CN116224893A - Control system of exhaust equipment for X-ray tube processing - Google Patents
Control system of exhaust equipment for X-ray tube processing Download PDFInfo
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- CN116224893A CN116224893A CN202211133169.5A CN202211133169A CN116224893A CN 116224893 A CN116224893 A CN 116224893A CN 202211133169 A CN202211133169 A CN 202211133169A CN 116224893 A CN116224893 A CN 116224893A
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- ray tube
- control cabinet
- plc control
- protection unit
- temperature
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- 238000012545 processing Methods 0.000 title claims abstract description 13
- 238000001816 cooling Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 5
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 208000028659 discharge Diseases 0.000 description 11
- 238000009529 body temperature measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002498 deadly effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
- G05B19/054—Input/output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/10—Plc systems
- G05B2219/11—Plc I-O input output
- G05B2219/1103—Special, intelligent I-O processor, also plc can only access via processor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
The invention discloses a control system of an exhaust device for processing an X-ray tube, which comprises a PLC control cabinet and an X-ray tube electrically connected with the PLC control cabinet, wherein a vacuum degree control protection unit, a temperature control protection unit and an external discharge protection unit are arranged between the X-ray tube and the PLC control cabinet, so that the X-ray tube can be timely fed back and protected through the vacuum degree control protection unit, the temperature control protection unit and the external discharge protection unit for avoiding the X-ray tube from being subjected to fatal damage aiming at abnormal conditions of vacuum degree convergence of the X-ray tube, internal ignition of the X-ray tube, external discharge of the X-ray tube and overhigh temperature.
Description
Technical Field
The invention relates to the technical field of X-ray tube processing, in particular to a control system of exhaust equipment for X-ray tube processing.
Background
The X-ray tube is a vacuum diode operating at high voltage and comprises two electrodes: one is a filament for emitting electrons as a cathode and the other is a target for receiving electron bombardment as an anode, both of which are sealed in a high vacuum glass or metal enclosure.
In the prior art, the vacuum degree inside the X-ray tube is realized through an exhaust system, when the tube core current and voltage are input into the X-ray tube for targeting and heating, the voltage difference between two poles of the X-ray tube is up to hundreds of kilovolts, when high-speed electrons bombard an anode disk, 99% of energy generated is converted into heat energy, cooling treatment is needed, the cooling treatment is carried out by heat radiation and heat transfer generated by the anode target disk of the X-ray tube to the tube wall in the system, the cooling is carried out through an external fan, the impurity gas released at the high temperature is discharged from the X-ray tube through an exhaust pipeline by a vacuum pump, an operator can intuitively acquire the vacuum degree and the temperature data of the X-ray tube by observing the display data of a program panel output by a PLC (programmable logic controller) so as to facilitate real-time monitoring, but the following defects exist in the actual X-ray tube processing process, the abnormal conditions such as air leakage or breakage condition, the external discharge and the over-high temperature cannot be timely protected, the corresponding valve closing or the loading action is needed to be judged and carried out, and the corresponding valve closing action is directly carried out, so that the production cost of the X-ray tube is directly damaged and the production cost is increased.
Disclosure of Invention
The present invention is directed to a control system for an exhaust apparatus for processing an X-ray tube, which is used for solving the problems set forth in the background art.
The aim of the invention can be achieved by the following technical scheme:
the control system of the exhaust equipment for the X-ray tube processing comprises a PLC control cabinet and an X-ray tube electrically connected with the PLC control cabinet, wherein a vacuum degree control protection unit, a temperature control protection unit and an external discharge protection unit are arranged between the X-ray tube and the PLC control cabinet;
the vacuum degree control protection unit receives a vacuum pressure signal on an exhaust pipeline of the X-ray tube through a vacuum gauge, and the vacuum gauge is used for outputting the vacuum pressure signal to an electrically connected PLC control cabinet;
the temperature control protection unit detects temperature signals of the rotating bearing at the end part of the X-ray tube in a non-contact mode through the single-point detection head, detects surface temperature signals of an anode target disc in the X-ray tube in a non-contact mode through the infrared temperature measuring gun, and the single-point detection head and the infrared temperature measuring gun are used for transmitting the temperature signals to the PLC control cabinet;
the outside-tube discharging protection unit is electrically connected with the PLC control cabinet through the standby PLC control cabinet, and when the standby PLC control cabinet receives the signal of the PLC control cabinet and is overtime, the standby PLC control cabinet is electrically connected with the X-ray tube and the vacuum pump to work.
