIG. 5 is a schematic cross-sectional view of FIG. 4;
FIG. 6 is a schematic diagram of a liquid-cooled anode assembly according to the present invention;
FIG. 7 is a schematic cross-sectional view of FIG. 6;
fig. 8 is a schematic view of the focal spot test of the present invention.
The following description is made with reference to the accompanying drawings:
1-vacuum chamber; 11-cabin door;
12-carrier platform; 13-observation window;
121-carrying lifting support; 122-stage Lift Motor;
2-cold cathode test assembly; 21-Cold cathode test platform;
211-cathode mounting clamping groove; 22-a rotary drive assembly;
221-rotating electrical machines; 222-cold cathode platform support;
23-Cold cathode Assembly; 231 — cathode base;
232-focus pole; 233 — cold cathode;
2311-cathode base clamping groove; 2312-positioning groove for cathode;
24-negative high voltage cable assembly; 3-grid lifting component;
31-grid lifting support; 32-lifting driving mechanism;
321-lifting motor; 33-a grid;
4-liquid-cooled anode assembly; 41-anode holder;
42-anode location member; 43-an anode;
431-quick connector; 432-anode base;
433-replaceable anode; 434-target material;
44-positive high voltage cable assembly; 5-focal spot testing assembly;
51-pinhole diaphragm; 52-X-ray camera;
53-Camera mounting fixture.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Referring to fig. 1-3, the X-ray tube performance testing mechanism according to the present invention mainly includes a vacuum chamber 1, a cold cathode testing assembly 2, a grid lifting assembly 3, a liquid cooling anode assembly 4, and a focal spot testing assembly 5.
The vacuum cavity 1 is in a capsule shape, that is, a hollow cavity structure formed by symmetrically arranging two symmetrical hemispheres at two ends of a cylinder respectively, and a loading platform 12 for carrying a test component is arranged in the vacuum cavity. The front part of the vacuum cavity is provided with a cabin door 11 for taking and placing the tested X-ray tube or replacing the target material and the like. The observation window 13 is arranged on the hatch 11, which is convenient for observing the real-time situation in the vacuum cavity.
The vacuum cavity body 1 bottom is equipped with 5 at least vacuum electrodes, inserts 1 vacuometer and 1 and fills gassing pressure release pipeline, and 5 vacuum electrodes insert negative high voltage power supply, positive high voltage power supply and zero line according to the demand respectively, and the vacuometer is used for detecting the vacuum in the vacuum cavity body 1, fills other messenger's products of other inerts such as high-purity nitrogen gas or argon gas in can being used for filling into the vacuum cavity body and is in other protection ranges of inertia all the time.
The high vacuum degree temperature control assembly comprises a vacuum pumping system for controlling the vacuum degree of the vacuum cavity 1, a heating system for controlling the temperature of the vacuum cavity and a liquid cooling system (not marked in the figure).
The vacuum pumping system consists of a backing pump, a molecular pump, an electric control pneumatic gate valve and a CF sealing flange. The backing pump and the molecular pump are combined together to provide a high vacuum degree environment, and the vacuum degree is kept to be less than or equal to 10 under the closed state of the system-6Pa, connecting a pipeline between the two pumps with the vacuum gauge; the electrically controlled pneumatic gate valve is responsible for the connection and disconnection of the pipeline between the pump and the vacuum cavity, so that the pressure rise rate is less than 4 multiplied by 10-2Pa/h。
The heating system adopts modes of baking lamps or heating belts and the like, can heat the vacuum cavity and maintain the temperature to 300 ℃, is used for degassing the system, improves the cold-state vacuum degree of the vacuum cavity 1, enables the cold cathode placed in the vacuum cavity to be in an excellent emission state, and is convenient for testing the performance of the cold cathode.
The liquid cooling system is provided with a liquid cooling unit and at least three sets of cooling pipelines which can be independently opened/closed. One set is used for cooling circulation of the vacuum cavity, one set is used for cooling the anode, and the last set is used for cooling the molecular pump. The outer shell of the vacuum cavity 1 is of a double-layer structure, and a cooling pipeline of the liquid cooling system is arranged in the double-layer structure.
Wherein, objective platform 12 is located on an object lifting support 121, be fixed with objective table elevator motor 122 in the vacuum cavity, objective table elevator motor 122 can pass through objective lifting support 121 drives objective platform goes up and down, for example belt drive or gear drive mechanism. When carrying platform need carry out lifting operation promptly, drive thing lifting support 121 through objective table elevator motor 122 and go up and down, and carrying platform 12 is fixed in on thing lifting support 121 to realize carrying platform 12's lift adjustment.
The cold cathode testing assembly 2 comprises a rotatable cold cathode testing platform 21 arranged on the loading platform, a rotary driving assembly 22 used for driving the cold cathode testing platform to rotate, a plurality of cold cathode assemblies 23 capable of being fixed on the cold cathode testing platform 21, and a negative high-voltage cable assembly 24 used for providing negative high voltage for the plurality of cold cathode assemblies 23 on the cold cathode testing platform 21.
The cold cathode testing platform 21 is disc-shaped, and a plurality of cathode mounting clamping grooves 211 are uniformly arranged on the periphery of the cold cathode testing platform and used for positioning the cold cathode assembly 23. The cold cathode assembly 23 includes a cathode base 231, a focusing electrode 232 and a cold cathode 233, wherein a cathode base slot 2311 is formed in the middle of the cathode base to match with a cathode mounting slot on the platform support 21. A plurality of cold cathode assemblies 23 to be detected are clamped into each cathode mounting clamping groove 211 on the disc-shaped cold cathode testing platform 21 through cathode base clamping grooves 2311 arranged in the middle of each cathode base, so that a batch of cold cathode assemblies 23 to be detected are positioned. The center of the top of the cathode base 231 is provided with a cathode positioning slot 2312, the bottom of the cold cathode 233 is clamped into the cathode positioning slot 2312, and the focusing electrode 232 is buckled on the periphery of the cold cathode 233.
The rotary driving assembly 22 includes a rotary motor 221 fixed on the object stage 12 and a cold cathode platform supporting frame 222 movably penetrating on the object stage 12, the rotary motor 221 can drive the cold cathode platform supporting frame 222 to rotate by a set angle relative to the object stage 12, and the cold cathode testing platform is fixed on the upper end of the cold cathode platform supporting frame 222. The rotating motor 221 is configured to drive the cathode platform support 222 to rotate, and further drive the cold cathode testing platform 21 to rotate, so as to implement testing of each set of cold cathode assemblies 23 fixed on the cold cathode testing platform 21. And the loading platform 12 can be lifted, so that the height and the angle of each group of cold cathode assemblies 23 can be adjusted.
The gate lifting assembly 3 includes a plurality of gate lifting brackets 31 disposed on the loading platform 12, a lifting driving mechanism 32 for driving each gate lifting bracket to lift, and a gate 33 fixed on the gate lifting bracket 31. The lifting driving mechanism 32 comprises a lifting motor 321 fixed on the carrying platform 12, the gate lifting support 31 is movably arranged on the carrying platform 12, and the lifting motor 321 is in transmission connection with the bottom of the lifting support 31.
This embodiment is provided with 3 sets of grid lifting brackets 31, which can fix 3 different types and models of grids 33. When the height of the grid relative to the loading platform 12, that is, the height of the grid relative to the cold cathode assembly 23, needs to be adjusted, the lifting motor 321 of the lifting driving mechanism 32 can drive the grid lifting support 31 to lift, so that the lifting adjustment of the grid 33 is realized, and the relative height between the grid 33 and the cold cathode assembly 23 can be adjusted.
The liquid cooling anode assembly 4 includes an anode support 41 disposed on the loading platform, an anode positioning member 42 fixed on the top of the anode support, an anode 43 fixed on the anode positioning member 42, and a positive high voltage cable assembly 44 for providing positive high voltage for the anode 43, wherein the central axis of the anode 43 is located on the same axis as the central axis of the gate 33 and the central axis of the cold cathode in the cold cathode assembly 23.
The anode 43 comprises a quick-connection plug 431, an anode base 432, a replaceable anode 433 and a target 434, wherein the two quick-connection plugs 431 are fixed on one end surface of the anode base 432, the replaceable anode 433 is fixed on the other end surface of the anode base 432 through threads, and the target 434 is brazed at the center of the replaceable anode 433. The anode is provided with a liquid inlet and outlet pipeline to form an anode cooling water path.
Wherein, focal spot test assembly 5 is including locating the objective platform is located the pinhole diaphragm 51 of anode location spare 42 one side, and locate outside the vacuum cavity and with the pinhole diaphragm is located the X ray camera 52 on the same horizontal line, and the observation window 13 outside of vacuum cavity is equipped with camera mounting fixture 53, and X ray camera 52 is fixed to be located on this camera mounting fixture 53. The pinhole diaphragm 51 is fixed on the object stage by a bracket. One end face of the target 434 is arranged at an angle of 5-45 degrees by arranging the replaceable anode 433, so that electrons emitted by the cold cathode on the cold cathode assembly 23 bombard the anode target along the vertical direction, the target generates effective light spots of X-ray in the horizontal direction, and the effective light spots just reach the X-ray camera 52 through the pinhole diaphragm 51, so that the focal spot test is facilitated.
The using method and the testing steps of the X-ray tube performance testing mechanism are explained in detail as follows:
step 1: installing a cold cathode, an anode and a grid to be tested:
the cold cathode 233 is placed in the cathode positioning groove 2312, the focusing electrode 232 is covered on the cold cathode 233, and the plurality of cold cathode assemblies 23 which are assembled are respectively and correspondingly slid into the cold cathode testing platform 21 along the cathode mounting clamping groove 211.
The required 3 grids are respectively fixed on the 3 grid lifting brackets 31 through screws.
Two liquid-cooled quick connectors 431 are screwed into the screw holes of the anode base 432 through the hole sites of the anode support 41, so that the two liquid-cooled quick connectors are fixed on the anode support 41, and the replaceable anode 43 is screwed into the anode base 432. The position of the replaceable anode inclined plane is adjusted to enable the X-ray reflecting surface to face the pinhole diaphragm, and the height of the anode is adjusted to enable the effective focus, the diaphragm central hole and the observation window center to be located on the same axis.
And fixing the X-ray camera on a camera fixing clamp, and adjusting the camera fixing clamp to be fixed on the corresponding screw hole to enable the center of the image of the X-ray camera and the center of the observation window 13 to be in the same axis.
Step 2: an access circuit:
and connecting each component into a corresponding circuit as required, simultaneously opening the X-ray tube performance testing system, opening the corresponding vacuum pumping system, heating system and liquid cooling system, controlling the vacuum furnace to heat and stabilize to 300 ℃ through the X-ray tube performance testing system when the vacuum degree is stable and less than or equal to 10-6Pa, maintaining for 1 hour for degassing, closing the heating system after degassing is finished, and cooling to room temperature to prepare for testing.
And step 3: and (3) performance testing:
the output power of the positive/negative high-voltage equipment is adjusted through the X-ray tube performance testing system, the I-V curve recorder obtains current and voltage characteristic data corresponding to the cold cathode, a curve graph is generated through PC (personal computer) processing, and relevant data are stored.
And (3) performing focus test, namely enabling electrons generated by the cold cathode to pass through a grid hole, hitting an anode target to generate X-rays with effective focus, passing through a pinhole diaphragm, hitting a receiver of an X-ray camera through a glass observation window on a cabin door, feeding back the X-rays to a computer through electric signals, analyzing and researching the X-ray with the computer to generate a curve graph of the ray density distribution at the focus of the X-ray tube, and obtaining the focus size of the X-ray tube according to the curve graph.
And repeating the steps by switching different cathodes to obtain the performance data of each cathode and different tube types.
After the test is finished, the corresponding high-voltage circuit is controlled to be closed, the discharge action is carried out, the pressure relief pipeline is opened, inert gases such as N2 or argon are filled, and after the internal and external atmospheric pressures are balanced, the cabin door can be opened to take out the cold cathode.
The above testing steps can be adjusted correspondingly according to the needs.
Therefore, the X-ray tube performance testing mechanism has the characteristics that the cathode and the grid can be adjusted, the anode can be replaced, the X-ray tube performance testing mechanism can be used for verifying various simulation data of the cold cathode X-ray tube before preparation, various parameters of the X-ray tube performance can be conveniently adjusted under the condition that a tube is not required to be prepared, and the cold cathode performance of different batches under different preparation processes such as a graphite arc method, a solid phase pyrolysis method, chemical vapor deposition, a pyrolytic polymer and screen printing can be tested. The characteristics can greatly shorten the development time of the cold cathode X-ray tube and save the tube manufacturing verification cost; and the quality of the cold cathode is checked, and the working stability and the yield of the cold cathode X-ray tube are improved.
In the previous description, numerous specific details were set forth in order to provide a thorough understanding of the present invention. The foregoing description is only a preferred embodiment of the invention, which can be embodied in many different forms than described herein, and therefore the invention is not limited to the specific embodiments disclosed above. And that those skilled in the art may, using the methods and techniques disclosed above, make numerous possible variations and modifications to the disclosed embodiments, or modify equivalents thereof, without departing from the scope of the claimed embodiments. Any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present invention are within the scope of the technical solution of the present invention.
