GB2292636A - Reticle loading and unloading apparatus - Google Patents
Reticle loading and unloading apparatus Download PDFInfo
- Publication number
- GB2292636A GB2292636A GB9517171A GB9517171A GB2292636A GB 2292636 A GB2292636 A GB 2292636A GB 9517171 A GB9517171 A GB 9517171A GB 9517171 A GB9517171 A GB 9517171A GB 2292636 A GB2292636 A GB 2292636A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cassette
- reticle
- manipulator
- unloading apparatus
- sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Library & Information Science (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Warehouses Or Storage Devices (AREA)
Description
2292636 APPARATUS FOR LOADING AND UNLOADING RETICLES Backqround of the
Invention The present invention relates to a reticle loading and unloading apparatus for loading/unloading a reticle with respect to a cassette.
A reticle, the general structure of which is shown in FIG. 1, bears the original pattern for forming an electrode pattern (e.g., for a liquid crystal display device) on a wafer or substrate.
installed on substrate Referring to FIG. 1, a reticle 100 comprises a glass substrate 101 on the upper or lower surface of which a predetermined exposure pattern is formed, and upper and lower pellicles 102 and 102, respectively upper and 101 to prevent foreign matter (dust particles) from adhering to the glass substrate.
Throughout the manufacturing process, the reticle is handled with extreme care due to its high cost and fragile nature. The reticle is stored in a cassette for storing many such reticles. The cassette is supported on a supporting stand positioned in front of a manipulator for the insertion/extraction thereof into/from the cassette periodically during the manufacturing process. For forming the electrode pattern on the wafer or substrate, an exposure lower surfaces of glass is 2 operation requires the reticle to be drawn out from the cassette and then, af ter processing, reinserted in the cassette. The manipulator effects the insertion/extraction of the reticle.
When a particular reticle is drawn out from the cassette by the manipulator, a control portion in the manipulator remembers the exact cassette location in which the reticle was stored. However, should a manipulator failure occur, whether it be due to operator error or a mechanical or programming malfunction, a reticle transported by the manipulator may collide with a loaded reticle already present in the cassette, thus damaging the costly reticles.
To solve this problem, a sensor for sensing a reticle may be installed within each cassette location, to sense the presence of a reticle stored therein. However, the cassette's simple, airtight structure impedes sensor installation. Also, the selection of such a sensor is greatly restricted since it should not have a driver because this would attract foreign particles due to its electrical field/charge. Consequently, the manipulator operation would be adversely affected.
Summary of the Invention
To solve the above problems, it is an object of j 3 the present invention to provide a reticle loading and unloading apparatus for preventing a collision between reticles, by sensing whether or not a reticle is loaded within a cassette, using a manipulator.
It is another object of the present invention to provide a reticle loading and unloading apparatus having sensing means for reducing the introduction of foreign particles when determining whether a reticle is loaded within a cassette.
To accomplish the above objects, according to one aspect of the present invention, a reticle loading and unloading apparatus, as embodied and broadly described herein, comprises a cassette including a door longer than a front-width of the cassette; a manipulator including a hand for inserting a reticle in the cassette or drawing the reticle out of the cassette; opening and shutting means in the manipulator for opening and shutting the door; and sensing means on at least one side of the hand and the opening and shutting means for checking whether the reticle is loaded within the cassette.
According to another aspect of the present invention, a reticle loading and unloading apparatus comprises a cassette including a door positioned in front of the cassette; a manipulator including a hand is when inserting a reticle 4 for inserting a reticle in the cassette or drawing the reticle out of the cassette; opening and shutting means in the manipulator for opening and shutting the door; and sensing means for checking whether the reticle is loaded within the cassette, the sensing means being on at least one side of the cassette.
According to yet another aspect of the present invention, a reticle loading and unloading apparatus comprises a supporting stand for supporting a number of cassettes mutually separated by a predetermined distance; a manipulator having a hand for selectively inserting a reticle in each one of the cassettes supported on the supporting stand or drawing the reticle out of each one of the cassettes; opening and shutting means in the manipulator for opening and shutting the door; a weight sensor for sensing a weight of a corresponding one of the cassettes, the weight sensor being under the corresponding cassette in the supporting stand, and a control portion for determining if the reticle is loaded within the cassette by a weight sensed through the sensor.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.
The accompanying drawings are included to provide a further understanding of the invention and are incorvorated in and constitute a part of this specification, illustrate several embodiments of the invention and together with the description serve to explain the principles of the invention.
Brief Description of the Drawings
The above objects and advantages of the present invention will become more apparent by describing in detail the preferred embodiments thereof with reference to the attached drawings in which:
FIG. 1 is a perspective view of a general reticle used in both the present invention and the prior art;
FIG. 2 is a perspective view of a reticle loading and unloading apparatus according to the present invention; FIG. 3 is a perspective view illustrating a state in which a door of a cassette is opened by an opening/shutting portion; FIGS. 4 and S are perspective views of another embodiment of a reticle detecting apparatus according to the present invention; and FIG. 6 is a side view illustrating still another embodiment of a reticle detecting apparatus according to the present invention.
6 Detailed Description of the Invention is A reticle loading and unloading apparatus according to the present invention checks whether a reticle is loaded within a cassette and inserts a reticle in the cassette or draws it out therefrom, one embodiment of which is shown in FIGS. 2 and 3.
The reticle loading and unloading apparatus of the present invention includes a manipulator 300 where an XY table 302 is installed, a supporting stand 400 which is supported by a bracket 410, adjacently to manipulator 300 and in which a plurality of cassettes 200 each for storing reticle 100 are arrayed, an opening/shutting device 500 for opening and shutting cassette door 203 and installed on XY table 302, and sensor 600 for sensing whether a reticle is loaded within a selected cassette and which is installed at the manipulator or opening/shutting As shown in FIG. 3, each of cassettes 200 comprises a body 202, 201 for accommodating reticle 100 device 500. the plurality of in which a space is provided, and door 203, one end of which is projected a predetermined length from a side of the body 202 and which is rotatably installed in front of the body 202 to shut tightly an entrance to the space 201.
Manipulator 300 comprises a main body 301, an XY table 302 mounted on the main body so as to move up 7 and down as well as in the X-and Y-directions, and a hand 310 for inserting reticle 100 in a cassette or drawing it out therefrom. The hand 310 is installed on the XY table 302 so as to move back and forth in the x-direction with respect to the XY table. The hand 310 has mutually parallel supporting fingers 311 so as to support either edge of reticle 100 and suction holes 312 through which suction force functions are formed in the upper surface of supporting fingers 311. Hand 310 moves back and forth by a member such as a cylinder 501 installed on the XY table 302. Also, XY table 302 is a general table movable in the X-and Y- axis directions. The XY table 302 moves up and down vertically by a ball screw (not shown) rotated by a motor and installed in a main body.
Opening and shutting device 500 comprises a cylinder 501 supported on XY table 302 of main body 301 in parallel with hand 310 and a roller 503 coupled to a rod 502 of cylinder 501. The roller 503 contacts door 203 when rod 502 moves back after moving forward.
The sensor 600 according to the embodiment in FIG. 3 senses whether reticle 100 is loaded within each of cassettes 200 which are stacked in supporting stand 400. The sensor 600 comprises supports 601 and 602 installed on either side of hand 310, a luminous 8 element 610 installed on one side of the support irradiating light into cassette 200 when door 203 is open, and a light receiving element 620 installed on the other side of the support sensing the light irradiated from the luminous element 610 into cassette 200 and then reflected from reticle 100. Here, the luminous element 610 and light receiving element 620 may be installed on supporting fingers 311 of hand 310. Also, any luminous element such as a light emitting diode or laser diode may be used as the light source.
A reticle sensor according to another embodiment of the present invention, as shown in FIGS. 4 and 5, comprises a body 202 of a cassette 200 having a door 203 made of semitransparent or transparent material, a luminous element 31 irradiating light and a light receiving element 32 sensing the light irradiated from the luminous element 31 which are selectively installed on the upper and lower portions of the cassette 200 or on its sides thereof. The luminous element 31 and light receiving element 32 are installed on the supporting stand 400 where a cassette 200 is safely placed. Also, information sensed from light receiving element 32 is transmitted zo a control portion of the manipulator 300 sc that a hand 310 can be controlled depending on the infcrmat-icn.