As a further scheme of the invention: the vacuum degree control protection unit further comprises an electric air valve arranged on the exhaust pipeline of the X-ray tube, and the electric air valve is respectively and electrically connected with the PLC control cabinet and the standby PLC control cabinet.
As a further scheme of the invention: the temperature control protection unit further comprises a temperature sensor for monitoring the anode target plate, and the temperature sensor is electrically connected with the PLC control cabinet and the standby PLC control cabinet.
As a further scheme of the invention: the outside of X-ray tube is provided with the fan that is used for driving coil cooling, PLC switch board and reserve PLC switch board are connected to the fan electricity.
The invention has the beneficial effects that:
(1) The vacuum degree control protection unit, the temperature control protection unit and the external discharge protection unit are arranged between the X-ray tube and the PLC control cabinet, so that the X-ray tube can be timely fed back and protected through the vacuum degree control protection unit, the temperature control protection unit and the external discharge protection unit aiming at abnormal conditions of vacuum degree convergence of the X-ray tube, internal ignition of the X-ray tube, external discharge of the X-ray tube and overhigh temperature, and the X-ray tube can be prevented from being deadly damaged;
(2) The vacuum degree control protection unit monitors and protects the vacuum degree of the X-ray tube through the vacuum gauge tube and the electric air valve, so that the risk of internal ignition caused by excessive diluted air in the X-ray tube can be avoided, and meanwhile, the damage of the vacuum pump caused by the fact that damaged parts of the X-ray tube enter the vacuum pump can be avoided;
(3) The temperature control protection unit is used for monitoring and protecting the temperature of the X-ray tube through the single-point detector head and the temperature sensor, so that the burning loss of the rotating bearing due to the overhigh temperature can be avoided, and meanwhile, the burning loss of the X-ray tube of the anode target disc due to the overhigh temperature can be avoided;
(4) The outside-tube discharge protection unit is arranged to carry out discharge protection on the X-ray tube through the standby PLC control cabinet, when the standby PLC control cabinet receives the overtime condition of the signals of the PLC control cabinet, the PLC control cabinet is considered to be in an overtime dead halt state, and the standby PLC control cabinet drives the vacuum pump and the X-ray tube to work or shut down at the moment, so that the vacuum pump and the X-ray tube are prevented from being damaged.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a block diagram of the functional units of the present invention;
fig. 2 is a block diagram showing a schematic configuration of each functional unit of the present invention.
In the figure: 100. an X-ray tube; 110. an anode target plate; 120. a driving coil; 200. an electric air valve; 300. a vacuum pump; 400. a vacuum gauge; 500. a single point detector head; 600. an infrared temperature measuring gun; 700. a PLC control cabinet; 800. a standby PLC control cabinet; 900. a fan.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-2, the invention discloses a control system of an exhaust device for processing an X-ray tube, which comprises a PLC control cabinet 700 and an X-ray tube 100 electrically connected with the PLC control cabinet 700, wherein the PLC control cabinet 700 drives the X-ray tube 100 to work, in order to ensure that the X-ray tube 100 works stably under a high voltage condition, the X-ray tube 100 needs to be subjected to exhaust treatment, the PLC control cabinet 700 drives a vacuum pump 300 to work, so that the vacuum pump 300 pumps out internal gas through an exhaust pipeline of the X-ray tube 100, thereby ensuring the internal working vacuum degree of the X-ray tube 100, a vacuum degree control protection unit is arranged between the X-ray tube 100 and the PLC control cabinet 700, the vacuum degree control protection unit receives a vacuum pressure signal on an exhaust pipeline of the X-ray tube 100 through a vacuum gauge 400, and the vacuum gauge 400 is used for outputting the vacuum pressure signal to the electrically connected PLC control cabinet 700; in the process of working and exhausting the X-ray tube 100, the X-ray tube 100 is diluted to emit gas through the exhaust pipeline due to the impurity gas released at the high temperature of the internal target of the X-ray tube 100, so that the internal vacuum degree of the X-ray tube 100 is reduced, the vacuum pressure signal on the exhaust pipeline of the X-ray tube 100 is monitored through the vacuum gauge 400, when the monitored vacuum pressure signal is lower than 4Pa, the PLC control cabinet 700 shuts down the voltage input of the load end X-ray tube 100, and the ionization ignition risk of the internal part of the X-ray tube 100 under high voltage due to excessive diluted gas in the X-ray tube 100 can be avoided.
In this embodiment, the vacuum control protection unit further includes an electric air valve 200 disposed on the exhaust pipeline of the X-ray tube 100, the electric air valve 200 is electrically connected to the PLC control cabinet 700, the exhaust pipeline of the X-ray tube 100 can be controlled to be closed or opened by the disposed electric air valve 200, when the X-ray tube 100 works normally, the electric air valve 200 is in an open state, when the vacuum gauge 400 monitors that the vacuum pressure signal on the exhaust pipeline of the X-ray tube 100 is instantaneously decompressed, the pressure loss may be due to the fact that the X-ray tube 100 is in a broken state, the PLC control cabinet 700 drives the electric air valve 200 to be closed, so as to avoid the damage of the vacuum pump 300 caused by the broken component of the X-ray tube 100 entering the vacuum pump 300, and meanwhile, the PLC control cabinet 700 stops the input current and voltage of the X-ray tube 100.
The temperature control protection unit is arranged between the X-ray tube 100 and the PLC control cabinet 700, the temperature control protection unit detects temperature signals of the rotating bearing at the end part of the X-ray tube 100 in a non-contact mode through the single-point detection head 500, detects surface temperature signals of the anode target plate 110 in the X-ray tube 100 in a non-contact mode through the infrared temperature measurement gun 600, the single-point detection head 500 and the infrared temperature measurement gun 600 are used for transmitting the temperature signals to the PLC control cabinet 700, the temperature signals of the rotating bearing at the end part of the X-ray tube 100 can be monitored in real time through the single-point detection head 500, the temperature signals of the anode target plate 110 in the X-ray tube 100 can be monitored in real time through the infrared temperature measurement gun 600, data can be displayed through the program panel output by the PLC control cabinet 700, and therefore the rotating bearing temperature data of the X-ray tube 100 are intuitively obtained, and when the temperature of the rotating bearing is too high, the PLC control cabinet 700 stops the rotating bearing of the X-ray tube 100.
In this embodiment, the temperature control protection unit further includes a temperature sensor for monitoring the anode target plate 110, the temperature sensor is electrically connected with the PLC control cabinet 700, the temperature sensor is set to monitor the temperature data raised by the anode target plate 110 in real time, and when the temperature monitored by the temperature sensor exceeds 1350 ℃, the PLC control cabinet 700 stops the operation of the anode target plate 110 of the X-ray tube 100 for impacting the electron beam.
An external discharge protection unit is arranged between the X-ray tube 100 and the PLC control cabinet 700, the external discharge protection unit is electrically connected with the PLC control cabinet 700 through the standby PLC control cabinet 800, when the standby PLC control cabinet 800 receives a signal overtime condition of the PLC control cabinet 700, the standby PLC control cabinet 800 is electrically connected with the X-ray tube 100 and the vacuum pump 300 to work, when the X-ray tube 100 inputs high voltage to work, the insulation requirement of the end part of the X-ray tube 100 is high due to the fact that the X-ray tube 100 needs to be loaded with a few kilovolts of high voltage, but when the X-ray tube 100 actually works, the insulation of the end part tube core position of the driving coil 120 and the end part of the X-ray tube 100 is insufficient, the discharge risk is generated, and the external discharge high voltage current flows back to the PLC control cabinet 700 through a wire, so that the PLC control cabinet 700 is crashed, the vacuum pump 300 is stopped, and the X-ray tube 100 is overheated and damaged when the PLC control cabinet 700 is seriously crashed, in the prior art, the driving coil 120 is generally provided with a ground wire as the leakage protection, but serious consequences caused by the failure of the crashing of the PLC control cabinet 700 are avoided; by setting the standby PLC control cabinet 800, the standby PLC control cabinet 800 sets a timeout value of 100, and reduces 1 every 0.01ms or one clock period, a new signal of the received PLC control cabinet 700 is reset to 100, if the signal value of the received PLC control cabinet 700 is not received within the timeout value, the timeout value is smaller than 1, the PLC control cabinet 700 is considered to be in a timeout dead state, and at the moment, the standby PLC control cabinet 800 drives the vacuum pump 300 and the X-ray tube 100 to operate or shut down, so that the vacuum pump 300 and the X-ray tube 100 are prevented from being damaged.
In this embodiment, the electric air valve 200 is electrically connected to the standby PLC control cabinet 800, and the standby PLC control cabinet 800 drives the electric air valve 200 to open or close, so as to provide protection for the exhaust pipeline of the X-ray tube 100.
In this embodiment, the temperature sensor is electrically connected to the standby PLC control cabinet 800, and the standby PLC control cabinet 800 also receives the temperature value monitored by the temperature sensor, and plays a role in protecting the anode target plate 110 of the X-ray tube 100 from impacting the electron beam.
In this embodiment, a fan 900 for cooling the driving coil 120 is disposed outside the X-ray tube 100, the fan 900 is electrically connected to the PLC control cabinet 700 and the standby PLC control cabinet 800, and the disposed fan 900 is driven to operate or shut down by the PLC control cabinet 700 and the standby PLC control cabinet 800 respectively, so as to perform external cooling treatment on the driving coil 120 of the X-ray tube 100.
The foregoing describes one embodiment of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (4)
1. The control system of the exhaust equipment for the X-ray tube processing comprises a PLC control cabinet (700) and an X-ray tube (100) electrically connected with the PLC control cabinet (700), and is characterized in that a vacuum degree control protection unit, a temperature control protection unit and an external discharge protection unit are arranged between the X-ray tube (100) and the PLC control cabinet (700);
the vacuum degree control protection unit receives a vacuum pressure signal on an exhaust pipeline of the X-ray tube (100) through a vacuum gauge tube (400), and the vacuum gauge tube (400) is used for outputting the vacuum pressure signal to an electrically connected PLC control cabinet (700);
the temperature control protection unit detects temperature signals of a rotating bearing at the end part of the X-ray tube (100) in a non-contact mode through the single-point detection head (500), detects surface temperature signals of an anode target disc (110) in the X-ray tube (100) in a non-contact mode through the infrared temperature measuring gun (600), and the single-point detection head (500) and the infrared temperature measuring gun (600) are used for transmitting the temperature signals to the PLC control cabinet (700);
the outside-tube discharge protection unit is electrically connected with the PLC control cabinet (700) through the standby PLC control cabinet (800), and when the standby PLC control cabinet (800) receives a signal of the PLC control cabinet (700) and is overtime, the standby PLC control cabinet (800) is electrically connected with the X-ray tube (100) and the vacuum pump (300) to work.
2. The control system of an exhaust apparatus for X-ray tube processing according to claim 1, wherein the vacuum control protection unit further comprises an electric air valve (200) disposed on an exhaust pipe of the X-ray tube (100), and the electric air valve (200) is electrically connected to the PLC control cabinet (700) and the standby PLC control cabinet (800), respectively.
3. The control system of an exhaust apparatus for X-ray tube processing according to claim 1, wherein the temperature control protection unit further comprises a temperature sensor for monitoring the anode target plate (110), and the temperature sensor is electrically connected to the PLC control cabinet (700) and the backup PLC control cabinet (800).
4. The control system of an exhaust apparatus for X-ray tube processing according to claim 1, wherein a fan (900) for cooling the driving coil (120) is provided outside the X-ray tube (100), and the fan (900) is electrically connected to the PLC control cabinet (700) and the backup PLC control cabinet (800).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211133169.5A CN116224893A (en) | 2022-09-16 | 2022-09-16 | Control system of exhaust equipment for X-ray tube processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211133169.5A CN116224893A (en) | 2022-09-16 | 2022-09-16 | Control system of exhaust equipment for X-ray tube processing |
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| Publication Number | Publication Date |
|---|---|
| CN116224893A true CN116224893A (en) | 2023-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211133169.5A Pending CN116224893A (en) | 2022-09-16 | 2022-09-16 | Control system of exhaust equipment for X-ray tube processing |
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Citations (12)
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|---|---|---|---|---|
| JPH0982227A (en) * | 1995-09-07 | 1997-03-28 | Toshiba Electron Eng Corp | Evacuation method and device for x-ray tube |
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2022
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