CN1130260A - Loading and unloading device for reticle sheet - Google Patents
Loading and unloading device for reticle sheet Download PDFInfo
- Publication number
- CN1130260A CN1130260A CN95117126A CN95117126A CN1130260A CN 1130260 A CN1130260 A CN 1130260A CN 95117126 A CN95117126 A CN 95117126A CN 95117126 A CN95117126 A CN 95117126A CN 1130260 A CN1130260 A CN 1130260A
- Authority
- CN
- China
- Prior art keywords
- box
- graticule
- order
- packed
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Library & Information Science (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
A reticle loading and unloading apparatus includes a cassette having a door longer than a front-width of the cassette; a manipulator having a hand for inserting a reticle within the cassette or drawing it out; an opening and shutting portion for opening and shutting the door; and a sensor which senses whether or not a reticle is loaded within the cassette. Thus, the manipulator can insert the reticle within the cassette or draw it out after checking whether or not a reticle is loaded within the cassette to prevent collisions.
Description
The present invention relates to a kind ofly pack into and withdrawing device with respect to a box pack into/the take out graticule of graticule.
The graticule of general structure shown in Figure 1 has a wafer or substrate, and former figure is arranged above, in order to constitute electrode pattern (display device that for example is used for liquid crystal).With reference to Fig. 1, a graticule 100 comprises glass substrate 101, forms a predetermined exposure pattern thereon on surface or the lower surface; Be respectively fitted with film 102 and following film 102 on the upper surface of glass substrate 101 and the lower surface, be attached on this glass substrate so that external substance (dust granule) is unlikely.
Because the expensive and frangibility of graticule is all protected graticule gingerly in entire making process.Graticule is placed in the box, so that deposit many these class graticules.This box is supported on the support bed that is positioned at executor the place ahead, so that on manufacturing process discontinuous ground graticule inserted in the box/extract out in box.In order to form electrode pattern on the wafer or on the substrate, exposing operation needs this graticule is taken out in box, after the processing, inserts in the box again again.Executor just is used for insertion/extraction graticule.
When utilizing executor that one specific graticule is taken out in box, the exact position of the box of wherein depositing this graticule is partly write down in the control in the executor.Yet, just in case manipulator fault takes place, no matter be because operator's mistake, or mechanical fault or program error, the graticule of being transferred by executor just may collide with the graticule that is loaded in the box Already in, thereby damages this expensive graticule.
In order to address this problem, can detect the sensor that graticule is used one of the position of each box installing, so that judge the existence of having deposited in a graticule wherein.But the simple and airtight structure of box is hindering the installing of sensor.Have again,,, the selection of such sensor is restricted greatly because of its electric field/electric charge will attract the event of outer boundry particle owing to can not have driver.Therefore, disadvantageous effect is often played in the action of this executor.
In order to address the above problem, the object of the present invention is to provide a kind of graticule to pack into and withdrawing device, when utilizing executor to insert graticule, by detecting the graticule of whether having packed in the box, collide between the graticule avoiding.
Another object of the present invention is to provide a kind of graticule to pack into and withdrawing device, it has when whether graticule being housed in determining box, can reduce the pick-up unit that outer boundry particle is introduced.
For achieving the above object, according to one aspect of the present invention, as here concrete general description for example like that, a kind of graticule is packed into and withdrawing device comprises: the box of a band door, longer than the front width of box; The executor of one band arm is used for graticule is inserted in the box, perhaps extracts this graticule in the box out, and the opening and closing mechanism in this executor is used for the described door of opening and closing; And at one side at least of this arm and the pick-up unit on the switching mechanism, in order to check the graticule of whether having packed in the box.
According to another aspect of the present invention, a kind of graticule is packed into and withdrawing device comprises: the box of a band door, and door is positioned at the front of this box; The executor of one band arm is extracted graticule out in order to graticule is inserted in the box or in box; Opening and closing mechanism in the executor, be used for the described door of opening and closing; And testing agency, in order to check the graticule of whether having packed in the box, this testing agency is present at least one side of this box.
