CN103575233A - Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error - Google Patents
Method for detecting large-caliber large-relative-aperture parabolic reflector surface shape error Download PDFInfo
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Abstract
The invention relates to a method for detecting a large-caliber large-relative-aperture parabolic reflector surface shape error. An existing method is high in cost and low in accuracy and efficiency. The method includes the steps of selecting a transmission standard lens, adjusting the position of a laser wave surface interferometer, adjusting a focus of a tested parabolic reflector to be coincided with a focus of the laser wave surface interferometer, adjusting the optical axis of the tested parabolic reflector to enable the optical axis of the tested parabolic reflector and the optical axis of the laser wave surface interferometer to be coaxial, adjusting a standard plane reflector, rotating the laser wave surface interferometer to enable the laser wave surface interferometer to be aligned with a first annular sub-aperture A, and repeating the sixth step and the seventh step according to a sub-aperture division scheme. The method for detecting the large-caliber large-relative-aperture parabolic reflector surface shape error is low in cost and high in accuracy and efficiency.
Description
Technical field
The invention belongs to optical testing technology field, relate generally to a kind of detection method for rotational symmetric heavy caliber object lens of large relative aperture parabolic mirror face shape error.
Technical background
The optical system that the paraboloidal mirror of take is primary mirror has obtained application more and more widely in high-tech sectors such as astronomical optics, space optics and military affairs, in order to increase light gathering and the peak light intensity of optical system, the prominent feature of optical system is heavy caliber and object lens of large relative aperture.The manufacture of heavy caliber object lens of large relative aperture paraboloidal mirror needs corresponding detection technique, yet, heavy caliber object lens of large relative aperture paraboloidal mirror is carried out to high precision detection and still have a lot of challenges.
In the paraboloidal polishing stage, common quantitative detecting method has autocollimation method and compensating glass zero check method.Autocollimation method utilizes parabola to have the aberrationless point (geometrical focus and infinite point) of a pair of conjugation, when pointolite is accurately positioned in geometrical focus, can realize conjugation with a high precision plane catoptron suitable with tested paraboloidal mirror bore, yet manufacture difficulty for the required high precision plane catoptron of heavy caliber paraboloidal mirror, expensive, autocollimation for super large caliber paraboloidal mirror is difficult to realize especially, and need to select than its transmission standard mirror of object lens of large relative aperture more for object lens of large relative aperture paraboloidal mirror, increase along with relative aperture, transmission standard mirror can not meet the detection of the parabolic mirror of object lens of large relative aperture, compensating glass zero check method is that just plane wave front or spherical wave front are converted to the parabola wavefront overlapping with the theoretical shape of tested parabolic mirror by compensating glass, its great advantage is that the bore of the tested parabolic mirror of relative aperture of compensating glass is much smaller, but, in order to obtain reliable parabola wavefront, to the manufacture of compensating glass with debug precision and proposed quite harsh requirement, simultaneously, the relative aperture that the relative aperture of compensating glass must be greater than tested parabolic mirror could be realized the detection of unified face shape error, increase along with relative aperture, compensating glass can not meet the detection of the paraboloidal mirror of object lens of large relative aperture equally.
Li Shengyi etc. are in Chinese Patent Application No. " 200710034359.0 " " heavy caliber object lens of large relative aperture aspheric mirror medium-high frequency error detecting apparatus and method ", the medium-high frequency error-detecting that realizes aspheric mirror by 5-axis movement adjustment platform and the area data stitching algorithm of design, its measurement result is the deviation with respect to best-fit ball, is subject to the restriction of interference fringe consistency for the paraboloid surface shape detection of large bias.
Chen Wei etc. are in Chinese Patent Application No. " 200510086657.5 " " high step error detection method in aperture aspherical optical elements ", by calculating two-dimensional power spectrum density, ask for corresponding frequencies scope energy loss, a kind of data processing and evaluation method of medium-high frequency error, and the detection method of involvement aspect shape control information itself not.
U.S. QED company is at " An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces ", P. E. Murphy, and G. W. Forbes, Proc. Of SPIE, Vol. 5188, 296-307, 2003 and United States Patent (USP) " US 6956657B2 " in the sub-aperture stitching method of a kind of aspherical mirror shape error-detecting is proposed, tested aspheric mirror is divided into several and covers unified sub-aperture, by six axle motion platforms, adjust tested aspheric mirror or interferometer, antithetical phrase aperture is carried out zero-bit and is interfered detection, then adopt stitching algorithm to obtain unified testing result, it is by hardware precision, the inclination that has utilized algorithm compensation between aperture, defocus error, guaranteed the stable of measuring system, equally, paraboloid surface shape for large bias is detected the restriction that is subject to interference fringe consistency.
The pick-up unit using in said method, all comprise laser wavefront interferometer 3, tested parabolic mirror 1, standard flat catoptron 4 and main control computer 2, laser wavefront interferometer 3, tested parabolic mirror 1, standard flat the catoptron 4 all adjusting mechanism by separately move.
Summary of the invention
The object of the invention is the technical matters existing for prior art, propose the detection method of a kind of low cost, high precision, high efficiency heavy caliber object lens of large relative aperture parabolic mirror face shape error.
To achieve these goals, the invention provides the detection method of heavy caliber object lens of large relative aperture parabolic mirror face shape error, comprise the steps:
The first step: selective transmission standard lens, and clamping is to laser wavefront interferometer;
Second step: adjust the position of laser wavefront interferometer, the focus of laser wavefront interferometer and the rotation center O of its adjusting mechanism are overlapped;
The 3rd step: the focus of adjusting tested parabolic mirror overlaps with the focus of laser wavefront interferometer;
The 4th step: adjust the optical axis of tested parabolic mirror and the optical axis of laser wavefront interferometer is coaxial;
The 5th step: adjust standard flat catoptron, the light that is incident to tested parabolic mirror is returned through flat mirror reflects Hou Yanyuan road, form self-collimation measurement principle;
The 6th step: according to the relative aperture of transmission standard lens is installed in laser interferometer, angle measuring interferometer, make laser wavefront interferometer aim at the first ring aperture A, face shape error with this region of the tested parabola of interferometer measurement, laser corrugated, data deposit, and the anglec of rotation of recording laser wavefront interferometer;
The splitting scheme in described sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, can obtain the field angle θ of laser wavefront interferometer, the region of the measured piece that definition laser wavefront interferometer is aimed at is first sub-aperture A on first ring, according to sub-aperture overlapping area between two, be not less than the principle of single sub-aperture area 1/4, can obtain respectively all sub-aperture on first ring and all sub-aperture on other rings;
The 7th step: according to sub-aperture splitting scheme, make interferometer aim at successively sub-aperture B, C, D, and utilize the sub-aperture area face of the correspondence shape of the tested parabolic mirror of laser corrugated interferometer measurement, data deposit, and the corresponding rotational angle of recording laser interferometer and tested parabolic mirror;
The 8th step: repeat the 6th step and the 7th step, until all sub-aperture area are measured complete, the face shape error data of the anglec of rotation of the anglec of rotation of laser wavefront interferometer, standard flat catoptron and laser wavefront interferometer are sent into main control computer, and the face shape error figure in several sub-apertures that detection is obtained is spliced into unified face shape error figure.
The data processing algorithm program of described main control computer comprises the data extraction algorithm of overlapping region and the stitching algorithm of area data, wherein: the data extraction algorithm of described overlapping region is determined the roughly overlapping region in two adjacent sub-apertures according to the rotatablely move anglec of rotation of assembly and the anglec of rotation of C axle universal stage of laser wavefront interferometer, by laser face shape error that wavefront interferometer is surveyed, be the tested paraboloidal deviation of relative ideal, be equivalent to the face shape error of laser corrugated interferometer measurement plane component.
Compared with prior art, the invention has the advantages that:
1, the autocollimation method that heavy caliber object lens of large relative aperture parabolic mirror face shape error pick-up unit of the present invention and method are carried out a plurality of sub-apertures by interferometer rotating mechanism and measured piece rotating mechanism is checked, by detecting data processor, obtain unified face shape error, not only improved lateral resolution, autocollimation method of inspection is not subject to the impact of vertical survey scope simultaneously, therefore can measure the parabolic mirror of large bias;
2, sub-aperture of the present invention data stitching algorithm is equivalent to the sub-aperture stitching algorithm of measurement plane optical element, and the alignment error such as inclination of causing of adjusting mechanism, out of focus carries out the splicing of sub-aperture data after can eliminating again, reduced the requirement to adjusting mechanism in rotation process;
3, sub-aperture of the present invention is divided into several rings, only need to record the angle that relatively rotates between sub-aperture, and the accurate extraction of overlapping region adopts secondary localization method, the advantage of the overlapping region extraction algorithm of software, reduced the requirement of hardware, reduce the accuracy requirement to standard flat mirror adjustment mechanism, and do not needed to carry out pinpoint middle center inside diameter measurement;
4, the present invention only need to carry out the motion control of the adjusting mechanism of laser wavefront interferometer and standard flat catoptron in measuring process, has greatly reduced the impact of adjusting mechanism in measuring process.
Accompanying drawing explanation
Fig. 1 is the pick-up unit schematic diagram of heavy caliber object lens of large relative aperture parabolic mirror face shape error;
Fig. 2 is the vertical view of the pick-up unit schematic diagram of heavy caliber object lens of large relative aperture parabolic mirror face shape error;
Fig. 3 is the mechanism action schematic diagram while dividing sub-aperture;
Fig. 4 is that schematic diagram is divided in unified sub-aperture to be measured.
Wherein: the tested parabolic mirror of 1-, 2-main control computer, 3-laser wavefront interferometer, 4-standard flat catoptron.
Embodiment
Referring to Fig. 1 and Fig. 2, the pick-up unit using in the inventive method, comprise laser wavefront interferometer 3, tested parabolic mirror 1, standard flat catoptron 4 and main control computer 2, laser wavefront interferometer 3, tested parabolic mirror 1, standard flat the catoptron 4 all adjusting mechanism by separately move.
Concrete device is known textural association;
Described laser wavefront interferometer is by its adjusting mechanism controlled motion, and the rotation center of its adjusting mechanism is O, and the action by adjusting mechanism makes the focus of laser wavefront interferometer 3 overlap with its rotation center O; Action by adjusting mechanism simultaneously realizes laser wavefront interferometer 3 and rotates to an angle around its focus (being rotation center O).
The adjusting mechanism of described tested parabolic mirror 1 comprise X-axis motion adjust platform, Y-axis motion adjust tilt adjustments platform in platform, XOY plane, around the focusing campaign assembly of tested parabolic mirror optical axis rotating C axle universal stage and tested parabolic mirror.The tilt adjustments platform that X-axis motion is adjusted in platform, Y-axis motion adjustment platform and XY plane is used for adjusting tested parabolic mirror 1, makes the optical axis of tested parabolic mirror 1 and the optical axis of laser wavefront interferometer 3 coaxial; C axle universal stage is used for rotating tested parabolic mirror 1, to realize the face shape error in each sub-aperture on same ring, measures; Focusing motion assembly is used for adjusting the focus of tested parabolic mirror 1 and the rotation center O of the adjusting mechanism of laser wavefront interferometer overlaps.
The adjusting mechanism of described standard flat catoptron 4 is for adjusting plane mirror, makes the light that is incident to tested parabolic mirror 1 form autocollimation.
A detection method for heavy caliber object lens of large relative aperture parabolic mirror face shape error, comprises the steps:
The first step: selective transmission standard lens, and clamping is to laser wavefront interferometer 3, makes laser corrugated interferometer beam be full of large as far as possible measured piece bore, to reduce the number of rings of measuring sub-aperture;
Second step: adjust the position of laser wavefront interferometer, the focus of laser wavefront interferometer and the rotation center O of its adjustment structure are overlapped;
The 3rd step: the focus of adjusting tested parabolic mirror overlaps with the focus of laser wavefront interferometer;
The 4th step: adjust the optical axis of tested parabolic mirror and the optical axis of laser wavefront interferometer is coaxial;
The 5th step: adjust standard flat catoptron, the light that is incident to tested parabolic mirror is returned through flat mirror reflects Hou Yanyuan road, form self-collimation measurement principle;
The 6th step: according to the relative aperture of transmission standard lens is installed in laser interferometer, angle measuring interferometer, make laser wavefront interferometer aim at the first ring aperture A, face shape error with this region of the tested parabola of interferometer measurement, laser corrugated, data deposit, and the anglec of rotation of recording laser wavefront interferometer;
The splitting scheme in sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, can obtain the field angle θ of laser wavefront interferometer, referring to Fig. 3, the region of the measured piece that definition laser wavefront interferometer is aimed at is first sub-aperture A on first ring, according to sub-aperture overlapping area between two, be not less than the principle of single sub-aperture area 1/4, can obtain respectively all sub-aperture on first ring and all sub-aperture on other rings;
The 7th step: according to sub-aperture splitting scheme, referring to Fig. 4, make interferometer aim at successively sub-aperture B, C, D, and utilize the sub-aperture area face of the correspondence shape of the tested parabolic mirror of laser corrugated interferometer measurement, data deposit, and the corresponding rotational angle of recording laser interferometer and tested parabolic mirror;
The 8th step: repeat the 6th step and the 7th step, until all sub-aperture area measurements are complete, the face shape error data of the anglec of rotation of the anglec of rotation of laser wavefront interferometer, standard flat catoptron and laser wavefront interferometer are sent into main control computer.
Then by data processing algorithm program, processed, described data processing algorithm program comprises the data extraction algorithm of overlapping region and the stitching algorithm of area data, wherein the data extraction algorithm of overlapping region is determined the roughly overlapping region in two adjacent sub-apertures according to the rotatablely move anglec of rotation of assembly and the anglec of rotation of C axle universal stage of laser wavefront interferometer, by laser face shape error that wavefront interferometer is surveyed, it is the tested paraboloidal deviation of relative ideal, the face shape error that is equivalent to laser corrugated interferometer measurement plane component, therefore, can by two adjacent sub-apertures roughly the alignment error of overlapping region after eliminating, carry out again the related operation of its absolute face shape error, to obtain overlapping region accurately, two adjacent sub-apertures, described sub-aperture data stitching algorithm, by the iteration optimization of two overlapping region, adjacent sub-aperture data, makes its inconsistency minimum.
The face shape error figure in several sub-apertures that finally detection obtained is spliced into unified face shape error figure.
Claims (2)
1. a detection method for heavy caliber object lens of large relative aperture parabolic mirror face shape error, is characterized in that: comprise the steps:
The first step: selective transmission standard lens, and clamping is to laser wavefront interferometer;
Second step: adjust the position of laser wavefront interferometer, the focus of laser wavefront interferometer and the rotation center O of its adjusting mechanism are overlapped;
The 3rd step: the focus of adjusting tested parabolic mirror overlaps with the focus of laser wavefront interferometer;
The 4th step: adjust the optical axis of tested parabolic mirror and the optical axis of laser wavefront interferometer is coaxial;
The 5th step: adjust standard flat catoptron, the light that is incident to tested parabolic mirror is returned through flat mirror reflects Hou Yanyuan road, form self-collimation measurement principle;
The 6th step: according to the relative aperture of transmission standard lens is installed in laser interferometer, angle measuring interferometer, make laser wavefront interferometer aim at the first ring aperture A, face shape error with this region of the tested parabola of interferometer measurement, laser corrugated, data deposit, and the anglec of rotation of recording laser wavefront interferometer;
The splitting scheme in described sub-aperture: according to the relative aperture of laser wavefront interferometer standard lens, can obtain the field angle θ of laser wavefront interferometer, the region of the measured piece that definition laser wavefront interferometer is aimed at is first sub-aperture A on first ring, according to sub-aperture overlapping area between two, be not less than the principle of single sub-aperture area 1/4, can obtain respectively all sub-aperture on first ring and all sub-aperture on other rings;
The 7th step: according to sub-aperture splitting scheme, make interferometer aim at successively sub-aperture B, C, D, and utilize the sub-aperture area face of the correspondence shape of the tested parabolic mirror of laser corrugated interferometer measurement, data deposit, and the corresponding rotational angle of recording laser interferometer and tested parabolic mirror;
The 8th step: repeat the 6th step and the 7th step, until all sub-aperture area are measured complete, the face shape error data of the anglec of rotation of the anglec of rotation of laser wavefront interferometer, standard flat catoptron and laser wavefront interferometer are sent into main control computer, and the face shape error figure in several sub-apertures that detection is obtained is spliced into unified face shape error figure.
2. the detection method of heavy caliber object lens of large relative aperture parabolic mirror face shape error according to claim 1, it is characterized in that: the data processing algorithm program of described main control computer comprises the data extraction algorithm of overlapping region and the stitching algorithm of area data, wherein: the data extraction algorithm of described overlapping region is determined the roughly overlapping region in two adjacent sub-apertures according to the rotatablely move anglec of rotation of assembly and the anglec of rotation of C axle universal stage of laser wavefront interferometer, by laser face shape error that wavefront interferometer is surveyed, it is the tested paraboloidal deviation of relative ideal, the face shape error that is equivalent to laser corrugated interferometer measurement plane component.
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| CN110737103A (en) * | 2019-10-31 | 2020-01-31 | 中国科学院长春光学精密机械与物理研究所 | large-caliber off-axis catadioptric multichannel optical system assembling and adjusting method |
| CN110986823A (en) * | 2019-12-19 | 2020-04-10 | 华中科技大学 | Large-caliber correcting mirror surface shape measuring system and method |
| CN112525099A (en) * | 2020-11-16 | 2021-03-19 | 南京理工大学 | Device and method for absolute inspection of large-aperture plane interferometer by using rotation translation method |
| CN112525099B (en) * | 2020-11-16 | 2022-09-06 | 南京理工大学 | Device and method for absolute inspection of large-caliber planar interferometer by using rotation translation method |
| CN112924144A (en) * | 2021-02-09 | 2021-06-08 | 汕头大学 | High-precision detection device for variable-aperture reflector |
| CN112964455A (en) * | 2021-02-09 | 2021-06-15 | 中国科学院上海光学精密机械研究所 | Wave aberration splicing measuring device and method for large-numerical-aperture objective lens |
| CN112964455B (en) * | 2021-02-09 | 2022-10-11 | 中国科学院上海光学精密机械研究所 | Wave aberration splicing measuring device and method for large-numerical-aperture objective lens |
| CN112924144B (en) * | 2021-02-09 | 2023-03-24 | 汕头大学 | High-precision detection device for variable-aperture reflector |
| CN113049228A (en) * | 2021-03-22 | 2021-06-29 | 中国科学院上海光学精密机械研究所 | Objective wave aberration detection device and detection method |
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