CN202421509U - Cold cathode auxiliary power spectrum system - Google Patents
Cold cathode auxiliary power spectrum system Download PDFInfo
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- CN202421509U CN202421509U CN2010205366261U CN201020536626U CN202421509U CN 202421509 U CN202421509 U CN 202421509U CN 2010205366261 U CN2010205366261 U CN 2010205366261U CN 201020536626 U CN201020536626 U CN 201020536626U CN 202421509 U CN202421509 U CN 202421509U
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- power spectrum
- cold cathode
- cathode auxiliary
- auxiliary power
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Provided is a cold cathode auxiliary power spectrum system that has a cathode luminescence instrument fixed upon a microscope and is connected with a detector via a power spectrum detector accessory. Meanwhile, the detector is connected with a computer. The cold cathode auxiliary power spectrum system is characterized in that: a power spectrum detector accessory is added to the position of an observation window of a cathode luminescence vacuum chamber; and the detector is placed upon the power spectrum detector accessory. The cold cathode auxiliary power spectrum system simplifies sample processing at the early stage, allows simultaneous obtaining of the transmission, polarizing, and cathode luminescence pictures of the samples as well as the element category, component, form and content analysis data, and spectra of the samples, and avoids saturation, thermal excitation, and apparatus pollution resulting from the overheating of an electron gun. In addition, the size and direction of the cathode light beam can be adjusted. The cold cathode auxiliary power spectrum system is easy and convenient for operation.
Description
Technical field
The utility model relates to a kind of device of element kind, composition, form and the content analysis to various metals, solid material microcell such as inorganic, organic, the cold cathode auxiliary energy spectra system that especially cooperates optical microscope cathodeluminescence appearance to use.
Background technology
Since roentgen in 1895 finds the X-ray, various x-ray instrument devices have been produced.Along with electron probe technology and semiconductor material and development of computer thereof, various New X-gamma ray spectrometers have been developed, concurrent its auxiliary product cathodeluminescence appearance of having put on display.A kind of in the world new multielement analysis instrument of more than ten years develops rapidly recently, becomes a kind of maturation, widely used analytical instrument, and it is exactly x-ray fluorescence energy spectrometer (full name is an energy dispersion x-ray fluorescence spectrometry appearance).Present many electron beam instruments can carry out ultimate analysis, and they use the most extensive with the supporting use of X-ray detector that is fit to, EMP that wherein is the basis with the EDS system (EMP) and scanning electron microscope (SEM).
These technology are with beam bombardment solid sample surface, and carry out qualitative, the quantitative test of element according to the intensity of the wavelength (or energy) of the X ray of being launched in the microcell.Though they have advantages such as the hot spot of generation is little, precision is good, also there are a lot of deficiencies in it.Independent cathodeluminescence (CL) be though microtechnic can be used for the component characteristics research of rock forming mineral quickly and easily, and it can only obtain image, the complete information of complex that can not sampling.Scanning electron microscope needs conducting sample mostly, thereby need on sample, plate one deck conducting film.SEM is to be main with the observation sample shape characteristic, and they can not carry out the transmission and the polarisation of optical microscope and observe.Even be furnished with the equipment of energy spectrometer, because its vacuum cavity is big, electron beam current is big during constituent analysis, so easy pollutions such as electronics light path, diaphragms, image quality decrease speed is fast, needs often to clean light path and diaphragm; This equipment mainly uses field emission electron gun and heat emission effect electron gun.Price is extremely expensive though the former performance is good, latter's low price, and imaging becomes clear inadequately and is easy to generate problems such as supersaturation and thermal excitation.
Summary of the invention
In order to overcome in present use equipment; The imperfection that information is obtained; Sample can not carry out multiple observation simultaneously and need the plating conducting film; Electron gun is overheated or cross the problem that expensive and equipment is prone to aspects such as pollutions, and the cold cathode auxiliary energy spectra system that the utility model provides has been avoided the loaded down with trivial details processing in sample early stage when obtaining the complete information of sample, solved electron gun overheated, cross expensive and the easy pollution problem of equipment.
The utility model solves the technical scheme that its technical matters adopted: at first on optical microscope, be equipped with the cathodeluminescence environment division.Optical microscope can be observed phenomenons such as the reflection, transmission, polarisation of sample.Cathodeluminescence equipment this part, what we chose is cold-cathode gun, it is a kind of horizontal cold cathode electron beam ray type, through applying high pressure at the two poles of the earth, under cold-cathode discharge, produces electron beam.Because electron beam is cold, electronics light path, diaphragm etc. are difficult for contaminated like this.The control of electron beam is furnished with focus magnet and deflection magnet, and they are the size and the beam direction of scalable electronics bundle hot spot respectively, so that obtain sample field of view and observation brightness preferably.Sample is placed in the vacuum chamber, reaches vacuum environment through vacuum pump.It provides the environment of a neutralization, thereby need not use the sample with conductive coating, and the sample that will test is not had specific (special) requirements, all can so long as the rock forming mineral of common mating plate, thin slice, fritter is put into to test in the vacuum.The main Main Control Tank that uses of whole cathodeluminescence operation is controlled.On the basis of negative electrode equipment; We have been equipped with an eds detector annex, promptly add the eds detector annex in the position of cathodeluminescence vacuum chamber view window, and a detector is installed on this annex; Observe by means of the negative electrode X ray of sample cathodeluminescence (CL) like this; The detector of EDS can detect the negative electrode X ray, thereby on the basis of optical microscope, detects the power spectrum spectral line again, obtains the X-ray frequency spectrum of sample.
In brief, this technical scheme is that the cathodeluminescence appearance is fixed on the microscope, is connected with detector through the eds detector annex, simultaneously detector is connected with computer; It is characterized in that: the eds detector annex is added in the position at cathodeluminescence vacuum chamber view window, and detector is placed on the eds detector annex, and after energy spectrum analysis software was installed in computer, the spectrum peak can collect on the computer and show.The size of this eds detector annex is: the diameter of eds detector annex is the disk of 94.8mm; At the circle center diameter being arranged is the circular view window of 21mm; The view window lower surface has the wide annular seal groove of a 2.9mm, is furnished with O-ring seal, and in view window one side one degree of tilt to be arranged be 30 ° perforate; In a side of view window one internal diameter being housed is 19mm, and external diameter is the cylindric detector mounting bracket of 28mm, and is furnished with the bolt seals lid of band embossing, is furnished with circular stainless steel coil and O RunddichtringO in the gland bonnet.
The beneficial effect of the utility model is: simplified the sample preparation in early stage; Can obtain element kind, composition, form and the content analysis data and the spectrogram of transmission, polarisation, cathodeluminescence picture and the sample of sample simultaneously, overheated saturated, thermal excitation that causes and the instrument of having avoided electron gun pollute.In addition, the negative electrode beam size, direction is adjustable, and instrumentation is convenient succinct.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 cold cathode auxiliary energy spectra system synoptic diagram.
Fig. 2 energy spectrum analysis detector annex embodiment synoptic diagram.
Fig. 3-01, Fig. 3-the 02nd, energy spectrum analysis detector annex bolted cover embodiment 1 synoptic diagram.
Fig. 4-01, Fig. 4-the 02nd, energy spectrum analysis detector annex bolted cover embodiment 2 synoptic diagram.
1. main frames among the figure, 2. display screen, 3.PX4 processor, 4. vacuum specimen chamber, 5. energy spectrometer, 6.CCD acquisition system, 7. microscope, 8. detector annex, 9. high-pressure electronic rifle, 10. main control box, 11. power supply adaptors, 12. vacuum pumps.
Embodiment
In Fig. 1, main frame (1) is connected with CCD acquisition system (6), PX4 processor (3), display screen (2) respectively.PX4 processor (3) has two lines to be connected with energy spectrometer (5).One is signal transmssion line, and one is to be used for providing for energy spectrometer (5) line of power supply.CCD acquisition system (6) is installed on the microscope (7) carries out the ccd image collection.Vacuum specimen chamber (4) is placed on the objective table of microscope (7), and high-pressure electronic rifle (9) links to each other with vacuum specimen chamber (4), electron beam is provided for vacuum specimen chamber (4) through high-pressure electronic rifle (9).Detector annex (8) is placed on the vacuum specimen chamber (4), and energy spectrometer (5) is installed in above the detector annex (8), obtains the power spectrum of negative electrode light through detector annex (8).Pump valve on the vacuum specimen chamber (4) is connected with vacuum pump (12), and the vacuum environment of vacuum specimen chamber (4) is provided through vacuum pump (12).Main control box (10) is connected with high-pressure electronic rifle (9) with vacuum specimen chamber (4) respectively.Total system has main control box (10) to be connected with power supply adaptor (11), through power supply adaptor (11) power supply is provided.
Claims (3)
1. cold cathode auxiliary energy spectra system is that the cathodeluminescence appearance is fixed on the microscope, is connected with detector through the eds detector annex, simultaneously detector is connected with computer; It is characterized in that: the eds detector annex is added in the position at cathodeluminescence vacuum chamber view window, and detector is placed on the eds detector annex.
2. cold cathode auxiliary energy spectra system according to claim 1; It is characterized in that: the diameter of eds detector annex is the disk of 94.8mm; At the circle center diameter being arranged is the circular view window of 21mm; The view window lower surface has the wide annular seal groove of a 2.9mm, is furnished with O-ring seal, and in view window one side one degree of tilt to be arranged be 30 ° perforate.
3. cold cathode auxiliary energy spectra system according to claim 1; It is characterized in that it is 19mm that a side at view window is equipped with an internal diameter; External diameter is the cylindric detector mounting bracket of 28mm, and is furnished with the bolt seals lid of band embossing, is furnished with circular stainless steel coil and O RunddichtringO in the gland bonnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205366261U CN202421509U (en) | 2010-09-20 | 2010-09-20 | Cold cathode auxiliary power spectrum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205366261U CN202421509U (en) | 2010-09-20 | 2010-09-20 | Cold cathode auxiliary power spectrum system |
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| Publication Number | Publication Date |
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| CN202421509U true CN202421509U (en) | 2012-09-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010205366261U Expired - Fee Related CN202421509U (en) | 2010-09-20 | 2010-09-20 | Cold cathode auxiliary power spectrum system |
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| CN (1) | CN202421509U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103730311A (en) * | 2013-12-19 | 2014-04-16 | 北京恒元华建科技发展有限公司 | Cathode luminescence device |
| CN105092340A (en) * | 2015-09-16 | 2015-11-25 | 成都理工大学 | Rock sample microdomain delineation system |
| CN113218633A (en) * | 2021-05-06 | 2021-08-06 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing mechanism |
| CN114428093A (en) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
-
2010
- 2010-09-20 CN CN2010205366261U patent/CN202421509U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103730311A (en) * | 2013-12-19 | 2014-04-16 | 北京恒元华建科技发展有限公司 | Cathode luminescence device |
| CN103730311B (en) * | 2013-12-19 | 2016-03-30 | 北京恒元华建科技发展有限公司 | Cathode luminescence device |
| CN105092340A (en) * | 2015-09-16 | 2015-11-25 | 成都理工大学 | Rock sample microdomain delineation system |
| CN105092340B (en) * | 2015-09-16 | 2018-03-16 | 成都理工大学 | A kind of rock sample microcell draws a circle to approve system |
| CN114428093A (en) * | 2020-09-29 | 2022-05-03 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
| CN114428093B (en) * | 2020-09-29 | 2024-05-28 | 中国石油化工股份有限公司 | Measuring point positioning device based on energy spectrometer, energy spectrum testing system and testing method |
| CN113218633A (en) * | 2021-05-06 | 2021-08-06 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing mechanism |
| CN113218633B (en) * | 2021-05-06 | 2022-06-17 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing mechanism |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Beijing Megatoo Science & Technology Co., Ltd. Document name: Notification to Pay the Fees |
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| DD01 | Delivery of document by public notice |
Addressee: Beijing Megatoo Science & Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20150920 |
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| EXPY | Termination of patent right or utility model |