Claims (10)
1. The utility model provides an X-ray tube capability test mechanism, includes vacuum cavity (1), is equipped with hatch door (11) and inside on this vacuum cavity (1) and is equipped with objective platform (12) that can carry out lift adjustment, its characterized in that: the cold cathode testing device is characterized in that a cold cathode testing assembly (2), a grid lifting assembly (3), a liquid cooling anode assembly (4) and a focal spot testing assembly (5) are arranged on the carrying platform (12), the cold cathode testing assembly (2) comprises a rotatable cold cathode testing platform (21) arranged on the carrying platform, a rotary driving assembly (22) used for driving the cold cathode testing platform to rotate, a plurality of cold cathode assemblies (23) capable of being fixed on the cold cathode testing platform (21), and a negative high-voltage cable assembly (24) used for providing negative high voltage for the plurality of cold cathode assemblies (23) on the cold cathode testing platform (21); the grid lifting assembly (3) comprises a plurality of grid lifting brackets (31) arranged on the loading platform, a lifting driving mechanism (32) used for driving each grid lifting bracket to lift, and a grid (33) fixed on the grid lifting brackets (31); the liquid cooling anode assembly (4) comprises an anode support (41) arranged on the loading platform, an anode positioning piece (42) fixed at the top of the anode support, an anode (43) fixed on the anode positioning piece (42), and a positive high-voltage cable assembly (44) for providing positive high voltage for the anode (43), wherein the central shaft of the anode, the central shaft of the grid (33) and the central shaft of a cold cathode in the cold cathode assembly (23) are positioned at the same axial line position; focal spot test assembly (5) is including locating on the objective platform and being located pinhole diaphragm (51) of anode location spare (42) one side to and locate outside the vacuum cavity and with pinhole diaphragm is located X ray camera (52) on same water flat line.
2. The X-ray tube performance testing mechanism of claim 1, wherein: the vacuum cavity is a hollow cavity structure formed by symmetrically arranging two hemispheres at two ends of a cylinder respectively, the cabin door (11) is arranged at the front part of the vacuum cavity, and an observation window (13) is arranged on the cabin door; and a camera fixing clamp (53) for fixing the X-ray camera (52) is arranged outside the observation window (13).
3. The X-ray tube performance testing mechanism of claim 1, wherein: the cold cathode test platform (21) is disc-shaped, and a plurality of cathode mounting clamping grooves (211) are uniformly formed in the periphery of the cold cathode test platform.
4. The X-ray tube performance testing mechanism of claim 3, wherein: the cold cathode assembly (23) comprises a cathode base (231), a focusing electrode (232) and a cold cathode (233), wherein a cathode base clamping groove (2311) is formed in the middle of the cathode base and matched with a cathode mounting clamping groove (211) on the platform support; the center of the top of the cathode base (231) is provided with a cathode positioning groove (2312), the bottom of the cold cathode (233) is clamped into the cathode positioning groove (2312), and the focusing electrode (232) is buckled on the periphery of the cold cathode (233).
5. The X-ray tube performance testing mechanism of claim 1, wherein: the loading platform is arranged on the loading lifting support (121), a loading platform lifting motor (122) is fixed in the vacuum cavity, and the loading platform lifting motor (122) can be driven by the loading lifting support (121) to lift.
6. The X-ray tube performance testing mechanism of claim 5, wherein: the rotary driving assembly (22) comprises a rotary motor (221) fixed on the object carrying platform (12) and a cold cathode platform supporting frame (222) movably penetrating on the object carrying platform (12), the rotary motor (221) can drive the cathode platform supporting frame (222) to rotate for a set angle relative to the object carrying platform (12), and the cold cathode testing platform is fixed on the upper end portion of the cathode platform supporting frame (222).
7. The X-ray tube performance testing mechanism of claim 5, wherein: the lifting driving mechanism (32) comprises a lifting motor (321) fixed on the carrying platform (12), the grid lifting support (31) is movably arranged on the carrying platform (12), and the lifting motor (321) is in transmission connection with the bottom of the grid lifting support (31).
8. The X-ray tube performance testing mechanism of claim 1, wherein: the anode (43) comprises quick-connection plugs (431), an anode base (432), a replaceable anode (433) and a target (434), wherein the two quick-connection plugs (431) are fixed on one end face of the anode base (432), the replaceable anode (433) is fixed on the other end face of the anode base (432) through threads, and the target (434) is brazed at the center of the replaceable anode (433).
9. The X-ray tube performance testing mechanism of claim 1, wherein: the bottom of the vacuum cavity is provided with at least 1 vacuum gauge, 1 air charging and discharging pressure relief pipeline and 5 vacuum electrodes, and the at least 5 vacuum electrodes are respectively connected with a negative high-voltage power supply, a positive high-voltage power supply and a zero line as required; the vacuum cavity is of a double-layer structure, and a temperature control system and a vacuum pumping system are arranged on the vacuum cavity.
10. The X-ray tube performance testing mechanism of claim 1, wherein: and a liquid cooling pipeline connected to the liquid cooling anode assembly (4) is arranged on the vacuum cavity.
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