According to of the present invention more on the one hand, a kind of graticule is packed into and withdrawing device comprises: a support bed, in order to be separated from each other several boxes of a preset distance of supporting; The executor of one band arm is used in each of a plurality of boxes that graticule is optionally inserted support bed and supported, perhaps optionally extracts graticule out from each of these boxes; Opening and closing mechanism in the executor is in order to the described door of opening and closing; One weight sensor, in order to the weight that one of detects in the middle of each corresponding box, this weight sensor be arranged in the corresponding box of support bed below and a control section, determine the graticule of whether having packed in this box according to the weight that records by this sensor.
Should be appreciated that top general description and following detailed are illustrative and illustrative, be intended to as desired, provide and further specify of the present invention.
Provide a few width of cloth accompanying drawings, so that further understanding of the invention to be provided, and they also are included into and constitute the part of this instructions, and they have represented several embodiment of the present invention, and with this description with explaining principle of the present invention.
With reference to accompanying drawing, will make above-mentioned purpose of the present invention and advantage become clear further by describing preferred embodiment in detail, wherein:
Fig. 1 is the skeleton view of used common graticule in the present invention and the prior art;
Fig. 2 is that graticule of the present invention is packed into and the skeleton view of withdrawing device;
Fig. 3 is that the door of a box of expression is unlocked/skeleton view under the closed portion opening;
Figure 4 and 5 are skeleton views of the another kind of embodiment of graticule pick-up unit of the present invention;
Fig. 6 is the side view of expression another embodiment of graticule pick-up unit of the present invention.
A graticule according to the present invention is packed into and withdrawing device is checked the graticule of whether having packed in the box, and graticule is inserted in the box or from wherein extracting graticule out, Fig. 2 and 3 its a kind of embodiment of expression.
Graticule of the present invention is packed into and withdrawing device comprises: an executor 300, and it is equipped with XY platform 302; A support bed 400 that supports by pillar 410, it is wherein arranging a plurality of boxes 200 near executor 300, each box is used to deposit graticule 100; An On/Off device 500, in order to the door 203 of opening and closing box, it is installed on the XY platform 302; Also comprise a sensor 600, be used for detecting the graticule of whether having packed in the selected box, it be contained on the executor or On/Off device 500 on.
As shown in Figure 3, each in the middle of a plurality of boxes 200 includes a main body 202, and a space 201 that holds graticule 100 wherein is provided; Also comprise door 203, an end of door stretches out a predetermined length from main body 202 1 sides, and it is closely closed in order to the inlet that will arrive space 201 by the rotating front that is installed in main body 202.
Executor 300 comprises a main body 301, be installed with on this main body one with upwards, downwards and along the XY platform 302 that X and Y direction move, also comprise an arm 310, in order to graticule 100 is inserted in the boxes or from wherein extracting graticule out.This arm 310 is contained on the XY platform 302, can be with respect to this XY platform along directions X backward and move forward.This arm 310 has support fingers parallel to each other 311, is supported two lateral margins of graticule 100, and it inhales hole 312 in addition, inhales the hole by these and forms the suction force effect at the upper surface of support fingers 311.Arm 310 by means of be contained on the XY platform 302 the parts such as hydraulic cylinder 501 backward and move forward.In addition, XY platform 302 common platform for moving along X-and Y-direction of principal axis.This XY platform 302 is by by revolution and be contained in a spherical spiral (not shown) in main body vertical moving up and down.
Opening and closing device 500 comprises a hydraulic cylinder 501 on the XY platform 302 that is bearing in main body 301 parallel with arm 310, also comprises a running roller 503 that links to each other with the bar 502 of hydraulic cylinder 501.When bar 502 moved travelling backwards afterwards forward, running roller 503 contacted with 203.
Detect each whether graticule 100 is loaded into a plurality of boxes 200 of being stacked in the support bed 400 according to the sensor 600 of Fig. 3 embodiment.This sensor 600 comprises the bearing 601 and 602 that is loaded on arm 310 both sides; Be loaded on the light-emitting component 610 on the side bearing, under the situation that door 203 is opened, light injected in the box 200; Also comprise a photo detector 620 that is loaded on the opposite side bearing, detect the light of injecting in the box 200, reflecting by graticule 100 thereupon from light-emitting component 610.Here, light-emitting component 610 and photo detector 620 can be packed on the support fingers 311 of arm 310.In addition, any light-emitting component such as emitting diode or laser diode all may be used as light source.
Graticule sensor according to the another embodiment of the present invention shown in the Figure 4 and 5 comprises a main body 202 of being made box 200 by trnaslucent materials or transparent material, box has door 203, one radiative light-emitting component 31 and one detects the photo detector 32 of the light that sends from light-emitting component 31, they selectively are installed on the upper and lower of box 200, perhaps be contained in their both sides, this light-emitting component 31 and photo detector 32 are installed on the support bed 400, and box 200 just is contained on the frame safely.In addition, the control that the information that is recorded by photo detector 32 is sent to executor 300 partly so that arm 310 can be controlled according to this information.
Fig. 6 represents another embodiment of the present invention's one graticule sensor, and wherein several boxes 200 are supported on the support bed 400, are separated within a predetermined distance.Be contained in the weight of the weight sensor 900 detection boxes 200 on the support bed 400.Measuring cell can be used as weight sensor 900.Weight 3 information of the box that this weight sensor 900 is recorded are delivered to the control section of executor 300, to compare with the weight of measuring in advance of deposited box 200, make the arm 310 of executor be controlled according to this comparison information.
Describe below that the graticule of the present invention with said structure is packed into and the course of work of withdrawing device.
At first by XY platform 302, make the hydraulic cylinder 501 of opening and closing device be positioned at the place ahead on box 200 right sides that will insert or take out, this 302 is contained on the main body 301 of executor 300.The distance that many boxes 200 are separated to be scheduled to and being placed in the support bed 400.During work, hydraulic cylinder 501, bar 502 moves forward along the X-direction then, makes the running roller 503 that invests rod end to door 203 fronts that move forward to box 200.For accomplishing this point, along the Y direction hydraulic cylinder 501 is moved to a side of box 200 with XY platform 302 earlier, thereby running roller 503 is positioned at stretch out in the box side the back.At last, hydraulic cylinder 501 moves running roller 503 along the directions X action backward.Therefore as shown in Figure 3, door 203 is supported in running roller 503 unlatchings on the bar 502.Simultaneously, inject in the box 200 by the light that is loaded on light-emitting component 610 emissions on the bearing 601.If graticule 100 is loaded in the box 200, the light that reflects from graticule 100 is that photo detector 620 is measured, stops subsequently inserting graticules 100 by the arm 310 of executor 300.If do not recorded by photo detector 620 from the light of light-emitting component 610 emissions, graticule 100 is not loaded in the box 200 as yet, and arm 310 just inserts graticule 100 in this box.
Fig. 5 represents another kind of embodiment of the present invention, wherein box 200 is made by trnaslucent materials or transparent material, the illumination that is used to self-emission device 31 there is mapped in this box of being made by transparent or semitransparent material, with the light of photo detector 32 detection of reflected, judge whether have graticule 100 to be loaded in the box 200 again with this.Also promptly, when graticule 100 is loaded in the box 200, is then launched by graticule 100, and record by photo detector 32 thereupon from the light of light-emitting component 31 emissions.If graticule 100 is not loaded in the box as yet, then the light from light-emitting component 31 emissions passes through box 200, and not measured by photo detector 32.Thereby, according to the light that records by photo detector 32, can determine the graticule of whether packing in the box 200.Arm 310 and be used for the hydraulic cylinder of one of opening and closing with as mentioned above same way as action.
Fig. 6 represents another embodiment of the present invention, and it judges by the referential weight that adopts the box that records in advance whether graticule 100 has been loaded in the box 200, wherein the weight that detects in the box by the weight sensor 900 that is contained on the support bed 400.By this weight information is compared with the referential weight in the control that is stored in executor 300 partly, to determine whether graticule 100 has been loaded into this box.The arm 310 of executor relatively moves according to this.