9 FIG. 6 shows still another embodiment of a reticle sensor according to the present invention, wherein a number of cassettes 200 are supported on a supporting stand 400 so as to be separated by a predetermined distance. A weight sensor 900, installed on supporting stand 400, senses the weight of cassette 200. A load cell may be used as weight sensor 900. Weight information of the cassette sensed by the weight sensor 900 is transmitted to a control portion of the manipulator 300 to be compared with a stored pre-measured weight of cassette 200, so that a hand 310 of the manipulator is controlled depending on the compared information.
The operation of a reticle loading and unloading apparatus according to the present invention having the aforementioned structure will now be described.
First, a cylinder 501 of an opening and shutting device, is located in front of the right side of cassette 200 to be inserted or drawn out by the XY table 302 installed in the main body 301 of the manipulator 300. A number of cassettes 200 are placed in t he supporting stand 400 separated by a predetermined distance. In operation, cylinder 501 and then rod 502 moves forward in the X-direction, so that the roller 503 attached to the end of rod is moved forward ahead of door 203 of cassette 200. To is accomplish this, cylinder 501 is first moved in the Ydirection to a side of cassette 200 by the XY table 302 such that roller 503 can be located in the rear of the door projected from the side of the cassette. Finally, the cylinder 501 operates in the X-direction and causing roller 503 to move backward. Accordingly, as shown in FIG. 3, door 203 is opened by roller 503 supported at rod 502 and the light irradiated from luminous element 610 installed on the support 601 is irradiated into cassette 200. When reticle 100 is installed within cassette 200, the light reflected from reticle 100 is sensed by the light receiving element 620 and then insertion of reticle 100 by hand 310 of manipulator 300 is discontinued. When the light irradiated from the luminous element 610 is not sensed by light receiving elemen7- 620, reticle 100 is not loaded within cassette 200, and hand 310 inserts reticle 100 into the cassette.
FIG. 5 shows another embodiment of the present invention where cassette 200 is made of semitransparent or transparent material, wherein it is sensed whether or not reticle 100 is loaded in cassette 200 by irradiating lighr- from luminous element 31 into the cassette made of the transparent or semitransparent material and then sensing the 11 reflected light with light receiving element 32. That is, when reticle 100 is loaded within cassette 200 the light irradiated from luminous element 31 is reflected by reticle 100 and then is sensed by light receiving element 32. When reticle 100 is not loaded within the cassette, the light irradiated from the luminous element 31 goes through cassette 200 and is not sensed by light receiving element 32. Therefore, whether or not a reticle is loaded within cassette 200 is determined on the basis of the light sensed by light receiving element 32. Hand 310 and the cylinder for opening and shutting a door operate in the same manner as described above.
FIG. 6 shows still another embodiment of the present invention which senses whether or not reticle 100 is loaded within cassette 200 by using a pre-measured reference weight of a cassette, wherein the weight of the cassette is sensed by a weight sensor 900 installed on the supporting stand 400. It is determined whether or not reticle 100 is loaded within the cassette by comparing the weight information with a reference weight stored in the control portion of manipulator 300. Hand 310 of the manipulator operates on the basis of the comparison.
As described above, the reticle detecting apparatus decermines whet-her or not a reticle is 12 loaded within a cassette and then controls a manipulator accordingly, thereby preventing damage due to contact between a reticle loaded within a cassette and a reticle supported by the hand.
The apparatus described above comprise preferred embodiments of the present invention. However, it will be apparent to those skilled in the art that various modifications and variations can be made in the apparatus and methods of this invention without departing from the spirit or scope of the present invention. The present invention covers such modifications and variations which are within the scope of the appended claims and their equivalents. For example, the present invention can be applied to a reticle dust removing device and a reticle cleansing device, etc.
is
Claims (12)
1. A reticle loading and unloading apparatus, comprising:
cassette including a door longer than a frontwidth of the cassette; manipulator including a hand for inserting a reticle in said cassette or drawing the reticle out of said cassette; opening and shutting means in said manipulator for opening and shutting said door; and sensina means on at least one side of said hand and said opening and shutting means for checking whether the reticle is loaded within said cassette.
is
2. The reticle loading and unloading apparatus according to claim 1, wherein said sensing means further comprises: supports on both sides of the hand of said manipulator; a luminous element on one of said supports for irradiating light into said cassette; and a light receiving element for sensing light irradiated from said luminous element and then reflected from the reticle.
3. The reticle loading and unloading apparatus 14 according to claim 2, wherein said light receiving element and said luminous element are on said hand.
is
4. A reticle loading and unloading apparatus, comprising: a cassette including a door in front of the cassette; a manipulator including a hand for inserting a reticle in said cassette or drawing the reticle out of said cassette; opening and shutting means in said manipulator for opening and shutting said door; and sensing means for checking whether the reticle is loaded within the cassette, said sensing means being on at least one side of said cassette.
5. The reticle loading and unloading apparatus according to claim 4, wherein said sensing means comprises a luminous element for irradiating light on one side of the cassette and a light receiving element on the same side of the cassette for sensing light irradiated from said luminous element and then reflected from the reticle within the cassette.
6. The reticle loading and unloading apparatus according to claim 4, wherein said sensJnq means is comprises a luminous element for irradiating light on one side of the cassette and a light receiving element on the opposite side of the cassette for sensing light irradiated from said luminous element and then transmitted through the cassette.
7. A reticle loading and unloading apparatus, comprising: a supporting stand for supporting a number of cassettes mutually separated by a predetermined distance; a manipulator having a hand for selectively inserting a reticle in each one of said cassettes supported on said supporting stand or drawing the reticle out of each one of said cassettes; opening and shutting means in said manipulator for opening and shutting said door; a weight sensor for sensing a weight of a corresponding one of said cassettes, said weight sensor being under said corresponding cassette in said supporting stand; and a control portion for determining if the reticle is loaded within said cassette by a weight sensed through said sensor.
8. A reticle loading and unloading apparatus 16 according to claim 7, wherein said weight sensor includes a load cell.
9. A reticle loading and unloading apparatus, comprising a cassette for storing a reticle, manipulator means for inserting a reticle from the cassette, and a sensor for detecting whether a reticle is in said cassette before said manipulator means inserts a reticle into cassette.
10. Apparatus according to claim 9, wherein said sensor is mounted outside said cassette.
11. A method of inserting a reticle into a storage cassette, comprising sensing whether another reticle is in said cassette before inserting the reticle into the cassette.
12. A reticle sensing arrangement substantially as hereinbefore described with reference to the accompanying diagrams.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940021085A KR0144945B1 (en) | 1994-08-25 | 1994-08-25 | Reticle detecting device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB9517171D0 GB9517171D0 (en) | 1995-10-25 |
| GB2292636A true GB2292636A (en) | 1996-02-28 |
| GB2292636B GB2292636B (en) | 1998-12-23 |
Family
ID=19391159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9517171A Expired - Fee Related GB2292636B (en) | 1994-08-25 | 1995-08-22 | Apparatus for loading and unloading reticles |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0878325A (en) |
| KR (1) | KR0144945B1 (en) |
| CN (1) | CN1130260A (en) |
| DE (1) | DE19530856A1 (en) |
| FR (1) | FR2723929B1 (en) |
| GB (1) | GB2292636B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000062332A1 (en) * | 1999-04-13 | 2000-10-19 | Semiconductor 300 Gmbh & Co. Kg | ARRANGEMENT FOR STORING OBJECTS, PARTICULARLY FOR STORING DISKLIKE OBJECTS SUCH AS WAFERS, FLAT PANELS OR CDs |
| EP1133440A1 (en) * | 1998-06-17 | 2001-09-19 | Genmark Automation, Inc. | Automated opening and closing of ultra clean storage containers |
| CN111699143A (en) * | 2017-11-30 | 2020-09-22 | 中国建材国际工程集团有限公司 | Method for determining position of substrate in closed chamber and apparatus for performing the same |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100620160B1 (en) * | 2002-12-30 | 2006-09-01 | 동부일렉트로닉스 주식회사 | Apparatus for loading a reticle |
| KR100665293B1 (en) * | 2006-01-04 | 2007-01-17 | 코리아테크노(주) | Boxcover opener for use of photomask shipping box |
| CN105448783A (en) * | 2015-12-28 | 2016-03-30 | 江苏创基新能源有限公司 | Excessive adhesive inspection device of frame element |
| CN108615332A (en) * | 2016-12-13 | 2018-10-02 | 海太半导体（无锡）有限公司 | Patch device substrate position sensor sensing and alarm system |
| CN110941145B (en) * | 2018-09-21 | 2021-07-30 | 上海微电子装备（集团）股份有限公司 | Mask detection device and method and mask library equipment |
| CN110609451A (en) * | 2019-08-19 | 2019-12-24 | 武汉华星光电技术有限公司 | Exposure machine |
| CN113671799A (en) * | 2020-05-15 | 2021-11-19 | 长鑫存储技术有限公司 | Photomask detection device and method, exposure machine and photoetching equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4238834A1 (en) * | 1991-11-18 | 1993-05-19 | Fusion Systems Corp | Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm |
| US5225691A (en) * | 1992-05-18 | 1993-07-06 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6276531A (en) * | 1985-09-27 | 1987-04-08 | Canon Inc | Method for storing |
| JPS6278084A (en) * | 1985-09-27 | 1987-04-10 | キヤノン株式会社 | Substrate container |
| US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
| US4999671A (en) * | 1986-07-11 | 1991-03-12 | Canon Kabushiki Kaisha | Reticle conveying device |
| EP0452041B1 (en) * | 1990-04-06 | 1996-11-27 | Canon Kabushiki Kaisha | Substrate conveying device and method of controlling the same |
-
1994
- 1994-08-25 KR KR1019940021085A patent/KR0144945B1/en not_active IP Right Cessation
-
1995
- 1995-08-22 GB GB9517171A patent/GB2292636B/en not_active Expired - Fee Related
- 1995-08-22 DE DE19530856A patent/DE19530856A1/en not_active Withdrawn
- 1995-08-24 FR FR9510047A patent/FR2723929B1/en not_active Expired - Fee Related
- 1995-08-24 JP JP7239148A patent/JPH0878325A/en active Pending
- 1995-08-25 CN CN95117126A patent/CN1130260A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4238834A1 (en) * | 1991-11-18 | 1993-05-19 | Fusion Systems Corp | Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm |
| US5225691A (en) * | 1992-05-18 | 1993-07-06 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper with emitter and detector arrays for slot interrogation |
Non-Patent Citations (1)
| Title |
|---|
| WPI Abstract Accession No 93-168783/21 & DE 4238834 A1 (FUSION) 19.5.93 (see abstract) * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1133440A1 (en) * | 1998-06-17 | 2001-09-19 | Genmark Automation, Inc. | Automated opening and closing of ultra clean storage containers |
| EP1133440A4 (en) * | 1998-06-17 | 2009-06-10 | Genmark Automation Inc | Automated opening and closing of ultra clean storage containers |
| WO2000062332A1 (en) * | 1999-04-13 | 2000-10-19 | Semiconductor 300 Gmbh & Co. Kg | ARRANGEMENT FOR STORING OBJECTS, PARTICULARLY FOR STORING DISKLIKE OBJECTS SUCH AS WAFERS, FLAT PANELS OR CDs |
| CN111699143A (en) * | 2017-11-30 | 2020-09-22 | 中国建材国际工程集团有限公司 | Method for determining position of substrate in closed chamber and apparatus for performing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9517171D0 (en) | 1995-10-25 |
| CN1130260A (en) | 1996-09-04 |
| FR2723929B1 (en) | 1997-07-25 |
| KR960009089A (en) | 1996-03-22 |
| GB2292636B (en) | 1998-12-23 |
| FR2723929A1 (en) | 1996-03-01 |
| JPH0878325A (en) | 1996-03-22 |
| KR0144945B1 (en) | 1998-08-17 |
| DE19530856A1 (en) | 1996-02-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19990822 |