GB2292636B - Apparatus for loading and unloading reticles - Google Patents
Apparatus for loading and unloading reticlesInfo
- Publication number
- GB2292636B GB2292636B GB9517171A GB9517171A GB2292636B GB 2292636 B GB2292636 B GB 2292636B GB 9517171 A GB9517171 A GB 9517171A GB 9517171 A GB9517171 A GB 9517171A GB 2292636 B GB2292636 B GB 2292636B
- Authority
- GB
- United Kingdom
- Prior art keywords
- reticles
- unloading
- loading
- unloading reticles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Library & Information Science (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940021085A KR0144945B1 (en) | 1994-08-25 | 1994-08-25 | Reticle detecting device |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9517171D0 GB9517171D0 (en) | 1995-10-25 |
GB2292636A GB2292636A (en) | 1996-02-28 |
GB2292636B true GB2292636B (en) | 1998-12-23 |
Family
ID=19391159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9517171A Expired - Fee Related GB2292636B (en) | 1994-08-25 | 1995-08-22 | Apparatus for loading and unloading reticles |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH0878325A (en) |
KR (1) | KR0144945B1 (en) |
CN (1) | CN1130260A (en) |
DE (1) | DE19530856A1 (en) |
FR (1) | FR2723929B1 (en) |
GB (1) | GB2292636B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6142722A (en) * | 1998-06-17 | 2000-11-07 | Genmark Automation, Inc. | Automated opening and closing of ultra clean storage containers |
TW495802B (en) * | 1999-04-13 | 2002-07-21 | Semiconductor 300 Gmbh & Amp C | Arrangement for storing objects, particularly for storing disklike objects such as wafers, flat panels or CDs |
KR100620160B1 (en) * | 2002-12-30 | 2006-09-01 | 동부일렉트로닉스 주식회사 | Apparatus for loading a reticle |
KR100665293B1 (en) * | 2006-01-04 | 2007-01-17 | 코리아테크노(주) | Boxcover opener for use of photomask shipping box |
CN105448783A (en) * | 2015-12-28 | 2016-03-30 | 江苏创基新能源有限公司 | Excessive adhesive inspection device of frame element |
CN108615332A (en) * | 2016-12-13 | 2018-10-02 | 海太半导体(无锡)有限公司 | Patch device substrate position sensor sensing and alarm system |
JP7186225B2 (en) * | 2017-11-30 | 2022-12-08 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッド | Method and Apparatus for Performing the Method for Determining Substrate Position in an Enclosed Chamber |
CN110941145B (en) * | 2018-09-21 | 2021-07-30 | 上海微电子装备(集团)股份有限公司 | Mask detection device and method and mask library equipment |
CN110609451A (en) * | 2019-08-19 | 2019-12-24 | 武汉华星光电技术有限公司 | Exposure machine |
CN113671799A (en) * | 2020-05-15 | 2021-11-19 | 长鑫存储技术有限公司 | Photomask detection device and method, exposure machine and photoetching equipment |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4238834A1 (en) * | 1991-11-18 | 1993-05-19 | Fusion Systems Corp | Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm |
US5225691A (en) * | 1992-05-18 | 1993-07-06 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
JPS6276531A (en) * | 1985-09-27 | 1987-04-08 | Canon Inc | Method for storing |
JPS6278084A (en) * | 1985-09-27 | 1987-04-10 | キヤノン株式会社 | Substrate container |
US4999671A (en) * | 1986-07-11 | 1991-03-12 | Canon Kabushiki Kaisha | Reticle conveying device |
DE69123279T2 (en) * | 1990-04-06 | 1997-04-24 | Canon Kk | Transport device for substrates and method for control |
-
1994
- 1994-08-25 KR KR1019940021085A patent/KR0144945B1/en not_active IP Right Cessation
-
1995
- 1995-08-22 GB GB9517171A patent/GB2292636B/en not_active Expired - Fee Related
- 1995-08-22 DE DE19530856A patent/DE19530856A1/en not_active Withdrawn
- 1995-08-24 FR FR9510047A patent/FR2723929B1/en not_active Expired - Fee Related
- 1995-08-24 JP JP7239148A patent/JPH0878325A/en active Pending
- 1995-08-25 CN CN95117126A patent/CN1130260A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4238834A1 (en) * | 1991-11-18 | 1993-05-19 | Fusion Systems Corp | Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm |
US5225691A (en) * | 1992-05-18 | 1993-07-06 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation |
Non-Patent Citations (1)
Title |
---|
WPI Abstract Accession No 93-168783/21 & DE 4238834 A1 (FUSION) 19.5.93 (see abstract) * |
Also Published As
Publication number | Publication date |
---|---|
GB9517171D0 (en) | 1995-10-25 |
DE19530856A1 (en) | 1996-02-29 |
JPH0878325A (en) | 1996-03-22 |
KR960009089A (en) | 1996-03-22 |
KR0144945B1 (en) | 1998-08-17 |
CN1130260A (en) | 1996-09-04 |
GB2292636A (en) | 1996-02-28 |
FR2723929B1 (en) | 1997-07-25 |
FR2723929A1 (en) | 1996-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19990822 |