CN101050949A - Measuring system and its measuring method for large field object micro surface three dimension topography - Google Patents
Measuring system and its measuring method for large field object micro surface three dimension topography Download PDFInfo
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- CN101050949A CN101050949A CN 200710057416 CN200710057416A CN101050949A CN 101050949 A CN101050949 A CN 101050949A CN 200710057416 CN200710057416 CN 200710057416 CN 200710057416 A CN200710057416 A CN 200710057416A CN 101050949 A CN101050949 A CN 101050949A
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Abstract
A method for measuring micro-surface 3-D morphology of large field object includes starting up device and switching on PZT switch to collect the first frame of interference image, controlling PZT to drive micro-objective lens and reference surface to move along optical axis and collecting multi-frame of phase shift interference images (PSII), using precise displacement platform to move measured surface and collecting multi-frame of PSII at relevant positions, deriving out test data and carrying out relevant treatments for obtaining 3-D morphology of said object. The system used for realizing said method is also disclosed.
Description
Technical field
The present invention relates to a kind of micro-object measuring surface form technology.Particularly relate to a kind of phase shift micro-interference art of utilizing and measure large field object micro surface three dimension topography, and the measuring accuracy height, do not damage the measuring system and the measuring method thereof of the large field object micro surface three dimension topography on tested surface surface.
Background technology
To the detection of the three-dimensional appearance of object, be an important detection content always.The method of Measuring Object surface topography mainly is divided into contact type measurement method and non-contact type measuring method.
Contact measurement method adopts the contact type probe sample surface of lining by line scan, though this method precision is higher, damages the tested surface surface easily.
For the object surface appearance of precision, contactless measuring method is more feasible.Chinese patent 02103611.X discloses a kind of transmission-type differential interference microscope that matches that adopts and has measured the surface topography of transparent substance, but this method can not be measured nontransparent object surfaces pattern.Chinese patent CN1179535 discloses a kind of three-dimensional measuring apparatus and method that is used for surperficial parts profiles such as testing circuit plate, and it is to utilize principle of triangulation to determine the concavo-convex amount on testee surface.Chinese patent 99127007.X discloses a kind of detection method of three-dimensional surface shape of light belt scan-type.
Interferometry is because the measuring accuracy height, belong to non-cpntact measurement and be widely used in topography measurement, but the horizontal and vertical Measurement Resolution that the surface topography of microcosmic needs is higher, thereby the high measuring method of a kind of measuring accuracy of needs, for the object micro surface three dimension topography of big visual field, also need corresponding measuring method and device simultaneously.
Summary of the invention
Technical matters to be solved by this invention is, provide a kind of phase shift micro-interference art of utilizing to measure large field object micro surface three dimension topography, and the measuring accuracy height does not damage the measuring system and the measuring method thereof of the large field object micro surface three dimension topography on tested surface surface.
The technical solution adopted in the present invention is: a kind of measuring system of large field object micro surface three dimension topography, include light source, and also be provided with the condenser system that receives light source; Side at the output light of condenser system is provided with first spectroscope; Be disposed with the precision displacement platform of microcobjective, reference surface, second spectroscope, tested surface and mobile tested surface at first spectroscopical downside; Be disposed with tube lens, charge coupled device ccd, image pick-up card and computing machine at first spectroscopical upside; Second spectroscope, reference surface and microcobjective link to each other with piezoceramic transducer respectively.
Described condenser system includes: first condenser that sets gradually, second condenser, optical filter, aperture diaphragm, the 3rd condenser, field stop and the 4th condenser constitute.
Described precision displacement platform includes: the stepping precision surface plate of two dimension and the manual displacement platform on the vertical direction are formed.
The stepping precision surface plate of described two dimension is controlled by 2 step motor drive.
Manual displacement platform on the described vertical direction is to regulate by manual micrometer caliper.
The measuring method of large field object micro surface three dimension topography includes following steps:
1) measured object is placed on the objective table, precision displacement platform can drive measured object, and to carry out precision on the directions in 2 dimensions mobile.
2) opening device and regulating, the light beam that light source is sent is taked the reflective method of autocollimation evenly throw light on tested surface and reference surface by illuminator;
3) instrument is focused, the stable interference fringe clearly that tested surface and reference surface are formed is imaged onto on the charge-coupled image sensor by the micro-interference imaging system;
4) open the piezoceramic transducer switch, select close-loop control mode, half of selection piezoceramic transducer range finely tuned once more as initial position, feasible the best of interference fringe contrast at this moment;
5) according to optical source wavelength and phase shift mutually, determine the phase-shift phase in each step, the displacement in each step of input on the control panel of piezoceramic transducer controller, wait the piezoelectric ceramics sensor move stable after, carry out the collection of interferogram;
6) after the collection of multi-frame interferometry bar graph is finished, observe the variation tendency of bar graph earlier,, just can carry out next step operation if correct.If the saltus step or the disappearance of the moving direction of interferogram are arranged suddenly in the bar graph, should carry out the collection of interference fringe picture again, the experimental data that this step obtains is as the phase shifting interference of a position;
7) tested surface is carried out the precision sweep of two-dimensional direction by precision displacement platform, according to required amount of movement, the computer control precision displacement platform moves, and waits the stable back of electronic control translation stage to repeat the 5th, 6 steps, carries out the collection of the phase shifting interference of another location;
8) repeat the 7th step, carry out the collection of the interferogram of 2 each position of dimension direction;
9) control mode of piezoceramic transducer is changed into open-loop voltage control, regulation voltage is to 0V, after waiting the piezoelectric ceramics sensor to reply to stablize, and the powered-down switch.Close the light source switch of instrument, derive experimental data;
Several phase shifting interferences process image filterings that 10) will collect, denoising, image mosaic, phase extraction algorithms is separated parcel and is handled, and obtains the three-dimensional appearance of microcosmic surface.
Describedly carry out instrument focusing and comprise: observe the image that collects in the computing machine, determine the contrast of interference fringe.
Describedly drive microcobjective and reference surface moves along optical axis direction, comprise the switch of opening the piezoceramic transducer controller, select the displacement sensing pattern of closed-loop control, and make interference fringe contrast maximum at this moment by piezoceramic transducer.
The collection of the phase shifting interference of described beginning another location comprises the closed loop displacement of piezoceramic transducer is returned to 5 μ m places, begins to gather the interferogram of the 1st width of cloth, then carries out the collection of phase shifting interference according to the requirement and the order in the 4th step then.
Repeat the 6th, 7 steps and can also carry out the experiment of the splicing of another direction, obtain phase shifting interference.
The measuring system of large field object micro surface three dimension topography of the present invention and measuring method thereof have following advantage:
1, adopt wideband light source as light source, thereby the coherent length that guarantees light source is shorter, thereby can guarantees measuring accuracy.
2, adopted unlimited tube length microcobjective structure between microcobjective and tube lens, thereby can guarantee that in the phase shift process, the aberration of optical system can not worsen.
3, adopt field stop and bore diaphragm owing in the illuminator, thereby can regulate the illumination zone and the intensity of tested surface.
4, tested surface has adopted the scanning splicing system, makes tested surface can carry out accurate displacement scanning, thereby can measure the three-dimensional appearance of big visual field surface structure.
5, several phase shifting interferences adopt image filtering, and pre-service such as denoising have increased the precision that three-dimensional appearance detects.
The present invention do not lose tested surface, and measuring accuracy is higher owing to belong to non-cpntact measurement, can be widely used in integrated circuit, semiconductor devices, the three-dimensional appearance of microoptical electromechanical device grade micro-surface structures such as (MEMS).
Description of drawings
Fig. 1 is the structural representation of big visual field micro surface three dimension topography measurement mechanism;
Wherein:
1: light source 2: the spotlighting system
5: 6: the second spectroscopes of reference surface
7: tested surface 8: precision displacement platform
9: piezoceramic transducer 10: tube lens
11: charge coupled device ccd 12 image pick-up cards
21: the first condensers of 13 computing machines
23: the three condensers of 22: the second condensers
26: aperture diaphragm 27: field stop
81: stepper motor 82: manual micrometer caliper
Embodiment
Below in conjunction with embodiment the measuring system and the measuring method thereof of large field object micro surface three dimension topography of the present invention are made a detailed description.
The measuring system of large field object micro surface three dimension topography of the present invention, include light source 1, also be provided with the condenser system 2 that receives light source 1, described condenser system 2 includes: first condenser 21 that sets gradually, second condenser 22, optical filter 25, aperture diaphragm 26, the 3rd condenser 23, field stop 27 and the 4th condenser 24 constitute; Side at the output light of condenser system 2 is provided with first spectroscope 3; Be disposed with the precision displacement platform 8 of microcobjective 4, reference surface 5, second spectroscope 6, tested surface 7 and support tested surface 7 at the downside of first spectroscope 3, described precision displacement platform 8 includes: the stepping precision surface plate of two dimension and the manual displacement platform on the vertical direction are formed, the stepping precision surface plate of described two dimension is by 2 stepper motor 81 drive controlling, and the manual displacement platform on the described vertical direction is to regulate by manual micrometer caliper 82; Upside at first spectroscope 3 is disposed with tube lens 10, charge coupled device ccd 11, image pick-up card 12 and computing machine 13; Second spectroscope 6, reference surface 5 and microcobjective 4 link to each other with piezoceramic transducer (PZT) 9 respectively.
In the measuring system of large field object micro surface three dimension topography:
Light source 1: be used for system's illumination and interference imaging; Can adopt the light emitting diode LED (Light-emitting diode) of Luxeon company, model is: LXHLNM98, and its centre wavelength is 532nm, 10 ° the angle of divergence, power is 1W.
In the illuminator, the condenser group can adopt a plurality of plano-convex lenss to form.
Piezoceramic transducer (PZT) can adopt the MPT-1JRI001 of rich real Micronics Inc. of Harbin Institute of Technology, and stroke is 10 μ m, and displacement resolution is 1nm, and repetitive positioning accuracy is 10nm.
CCD can select the high black-white CCD of detection sensitivity for use, and model is the GW-902H of WATEC company, and its minimal illumination is 0.002Lx.
Microcobjective and tube lens can select 10 for use * or 50 * microscopical object lens and tube lens.
Tested surface can be selected the object with micro-structure surface for use, end surface of optical fiber connector for example, MEMS device surface.
Image pick-up card can select for use in the good perseverance from black-white image grabbing card OK-M10M, it is based on the 8bit data collecting card of the normal video of pci bus.
The precision displacement platform of tested surface is made up of the motorized precision translation stage of 2 dimensions and the manual translation platform of vertical direction.Two the accurate motorized precision translation stages of Shanghai friendship ties company and the composition of one dimension manual translation platform have been selected for use.Accurate motorized precision translation stage adopts stepper motor to drive, selected two-phase hybrid stepping motor 42BYG-B for use, selected the micro-stepping driving of stepping motor device SH20402A of Beijing four-way motor company for use, synchronizing can be provided, improved for half step, four segmentations, eight segmentations, 16 minutes, 32 segmentations and 64 segmentations etc. are operational mode wherein.
Native system can be divided into five funtion parts:
1, light source and illumination section: constitute by light source, condenser group, aperture diaphragm, field stop and microcobjective, offer tested surface and reference surface and evenly and fully throw light on;
2, interference imaging part: by second spectroscope, microcobjective, tube lens and charge coupled device ccd are formed.It is imaged on the interference fringe of tested surface and reference surface formation on the CCD;
3, phase shift interference part: by microcobjective, second spectroscope and piezoceramic transducer are formed.PZT causes the phase differential of two-beam light, thereby forms phase shift interference.In measuring process, PZT system band interference objective and is moved, and whenever moves a computing machine and carries out image acquisition one time;
4, tested surface scanning splicing part: tested surface is made up of the precision stepper motor platform of 2 dimensions, by the scanning of computer control realization to tested surface, has enlarged measurement range by image mosaic.
5, image acquisition and data processing section: image pick-up card is gathered CCD and is gone up the interference image that forms.At first the image that collects is carried out filtering, image pre-service such as denoising are carried out phase extraction to several phase shifting interferences then, and phase place separates parcel and image mosaic is handled, and obtains the three-dimensional appearance of microcosmic surface at last.
The course of work of the measuring system of large field object micro surface three dimension topography of the present invention is:
Light source 1 offers tested surface 7 by spotlighting system 2 and reference surface 5 evenly and fully throws light on.The light beam of coming from illumination path is divided into measuring beam and reference beam by second spectroscope 6.The light beam that returns from tested surface 7 and reference surface 5 forms interference fringe, is imaged onto on the charge coupled device ccd 11 by microcobjective 4 and tube lens 10.Second spectroscope, microcobjective 4 and lens barrel object lens 10 form the interference imaging part.Illumination path links to each other by first spectroscope 3 with the interference imaging light path.Second spectroscope 6, microcobjective 4 and piezoceramic transducer 9 link to each other.Cause moving of PZT by the variation that is applied to the voltage on the piezoceramic transducer 9, its drives microcobjective 4 and second spectroscope 6 moves along optical axis, thereby forms phase shift interference.Spotlighting system 2 is made up of first condenser 21, second condenser 22, the 3rd condenser 23, the 4th condenser 24, optical filter 25, aperture diaphragm 26, field stop 27, regulate the bore of field stop and aperture diaphragm, thus illumination zone and the intensity that can regulate tested surface.Tested surface 7 links to each other with precision displacement platform 8, and the precision that can carry out on the 2 dimension directions moves.Precision displacement platform is by 2 stepper motor 81 drive controlling, and manual displacement platform manual adjustments can be regulated by manual micrometer caliper 82.
The measuring method of large field object micro surface three dimension topography of the present invention includes following steps:
1) measured object is placed on the objective table, precision displacement platform can drive measured object, and to carry out precision on the directions in 2 dimensions mobile.
2) opening device and regulating, the light beam that light source is sent is taked the reflective method of autocollimation evenly throw light on tested surface and reference surface by illuminator;
Described opening device comprises: turn on the power switch, open computer, open the driver of video frequency collection card, open the light source switch of instrument.
3) instrument is focused, the stable interference fringe clearly that tested surface and reference surface are formed is imaged onto on the charge-coupled image sensor by the micro-interference imaging system;
Describedly carry out instrument focusing and comprise: observe the image that collects in the computing machine, determine the contrast of interference fringe.Promptly observe the having or not and the contrast situation of change of interference fringe of the image that collects in the computing machine, at first regulate objective table, make testee at the illumination field of view center, then the up-down adjustment objective table, make tested surface be preferably on the inspection surface, certain focal depth range is all arranged up and down.If the contrast of interference fringe is good not enough, can regulates by regulating CCD sleeve and object lens, and make the displacement platform be positioned at the centre of electronic control translation stage (perhaps determining the position of Z direction translation stage) according to actual conditions.
4) open piezoceramic transducer (PZT) switch, select close-loop control mode, half of selection PZT range finely tuned once more as initial position, feasible the best of interference fringe contrast at this moment;
This step comprises: the switch of opening the PZT controller, check at first whether in the place's displacement of 0V voltage be zero, select the displacement sensing pattern of closed-loop control then, selecting initial displacement is 5 μ m, after the PZT stable reaction, focusing again again, feasible interference fringe contrast maximum at this moment, and certain focal depth range is all arranged up and down, gather the 1st width of cloth interferogram then.
5) according to optical source wavelength and phase shift mutually, determine the phase-shift phase in each step, the displacement in each step of input on the control panel of PZT controller, Deng PZT move stable after, carry out the collection of interferogram, tested surface is carried out precision sweep on the two-dimensional direction by precision displacement platform, obtain several phase shifting interference on each scanning position respectively;
6) after the collection of multi-frame interferometry bar graph is finished, observe the variation tendency of bar graph earlier,, just can carry out next step operation if correct.If the saltus step or the disappearance of the moving direction of interferogram are arranged suddenly in the bar graph, should carry out the collection of interference fringe picture again, the experimental data that this step obtains is as the phase shifting interference of a position;
7) tested surface is carried out the precision sweep of two-dimensional direction by precision displacement platform, according to required amount of movement, the computer control precision displacement platform moves, and waits the stable back of electronic control translation stage to repeat the 5th, 6 steps, carries out the collection of the phase shifting interference of another location;
This step includes: according to the requirement of experiment to the segmentation multiple of displacement and stepper motor, calculate the needed umber of pulse of amount of movement, at first open the serial ports control program of stepper motor, determine the good moving direction of (back) corresponding electronic control translation stage left (the assurance stepper motor can correctly be worked).Begin the collection of interferogram after electronic control translation stages such as input pulse number are stable.Then the closed loop displacement of PZT is returned to 5 μ m places, begins to gather the interferogram of the 1st width of cloth, then carry out the collection of phase shifting interference according to the requirement and the order in the 5th step then.
8) repeat the 7th step, carry out the collection of the interferogram of 2 each position of dimension direction;
9) control mode of PZT is changed into open-loop voltage control, regulation voltage is to 0V, after waiting PZT to reply to stablize, and the powered-down switch.Close the light source switch of instrument, derive experimental data;
Several phase shifting interferences process image filterings that 10) will collect, denoising, image mosaic, phase extraction algorithms is separated parcel and is handled, and obtains the three-dimensional appearance of microcosmic surface.
The 7th, 8 steps of method iterates can also be carried out the experiment of the splicing of another direction, obtain phase shifting interference.
In actual use, using method of the present invention requires in peace and quiet, experimentizes under the environment that does not have to vibrate.
Claims (10)
1. the measuring system of a large field object micro surface three dimension topography includes light source (1), it is characterized in that, also is provided with the condenser system (2) that receives light source (1); Side at the output light of condenser system (2) is provided with first spectroscope (3); The downside of first spectroscope (3) be disposed with microcobjective (4), reference surface (5), second spectroscope (6),, the precision displacement platform (8) of tested surface (7) and mobile tested surface (7); Upside at first spectroscope (3) is disposed with tube lens (10), charge coupled device ccd (11), image pick-up card (12) and computing machine (13); Second spectroscope (6), reference surface (5) and microcobjective (4) link to each other with piezoceramic transducer (9) respectively.
2. the measuring system of large field object micro surface three dimension topography according to claim 1, it is characterized in that described condenser system (2) includes: first condenser (21) that sets gradually, second condenser (22), optical filter (25), aperture diaphragm (26), the 3rd condenser (23), field stop (27) and the 4th condenser (24) constitute.
3. the measuring system of large field object micro surface three dimension topography according to claim 1 is characterized in that, described precision displacement platform (8) includes: the stepping precision surface plate of two dimension and the manual displacement platform on the vertical direction are formed.
4. the measuring system of large field object micro surface three dimension topography according to claim 3 is characterized in that, the stepping precision surface plate of described two dimension is by 2 stepper motors (81) drive controlling.
5. the measuring system of large field object micro surface three dimension topography according to claim 3 is characterized in that, the manual displacement platform on the described vertical direction is to regulate by manual micrometer caliper (82).
6. the measuring method of a large field object micro surface three dimension topography is characterized in that, includes following steps:
1) measured object is placed on the objective table, precision displacement platform can drive measured object, and to carry out precision on the directions in 2 dimensions mobile.
2) opening device and regulating, the light beam that light source is sent is taked the reflective method of autocollimation evenly throw light on tested surface and reference surface by illuminator;
3) instrument is focused, the stable interference fringe clearly that tested surface and reference surface are formed is imaged onto on the charge-coupled image sensor by the micro-interference imaging system;
4) open the piezoceramic transducer switch, select close-loop control mode, half of selection piezoceramic transducer range finely tuned once more as initial position, feasible the best of interference fringe contrast at this moment;
5) according to optical source wavelength and phase shift mutually, determine the phase-shift phase in each step, the displacement in each step of input on the control panel of piezoceramic transducer controller, wait the piezoelectric ceramics sensor move stable after, carry out the collection of interferogram;
6) after the collection of multi-frame interferometry bar graph is finished, observe the variation tendency of bar graph earlier,, just can carry out next step operation if correct.If the saltus step or the disappearance of the moving direction of interferogram are arranged suddenly in the bar graph, should carry out the collection of interference fringe picture again, the experimental data that this step obtains is as the phase shifting interference of a position;
7) tested surface is carried out the precision sweep of two-dimensional direction by precision displacement platform, according to required amount of movement, the computer control precision displacement platform moves, and waits the stable back of electronic control translation stage to repeat the 5th, 6 steps, carries out the collection of the phase shifting interference of another location;
8) repeat the 7th step, carry out the collection of the interferogram of 2 each position of dimension direction;
9) control mode of piezoceramic transducer is changed into open-loop voltage control, regulation voltage is to 0V, after waiting the piezoelectric ceramics sensor to reply to stablize, and the powered-down switch.Close the light source switch of instrument, derive experimental data;
Several phase shifting interferences process image filterings that 10) will collect, denoising, image mosaic, phase extraction algorithms is separated parcel and is handled, and obtains the three-dimensional appearance of microcosmic surface.
7. the measuring method of large field object micro surface three dimension topography according to claim 6 is characterized in that, describedly carries out instrument focusing and comprises: observe the image that collects in the computing machine, determine the contrast of interference fringe.
8. the measuring method of large field object micro surface three dimension topography according to claim 6, it is characterized in that, describedly drive microcobjective and reference surface moves along optical axis direction by piezoceramic transducer, comprise the switch of opening the piezoceramic transducer controller, select the displacement sensing pattern of closed-loop control, and make interference fringe contrast maximum at this moment.
9. the measuring method of large field object micro surface three dimension topography according to claim 6, it is characterized in that, the collection of the phase shifting interference of described beginning another location, comprise the closed loop displacement of piezoceramic transducer is returned to 5 μ m places, begin to gather the interferogram of the 1st width of cloth, then carry out the collection of phase shifting interference according to the requirement and the order in the 5th step then.
10. the measuring method of large field object micro surface three dimension topography according to claim 6 is characterized in that, repeats the experiment that the 7th, 8 steps can also be carried out the splicing of another direction, obtains phase shifting interference.
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