CN110528078A - A kind of crystal withdrawing device - Google Patents
A kind of crystal withdrawing device Download PDFInfo
- Publication number
- CN110528078A CN110528078A CN201910770791.9A CN201910770791A CN110528078A CN 110528078 A CN110528078 A CN 110528078A CN 201910770791 A CN201910770791 A CN 201910770791A CN 110528078 A CN110528078 A CN 110528078A
- Authority
- CN
- China
- Prior art keywords
- crystal
- cylinder
- gland
- withdrawing device
- boss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides a kind of crystal withdrawing devices, comprising: cylinder, inner sidewall have inwardly projecting step, and for the step for placing attachment crystal unit, the top of the cylinder is symmetrically arranged with multiple elastic components；Gland, outside have edge, and middle part is provided with the boss of pressing crystal, forms groove between the edge and boss, the edge end is correspondingly arranged on multiple mounting portions connecting with the elastic component.The present invention makes the power stepless action of boss crystal cleavage during on crystal, preventing crystal from taking out by the elastic component among cylinder and gland.The apparatus structure of the application is simple, can be taken out conveniently crystal, crystal cleavage during capable of preventing crystal from taking out, and guarantees the integrity of the crystal taken out and improves work efficiency.
Description
Technical field
The present invention relates to a kind of crystal withdrawing devices, belong to crystal production apparatus field.
Background technique
Silicon carbide (SiC) monocrystalline have high thermal conductivity, high-breakdown-voltage, carrier mobility be high, chemical stability very
High excellent semiconductor physics can be fabricated to the high frequency to work under high temperature, intense radiation conditions, high power electronic device
Part and opto-electronic device have huge application value in national defence, high-tech, industrial production, power supply, field of power transformation, are counted as
The third generation semiconductor material with wide forbidden band of great development prospect.
Currently, physical vaporous deposition (PVT) is to grow carborundum crystals commonly used approach, with carbonization in this method
Si powder is raw material, and the silicon carbide powder in crucible, which is heated to certain temperature, significantly to distil, and the silicon carbide decomposed
Gas can be transported along temperature gradient and be agglomerated at silicon carbide seed.In general, seed crystal to be placed on to the seed crystal support of hollow perforation
Frame upper end, seed crystal bracket are placed on inside crucible, cover crucible cover；Or seed crystal is placed directly within the upper end of the crucible, then cover earthenware
Crucible lid, the growth for seed crystal.It after crystal growth, needs to take out crystal, the crystal being attached on crucible or seed crystal bracket,
It is complete at present to hit crucible or the taking-up of seed crystal bracket on station by hand, easily cause crystal cleavage, low efficiency.The prior art
In, there are no a kind of devices that the crystal by crucible body or seed crystal bracket takes out.
Summary of the invention
To solve the above-mentioned problems, it this application provides a kind of crystal withdrawing device, avoids by by hand in station
The drawbacks of crystal, is taken out in upper shock, prevents from taking crystallization process crystal cleavage and improve work efficiency.
The application the technical solution adopted is as follows:
A kind of crystal withdrawing device, comprising: cylinder, inner sidewall have inwardly projecting step, and the step is for putting
Attachment crystal unit is set, the top of the cylinder is symmetrically arranged with multiple elastic components；Gland, outside have edge, and middle part is set
It is equipped with the boss of pressing crystal, forms groove between the edge and boss, the edge end is correspondingly arranged on multiple and institute
State the mounting portion of elastic component connection.
Further, the step is L shape step, and the width of L shape step is equal to or less than the thickness of attachment crystal unit,
The height of L shape step is less than the height of attachment crystal unit.
Further, the outer diameter of the gland and the outer diameter of cylinder are roughly equal, and the height at edge is less than the height of boss,
The thickness at edge is less than the thickness on cylinder top.
Further, the elastic component is spring, and the mounting portion with the spring dismantling connection is hole slot.
Preferably, the quantity of the spring is 3-6；It preferably, is 4.
Further, the outer cover of the cylinder is equipped with shell, and the height of shell is approximately equal to the height of cylinder and gland
The sum of degree.
Further, the cylinder and gland are made of the organic material of high purity graphite material or high-purity.
Further, the top opening of the cylinder, bottom are equipped with soft material layer；Preferably, the soft material
Layer is foam cotton.
Further, the attachment crystal unit is the seed crystal bracket of crucible or hollow perforation.
Further, handle is provided at the top of the gland；Preferably, the handle is T-handle.
The application's has the beneficial effect that
(1) the application uses cylinder and gland structure, after attachment crystal unit is put at cylinder step, the boss of gland
Pressing acts on crystal, makes crystal loose or dislocation, can be taken out conveniently crystal.
(2) the application makes the power stepless action of boss on crystal, prevents crystalline substance by the elastic component among cylinder and gland
Crystal cleavage during body takes out.
(3) apparatus structure of the application is simple, can be taken out conveniently crystal, and crystal is opened during capable of preventing crystal from taking out
It splits, guarantee the integrity of the crystal taken out and improves work efficiency.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present application, constitutes part of this application, this Shen
Illustrative embodiments and their description please are not constituted an undue limitation on the present application for explaining the application.In the accompanying drawings:
Fig. 1 is the schematic diagram of apparatus of the present invention；
Fig. 2 is the carborundum crystals photo taken out using apparatus of the present invention；
Fig. 3 is the carborundum crystals photo taken out using art methods；
Wherein, 1, shell；2, cylinder；3, gland；4, step；5, edge；6, boss；7, groove；8, spring；9, handle；
10, seed crystal bracket；11, carborundum crystals.
Specific embodiment
The application is described in detail below with reference to embodiment, but the application is not limited to these embodiments.
Many details are explained in the following description in order to fully understand the application, still, the application may be used also
To be implemented using other than the one described here other modes, therefore, the protection scope of the application is not by described below
Specific embodiment limitation.
In addition, in the description of the present application, it is to be understood that term " on ", "lower", "front", "rear", "left", "right",
"vertical", "horizontal", "top", "bottom", "inner", "outside", etc. instructions orientation or positional relationship be orientation based on the figure
Or positional relationship, it is merely for convenience of description the application and simplifies description, rather than the device or element of indication or suggestion meaning
It must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment
Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present application, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In this application unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", etc. terms answer
It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be mechanical connection,
It can be electrical connection, can also be communication；It can be directly connected, two can also be can be indirectly connected through an intermediary
The interaction relationship of connection or two elements inside a element.For the ordinary skill in the art, Ke Yigen
The concrete meaning of above-mentioned term in this application is understood according to concrete condition.
In this application unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.In retouching for this specification
In stating, the description of reference term " one embodiment ", " some embodiments ", " example ", " specific example " or " some examples " etc.
Mean that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the application
In embodiment or example.In the present specification, schematic expression of the above terms are necessarily directed to identical embodiment
Or example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples
It can be combined in any suitable manner.
This application provides a kind of crystal withdrawing devices, suitable for growing taking for crystal on the seed crystal of crucible inner upper end
Out, it is particularly suitable for growing the taking-up of crystal using seed crystal bracket, the crystal includes but is not limited to silicon carbide, monocrystalline silicon, more
Crystal silicon etc..
As described in Figure 1, crystal withdrawing device provided by the present application includes cylinder 2 and gland 3.
In one embodiment, the inner sidewall of cylinder 2 has inwardly projecting step 4, and step 4 is brilliant for placing attachment
Body device, the top of cylinder 2 are symmetrically arranged with multiple springs 8；The outside of gland 3 has edge 5, and middle part is provided with pressing crystal
Boss 6, between edge 5 and boss 6 formed groove 7,5 end of edge be correspondingly arranged on installation spring 8 hole slot.When crystal is raw
After length, needs to take out in the crystal for growing attachment in crucible or on seed crystal bracket, attachment crystal unit is put into cylinder 2
In step at, by by spring correspondence be mounted at hole slot, uniformly firmly be slowly pressed downward gland 3, boss 6 acts on crystal
On, after crystal is by uniform pressing force, it can be loosened on crucible or seed crystal bracket, to make crystal and crucible or seed crystal support
Frame separation, to be taken out conveniently crystal.The setting of groove 7 extrudes crystal convenient for boss 6, can also press piezocrystal to avoid in boss 6
Seed crystal bracket is broken when body, and seed crystal bracket may be reused.
The step is L shape step, and the width of L shape step is equal to or less than the thickness of attachment crystal unit, L shape step
Height is less than the height of attachment crystal unit.The specific size of L shape step is adjustable, as long as guaranteeing that boss 6 can press
Crystal will not encounter 2 inner wall of cylinder when crystal falls off.When the seed crystal bracket of attachment crystal is placed on the lower surface of L shape step
Afterwards, during taking crystalline substance, it is pressed downward gland 3, crystal will not collide the inner wall of cylinder 2 from loose or dislocation on seed crystal bracket, crystal.
The outer diameter of the outer diameter and cylinder 2 of the gland 3 is roughly equal, and the height at edge 5 is less than the height of boss 6, edge 5
Thickness be less than 2 top of cylinder thickness.Due to when the height that the height at edge 5 is less than boss 6, which can increase gland boss, to be pushed
Stroke, guarantee relative ease extrude crystal.When taking crystalline substance, L shape step can be placed in the inside of groove 7, and boss 6 can enter
To the intracavitary of attachment crystal unit.The size of edge 5 and boss 6 is adjustable, as long as guaranteeing that boss 6 can act on one section of crystal
Distance.
Preferably, the difference in height of edge 5 and boss 6 is less than the height of L shape step, and when boss 6 presses crystal, boss 6 is stretched
Enter to the intracavitary maximum distance of cylinder 2 be edge 5 and boss 6 difference in height, only need so that crystal loose or dislocation, without exerting oneself
The too long distance of crystal is acted on, in case torque easily causes the cracking of crystal too much.
In a kind of optional embodiment, other elastic components that spring 8 can also be may be implemented using this field are corresponding
The mounting portion for connecting the elastic component can also be in such a way that this field may be implemented.During taking crystalline substance, due to elastic component
Presence, can have a buffer function to the power for acting on crystal, prevent from overexerting to crystal and cause crystal cleavage.Elastic component with
The connection of mounting portion is to be detachably connected, and other any ways that this field may be implemented can also be used.
Preferably, the quantity of the spring 8 is 3-6；It preferably, is 4.4 symmetrically arranged springs 8 ensure that pressure
The uniformity that lid 3 is exerted oneself, it is also more convenient using dismantling.
In one embodiment, which further includes shell 1,1 set of the shell outside in cylinder 2, and the height of shell 1 is big
Cause the sum of the height for being equal to cylinder 2 Yu gland 3.Shell 1, cylinder 2 only retain dismountable gap between gland 3.Shell 1
It playing a protective role, when avoiding firmly pushing gland 3, the height of the double swerve of gland 3, shell cannot be too big, with
Exempt to influence in gland 3 spring from the dismounting in hole slot, it has not been convenient to which gland takes out.
In one embodiment, the cylinder 2 and gland 3 are by high purity graphite material or the organic material system of high-purity
At.High purity graphite material or the organic material of high-purity refer to material of the purity of graphite or organic matter 99.999% or more
Material to guarantee to pollute crystal with the material of crystal contact, and can also guarantee to avoid the pollution to seed crystal bracket
The reuse of seed crystal bracket, save the cost.
The top opening of the cylinder 2, bottom are equipped with soft material layer；Preferably, the soft material layer is foam
Cotton.When the setting of soft material layer avoids that crystal is fallen down on seed crystal bracket, crystal causes to be crushed.The cylinder 2 can also be adopted
With the cylindrical body of hollow perforation, it is only necessary to spread foam cotton when taking crystalline substance, below cylindrical body, prevent crystal from breaking into pieces.
The attachment crystal unit is the seed crystal bracket of crucible or hollow perforation.According to this field routine, seed crystal bracket or
The bore of crucible body is all circle, and therefore, herein described cylinder 2 and shell 1 are hollow cylindrical body or analogous shape.
The top of the gland 3 is provided with handle 9；Preferably, the handle is T-handle.Handle is held, gland is facilitated
Downwards firmly.
Top when in use, is put into the platform of cylinder 2 by the device of the application with the seed crystal bracket 10 of carborundum crystals 11
At rank 4, alignment hole slot is packed into spring, holds handle and uniformly firmly slowly pushes gland 3 simultaneously, damages to avoid deflection when pushing
Bad seed crystal bracket and the pushing damage crystal that overexerts, boss 6 act on crystal, and crystal loose or dislocation is in the bottom of cylinder 2.
Then gland 3 is removed, crystal is taken out.Plane of crystal is complete, without any cracking scratch damage, as shown in Figure 2.
Comparative example 1
After top is taken out with the seed crystal bracket of crystal, crystal is taken out by hitting or colliding seed crystal bracket, crystal table
There are cracking, scratch and damage in face, as shown in Figure 3.
The above, only embodiments herein, the protection scope of the application is not by these specific embodiments
Limitation, but determined by following claims.To those skilled in the art, the application can have various
Change and variation.All any modification, equivalent replacement, improvement and so within the technical idea and principle of the application, should all
Comprising within the scope of protection of this application.
Claims (10)
1. a kind of crystal withdrawing device characterized by comprising
Cylinder, inner sidewall have inwardly projecting step, and the step is for placing attachment crystal unit, the top of the cylinder
End is symmetrically arranged with multiple elastic components；
Gland, outside have edge, and middle part is provided with the boss of pressing crystal, forms groove between the edge and boss,
The edge end is correspondingly arranged on multiple mounting portions connecting with the elastic component.
2. crystal withdrawing device according to claim 1, which is characterized in that the step is L shape step, L shape step
Width is equal to or less than the thickness of attachment crystal unit, and the height of L shape step is less than the height of attachment crystal unit.
3. crystal withdrawing device according to claim 1, which is characterized in that the outer diameter of the gland and the outer diameter of cylinder are big
Cause equal, the height at edge is less than the height of boss, and the thickness at edge is less than the thickness on cylinder top.
4. crystal withdrawing device according to claim 1, which is characterized in that the elastic component is spring, with the spring
The mounting portion of dismantling connection is hole slot.
5. crystal withdrawing device according to claim 4, which is characterized in that the quantity of the spring is 3-6；It is preferred that
, it is 4.
6. crystal withdrawing device according to claim 1, which is characterized in that the outer cover of the cylinder is equipped with shell, outside
The height of shell is approximately equal to the sum of the height of cylinder and gland.
7. crystal withdrawing device according to claim 1, which is characterized in that the cylinder and gland are by high purity graphite material
Material or the organic material of high-purity are made.
8. crystal withdrawing device according to claim 1, which is characterized in that the top end opening of the cylinder, bottom are laid with
There is soft material layer；Preferably, the soft material layer is foam cotton.
9. crystal withdrawing device according to claim 1, which is characterized in that the attachment crystal unit is crucible or hollow
The seed crystal bracket of perforation.
10. crystal withdrawing device according to claim 1, which is characterized in that be provided with handle at the top of the gland；It is excellent
Choosing, the handle is T-handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910770791.9A CN110528078B (en) | 2019-08-20 | 2019-08-20 | Crystal taking-out device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910770791.9A CN110528078B (en) | 2019-08-20 | 2019-08-20 | Crystal taking-out device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110528078A true CN110528078A (en) | 2019-12-03 |
| CN110528078B CN110528078B (en) | 2020-10-02 |
Family
ID=68663829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910770791.9A Active CN110528078B (en) | 2019-08-20 | 2019-08-20 | Crystal taking-out device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110528078B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853480A (en) * | 2020-12-31 | 2021-05-28 | 湖南三安半导体有限责任公司 | Seed crystal pasting jig, flow guide assembly and method for pasting seed crystal on edge |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201179559Y (en) * | 2008-04-16 | 2009-01-14 | 广州市型腔模具制造有限公司 | Push-off mechanism of stationary mould for mould |
| CN101973011A (en) * | 2010-09-08 | 2011-02-16 | 中国科学院长春光学精密机械与物理研究所 | Crystal curing press head applied to electronic tag back-off encapsulation equipment |
| CN201982273U (en) * | 2011-03-14 | 2011-09-21 | 杜志刚 | Inflator convenient to pull, not easy to be loose and capable of being placed in air sac |
| CN102248509A (en) * | 2011-07-08 | 2011-11-23 | 苏州奔腾塑业有限公司 | Extractor |
| CN204171977U (en) * | 2014-10-17 | 2015-02-25 | 山东鼎盛精工有限公司 | Novel 7 inch drill collar batteries take out charging apparatus |
| CN204417652U (en) * | 2014-12-11 | 2015-06-24 | 河北同光晶体有限公司 | For growing the plumbago crucible of SiC crystal |
| CN208772385U (en) * | 2018-09-13 | 2019-04-23 | 韶关市博信模具制造有限公司 | A kind of new case angle casting die |
| CN209224503U (en) * | 2018-11-20 | 2019-08-09 | 广东伊之密高速包装***有限公司 | A kind of liftout attachment of mold |
-
2019
- 2019-08-20 CN CN201910770791.9A patent/CN110528078B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201179559Y (en) * | 2008-04-16 | 2009-01-14 | 广州市型腔模具制造有限公司 | Push-off mechanism of stationary mould for mould |
| CN101973011A (en) * | 2010-09-08 | 2011-02-16 | 中国科学院长春光学精密机械与物理研究所 | Crystal curing press head applied to electronic tag back-off encapsulation equipment |
| CN201982273U (en) * | 2011-03-14 | 2011-09-21 | 杜志刚 | Inflator convenient to pull, not easy to be loose and capable of being placed in air sac |
| CN102248509A (en) * | 2011-07-08 | 2011-11-23 | 苏州奔腾塑业有限公司 | Extractor |
| CN204171977U (en) * | 2014-10-17 | 2015-02-25 | 山东鼎盛精工有限公司 | Novel 7 inch drill collar batteries take out charging apparatus |
| CN204417652U (en) * | 2014-12-11 | 2015-06-24 | 河北同光晶体有限公司 | For growing the plumbago crucible of SiC crystal |
| CN208772385U (en) * | 2018-09-13 | 2019-04-23 | 韶关市博信模具制造有限公司 | A kind of new case angle casting die |
| CN209224503U (en) * | 2018-11-20 | 2019-08-09 | 广东伊之密高速包装***有限公司 | A kind of liftout attachment of mold |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853480A (en) * | 2020-12-31 | 2021-05-28 | 湖南三安半导体有限责任公司 | Seed crystal pasting jig, flow guide assembly and method for pasting seed crystal on edge |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110528078B (en) | 2020-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104805504B (en) | A kind of method of fast-growth large size silicon-carbide monocrystalline | |
| CN101680112A (en) | Guided diameter formula SiC sublimation-grown by the multilayer growth guide | |
| CN103708463B (en) | The preparation method of feather weight high-pure SiC power | |
| CN108360064B (en) | Method for improving stability of single crystal diamond prepared by MPCVD | |
| CN108018605A (en) | Seed crystal processing method and Silicon carbide crystal growth method | |
| CN202390579U (en) | Graphite crucible for growing silicon carbide single crystal by using physic gaseous phase transport method | |
| CN102021653B (en) | Method for growing silicon carbide single crystal by using high-density material block | |
| CN101812723A (en) | Method and device for growing silicon carbide signal crystals based on physical vapor transport technology | |
| CN110408987A (en) | Crystal growing furnace | |
| CN104350187A (en) | Method for manufacturing silicon carbide substrate | |
| CN106698436A (en) | Preparation method of high-purity silicon carbide powder | |
| CN110528078A (en) | A kind of crystal withdrawing device | |
| CN211005718U (en) | Crystal taking-out device | |
| CN115182050A (en) | BaGa vapor equilibrium growth method 2 GeSe 6 Method for single crystal | |
| CN208293118U (en) | A kind of SiC single crystal grower of reusable crucible | |
| CN207659559U (en) | Crucible cover and crucible | |
| CN207259637U (en) | The fixing device of seed crystal or substrate in aluminum-nitride single crystal growth | |
| CN202591206U (en) | Glass phase material hardening and crushing recovery device | |
| JP6829767B2 (en) | Manufacturing method and manufacturing equipment for SiC raw materials for SiC crystal growth | |
| CN105696081B (en) | The preparation method of aluminium antimonide material | |
| CN206511930U (en) | A kind of porous crucible | |
| CN210945856U (en) | Growth device for growing silicon carbide polycrystal | |
| CN111197181B (en) | Preparation method of high-purity ultrathin silicon carbide substrate | |
| CN201420112Y (en) | Grower of SiC monocrystals | |
| CN202246977U (en) | Crystal supporting device for growing zone-melting monocrystal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: 250100 AB Block 1106-6-01, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |