CN112731579A - Pixel polarizing film array, detection device and infrared polarization detector - Google Patents

Pixel polarizing film array, detection device and infrared polarization detector Download PDF

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Publication number
CN112731579A
CN112731579A CN202011534038.9A CN202011534038A CN112731579A CN 112731579 A CN112731579 A CN 112731579A CN 202011534038 A CN202011534038 A CN 202011534038A CN 112731579 A CN112731579 A CN 112731579A
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China
Prior art keywords
pixel
light absorption
polarized light
array
polarization
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Pending
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CN202011534038.9A
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Chinese (zh)
Inventor
赵旸
张鹏
侯虎旺
张辉
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/59Radiation pyrometry, e.g. infrared or optical thermometry using polarisation; Details thereof

Abstract

The invention discloses a pixel polaroid array which has a light absorption function and a polarization function and is used as a light absorption layer and a polarization layer in a pixel structure, the pixel array comprises a plurality of polarized light absorption units, each polarized light absorption unit comprises four polarized light absorption sheets, the four polarized light absorption sheets are aligned in pairs and are arranged in a 2 x 2 array, the material of each polarized light absorption sheet is a carbon nano tube film arranged in sequence, the tube axis directions of the carbon nano tubes arranged in sequence of the two adjacent polarized light absorption sheets in each polarized light absorption unit are different, the pixel polaroid array is arranged on the upper layer of the pixel structure and is used for polarizing and absorbing light waves, and the anisotropic absorption performance of the carbon nano tube film arranged in sequence on light is utilized, so that the functions of polarization and light absorption can be realized, the light absorption layer of an infrared detector can be replaced, and the pixel array is used as a polarization/light absorption layer. The invention also discloses a pixel polaroid array detection device and an infrared polarization detector.

Description

Pixel polarizing film array, detection device and infrared polarization detector
Technical Field
The invention relates to the technical field of infrared detection, in particular to a film pixel polaroid array based on an in-line carbon nanotube, a detection device and an infrared polarization detector.
Background
All objects with the temperature higher than the absolute zero degree can radiate electromagnetic waves outwards, and the higher the temperature is, the shorter the peak wavelength of the radiated electromagnetic waves is. The wavelength of electromagnetic wave radiated from an object at room temperature of about 300K is 8-14um, and the wave band is defined as long-wave infrared. By detecting infrared radiation emitted by an object, an image which can be observed and displayed is formed after processing, the detection technology of the object is called as an infrared thermal imaging technology, and thermal imaging generally refers to detection imaging in a medium wave 3-5 um wave band or a long wave 8-14um wave band.
The infrared thermal imaging technology is one of important methods for detecting and identifying targets, has wide application in the military and civil fields, and is an important information acquisition means. Traditional infrared imaging techniques focus on the radiation intensity and spectral information of the target, which requires a certain radiation intensity difference between the target and the background to effectively detect the target. The background of the target is more and more complex now, and especially the target is disguised and hidden, and the background has serious interference to the target detection. In recent years, the infrared polarization imaging technology is more and more commonly applied in the fields of photography, microscopy, atmospheric remote sensing, astronomy, biomedical diagnosis and the like due to the enhancement of image contrast and the improvement of signal to noise ratio.
Polarization is one of the inherent characteristics of light, and is important in the same way as the amplitude and phase of light. Substances have different polarization characteristics due to their own properties, that is, the substances emit infrared radiation with different polarization characteristics due to their own properties. Compared with the traditional infrared imaging technology, the infrared polarization imaging technology has the unique advantages that: information can be provided on the orientation, material type and roughness of the surface of the substance.
A micro-polarizer array is a device that can extract a full set of polarization information of light in parallel and in real time, and is generally placed in front of an infrared detector for use. Most of the existing micro-polarizer arrays adopt a metal nano wire grid scheme, TE wave (transverse electric wave) photons with the polarization direction parallel to the wire grid are reflected, and TM wave (transverse magnetic wave) photons with the polarization direction perpendicular to the wire grid are transmitted. Wherein, the period of the nano-scale metal wire grating and the requirement of the manufacturing process on the process and the equipment are higher, which causes the problems of complex process, high cost, low efficiency and the like.
In the patent CN109343166A of the previous application, a method for manufacturing a micro-polarizer array by using a multi-walled carbon nanotube film and a method for manufacturing the same are provided, which effectively solve the limiting factors in the device manufacturing process such as process, cost and efficiency, but if it is to implement infrared polarization imaging, the carbon nanotube micro-polarizer array needs to be further integrated with an infrared detector in a pixel-level manner, as shown in fig. 1, infrared light radiated by an object passes through the aligned carbon nanotube micro-polarizer array and then becomes linearly polarized light, and the transmitted linearly polarized light is acquired by the infrared detector, thereby implementing polarization imaging. In the pixel structure of the infrared detector, there is a light absorption layer structure, the light absorption layer is usually made of a material with high absorptivity to photons, photon energy transmitted through the micro-polarizer array is substantially absorbed by the light absorption layer structure in the pixel, and the absorbed energy is used to realize photoelectric conversion or photothermal conversion (depending on the signal readout mode) for signal output. Essentially, the above patents utilize the anisotropic transmission properties of light by multi-walled carbon nanotubes. Moreover, when the micro-polarizer array and the infrared detector are integrated, it is difficult to achieve strict pixel-level alignment, and a situation of direction deviation between the micro-polarizer array and the infrared detector (essentially, the direction deviation between the micro-polarizer array unit and the light absorption layer) occurs, so that pixel crosstalk between adjacent pixels is caused during imaging, and the detection accuracy and the imaging quality are affected.
Disclosure of Invention
In order to solve the technical problems, simplify the process and prevent pixel crosstalk between adjacent pixels during imaging so as to influence the detection precision and the imaging quality, the invention discloses a pixel polarizer array, a detection device and an infrared polarization detector based on an in-line carbon nanotube film, and the specific scheme is as follows.
A pixel polaroid array has a light absorption function and a polarization function, can be used as a light absorption layer and a polarization layer in a pixel structure, and comprises a plurality of polarized light absorption units, wherein each polarized light absorption unit comprises four polarized light absorption sheets, the four polarized light absorption sheets are aligned in pairs and arranged in a 2 x 2 array, each polarized light absorption sheet is made of an in-line carbon nanotube film, the tube axis directions of in-line carbon nanotubes of two adjacent polarized light absorption sheets in each polarized light absorption unit are different, and the pixel polaroid array is arranged on the upper layer of the pixel structure and used for polarizing and absorbing light waves.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two opposite polarized absorbers in each of the polarizer absorbing units are perpendicular.
According to some embodiments of the present invention, the directions of the aligned carbon nanotubes of the four polarized light absorbers of the polarized light absorption unit are 0 °, 45 °, 90 ° and 135 °, respectively.
According to some embodiments of the invention, the aligned carbon nanotube film is a one-dimensional tubular carbon nanotube, the one-dimensional tubular carbon nanotube is arranged in parallel, and the one-dimensional tubular carbon nanotube is arranged to form an anisotropic two-dimensional material.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotube has a diameter of 1nm to 50 nm.
According to some embodiments of the invention, the size of the polarizing absorber is comparable to the size of a pixel of the pixel structure.
According to some embodiments of the invention, the shape of the polarized light absorber is consistent with the shape of the pixel structure, and the polarized light absorber and the pixel are arranged in an up-down alignment manner.
According to some embodiments of the invention, an array of pixel polarizers as described above is included.
According to some embodiments of the invention, an array of pixel polarizers as described above is included.
The invention sets 2 x 2 arranged 4 polaroids made of the in-line carbon nanotube film, the direction of the in-line carbon nanotube of two opposite polaroids is vertical, when light beam is incident to the in-line carbon nanotube film, the photon of TE wave is absorbed, the photon of TM wave is transmitted, the absorption characteristic and the transmission characteristic of the photon of TM wave both show anisotropy, the anisotropic absorption performance of the in-line carbon nanotube film to light is utilized, the functions of polarization and light absorption can be realized, and the in-line carbon nanotube film can replace a light absorption layer of an infrared detector to be used as a polarization/light absorption layer.
Drawings
FIG. 1 schematically illustrates a prior art integration of an infrared detector with a pixel polarizer array;
