CN110806279A - Low-temperature drift pressure sensor - Google Patents
Low-temperature drift pressure sensor Download PDFInfo
- Publication number
- CN110806279A CN110806279A CN201911227446.7A CN201911227446A CN110806279A CN 110806279 A CN110806279 A CN 110806279A CN 201911227446 A CN201911227446 A CN 201911227446A CN 110806279 A CN110806279 A CN 110806279A
- Authority
- CN
- China
- Prior art keywords
- shell
- sensing chip
- pressure sensor
- pressure sensing
- temperature drift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/02—Measuring force or stress, in general by hydraulic or pneumatic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/18—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges
- G01L7/182—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges constructional details, e.g. mounting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to the technical field of pressure sensors and discloses a low-temperature drift pressure sensor which comprises a shell, wherein a connecting pipe is arranged on the upper end surface of the shell, a sealing cover is connected to the top of the connecting pipe, a protective sleeve is arranged on the upper end surface of the shell and positioned inside the connecting pipe, a pressure sensing chip connected with the upper end surface of the shell is arranged inside the protective sleeve, and a gold wire penetrating through the protective sleeve is connected to the outer surface of the pressure sensing chip. According to the low-temperature-drift pressure sensor, the pressure sensing chip and the gold wire are arranged at the top of the isolation chamber and are communicated through the communication hole, so that the isolation liquid is in contact with the pressure sensing chip, the volume of the isolation chamber and the contact area of the pressure sensing chip and the isolation liquid are reduced, and the influence of the temperature drift of the isolation liquid on the pressure sensing chip is further reduced; and the gold wire is not contacted with the spacer fluid, so that the problem of tightness is solved, the structure is simplified, and the aim of low temperature drift is fulfilled.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a low-temperature drift pressure sensor.
Background
The fundamental reason for the drift is that all pressure sensors are based on the elastic deformation of a material, and no matter how good the elasticity of the material is, certain elastic fatigue is always generated after each elastic recovery; in addition, there is a more pronounced drift, i.e., temperature drift, in addition to material-induced drift, which is a change in the output of the pressure sensor due to a change in temperature, and which is determined by the multiple properties of the material, since a material is sensitive to both pressure and temperature.
Most of the existing pressure sensors utilize silicon oil as an isolating substance, but the output precision of the pressure sensor is influenced due to the existence of temperature drift, the existing pressure sensor chip and a gold wire are both positioned in an isolating chamber, the gold wire is connected with the outside, the tightness of the gold wire is difficult to guarantee, and the leakage problem exists, so that the low-temperature drift pressure sensor is provided to solve the problem.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a low-temperature-drift pressure sensor which has the advantages of low temperature drift and the like, and solves the problems that most of the existing pressure sensors use silicon oil as an isolating substance, but the output accuracy of the pressure sensor is influenced due to the temperature drift, the existing pressure sensor chip and a gold wire are both positioned in an isolating chamber, the gold wire is connected with the outside, the tightness of the gold wire is difficult to guarantee, and the leakage exists.
(II) technical scheme
In order to realize the purpose of low temperature drift, the invention provides the following technical scheme: a low-temperature drift pressure sensor comprises a shell, wherein a connecting pipe is arranged on the upper end surface of the shell, the top of the connecting pipe is connected with a sealing cover, a protective sleeve is arranged on the upper end surface of the shell and positioned inside the connecting pipe, a pressure sensing chip connected with the upper end surface of the shell is arranged inside the protective sleeve, and the outer surface of the pressure sensing chip is connected with a gold wire penetrating through the protective sleeve;
an isolation chamber filled with isolation liquid is also arranged in the shell;
the upper end face of the shell is provided with a communicating hole communicated with the isolation chamber, and the communicating hole is positioned below the sensing face of the pressure sensing chip.
Preferably, the pressure sensing chip is connected with a circuit board through a gold wire, and the circuit board is located on the upper end face of the shell and located inside the connecting pipe.
Preferably, the casing is further provided with a detection chamber filled with detection liquid, and an isolation membrane is arranged between the detection chamber and the isolation chamber and used for isolating the detection liquid.
Preferably, the bottom end of the shell and the bottom of the detection chamber are connected with a baffle.
Preferably, the outer surface of the shell is provided with an O-shaped groove, and a sealing ring is connected inside the O-shaped groove.
Preferably, the upper end of the connecting pipe forms an interference fit with the cover.
(III) advantageous effects
Compared with the prior art, the invention provides a low-temperature drift pressure sensor, which has the following beneficial effects:
according to the low-temperature-drift pressure sensor, the pressure sensing chip and the gold wire are arranged at the top of the isolation chamber and are communicated through the communication hole, so that the isolation liquid is in contact with the pressure sensing chip, the volume of the isolation chamber and the contact area of the pressure sensing chip and the isolation liquid are reduced, and the influence of the temperature drift of the isolation liquid on the pressure sensing chip is further reduced; and the gold wire is not contacted with the spacer fluid, so that the problem of tightness is solved, the structure is simplified, and the aim of low temperature drift is fulfilled.
Drawings
FIG. 1 is a schematic structural diagram of a low-temperature drift pressure sensor according to the present invention;
fig. 2 is a schematic structural diagram of a pressure sensor in the prior art.
In the figure: the device comprises a shell 1, a sealing ring 2, a baffle 3, an isolating membrane 4, an isolating chamber 5, a detection chamber 6, a sealing cover 7, a pressure sensing chip 8, a gold wire 9, a circuit board 10, a glass sleeve 11, a communication hole 12, a protective sleeve 13 and a connecting pipe 14.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a low temperature drift pressure sensor includes a housing 1, a connecting pipe 14 is arranged on an upper end surface of the housing 1, a sealing cover 7 is connected to a top of the connecting pipe 14, an upper end of the connecting pipe 14 forms an interference fit with the sealing cover 7, a protective sleeve 13 is arranged on the upper end surface of the housing 1 and inside the connecting pipe 14, a size of an inner space of the protective sleeve 13 is matched with a pressure sensing chip 8, a pressure sensing chip 8 hermetically connected with the upper end surface of the housing 1 is arranged inside the protective sleeve 13, and a gold wire 9 penetrating through the protective sleeve 13 is connected to an outer surface of the pressure sensing chip 8 for preventing silicone oil from leaking;
an isolation chamber 5 filled with isolation liquid is also arranged in the shell 1, and the isolation liquid can be silicone oil; the upper end surface of the shell 1 is provided with a communication hole 12 communicated with the isolation chamber 5, the communication hole 12 is positioned below the sensing surface of the pressure sensing chip 8, the pressure sensing chip 8 is connected with a circuit board 10 through a gold wire 9, and the circuit board 10 is positioned on the upper end surface of the shell 1 and positioned inside a connecting pipe 14;
a detection chamber 6 filled with detection liquid is also arranged in the shell 1, the detection liquid can be urea solution, and an isolation film 4 is arranged between the detection chamber 6 and the isolation chamber 5 and used for isolating the detection liquid and transmitting pressure force to the isolation liquid; the bottom of casing 1 and the bottom that is located detection room 6 are connected with baffle 3, and the surface of casing 1 is equipped with O type groove, and the inside in O type groove even has sealing washer 2.
Fig. 2 shows the structure of a pressure sensor in the prior art, which is different in that a pressure sensing chip 8 and a gold wire 9 are both located inside an isolation chamber and are in contact with an isolation liquid, the upper end of the gold wire 9 penetrates through a shell 1 and a circuit board 10 to be connected, and is sealed by sintering a glass sleeve 11, which has the disadvantages that the space of 5 is large, and the contact area of the pressure sensing chip 8 and the isolation liquid is large, and is easily affected by the temperature drift of the isolation liquid; the sealing property of the sintered glass sleeve 11 is not stable enough, and there is a possibility of oil leakage.
The invention has the beneficial effects that: according to the low-temperature-drift pressure sensor, the pressure sensing chip 8 and the gold wire 9 are arranged at the top of the isolation chamber 5, and the pressure sensing chip 8 is communicated through the communication hole 12, so that the isolation liquid is contacted with the pressure sensing chip 8, the volume of the isolation chamber 5 and the contact area of the pressure sensing chip 8 and the isolation liquid are reduced, and the influence of the temperature drift of the isolation liquid on the pressure sensing chip 8 is further reduced; and the gold wire 9 does not contact with the spacer fluid, does not have the problem of leakproofness, and the simplified structure has realized the purpose that low temperature floats, has solved and has used silicon oil as the barrier medium in most among the current pressure sensor, but because the existence of temperature drift makes pressure sensor's output precision receive the influence to current pressure sensor chip and gold wire all are located the inside of isolation chamber, and the gold wire is connected with the external world, and the leakproofness of gold wire is difficult to guarantee, has the problem of leaking.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A low temperature floats pressure sensor which characterized in that: the pressure sensing device comprises a shell (1), wherein a connecting pipe (14) is arranged on the upper end face of the shell (1), the top of the connecting pipe (14) is connected with a sealing cover (7), a protective sleeve (13) is arranged on the upper end face of the shell (1) and positioned inside the connecting pipe (14), a pressure sensing chip (8) connected with the upper end face of the shell (1) is arranged inside the protective sleeve (13), and a gold wire (9) penetrating through the protective sleeve (13) is connected to the outer surface of the pressure sensing chip (8);
an isolation chamber (5) filled with isolation liquid is also arranged in the shell (1);
the upper end face of the shell (1) is provided with a communicating hole (12) communicated with the isolation chamber (5), and the communicating hole (12) is located below the sensing face of the pressure sensing chip (8).
2. A low temperature drift pressure sensor according to claim 1, wherein: the pressure sensing chip (8) is connected with a circuit board (10) through a gold wire (9), and the circuit board (10) is located on the upper end face of the shell (1) and located inside the connecting pipe (14).
3. A low temperature drift pressure sensor according to claim 1, wherein: the inside of casing (1) still is equipped with and is filled with detection room (6) that detect the liquid, be equipped with barrier film (4) between detection room (6) and isolation room (5) for keep apart and detect the liquid.
4. A low temperature drift pressure sensor according to claim 3, wherein: the bottom of the shell (1) and the bottom of the detection chamber (6) are connected with a baffle (3).
5. A low temperature drift pressure sensor according to claim 1, wherein: the outer surface of the shell (1) is provided with an O-shaped groove, and a sealing ring (2) is connected inside the O-shaped groove.
6. A low temperature drift pressure sensor according to claim 1, wherein: the upper end of the connecting pipe (14) is in interference fit with the sealing cover (7).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911227446.7A CN110806279A (en) | 2019-12-04 | 2019-12-04 | Low-temperature drift pressure sensor |
| CN202011349215.6A CN112304474A (en) | 2019-12-04 | 2020-11-26 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911227446.7A CN110806279A (en) | 2019-12-04 | 2019-12-04 | Low-temperature drift pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110806279A true CN110806279A (en) | 2020-02-18 |
Family
ID=69492443
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911227446.7A Pending CN110806279A (en) | 2019-12-04 | 2019-12-04 | Low-temperature drift pressure sensor |
| CN202011349215.6A Pending CN112304474A (en) | 2019-12-04 | 2020-11-26 | Pressure sensor |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011349215.6A Pending CN112304474A (en) | 2019-12-04 | 2020-11-26 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN110806279A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113776728B (en) * | 2021-09-17 | 2024-06-04 | 深圳科维新技术有限公司 | Pressure transmission cavity structure for avoiding liquid low-temperature crystallization |
| CN115752873A (en) * | 2022-12-13 | 2023-03-07 | 武汉飞恩微电子有限公司 | Pressure sensor |
| CN115808264A (en) * | 2022-12-13 | 2023-03-17 | 武汉飞恩微电子有限公司 | Pressure sensor |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419235A (en) * | 2010-09-28 | 2012-04-18 | 刘胜 | Gas pressure sensor |
| CN106289634A (en) * | 2016-08-23 | 2017-01-04 | 太仓市威士达电子有限公司 | A kind of metal shell for pressure sensor package combines |
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN208399071U (en) * | 2018-07-27 | 2019-01-18 | 扬州扬杰电子科技股份有限公司 | Silicon piezoresistance type pressure sensor packaging structure |
| CN208833429U (en) * | 2018-09-27 | 2019-05-07 | 江苏德尔森控股有限公司 | A kind of small flame-proof pressure sensor |
| CN209356116U (en) * | 2019-01-29 | 2019-09-06 | 上海海华传感器有限公司 | A kind of urea pressure sensor |
| CN214010595U (en) * | 2020-11-26 | 2021-08-20 | 武汉飞恩微电子有限公司 | Pressure sensor |
-
2019
- 2019-12-04 CN CN201911227446.7A patent/CN110806279A/en active Pending
-
2020
- 2020-11-26 CN CN202011349215.6A patent/CN112304474A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN112304474A (en) | 2021-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110806279A (en) | Low-temperature drift pressure sensor | |
| CN100545583C (en) | A kind of differential pressure, pressure, temperature simultaneously measuring multi-parameter sensor | |
| CN104215382A (en) | Membrane-separation type gauge pressure sensor of external balance chamber | |
| CN204027754U (en) | The film isolated form gauge pressure transducer of external balance chamber | |
| CN211147903U (en) | Low-temperature drift pressure sensor | |
| CN211344019U (en) | Pressure sensor with double-sealing structure | |
| CN104215383B (en) | Thin-film isolation gauge pressure sensor with built-in balance chamber | |
| CN107941405A (en) | Hydrostatic sensor and its bearing calibration | |
| CN208780386U (en) | A kind of pressure sensor | |
| CN210089909U (en) | Medium isolation type pressure sensor | |
| CN212275130U (en) | Pressure measuring device and liquid level measuring instrument | |
| CN212228296U (en) | Pressure sensor | |
| CN106768113B (en) | A kind of fluid conveying measuring device | |
| JP3641533B2 (en) | Submerged hydraulic water level sensor | |
| KR20130138943A (en) | Closed-type pressure transducer | |
| CN211425746U (en) | Differential pressure sensor | |
| CN211504505U (en) | Sensor packaging structure | |
| JP2017133875A (en) | Water level detection device | |
| US6935184B2 (en) | Pressure transducer capable of detecting internal leakage of external media | |
| CN210741726U (en) | Pressure transmitter | |
| CN212585879U (en) | Pressure sensor for air pressure monitoring | |
| CN216410455U (en) | Miniature precision pressure sensor | |
| CN208420267U (en) | A kind of vacuum pressure sensor | |
| CN214893781U (en) | High-sealing impact-resistant pressure sensor | |
| CN204027755U (en) | The film isolated form gauge pressure transducer of built-in balance chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200218 |