CN115164775A - Large-caliber convex aspheric reflector surface shape detection device and detection method thereof - Google Patents
Large-caliber convex aspheric reflector surface shape detection device and detection method thereof Download PDFInfo
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Abstract
The invention provides a surface shape detection device and a surface shape detection method for a large-caliber convex aspheric reflector, which comprises the following steps: a laser interferometer and a spherical standard mirror; the laser interferometer is used for emitting plane waves which are incident to the spherical standard mirror and then become spherical waves, the spherical waves are incident to the mirror to be detected, interference fringes are formed between the spherical waves and a reference wave surface after the spherical waves are reflected by the mirror to be detected, and therefore surface shape information of the central subaperture of the mirror to be detected is obtained; the detection device also comprises a CGH; the CGH is placed in front of a light outlet of the laser interferometer and used for converting plane waves into wavefront conforming to the surface shape of the mirror to be inspected, the poses of the mirror to be inspected and the CGH are adjusted respectively, interference fringes measured by the sub-aperture on the outer ring of the mirror to be inspected are zero fringes, accordingly surface shape information of the sub-aperture on the outer ring of the mirror to be inspected is obtained, all sub-aperture surface shapes are spliced through a splicing algorithm, and then full-aperture surface shape information of the mirror to be inspected is obtained. The invention can effectively reduce the number of sub-apertures and the splicing difficulty, thereby reducing errors generated in the splicing process.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a large-caliber convex aspheric reflector surface shape detection device and a detection method thereof.
Background
In an optical system, aspheric optical elements have more design freedom and thus can meet more complex design requirements. The introduction of the aspheric element can enlarge the view field angle and improve the resolution, thereby improving the imaging quality. And under the same performance index condition, the use of the aspheric surface can reduce the number of elements so as to reduce the complexity of the system. Therefore, the aspheric reflector is increasingly applied to the fields of space optics, astronomical optics, military defense, high-tech civil use and the like. For example, as early as the 80's of the last century, as many as 23.46 thousand aspheric elements have been used in the optical equipment of the united states army. In the field of space-to-ground observation and astronomical observation, higher requirements are put on the resolution of an optical imaging system, so the aperture of the optical system is increased, and the corresponding secondary mirror (generally a convex aspheric surface) is increased. For example, the secondary mirror of the emitted James-webber Space Telescope (JWST, james Webb Space Telescope) adopts a convex aspheric surface, and the aperture reaches 738mm. Nowadays, large-caliber convex aspheric mirrors are increasingly applied to various photoelectric systems, the calibers of the large-caliber convex aspheric mirrors are increasingly large, and the requirement on surface shape accuracy is increasingly high, so that higher requirements are provided for high-accuracy surface shape detection.
Common convex aspheric surface shape detection means include: compensation method, non-aberration point measurement method, sub-aperture splicing detection method, etc. The compensation element is independently used for full-aperture surface shape detection, and an aspheric compensation lens which is larger than the aperture of the lens to be detected and is matched with the lens needs to be manufactured; large-caliber aspheric surfaces with large steep deviations require CGH with high scribing density. The compensation lens or the CGH has high manufacturing difficulty and cost, and high installation, adjustment and detection difficulty; the aberration-free point measurement method is used for measuring a paraboloid, a hyperboloid and an ellipsoid by utilizing a pair of conjugate aberration-free points of a quadric surface, but is only suitable for the quadric surface, a larger-caliber Hindle ball or an auxiliary plane mirror is often needed when a large-caliber aspheric surface is detected, and the problem of central shielding exists in the measurement process; for the convex aspheric surface with the small and medium caliber, the sub-aperture splicing method is simple and convenient and has higher precision, however, in the surface shape detection of the convex aspheric surface with the large caliber, the splicing detection is independently used, so that the number of the sub-apertures is more, the difficulty of data processing and the detection time are increased, more importantly, the transmission of errors is aggravated, and the precision of the splicing detection is limited.
Disclosure of Invention
In view of the above problems, the present invention provides a surface shape detection device and a surface shape detection method for a large-diameter convex aspheric reflector. The method is different from the traditional detection method in that the aspheric degree of the center of the lens to be detected is small, so that the measurement can be directly carried out by an interferometer; and the outer ring has large deviation, the outer ring is detected by adopting a CGH compensation method, and finally the outer ring is spliced into a complete surface shape through a splicing algorithm. In the detection process, the gravity of the vertically placed lens to be detected causes non-negligible influence on the face shape detection result, and the influence cannot be obtained through direct measurement, so that the influence needs to be removed through calculation.
According to the invention, the accurate full aperture mirror surface shape result is obtained by combining the CGH compensation detection and the sub-aperture splicing detection, and the final detection precision is superior to 10nm, so that the requirement of high-precision detection of the large-aperture convex aspheric surface is met.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
the invention provides a surface shape detection device for a large-caliber convex aspheric reflector, which comprises: a laser interferometer and a spherical standard mirror;
the laser interferometer is used for emitting plane waves to enter the spherical standard mirror to be changed into spherical waves, the spherical waves enter the to-be-detected mirror, interference fringes are formed with the reference wave surface after the spherical waves are reflected by the to-be-detected mirror, the positions of the laser interferometer and the to-be-detected mirror are adjusted until the interference fringes of the central subaperture are minimum, and therefore surface shape information of the central subaperture of the to-be-detected mirror is obtained;
the detection device also comprises a CGH;
the CGH is placed in front of a light outlet of the laser interferometer and used for converting plane waves into wavefront which accords with the surface shape of the mirror to be detected, the positions of the mirror to be detected and the CGH are adjusted respectively, interference fringes measured by the sub-aperture on the outer ring of the mirror to be detected are zero fringes, so that surface shape information of the sub-aperture on the outer ring of the mirror to be detected is obtained, all sub-aperture surface shapes are spliced through a splicing algorithm, and then full-aperture surface shape information of the mirror to be detected is obtained.
Preferably, the CGH is fixed to the CGH substrate, and a CGH adjusting device for adjusting x, y, and z axis directions of the CGH is installed at the bottom of the CGH.
Preferably, the bottom of the laser interferometer is provided with a laser interferometer adjusting device, and the laser interferometer adjusting device is used for adjusting the z-axis direction of the laser interferometer;
preferably, the bottom of the lens to be examined is provided with a lens adjusting device to be examined;
when the central sub-aperture of the lens to be detected is detected:
the adjusting device of the lens to be detected is used for adjusting the x axis, the y axis and the inclination angle of the lens to be detected;
when the outer ring subaperture of the lens to be detected is detected:
the adjusting device of the lens to be detected is used for adjusting the directions of the x axis, the y axis and the z axis, the rotating direction and the inclining direction of the lens to be detected.
The invention also provides a detection method of the large-caliber convex aspheric reflector surface shape detection device, which comprises the following steps:
s1, adjusting the pose between the spherical standard mirror and the central sub-aperture of the mirror to be detected, and detecting the central sub-aperture of the mirror to be detected when zero stripes appear;
s2, adjusting the pose between the laser interferometer and the CGH, and detecting the outer ring sub-aperture of the mirror to be detected when zero stripes appear;
s3, removing errors generated due to the influence of gravity in the detection results obtained in the step S1 and the step S2;
and S4, splicing the full aperture surface shape data of the to-be-detected lens through a sub-aperture splicing algorithm.
Preferably, a preprocessing step S0 is included: and selecting a spherical standard lens according to the parameters of the lens to be inspected, planning the sub-aperture of the lens to be inspected and designing the CGH.
Preferably, the preprocessing step S0 comprises the following sub-steps:
s01, selecting a spherical standard mirror with parameters of F # being more than or equal to R #;
wherein the content of the first and second substances,
F#＝f/D，R#R/D；
f # is the F number of the spherical standard mirror, R # is the R number of the mirror to be inspected, F is the focal length of the spherical standard mirror, D is the aperture of the spherical standard mirror, R is the vertex curvature radius of the mirror to be inspected, and D is the aperture of the mirror to be inspected;
s02, planning the sub-aperture of the lens to be detected;
the principle of the aperture planning of the lens to be examined is as follows:
the number of interference fringes of each sub-aperture is less than the maximum resolution fringe number of the laser interferometer;
the planned subaperture realizes the full-aperture surface coverage of the lens to be inspected;
the area of the overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
the size of the sub-aperture is about r/F #;
s03, designing a CGH according to parameters of a to-be-examined lens;
includes three regions:
the main area is a detection area and is used for detecting the surface shape of the lens to be detected;
the alignment area is used for alignment between the laser interferometer and the CGH;
the reference region is used for alignment between the CGH and the scope to be inspected.
Preferably, in step S2: and moving the position of the lens to be detected to enable the CGH to align to the sub-aperture with the distance of 180 degrees at the position of the first outer ring sub-aperture, and repeating the measurement operation to obtain the surface shape data of the other group of outer ring sub-apertures.
Preferably, in step S3: the error caused by the influence of gravity is half of the difference value of two groups of results of 0 degrees and 180 degrees under the same outer ring sub-aperture obtained by measurement, and can be removed from the detection result.
Preferably, a post-processing step S5 is further included: carrying out precision analysis on the full-aperture surface shape data by a self-checking method;
the self-checking method comprises the following steps: additionally measuring any sub-aperture of the mirror to be detected, and performing point-to-point subtraction on the full-aperture surface shape data and the self-checking sub-aperture surface shape data according to the pixel corresponding relation to obtain corresponding residual distribution.
Compared with the prior art, the invention has the following advantages:
1. compared with the traditional direct splicing of the sub-apertures, the method can effectively reduce the number of the sub-apertures and reduce the splicing difficulty, thereby reducing the error generated in the splicing process;
2. compared with the traditional full-aperture CGH compensation detection method, the invention carries out CGH design aiming at the sub-apertures, reduces the size of the CGH, only needs to design one CGH for each circle of sub-apertures, reduces the design difficulty and the manufacturing cost of the compensation element, and simplifies the detection process;
3. the influence of gravity on the surface shape detection result is considered, and the surface shape detection result is eliminated, so that the surface shape detection precision is improved.
Drawings
Fig. 1 is a schematic diagram of a central sub-aperture detection structure of a large-aperture convex aspheric mirror surface shape detection device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an outer ring subaperture detection structure of the large-caliber convex aspheric reflector surface shape detection device provided in the embodiment of the present invention.
Fig. 3 is a schematic flow chart of a method for detecting the surface shape of a large-caliber convex aspheric reflector according to an embodiment of the present invention.
Fig. 4 is a block diagram of a flowchart of a method for detecting a mirror shape of a large-caliber convex aspheric reflector according to an embodiment of the invention.
Wherein the reference numerals include: the device comprises a laser interferometer 1, a laser interferometer adjusting device 2, a spherical standard mirror 3, a to-be-detected mirror 4, a to-be-detected mirror adjusting device 5, a CGH substrate 6, a CGH7 and a CGH adjusting device 8.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
Fig. 1 shows a schematic diagram of a central subaperture detection structure of a large-caliber convex aspheric reflector surface shape detection device provided in an embodiment of the present invention.
Fig. 2 shows a schematic diagram of an outer ring subaperture detection structure of a large-caliber convex aspheric reflector surface shape detection device provided by the embodiment of the invention.
As shown in fig. 1 and fig. 2, the large-caliber convex aspheric reflector surface shape detection apparatus provided in the embodiment of the present invention includes: the device comprises a laser interferometer 1, a laser interferometer adjusting device 2, a spherical standard mirror 3, a to-be-detected mirror adjusting device 5, a CGH substrate 6, a CGH7 and a CGH adjusting device 8.
Firstly, detecting the central subaperture of the lens 4 to be detected:
in the process of detecting the information of the central subaperture surface shape of the mirror to be detected 4, the laser interferometer 1 emits plane wave laser to be incident into the spherical standard mirror 3, the spherical standard mirror 3 changes the laser generated by the laser interferometer 1 from the plane wave into spherical wave, the spherical wave irradiates the surface of the mirror to be detected 4, and interference fringes are formed between the spherical wave and a reference wave surface after the spherical wave is reflected by the mirror to be detected 4. Adjusting the poses of the laser interferometer 1 and the mirror to be detected 4 respectively by adjusting the laser interferometer adjusting device 2 and the mirror to be detected adjusting device 5 until the interference fringes of the central sub-aperture are minimum, thereby obtaining the surface shape information of the central sub-aperture;
the bottom of the laser interferometer 1 is provided with a laser interferometer adjusting device 2, and the bottom of the mirror to be inspected 4 is provided with a mirror to be inspected adjusting device 5. The laser interferometer adjusting device 2 adjusts the z-axis direction of the laser interferometer 1, and the inspection mirror adjusting device 5 adjusts the x-axis, y-axis and tilt angle of the inspection mirror 4
And then detecting the outer ring sub-aperture of the lens 4 to be detected:
in the process of measuring the outer ring sub-aperture, the CGH7 is fixed on the CGH substrate 6, the CGH7 is placed in front of a light outlet of the laser interferometer 1, the CGH7 is used for converting spherical waves emitted by the laser interferometer 1 into wavefront conforming to the surface shape of the to-be-inspected mirror 4, the poses of the to-be-inspected mirror 4 and the CGH7 are adjusted by adjusting the to-be-inspected mirror adjusting device 5 and the CGH adjusting device 8 in the adjusting graph 2 respectively, interference fringes measured by the outer ring sub-aperture of the to-be-inspected mirror 4 are zero fringes, so that the surface shape information of the outer ring sub-aperture is obtained, all the sub-apertures are spliced through a splicing algorithm, and then the full-aperture surface shape information of the to-be-inspected mirror 4 is obtained.
The bottom of the CGH7 is provided with a CGH adjusting device 8, and the to-be-detected mirror adjusting device 5 is used for adjusting the directions of the x axis, the y axis and the z axis, the rotating direction and the inclining direction of the to-be-detected mirror 4; the CGH adjusting apparatus 8 is used to adjust the x, y, and z-axis directions of the CGH 7.
Fig. 3 is a schematic flow chart illustrating a method for detecting the surface shape of a large-caliber convex aspheric reflector provided by an embodiment of the invention.
Fig. 4 is a block diagram illustrating a flowchart of a method for detecting a mirror shape of a large-caliber convex aspheric surface reflector according to an embodiment of the present invention.
As shown in fig. 3 and fig. 4, the method for detecting the surface shape of the large-aperture convex aspheric mirror (D >500mm, offset >100 λ, λ =632.8 nm) according to the embodiment of the present invention first performs sub-aperture planning, and calculates the offset of each circle of sub-apertures. Because the deviation of the central subaperture is small, the interferometer and the standard spherical mirror are used for directly measuring; the CGH is designed according to the outer ring sub-aperture, and because the to-be-detected mirror has rotational symmetry, only one CGH is designed for each ring of sub-aperture; and adjusting the position between the CGH and the interferometer through the alignment area, and adjusting the detection state to the outer ring of zero-aperture fringes according to the design of the main area of the CGH.
The method specifically comprises the following steps:
s0, pretreatment: and selecting a spherical standard lens according to the parameters of the lens to be inspected, planning the sub-aperture of the lens to be inspected and designing the CGH.
And S01, selecting a spherical standard mirror with parameters of F # > R #.
Wherein the content of the first and second substances,
F#＝f/D，R#R/D；
f # is the F number of the spherical standard mirror, R # is the R number of the mirror to be inspected, F is the focal length of the spherical standard mirror, D is the aperture of the spherical standard mirror, R is the vertex curvature radius of the mirror to be inspected, and D is the aperture of the mirror to be inspected.
And S02, planning the sub-aperture of the lens to be detected.
The principle of sub-aperture planning is as follows:
the number of interference fringes of each sub-aperture is less than the maximum resolution fringe number of the laser interferometer;
the planned subaperture can realize full-aperture surface shape coverage on the lens to be inspected;
the area of an overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
the size of the sub-aperture is about r/F #.
And S03, designing the CGH required by the outer ring sub-aperture according to the parameters of the lens to be examined.
CGH is generally divided into three regions:
the main area is a detection area and is used for detecting the surface shape of the lens to be detected;
the alignment area is used for alignment between the interferometer and the CGH;
the reference region is used for alignment between the CGH and the scope to be inspected.
When the main area is designed, the detection light path returns along the original path until the wave aberration is minimum, and the density of diffraction pattern stripes of the detection light path meets the manufacturing conditions of the existing CGH processing technology.
After the steps are completed, starting to detect the surface shape of the lens to be detected, and comprising the following steps of:
s1, detecting the central subaperture of the lens to be detected.
Firstly, selecting a corresponding standard spherical mirror according to parameters of a lens to be detected. And adjusting the position relation between the standard mirror and the central sub-aperture to minimize interference fringes, and then detecting.
S2, detecting the outer ring sub-aperture of the lens to be detected.
And adjusting the pose between the laser interferometer and the CGH according to the design of the CGH alignment area, aligning the CGH and the outer sub-aperture of the mirror to be detected until the interference fringes are minimum, and detecting the sub-aperture surface shape.
According to the subaperture planning scheme, rotating the adjusting device of the lens to be detected so as to detect the surface shape of each subaperture of the outer ring of the lens to be detected, and collecting all the surface shape information of the subaperture of the outer ring; and moving the position of the lens to be detected to enable the CGH to align to the sub-aperture with the distance of 180 degrees at the position of the first outer ring sub-aperture, and repeating the measurement operation to obtain the surface shape data of the other group of outer ring sub-apertures.
And S3, removing errors caused by the influence of gravity in the detection results obtained in the step S1 and the step S2.
Because the mirror to be examined is the state of placing for vertical when detecting outer ring subaperture, consequently the detection result of the shape of face also can be influenced to gravity factor. The error due to the influence of gravity is half the difference between the two sets of results measured at 0 ° and 180 °, which can be removed in the detection results.
And S4, splicing the full aperture surface shape data of the to-be-detected lens through a sub-aperture splicing algorithm.
And solving the splicing coefficients between adjacent sub-apertures and relative central sub-apertures by using a sub-aperture splicing algorithm of comprehensive optimization through least square fitting, and finally obtaining full-aperture surface shape error data through splicing calculation.
S5, post-processing: and carrying out precision analysis on the full-aperture surface shape data by a self-checking method.
The detection method of the large-caliber convex aspheric surface provided by the invention has the following factors which influence the precision: if the interferometer system has system errors and random errors in the detection process; detecting the needed CGH with design residual error, coding error, substrate error and carving distortion caused by the existing process level; adjustment errors can also be generated in the detection process, wherein the adjustment errors comprise alignment errors such as optical intervals, eccentricity and inclination of a lens to be detected and the CGH; splicing errors generated by the splicing algorithm.
The accuracy of the algorithm can be evaluated in a self-checking mode; and carrying out precision analysis on the detection result so as to obtain an accurate full-aperture surface shape result.
The self-checking method comprises the following steps: and additionally measuring one subaperture of the lens to be detected, and subtracting the full aperture surface shape data and the self-checking subaperture surface shape data point to point according to the pixel corresponding relation to obtain corresponding residual distribution.
The final detection precision is better than 10nm (RMS value), thereby meeting the requirement of high-precision detection of the large-caliber convex aspheric surface.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The utility model provides a convex aspheric surface speculum face shape detection device of heavy-calibre which characterized in that includes: a laser interferometer and a spherical standard mirror;
the laser interferometer is used for emitting plane waves to enter the spherical standard mirror and then change the plane waves into spherical waves, the spherical waves enter the mirror to be detected, interference fringes are formed between the spherical waves and a reference wave surface after the spherical waves are reflected by the mirror to be detected, the positions of the laser interferometer and the mirror to be detected are adjusted until the interference fringes of the central sub-aperture are minimum, and therefore surface shape information of the central sub-aperture of the mirror to be detected is obtained;
the detection device further comprises a CGH;
the CGH is placed in front of a light outlet of the laser interferometer and used for converting the plane wave into a wavefront conforming to the surface shape of the mirror to be detected, the poses of the mirror to be detected and the CGH are respectively adjusted, so that interference fringes measured by the sub-aperture of the outer ring of the mirror to be detected are zero fringes, the surface shape information of the sub-aperture of the outer ring of the mirror to be detected is obtained, all sub-aperture surface shapes are spliced through a splicing algorithm, and the full-aperture surface shape information of the mirror to be detected is obtained.
2. The large-caliber convex aspheric reflector surface shape detection device as claimed in claim 1, wherein the CGH is fixed on a CGH substrate, a CGH adjusting device is installed at the bottom of the CGH, and the CGH adjusting device is used for adjusting x, y and z axis directions of the CGH.
3. The apparatus as claimed in claim 2, wherein the bottom of the laser interferometer is provided with a laser interferometer adjusting device for adjusting the z-axis direction of the laser interferometer.
4. The large-caliber convex aspheric reflector surface shape detection device according to claim 3, characterized in that a device for adjusting the to-be-inspected mirror is arranged at the bottom of the to-be-inspected mirror;
when the central sub-aperture of the lens to be detected is detected:
the adjusting device of the mirror to be detected is used for adjusting the x axis, the y axis and the inclination angle of the mirror to be detected;
when the outer ring sub-aperture of the lens to be detected is detected:
the adjusting device of the mirror to be detected is used for adjusting the x, y and z axis directions, the rotating direction and the inclining direction of the mirror to be detected.
5. The detection method of the large-caliber convex aspheric mirror surface shape detection device according to any one of claims 1 to 4, characterized by comprising the following steps:
s1, adjusting the pose between the spherical standard mirror and the central sub-aperture of the mirror to be detected, and detecting the central sub-aperture of the mirror to be detected when zero stripes appear;
s2, adjusting the pose between the laser interferometer and the CGH, and detecting the outer ring sub-aperture of the to-be-detected mirror when zero stripes appear;
s3, removing errors generated by the influence of gravity in the detection results obtained in the step S1 and the step S2;
and S4, splicing the full aperture surface shape data of the lens to be detected through a sub-aperture splicing algorithm.
6. The method for detecting the surface shape of the large-caliber convex aspheric mirror according to claim 5, characterized by comprising a preprocessing step S0: and selecting the spherical standard lens according to the parameters of the lens to be inspected, planning the sub-aperture of the lens to be inspected, and designing the CGH.
7. The method for detecting the surface shape of a large-caliber convex aspheric mirror as claimed in claim 6, wherein the preprocessing step S0 comprises the following substeps:
s01, selecting a spherical standard mirror with parameters of F # > R #;
wherein the content of the first and second substances,
F#＝f/D，R#R/D；
f # is the F number of the spherical standard mirror, R # is the R number of the mirror to be inspected, F is the focal length of the spherical standard mirror, D is the aperture of the spherical standard mirror, R is the vertex curvature radius of the mirror to be inspected, and D is the aperture of the mirror to be inspected;
s02, planning the sub-aperture of the to-be-inspected lens;
the principle of the aperture planning of the lens to be examined is as follows:
the number of interference fringes of each sub-aperture is smaller than the maximum resolution fringe number of the laser interferometer;
the planned subaperture covers the full-aperture surface shape of the mirror to be detected;
the area of an overlapping area between every two adjacent sub-apertures is more than or equal to 30 percent;
the size of the sub-aperture is about r/F #;
s03, designing the CGH according to parameters of a to-be-examined mirror;
the three regions are included:
the main area is a detection area and is used for detecting the surface shape of the lens to be detected;
the alignment area is used for alignment between the laser interferometer and the CGH;
the reference region is used for alignment between the CGH and the scope to be examined.
8. The method for detecting the surface shape of a large-caliber convex aspherical mirror according to claim 7, wherein in the step S2: and moving the position of the lens to be detected to enable the CGH to align to the sub-aperture with the position of the first outer ring sub-aperture and the sub-aperture with the 180-degree interval, and repeating the measurement operation to obtain the surface shape data of the other outer ring sub-aperture.
9. The method for detecting the surface shape of a large-caliber convex aspherical mirror according to claim 8, wherein in the step S3: the error caused by the influence of gravity is half of the difference between two groups of results of 0 degrees and 180 degrees under the same outer ring sub-aperture obtained by measurement, and can be removed from the detection result.
10. The method for detecting the surface shape of the large-caliber convex aspheric reflector according to claim 9, characterized by further comprising a post-processing step S5: carrying out precision analysis on the full-aperture surface shape data by a self-checking method;
the self-checking method comprises the following steps: and additionally measuring any subaperture of the to-be-detected mirror, and performing point-to-point subtraction on the full aperture surface shape data and the self-checking subaperture surface shape data according to the pixel corresponding relation to obtain corresponding residual error distribution.
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| CN117490604A (en) * | 2024-01-03 | 2024-02-02 | 中国科学院长春光学精密机械与物理研究所 | Optical plane shape absolute detection method |
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| CN117490604A (en) * | 2024-01-03 | 2024-02-02 | 中国科学院长春光学精密机械与物理研究所 | Optical plane shape absolute detection method |
| CN117490604B (en) * | 2024-01-03 | 2024-03-19 | 中国科学院长春光学精密机械与物理研究所 | Optical plane shape absolute detection method |
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