FIG. 2 schematically shows the structure of a polarizer array and the positional relationship with a pixel according to an embodiment of the present disclosure;
FIG. 3 schematically illustrates a structural diagram of an infrared polarization detector based on an in-line carbon nanotube film according to an embodiment of the disclosure;
FIG. 4 schematically illustrates an electron microscope image of an in-line carbon nanotube film of a pixel polarizer array of an embodiment of the disclosure at a scale of 100 μm;
FIG. 5 schematically shows an electron microscope image of an in-line carbon nanotube film of a pixel polarizer array of an embodiment of the present disclosure at a scale of 10 μm;
wherein 1 denotes a prior art pixel layer; 2 represents a prior art polarizing layer; 3 represents a prior art polarizing plate; 4 represents a prior art light absorbing layer; 5 denotes a prior art functional layer; 6 denotes a detection device; 7 denotes a polarized light absorbing layer; 8 represents a functional layer; 9 represents a polarized light absorbing unit; and 10 denotes a picture element.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
It is to be understood that such description is merely illustrative and not intended to limit the scope of the present invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. Furthermore, in the following description, descriptions of well-known technologies are omitted so as to avoid unnecessarily obscuring the concepts of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "comprising" as used herein indicates the presence of the features, steps, operations but does not preclude the presence or addition of one or more other features.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly formal sense, such as by the use of pixels, also known as pixels or dots of pixels, or image elements (pixel elements). Is the smallest unit that constitutes the digitized image.
Fig. 1 schematically shows a schematic diagram of integration of an infrared detector and a polarizer array in the prior art, as shown in fig. 1, the structure of the infrared polarization detector in the prior art includes a prior art image element layer 1 and a prior art polarization layer 2, wherein the prior art image element layer 1 is provided with a prior art light absorption layer 4, that is, the prior art functional layer 5 (i.e., all functional layers except the light absorption layer in the prior art pixel structure) is provided with a prior art light absorption layer 4, after the prior art image element layer 1 is processed, the prior art polarization layer 3 needs to be aligned with the prior art image element layer 1, which is specifically embodied that each image element of the prior art image element layer 1 (and the portion of the prior art light absorption layer 4 on the upper region thereof) needs to be aligned with one prior art polarizer 3, which increases the processing difficulty, if the prior art light absorption layer 4 is not completely aligned with the prior art polarizer 3, pixel crosstalk between adjacent pixels occurs during imaging, and thus detection accuracy and imaging quality are affected.
FIG. 2 schematically shows the structure of a polarizer array and the positional relationship with a pixel according to an embodiment of the present disclosure; fig. 3 schematically illustrates a structural diagram of an infrared polarization detector based on an in-line carbon nanotube film according to an embodiment of the present disclosure.
As shown in fig. 2, in order to simplify the manufacturing process and prevent pixel crosstalk between adjacent pixels during imaging from affecting the detection accuracy and the imaging quality, the invention discloses an application scheme of an in-line carbon nanotube film in an infrared polarization detector, and the specific scheme is as follows.
A pixel polarizing plate array having a light absorbing function and a polarizing function, which can be used as a light absorbing layer and a polarizing layer in a pixel structure, that is, a polarized light absorbing layer 7, includes a plurality of polarized light absorbing units 9, and each polarized light absorbing unit 9 includes four polarized light absorbing plates (wherein, 9a, 9b, 9c and 9d are four polarized light absorbing plates different in direction in one polarizing plate unit 9). Wherein the pixel polarizer array is arranged on the upper layer of the pixel structure and is used for polarizing and absorbing light waves.
According to some embodiments of the invention, the four polarized absorbing sheets are aligned two by two in a 2 x 2 array.
According to some embodiments of the invention, the material of each polarizing absorber is an in-line carbon nanotube film.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two adjacent polarized light absorbing sheets in each polarized light absorbing unit 9 are different.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two opposing polarizing absorbers in each of the polarizer absorbing cells 9 are perpendicular.
According to some embodiments of the present invention, the directions of the aligned carbon nanotubes of the four polarized light absorbers of the polarized light absorption unit 9 are 0 °, 45 °, 90 ° and 135 °, respectively.
According to some embodiments of the present invention, the aligned carbon nanotube film is a one-dimensional tubular carbon nanotube, and the one-dimensional tubular carbon nanotube is arranged in parallel.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotubes are aligned to form an anisotropic two-dimensional material.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotube has a diameter of 1nm to 50 nm.
Fig. 4 schematically shows an electron microscope image of the aligned carbon nanotube film of the pixel polarizer array of the embodiment of the present disclosure at a scale of 100 μm, in which it can be seen that the aligned carbon nanotube film has a significant orientation, and a plurality of one-dimensional tubular carbon nanotubes are aligned in parallel to form the film.
Fig. 5 schematically shows an electron microscope image of the aligned carbon nanotube film of the pixel polarizer array of the embodiment of the present disclosure at a scale of 10 μm, and the aligned carbon nanotubes show a certain meandering and winding, but still can be seen to have a significant orientation.
Based on the structural characteristics of the carbon nanotube film, the polarized light absorption plate has excellent absorption and transmission characteristics, the TE wave absorption rate is very high and is close to 1, and photons in incident beams with the polarization direction parallel to the axial direction of the incident beams can be directly absorbed by the carbon nanotubes in the row.
According to some embodiments of the present invention, the size of the polarizing absorber is comparable to the size of the pixel 10 of the pixel structure.
According to some embodiments of the present invention, the shape of the polarizing absorber is identical to the shape of the pixel 10 of the pixel structure, and is arranged in alignment above and below.
As shown in fig. 2 and 3, the present invention also discloses a pixel polarizer array detection device according to some embodiments of the present invention.
According to some embodiments of the present invention, the detection device 6 of the pixel polarizer array comprises the above-mentioned pixel polarizer array, in particular, a substrate, a pixel layer and a polarized light absorption layer 7.
The pixel polarizer array has a light absorption function and a polarization function, and can be used as a light absorption layer and a polarization layer in a pixel structure, that is, the polarized light absorption layer 7, and includes a plurality of polarized light absorption units 9, and each polarized light absorption unit 9 includes four polarized light absorption plates (where 9a, 9b, 9c, and 9d are four polarized light absorption plates with different directions in one polarizer unit). Wherein the pixel polarizer array is arranged on the upper layer of the pixel structure and is used for polarizing and absorbing light waves.
According to some embodiments of the invention, the four polarized absorbing sheets are aligned two by two in a 2 x 2 array.
According to some embodiments of the invention, the material of each polarizing absorber is an in-line carbon nanotube film.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two adjacent polarized light absorbing sheets in each polarized light absorbing unit 9 are different.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two opposing polarizing absorbers in each of the polarizer absorbing cells 9 are perpendicular.
According to some embodiments of the present invention, the directions of the aligned carbon nanotubes of the four polarized light absorbers of the polarized light absorption unit 9 are 0 °, 45 °, 90 ° and 135 °, respectively.
According to some embodiments of the present invention, the aligned carbon nanotube film is a one-dimensional tubular carbon nanotube, and the one-dimensional tubular carbon nanotube is arranged in parallel.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotubes are aligned to form an anisotropic two-dimensional material.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotube has a diameter of 1nm to 50 nm.
According to some embodiments of the present invention, the size of the polarizing absorber is comparable to the size of the pixel 10 of the pixel structure.
According to some embodiments of the present invention, the shape of the polarizing absorber is identical to the shape of the pixel 10 of the pixel structure, and is arranged in alignment above and below.
According to some embodiments of the present invention, an infrared polarization detector is also disclosed, comprising the pixel polarizer array described above.
The pixel polarizer array has a light absorption function and a polarization function, and can be used as a light absorption layer and a polarization layer in a pixel structure, that is, the polarized light absorption layer 7, and includes a plurality of polarized light absorption units 9, and each polarized light absorption unit 9 includes four polarized light absorption plates (where 9a, 9b, 9c, and 9d are four polarized light absorption plates with different directions in one polarizer unit). Wherein the pixel polarizer array is arranged on the upper layer of the pixel structure and is used for polarizing and absorbing light waves.
According to some embodiments of the invention, the four polarized absorbing sheets are aligned two by two in a 2 x 2 array.
According to some embodiments of the invention, the material of each polarizing absorber is an in-line carbon nanotube film.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of two adjacent polarized light absorbing sheets 9 in each polarized light absorbing unit 9 are different.
According to some embodiments of the present invention, the tube axis directions of the aligned carbon nanotubes of the two opposite polarized absorbers 9 in each polarizer absorber 9 are perpendicular.
According to some embodiments of the present invention, the directions of the aligned carbon nanotubes of the four polarized light absorbers of the polarized light absorption unit 9 are 0 °, 45 °, 90 ° and 135 °, respectively.
According to some embodiments of the present invention, the aligned carbon nanotube film is a one-dimensional tubular carbon nanotube, and the one-dimensional tubular carbon nanotube is arranged in parallel.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotubes are aligned to form an anisotropic two-dimensional material.
According to some embodiments of the invention, the one-dimensional tubular carbon nanotube has a diameter of 1nm to 50 nm.
According to some embodiments of the present invention, the size of the polarizing absorber is comparable to the size of the pixel 10 of the pixel structure.
According to some embodiments of the present invention, the shape of the polarizing absorber is identical to the shape of the pixel 10 of the pixel structure, and is arranged in alignment above and below.
The polarization light absorption sheet is made by arranging 2 x 2 arrayed 4 in-line carbon nanotube films, the directions of the in-line carbon nanotubes of the two opposite polarization sheets are vertical, when light beams enter the in-line carbon nanotube films, photons of TE waves are absorbed, photons of TM waves are transmitted, the absorption characteristics and the transmission characteristics of the photons show anisotropy, and the functions of polarization and light absorption can be realized by utilizing the anisotropic absorption performance of the in-line carbon nanotube films to light, so that the polarization light absorption sheet can be used as a polarization/light absorption layer instead of a light absorption layer of an infrared detector. That is, the polarized light absorption layer 7 composed of the pixel polarizer array provided by the present invention is directly used on the functional layer 8 (the functional layer 8 includes all functional layers except the polarized light absorption layer in the pixel structure), and structurally, compared with the prior art, the present application has a simpler structure, and simultaneously, the corresponding production process is simpler and has lower cost, and the technical problem that the pixel crosstalk between adjacent pixels occurs during imaging in the prior art, and further the detection precision and the imaging quality are affected is solved.
So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. In addition, the above definitions of the components are not limited to the specific structures, shapes or manners mentioned in the embodiments, and those skilled in the art may easily modify or replace them.
It is also noted that, unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing dimensions, range conditions, and so forth, used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
It will be appreciated by a person skilled in the art that various combinations and/or combinations of features described in the various embodiments and/or in the claims of the invention are possible, even if such combinations or combinations are not explicitly described in the invention. In particular, various combinations and/or combinations of the features recited in the various embodiments and/or claims of the present invention may be made without departing from the spirit or teaching of the invention. All such combinations and/or associations fall within the scope of the present invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A pixel polaroid array has a light absorption function and a polarization function and is used as a light absorption layer and a polarization layer in a pixel structure, and the pixel polaroid array is characterized by comprising a plurality of polarized light absorption units, wherein each polarized light absorption unit comprises four polarized light absorption sheets, the four polarized light absorption sheets are aligned in pairs and are arranged in a 2 x 2 array, each polarized light absorption sheet is made of an in-line carbon nanotube film, the tube axis directions of in-line carbon nanotubes of two adjacent polarized light absorption sheets in each polarized light absorption unit are different, and the pixel polaroid array is arranged on the upper layer of the pixel structure and used for polarizing and absorbing light waves.
2. The pixel polarizer array of claim 1, wherein the tube axis directions of the aligned carbon nanotubes of two opposite polarized absorbers in each polarizer absorber unit are perpendicular.
3. The pixel polarizer array according to claim 2, wherein the directions of the aligned carbon nanotubes of the four polarized absorbers of the polarized light absorbing unit are 0 °, 45 °, 90 ° and 135 °, respectively.
4. The pixel polarizer array according to any of claims 1 to 3, wherein the aligned carbon nanotube film is a one-dimensional tubular carbon nanotube, the one-dimensional tubular carbon nanotube is arranged in parallel, and the one-dimensional tubular carbon nanotube is arranged to form an anisotropic two-dimensional material.
5. The pixel polarizer array of claim 4, wherein the one-dimensional tubular carbon nanotubes have a diameter of 1nm to 50 nm.
6. The pixel polarizer array of any of claims 1 to 3, wherein the size of the polarizing absorber is comparable to the size of the pixel structure.
7. The pixel polarizer array according to any one of claims 1 to 3, wherein the shape of the polarizing absorber is consistent with the shape of the pixel structure, and the polarizing absorber is arranged in an up-and-down alignment.
8. A pixel polarizer array detection device comprising a pixel polarizer array according to any one of claims 1 to 7.
9. An infrared polarization detector comprising the pixel polarizer array of any one of claims 1 to 7.
CN202011534038.9A 2020-12-22 2020-12-22 Pixel polarizing film array, detection device and infrared polarization detector Pending CN112731579A (en)

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Citations (3)

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Publication number Priority date Publication date Assignee Title
CN103972322A (en) * 2013-02-04 2014-08-06 清华大学 Photosensitive resistor
CN109343166A (en) * 2018-12-05 2019-02-15 中国科学技术大学 Micro- polarization chip arrays based on multi-walled carbon nanotube and preparation method thereof
CN111430396A (en) * 2020-03-11 2020-07-17 中国科学院上海微***与信息技术研究所 Superconducting nanowire-based single photon polarization detection device and implementation device thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103972322A (en) * 2013-02-04 2014-08-06 清华大学 Photosensitive resistor
CN109343166A (en) * 2018-12-05 2019-02-15 中国科学技术大学 Micro- polarization chip arrays based on multi-walled carbon nanotube and preparation method thereof
CN111430396A (en) * 2020-03-11 2020-07-17 中国科学院上海微***与信息技术研究所 Superconducting nanowire-based single photon polarization detection device and implementation device thereof

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Title
XIAO L, ZHANG Y Y, WANG Y, ET AL: "《A polarized infrared thermal detector made from super-aligned multiwalled carbon nanotube films》", 《NANOTECHNOLOGY》 *
姜开利: "《超顺排碳纳米管阵列、薄膜、长线—通向应用之路》", 《中国科学》 *

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Application publication date: 20210430