As mentioned above, this graticule pick-up unit determines that whether a graticule than has been loaded in the box, correspondingly controls executor then, thus prevent since be loaded in the box graticule with by the damage due to colliding between the graticule of arm supporting.
Device described above comprises the preferred embodiments of the present invention.Yet, for those skilled in the art, be noted that in these apparatus and method of the present invention and can do various modifications and variations, can not break away from the spirit and scope of the present invention yet.The present invention includes such improvement and modification, they are in the scope of appending claims and equivalent thereof.For example, the present invention can be used for graticule device for reducing dust and graticule cleaning device etc.
Claims (8)
1. a graticule is packed into and withdrawing device, and it comprises:
The box of one band door, this front width than box is long;
The executor of one band arm is used for a graticule inserted in the described box or in described box and extracts graticule out;
Opening and closing mechanism in the described executor is in order to the described door of opening and closing; And
In at least one side of described arm and the testing agency on described unlatching and the closing organ, in order to check the graticule of whether having packed in the described box.
2. a graticule as claimed in claim 1 is packed into and withdrawing device, it is characterized in that described pick-up unit also comprises:
The bearing on the both sides of the arm of described executor;
Light-emitting component on one of described two bearings is in order to inject light in the described box; And
One photo detector sends from described light-emitting component in order to detect, subsequently the light that reflects from this graticule again.
3. a graticule as claimed in claim 2 is packed into and withdrawing device, it is characterized in that described photo detector and described light-emitting component are on described arm.
4. a graticule is packed into and withdrawing device, and it comprises:
The box of one band door, door is in the front of box;
The executor of one band arm is extracted graticule out in order to graticule is inserted in the described box or in described box;
Opening and closing mechanism in the described executor is in order to the described door of opening and closing; And
Pick-up unit, in order to check this graticule of whether having packed in the box, described pick-up unit is positioned at least one side of described box.
5. a graticule as claimed in claim 4 is packed into and withdrawing device, it is characterized in that described pick-up unit comprises a side at box, in order to luminous light-emitting component, with photo detector in the same side of box, in order to detect from described light-emitting component emission, the light of the graticule reflection in the box again subsequently.
6. a graticule as claimed in claim 4 is packed into and withdrawing device, it is characterized in that described device comprise a side at box, in order to luminous light-emitting component and photo detector in the relative side of box, in order to detect, pass the light of this box subsequently again from described light-emitting component emission.
7. a graticule is packed into and withdrawing device, and it comprises:
One support bed, in order to support the box of a plurality of spaced-apart preset distances.
The executor of one band arm is used for optionally a graticule is inserted in each that is supported on each box on the described support bed, and perhaps optionally each from described box is extracted this graticule out;
Opening and closing mechanism in the described executor is in order to the described door of opening and closing;
One weight sensor, in order to detect the weight of a corresponding box, described weight sensor is below corresponding box described in the described support bed;
One control section determines by the weight that is recorded by described sensor whether this graticule has packed in the described box.
8. a graticule as claimed in claim 7 is packed into and withdrawing device, it is characterized in that described weight sensor comprises a measuring cell.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR21085/94 | 1994-08-25 | ||
| KR1019940021085A KR0144945B1 (en) | 1994-08-25 | 1994-08-25 | Reticle detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1130260A true CN1130260A (en) | 1996-09-04 |
Family
ID=19391159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95117126A Pending CN1130260A (en) | 1994-08-25 | 1995-08-25 | Loading and unloading device for reticle sheet |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0878325A (en) |
| KR (1) | KR0144945B1 (en) |
| CN (1) | CN1130260A (en) |
| DE (1) | DE19530856A1 (en) |
| FR (1) | FR2723929B1 (en) |
| GB (1) | GB2292636B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615332A (en) * | 2016-12-13 | 2018-10-02 | 海太半导体（无锡）有限公司 | Patch device substrate position sensor sensing and alarm system |
| CN110609451A (en) * | 2019-08-19 | 2019-12-24 | 武汉华星光电技术有限公司 | Exposure machine |
| CN110941145A (en) * | 2018-09-21 | 2020-03-31 | 上海微电子装备（集团）股份有限公司 | Mask detection device and method and mask library equipment |
| WO2021227903A1 (en) * | 2020-05-15 | 2021-11-18 | 长鑫存储技术有限公司 | Reticle detection device and method, exposure tool, and lithographic apparatus |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6142722A (en) * | 1998-06-17 | 2000-11-07 | Genmark Automation, Inc. | Automated opening and closing of ultra clean storage containers |
| TW495802B (en) * | 1999-04-13 | 2002-07-21 | Semiconductor 300 Gmbh & Amp C | Arrangement for storing objects, particularly for storing disklike objects such as wafers, flat panels or CDs |
| KR100620160B1 (en) * | 2002-12-30 | 2006-09-01 | 동부일렉트로닉스 주식회사 | Apparatus for loading a reticle |
| KR100665293B1 (en) * | 2006-01-04 | 2007-01-17 | 코리아테크노(주) | Boxcover opener for use of photomask shipping box |
| CN105448783A (en) * | 2015-12-28 | 2016-03-30 | 江苏创基新能源有限公司 | Excessive adhesive inspection device of frame element |
| JP7186225B2 (en) * | 2017-11-30 | 2022-12-08 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッド | Method and Apparatus for Performing the Method for Determining Substrate Position in an Enclosed Chamber |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6276531A (en) * | 1985-09-27 | 1987-04-08 | Canon Inc | Method for storing |
| JPS6278084A (en) * | 1985-09-27 | 1987-04-10 | キヤノン株式会社 | Substrate container |
| US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
| US4999671A (en) * | 1986-07-11 | 1991-03-12 | Canon Kabushiki Kaisha | Reticle conveying device |
| EP0452041B1 (en) * | 1990-04-06 | 1996-11-27 | Canon Kabushiki Kaisha | Substrate conveying device and method of controlling the same |
| DE4238834A1 (en) * | 1991-11-18 | 1993-05-19 | Fusion Systems Corp | Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm |
| US5225691A (en) * | 1992-05-18 | 1993-07-06 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation |
-
1994
- 1994-08-25 KR KR1019940021085A patent/KR0144945B1/en not_active IP Right Cessation
-
1995
- 1995-08-22 GB GB9517171A patent/GB2292636B/en not_active Expired - Fee Related
- 1995-08-22 DE DE19530856A patent/DE19530856A1/en not_active Withdrawn
- 1995-08-24 FR FR9510047A patent/FR2723929B1/en not_active Expired - Fee Related
- 1995-08-24 JP JP7239148A patent/JPH0878325A/en active Pending
- 1995-08-25 CN CN95117126A patent/CN1130260A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108615332A (en) * | 2016-12-13 | 2018-10-02 | 海太半导体（无锡）有限公司 | Patch device substrate position sensor sensing and alarm system |
| CN110941145A (en) * | 2018-09-21 | 2020-03-31 | 上海微电子装备（集团）股份有限公司 | Mask detection device and method and mask library equipment |
| CN110609451A (en) * | 2019-08-19 | 2019-12-24 | 武汉华星光电技术有限公司 | Exposure machine |
| WO2021227903A1 (en) * | 2020-05-15 | 2021-11-18 | 长鑫存储技术有限公司 | Reticle detection device and method, exposure tool, and lithographic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9517171D0 (en) | 1995-10-25 |
| FR2723929B1 (en) | 1997-07-25 |
| KR960009089A (en) | 1996-03-22 |
| GB2292636B (en) | 1998-12-23 |
| FR2723929A1 (en) | 1996-03-01 |
| GB2292636A (en) | 1996-02-28 |
| JPH0878325A (en) | 1996-03-22 |
| KR0144945B1 (en) | 1998-08-17 |
| DE19530856A1 (en) | 1996-02-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |