CN110567681A - Device and method for detecting non-common view field auto-collimation optical system - Google Patents
Device and method for detecting non-common view field auto-collimation optical system Download PDFInfo
- Publication number
- CN110567681A CN110567681A CN201910918108.1A CN201910918108A CN110567681A CN 110567681 A CN110567681 A CN 110567681A CN 201910918108 A CN201910918108 A CN 201910918108A CN 110567681 A CN110567681 A CN 110567681A
- Authority
- CN
- China
- Prior art keywords
- collimation
- auto
- optical module
- module
- common
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention discloses a device and a method for detecting a non-common view field auto-collimation optical system, the device comprises a plurality of light sources, an optical module, an auto-collimation module, a plurality of detectors and a data processing module, the light sources and the detectors are arranged at the image surface position of the optical module, the auto-collimation module is arranged in front of the entrance pupil of the optical module and inclines at an angle theta in the direction vertical to the optical axis of the optical module, the output end of the detector is connected with the data processing module, the device and the method obtain the image point intensity, the wavefront sub-aperture shape and the non-common view field auto-collimation sub-aperture wavefront Zernike aberration variable quantity through tracing light rays, the optical module detuning quantity is obtained through solving, the optimal image quality is obtained through the adjustment and correction of the opposite quantity of the optical module detuning quantity through an adjusting device, compared with the traditional auto-collimation detection and adjustment, the auto-collimation module of the device and the method keeps a fixed posture unchanged, and simultaneously detects a, the optical module adjusting efficiency is effectively improved.
Description
Technical Field
The invention relates to the field of adaptive optics, in particular to a device and a method for detecting a non-common-view-field auto-collimation optical system.
background
when an optical system is installed and adjusted on the ground, a plurality of different field wavefronts on an axis or outside the axis of an imbalance module are obtained in a time-sharing mode by an auto-collimation detection method based on an interferometer, then the imbalance of a lens body of the optical module is obtained through subsequent algorithm calculation, the lens body of the optical module is adjusted to be in imbalance, the optical module is adjusted to be in an optimal image quality state, and a convergence point of an emergent laser spherical wave and a convergence point returned by the optical module are overlapped through adjustment of the posture of the interferometer by the auto-collimation detection method, namely, the parfocal state is achieved.
The prior auto-collimation detection method can only detect the wavefront of one view field in a parfocal state, the detection of the wavefronts of different view fields needs to readjust the positions of the interferometer and the auto-collimation plane mirror, and a large amount of adjustment time is spent, so that the adjustment efficiency is limited, and therefore, the problems that the detection of the wavefronts of different view fields in the traditional interferometer auto-collimation detection adjustment has no simultaneity, the adjustment efficiency is not high enough and the like exist.
Disclosure of Invention
The invention provides a device and a method for detecting a non-common-view-field auto-collimation optical system.
In order to achieve the above object, the present invention provides an apparatus for detecting a non-common-field-of-view auto-collimation optical system, comprising:
The device comprises at least two light sources, an optical module, an auto-collimation module, at least two detectors and a data processing module; the plurality of light sources and the plurality of detectors are arranged at the image surface position of the optical module and used for detecting the image point intensity of the plurality of non-common view field self-collimating wavefronts and obtaining the wavefront sub-aperture shape; the auto-collimation module is arranged in front of the entrance pupil of the optical module and is as close to the entrance pupil of the optical module as possible, so that sub-aperture wave fronts as large as possible can be obtained through detection, and the auto-collimation module and the optical axis of the optical module are inclined at an angle theta in the vertical direction; the output end of the detector is connected with the data processing module, and information detected by the detector is converted into a digital signal and transmitted to the data processing module; and the data processing module is used for storing the digital signals acquired by the detector, carrying out digital refocusing operation and image processing, judging whether the optical element has defects or not and displaying the processing result of the digital image.
Further, the non-common field of view means that the wavefront field of view of the point light source passing through the optical module is different from the wavefront field of view returned from the auto-collimation module to the optical module, and finally the superposition of the wavefronts of the two different field of view is obtained on the detector, wherein the deviation of the two wavefront field of view is 2 theta.
further, the light source is preferably a point light source.
further, the optical module is preferably a transmissive optical module or a reflective optical module.
Further, the auto-collimation module is preferably an auto-collimation plane mirror.
further, one light source corresponds to one detector, and the distance between each adjacent pair of light source and detector is L ═ f × tan (2 θ), where f is the focal length of the optical module, so that the interference between the light source and the detector position can be avoided.
Further, the data processing module is preferably a microcomputer.
furthermore, the optical module image plane is preferably square, and the light source is preferably placed at the center of the square image plane and at five view field positions at four corners.
The invention also provides a method for detecting the non-common-field auto-collimation optical system, which comprises the following steps:
Step S1: the adjusting device adjusts the plurality of light sources to corresponding directions according to corresponding non-common-view-field auto-collimation wave fronts based on the light ray tracing and according to optical structure parameters and relative positions of the auto-collimation module, the optical module and the light sources and detectors, so that all the light sources are imaged on the corresponding detectors through the optical module and the auto-collimation module;
step S2: detecting image information of image points, and acquiring the shape of a non-common view field auto-collimation sub-aperture;
Step S3: solving to obtain Zernike aberration Z, and solving to obtain Zernike aberration Z (rho, theta) by adopting an algorithm based on the Fourier transform relation between the image point intensity and the exit pupil wavefront and combining with the non-common field auto-collimation sub-aperture shape, wherein the rho represents the radial variable of the wave aberration at the exit pupil of the optical module, and the theta represents the angular variable;
Step S4: solving to obtain an optical module detuning amount D, combining an approximate linear relation Z between the intrinsic non-common-field auto-collimation sub-aperture wave front Zernike aberration Z of the optical module and the optical module lens detuning amount D, wherein k represents a linear coefficient, establishing an equation set, and solving to obtain the lens detuning amount by a least square method;
the sub-aperture wavefront means that the wavefront of the point light source passing through the optical module is inconsistent with the position of the wavefront returned by the autocollimation plane mirror at the entrance pupil of the optical module, so that a part of the wavefront does not return to the detector through the entrance pupil, and finally the sub-aperture of the autocollimation wavefront with the non-common view field is obtained on the detector;
step S5: adjusting and correcting, namely adjusting and correcting the corresponding mirror body of the optical module by the opposite amount of the misadjustment amount through the adjusting device according to the misadjustment amount of the optical module;
Step S6: and obtaining the optimal image quality, and iteratively operating the steps S1-S5 until the deviation of the corresponding non-common-field-of-view autocollimator aperture wavefront Zernike aberration obtained by detection and the expected value is within the threshold range, and completing adjustment and correction at the moment to achieve the optimal image quality of the optical module image surface.
Further, the algorithm is preferably a conventional phase recovery or phase difference method.
further, the Zernike aberration is mainly low-order aberration, including defocus, astigmatism and coma, and the misalignment amount refers to rigid body displacement of the mirror body, including decentration, tilt and axial displacement of the mirror body of the optical module.
Compared with the prior art, the device and the method for detecting the non-common-field auto-collimation optical system have the advantages that the plurality of light sources and the corresponding plurality of detectors are arranged at the image surface position of the optical module, the auto-collimation module is arranged in front of and close to the entrance pupil position of the optical module and inclines an angle theta in the direction perpendicular to the optical axis of the optical module, the auto-collimation module keeps a fixed posture and traces light rays, the multiple non-common-field auto-collimation sub-aperture wave fronts can be detected simultaneously until the deviation of the Zernike aberration of the corresponding non-common-field auto-collimation sub-aperture wave fronts obtained through detection and an expected value is within a threshold range, so that the optimal image quality is obtained, and the assembly and adjustment efficiency of the optical module is effectively improved.
drawings
in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic diagram of an apparatus for detecting a non-common-field-of-view auto-collimation optical system according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of light sources and detectors distributed on an image plane of an optical module in an apparatus for detecting a non-common-field-of-view auto-collimation optical system according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a detection method of an apparatus for detecting a non-common-field-of-view auto-collimation optical system according to an embodiment of the present invention.
| Reference numerals | Name (R) | Reference numerals | Name (R) |
| 1 | Light source | 4 | Detector |
| 2 | Optical module | 5 | Optical module image plane |
| 3 | Auto-collimation module |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
as shown in fig. 1 and fig. 2, an embodiment of the present invention provides an apparatus for detecting a non-common-field auto-collimation optical system, including five point light sources 1 and five detectors 4, where the light sources 1 and the detectors 4 are placed at positions of an image plane 5 of an optical module, a numerical aperture of the light sources 1 is selected according to a focal length and a clear aperture of a transmissive optical module 2, and an auto-collimation module 3 is placed in front of and near an entrance pupil of the optical module 2.
in the embodiment of the present invention, the tilt angle θ of the auto-collimation module 3 perpendicular to the optical axis of the optical module 2 is equal to 0.
Preferably, the inclination angle θ of the auto-collimation module 3 perpendicular to the optical axis of the optical module 2 is greater than 0, and the inclination angle of the auto-collimation module 3 is kept unchanged during the detection process.
In the embodiment of the invention, the optical module image plane 5 is square, and five light sources 1 and five detectors 4 are arranged at the center and four corners of the square image plane at five field-of-view positions.
preferably, the optical module image plane 5 is circular, and the light source 1 and the detector 4 are placed at the center of the circular image plane and at positions on the circular arc.
Preferably, the number of the light sources 1 and the detectors 4 is greater than five, and the distance between each adjacent pair of the light sources 1 and the detectors 4 is L ═ f × tan (2 θ), so as to avoid the position interference between the light sources 1 and the detectors 4, where f is the focal length of the optical module.
Preferably, the optical module image plane 5 is rectangular, elliptical, and other irregular shapes.
Preferably, when the optical module image plane 5 is square, and the number of the light sources 1 and the detectors 4 is more than five, the light sources 1 and the detectors 4 are distributed on the optical module image plane 5 in an array.
In the embodiment of the present invention, each point light source 1 and the corresponding detector 4 have corresponding relations of 1A and 4A, 1B and 4B, 1C and 4C, 1D and 4D, and 1E and 4E, where the distance between each point light source 1 and the detector 4 of the adjacent image point is L ═ f × tan (2 θ), and the adjacent relations are 1A and 4A, 1B and 4D, 1C and 4E, 1D and 4B, 1E and 4C.
As shown in fig. 3, a method for detecting a device of a non-common-field-of-view auto-collimation optical system includes the following steps:
Step S1: the adjusting device adjusts the plurality of light sources to corresponding directions according to corresponding non-common-view-field auto-collimation wave fronts based on the light ray tracing and according to optical structure parameters and relative positions of the auto-collimation module, the optical module and the light sources and detectors, so that all the light sources are imaged on the corresponding detectors through the optical module and the auto-collimation module;
Step S2: detecting image information of image points, and acquiring the shape of a non-common view field auto-collimation sub-aperture;
Step S3: solving to obtain Zernike aberration Z, at a data processing module, based on Fourier transform relation between image point intensity and exit pupil wavefront, and combining with a non-common field of view auto-collimation sub-aperture shape, solving to obtain Zernike aberration Z ═ Z (rho, theta) by adopting a traditional phase recovery or phase difference method, wherein rho represents radial variable of wave aberration at the exit pupil of the optical module, theta represents angular variable, and Zernike aberration is mainly low-order aberration and comprises defocus, astigmatism and coma;
step S4: solving to obtain an optical module misadjustment amount D, combining an approximate linear relation between the intrinsic non-common-field auto-collimation sub-aperture wave-front Zernike aberration Z of the optical module and the optical module lens body misadjustment amount D at a data processing module, wherein Z is kD, k represents a linear coefficient, establishing an equation set, and solving to obtain the lens body misadjustment amount through a least square method, wherein the misadjustment amount refers to rigid body displacement of the lens body and comprises eccentricity, inclination and axial displacement of the optical module lens body;
Step S5: the adjustment correction is carried out, and the adjustment correction of the opposite quantity of the misadjustment quantity is carried out on the corresponding mirror body of the optical module through an adjusting device according to the misadjustment quantity of the optical module at the data processing module;
Step S6: and obtaining the optimal image quality, and iteratively operating the steps S1-S5 until the deviation of the corresponding non-common-field-of-view autocollimator aperture wavefront Zernike aberration obtained by detection and the expected value is within the threshold range, and completing adjustment and correction at the moment to achieve the optimal image quality of the optical module image surface.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. The device for detecting the non-common-field-of-view auto-collimation optical system is characterized by comprising at least two light sources (1), an optical module (2), an auto-collimation module (3), at least two detectors (4) and a data processing module;
the light source (1) and the detector (4) are placed at the position of an optical module image surface (5);
The auto-collimation module (3) is arranged in front of the entrance pupil of the optical module (2), and the auto-collimation module (3) and the optical axis of the optical module (2) are inclined at an angle theta in the vertical direction;
the output end of the detector (4) is connected with the data processing module;
And the data processing module is used for storing, operating and processing the signals acquired by the detector (4) and displaying the processing result.
2. The apparatus for detecting a non-common field of view auto-collimation optical system as claimed in claim 1, wherein the light source (1) is a point light source.
3. The device for detecting a non-common-field-of-view auto-collimation optical system according to claim 1, wherein the optical module (2) is a transmissive optical module or a reflective optical module.
4. The apparatus for detecting a non-common-field-of-view auto-collimation optical system as recited in claim 1, wherein the auto-collimation module (3) is an auto-collimation flat mirror.
5. the apparatus for detecting a non-common-field-of-view auto-collimation optical system according to claim 1, wherein one light source (1) corresponds to one detector (4), and the distance between each adjacent pair of light source (1) and detector (4) is L ═ f × tan (2 θ), where f is the focal length of the optical module.
6. The apparatus of claim 1, wherein the data processing module is a microcomputer.
7. The device for detecting the non-common-field-of-view auto-collimation optical system as claimed in claim 1, wherein the optical module image plane (5) is square, and the light source (1) is placed at the center of the square image plane and five field-of-view positions at four corners.
8. The method for inspecting the device of the non-common view field auto-collimation optical system according to any one of claims 1 to 7, characterized by comprising the following steps:
Step S1: adjusting means for imaging all light sources (1) onto the respective detectors (4);
step S2: detecting image information of image points, and acquiring the shape of a non-common view field auto-collimation sub-aperture;
step S3: solving to obtain Zernike aberration Z, and solving to obtain Zernike aberration Z (rho, theta) by adopting an algorithm based on the Fourier transform relation between the image point intensity and the exit pupil wavefront and combining with the non-common field auto-collimation sub-aperture shape, wherein the rho represents the radial variable of the wave aberration at the exit pupil of the optical module, and the theta represents the angular variable;
step S4: solving to obtain an optical module detuning amount D, establishing an equation set by combining an approximate linear relation Z between the non-common-field auto-collimation sub-aperture wave front Zernike aberration Z of the optical module (2) and the optical module lens detuning amount D, wherein k represents a linear coefficient, and solving to obtain the lens detuning amount by a least square method;
Step S5: adjusting and correcting, namely adjusting and correcting the opposite quantity of the optical module (2) misadjustment quantity through an adjusting device according to the optical module misadjustment quantity;
Step S6: and obtaining the optimal image quality, and iteratively operating the steps S1-S5 until the deviation of the detected non-common-field autocollimation sub-aperture wave front Zernike aberration and the expected value is within the threshold range, so as to achieve the optimal image quality of the optical module image surface.
9. The method of claim 8, wherein the algorithm is a conventional phase recovery or phase difference method.
10. The method of claim 8, wherein the Zernike aberrations include defocus, astigmatism and coma, and the misalignment amounts include decentration, tilt and axial displacement of the lens body of the optical module (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910918108.1A CN110567681B (en) | 2019-09-26 | 2019-09-26 | Device and method for detecting non-common view field auto-collimation optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910918108.1A CN110567681B (en) | 2019-09-26 | 2019-09-26 | Device and method for detecting non-common view field auto-collimation optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110567681A true CN110567681A (en) | 2019-12-13 |
| CN110567681B CN110567681B (en) | 2021-02-12 |
Family
ID=68782621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910918108.1A Active CN110567681B (en) | 2019-09-26 | 2019-09-26 | Device and method for detecting non-common view field auto-collimation optical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110567681B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111812836A (en) * | 2020-07-21 | 2020-10-23 | 中国科学院长春光学精密机械与物理研究所 | Calibration, adjustment and installation method, device, equipment and medium for large-caliber large-view-field camera |
| CN114964523A (en) * | 2022-05-31 | 2022-08-30 | 无锡学院 | Wavefront sensor adjusting method for active optical correction system |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020044275A1 (en) * | 2000-10-18 | 2002-04-18 | Seiko Epson Corporation | Lens evaluation method and lens-evaluating apparatus |
| JP2002214079A (en) * | 2001-01-24 | 2002-07-31 | Olympus Optical Co Ltd | Lens inspection device |
| CN101034034A (en) * | 2007-01-31 | 2007-09-12 | 中国人民解放军国防科学技术大学 | Method and device for aspherical mirror diffraction image |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
| EP1990618A1 (en) * | 2007-05-11 | 2008-11-12 | L'office National D'etudes Et De Recherches Aerospatiales | Method and device for measuring at least one deformation of a wave front |
| CN101852677A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Method for improving focal distance detection precision of long focal distance collimator |
| CN102269937A (en) * | 2011-07-16 | 2011-12-07 | 北京理工大学 | Online detection device and method for wave aberration of projection objective of photoetching machine |
| CN102735348A (en) * | 2012-06-15 | 2012-10-17 | 中国科学院光电技术研究所 | Wavefront measuring method based on Hartmann wavefront sensor |
| CN102997863A (en) * | 2012-11-05 | 2013-03-27 | 北京理工大学 | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces |
| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103575233A (en) * | 2013-11-20 | 2014-02-12 | 西安工业大学 | Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error |
| US8668333B2 (en) * | 2010-12-08 | 2014-03-11 | Valdemar Portney | Contra-aspheric toric ophthalmic lens |
| CN105242387A (en) * | 2015-10-26 | 2016-01-13 | 中国科学院西安光学精密机械研究所 | Large view field off-axis three-reflector system and adjusting method |
| CN108037594A (en) * | 2018-01-02 | 2018-05-15 | 北京全欧光学检测仪器有限公司 | A kind of assembly method and device of full filed camera lens |
| CN108955904A (en) * | 2018-06-28 | 2018-12-07 | 北京空间机电研究所 | A kind of multi-functional Wavefront detecting device for taking into account an Area Objects |
| JP2019060760A (en) * | 2017-09-27 | 2019-04-18 | 株式会社トプコン | Lens characteristics measuring device and method for actuating lens characteristics measuring device |
| CN109724621A (en) * | 2018-12-26 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical system scaling method |
-
2019
- 2019-09-26 CN CN201910918108.1A patent/CN110567681B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020044275A1 (en) * | 2000-10-18 | 2002-04-18 | Seiko Epson Corporation | Lens evaluation method and lens-evaluating apparatus |
| JP2002214079A (en) * | 2001-01-24 | 2002-07-31 | Olympus Optical Co Ltd | Lens inspection device |
| CN101034034A (en) * | 2007-01-31 | 2007-09-12 | 中国人民解放军国防科学技术大学 | Method and device for aspherical mirror diffraction image |
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
| EP1990618A1 (en) * | 2007-05-11 | 2008-11-12 | L'office National D'etudes Et De Recherches Aerospatiales | Method and device for measuring at least one deformation of a wave front |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN101852677A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Method for improving focal distance detection precision of long focal distance collimator |
| US8668333B2 (en) * | 2010-12-08 | 2014-03-11 | Valdemar Portney | Contra-aspheric toric ophthalmic lens |
| CN102269937A (en) * | 2011-07-16 | 2011-12-07 | 北京理工大学 | Online detection device and method for wave aberration of projection objective of photoetching machine |
| CN102735348A (en) * | 2012-06-15 | 2012-10-17 | 中国科学院光电技术研究所 | Wavefront measuring method based on Hartmann wavefront sensor |
| CN102997863A (en) * | 2012-11-05 | 2013-03-27 | 北京理工大学 | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces |
| CN103528539A (en) * | 2013-09-26 | 2014-01-22 | 南京理工大学 | Nonzero-digit interference system based on point source array |
| CN103575233A (en) * | 2013-11-20 | 2014-02-12 | 西安工业大学 | Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error |
| CN105242387A (en) * | 2015-10-26 | 2016-01-13 | 中国科学院西安光学精密机械研究所 | Large view field off-axis three-reflector system and adjusting method |
| JP2019060760A (en) * | 2017-09-27 | 2019-04-18 | 株式会社トプコン | Lens characteristics measuring device and method for actuating lens characteristics measuring device |
| CN108037594A (en) * | 2018-01-02 | 2018-05-15 | 北京全欧光学检测仪器有限公司 | A kind of assembly method and device of full filed camera lens |
| CN108955904A (en) * | 2018-06-28 | 2018-12-07 | 北京空间机电研究所 | A kind of multi-functional Wavefront detecting device for taking into account an Area Objects |
| CN109724621A (en) * | 2018-12-26 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical system scaling method |
Non-Patent Citations (2)
| Title |
|---|
| 王永红: ""非扫描并行三维共焦检测技术综述"", 《仪器仪表学报》 * |
| 荣四海: ""点光源阵列多重波面自由曲面检测***设计与研究"", 《中国优秀硕士学位论文全文数据库 工程科技II辑》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111812836A (en) * | 2020-07-21 | 2020-10-23 | 中国科学院长春光学精密机械与物理研究所 | Calibration, adjustment and installation method, device, equipment and medium for large-caliber large-view-field camera |
| CN114964523A (en) * | 2022-05-31 | 2022-08-30 | 无锡学院 | Wavefront sensor adjusting method for active optical correction system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110567681B (en) | 2021-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2445289C (en) | Defocus and astigmatism compensation in a wavefront aberration measurement system | |
| CN108871733B (en) | Near-field detection device of large-caliber optical system and measurement method thereof | |
| CN110567681B (en) | Device and method for detecting non-common view field auto-collimation optical system | |
| US20090175525A1 (en) | Systems and Methods for Measuring Surface Shape | |
| CN100507488C (en) | Method and device for aspherical mirror diffraction image | |
| EP2833107A2 (en) | Wavefront measurement method, shape measurement method, optical element manufacturing method, optical apparatus manufacturing method, program, and wavefront measurement apparatus | |
| US20190212134A1 (en) | Method and apparatus for detecting cylinder and cylindrical converging lens | |
| EP3924711A1 (en) | System and method of wavefront sensing with engineered images | |
| US4620790A (en) | System for determining optical aberrations of a telescope optical system | |
| CN102954768A (en) | Surface profile measurement apparatus and alignment method thereof and an improved sub-aperture measurement data acquisition method | |
| US6653613B1 (en) | Method and device for wavefront optical analysis | |
| CN114216659A (en) | System and method for measuring parallelism of large-caliber long-focus optical axis | |
| EP0802438A2 (en) | Shape control apparatus for reflecting mirrors | |
| CN110966954A (en) | Large-caliber optical element surface shape splicing detection method and device | |
| CN115164775A (en) | Large-caliber convex aspheric reflector surface shape detection device and detection method thereof | |
| CN114185144B (en) | Mounting and adjusting method for mounting and adjusting large-caliber optical system based on small-caliber plane mirror | |
| Troy et al. | Residual misalignments of the Keck Telescope primary mirror segments: classification of modes and implications for adaptive optics | |
| CN113900250A (en) | Self-adaptive optical system deformable mirror and Hartmann wavefront sensor alignment method | |
| KR102197977B1 (en) | Telescope comprising an active mirror and internal means for monitoring said active mirror | |
| US10378995B2 (en) | Wavefront testing system | |
| Roddier et al. | Testing of telescope optics: a new approach | |
| TW202246749A (en) | Correcting aberration and apodization of an optical system using correction plates | |
| Neal et al. | Application of Shack-Hartmann wavefront sensors to optical system calibration and alignment | |
| EP4264211A1 (en) | Wavefront sensors with irregular aperture masks, diffusers, and cameras, and methods of making and using the same | |
| US5249033A (en) | Automated interferometric alignment system for paraboloidal mirrors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |