CN110347119B - Motion control structure and actuator - Google Patents
Motion control structure and actuator Download PDFInfo
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- CN110347119B CN110347119B CN201910605916.2A CN201910605916A CN110347119B CN 110347119 B CN110347119 B CN 110347119B CN 201910605916 A CN201910605916 A CN 201910605916A CN 110347119 B CN110347119 B CN 110347119B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/414—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
- G05B19/4142—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller characterised by the use of a microprocessor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/34—Director, elements to supervisory
- G05B2219/34013—Servocontroller
Abstract
The invention provides a motion control structure and a driving mechanism, wherein the motion control structure comprises a motion platform; the first execution mechanism surrounds the periphery of the motion platform and comprises first execution units arranged on two opposite sides of the motion platform along the X-axis direction and second execution units arranged on two opposite sides of the motion platform along the Y-axis direction, the first execution units comprise first execution pieces connected with the motion platform, the first execution pieces can displace along the X-axis direction, the second execution units comprise second execution pieces connected with the motion platform, and the second execution pieces can displace along the Y-axis direction; and the second execution mechanism surrounds the inner periphery of the motion platform, comprises a third execution unit, and the third execution unit comprises an assembly connected with the motion platform, and the assembly can displace along the Z-axis direction. The motion control structure provided by the invention has the advantages that the motion platform can be driven to realize six-degree-of-freedom motion, and the motion can be accurately and quickly transmitted to a driven object.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of micro-electro-mechanical systems, in particular to a motion control structure and an actuator adopting the motion control structure.
[ background of the invention ]
The MEMS (Micro-Electro-Mechanical System) motion control structure has a wide application, such as MEMS switch, MEMS Micro-mirror, MEMS speaker, etc., for some applications, such as MEMS Micro-mirror and MEMS anti-shake, the degree of freedom of the MEMS motion control structure is an important index, and the existing multi-degree-of-freedom MEMS motion control structure has the following defects:
1. in some applications, such as optical anti-shake, the number of degrees of freedom of existing motion control structures is small.
2. The connecting mode of the driving device and the driven object for realizing the multiple degrees of freedom is the driving device 1, the driving device 2 and the driven object, and the indirect connecting mode reduces the motion precision and the response speed of the driven object.
[ summary of the invention ]
One of the purposes of the invention is to provide a motion control structure, which can directly drive a motion platform to realize six-degree-of-freedom motion and can accurately and quickly transmit the motion to a driven object. The second objective of the present invention is to provide an actuator using the above-mentioned motion control structure.
One of the purposes of the invention is realized by adopting the following technical scheme:
a motion control structure comprising:
the motion platform is used for being connected with a driven object;
the first execution mechanism is used for driving the motion platform to translate along an X axis or translate along a Y axis or rotate around a Z axis, the first execution mechanism surrounds the periphery of the motion platform, the first execution mechanism comprises first execution units arranged on two opposite sides of the motion platform along the X axis direction and second execution units arranged on two opposite sides of the motion platform along the Y axis direction, the first execution units comprise first execution pieces connected with the motion platform, the first execution pieces can displace along the X axis direction, the second execution units comprise second execution pieces connected with the motion platform, and the second execution pieces can displace along the Y axis direction;
the second execution mechanism is used for driving the moving platform to translate along a Z axis or rotate around an X axis or rotate around a Y axis, the second execution mechanism surrounds the inner periphery of the moving platform, the second execution mechanism comprises a third execution unit arranged corresponding to the inner edge of the moving platform, the third execution unit comprises an assembly connected with the moving platform, and the assembly can displace along the Z axis direction under the driving of an external driver.
As an improved mode, the motion platform is in a shape of a square, two groups of first execution units are arranged, the two groups of first execution units are respectively located on two sides of the motion platform along the X-axis direction, and each group of first execution units comprises two first execution pieces arranged at intervals along the Y-axis direction; the two groups of second execution units are respectively positioned on two sides of the motion platform along the Y-axis direction, and each group of second execution units comprises second execution pieces arranged at intervals along the X-axis direction; the third execution units are provided with four groups, the four groups of third execution units are respectively arranged corresponding to four inner edges of the motion platform, and each group of third execution units comprises one assembly.
As a refinement, each first execution unit further comprises a first serpentine beam connecting the first execution member and the motion platform, and the first serpentine beam transmits the motion of the first execution member to the motion platform to displace the motion platform along the X-axis direction.
As an improved mode, each first execution unit further comprises a second snake-shaped beam and three first anchor parts arranged at intervals along the Y-axis direction, one first execution piece is arranged between every two adjacent first anchor parts, and two sides of each first execution piece are connected with the first anchor parts through the second snake-shaped beams respectively.
As a refinement, each second execution unit further comprises a third serpentine beam connecting the second execution member and the motion platform, and the third serpentine beam transmits the motion of the second execution member to the motion platform to displace the motion platform along the Y-axis direction.
As an improved mode, each second execution unit further comprises a fourth snake-shaped beam and three second anchor parts arranged at intervals along the X-axis direction, one second execution piece is arranged between every two adjacent second anchor parts, and two sides of each second execution piece are connected with the second anchor parts through the fourth snake-shaped beam respectively.
As a refinement, each of the third execution units further comprises a fifth serpentine beam connecting the assembly and the motion platform, the fifth serpentine beam transmitting the motion of the assembly to the motion platform to displace the motion platform along the Z-axis.
As a refinement, each of the third execution units further includes a serpentine beam component and third anchor portions disposed on both sides of the assembly, and both sides of the assembly are connected to the third anchor portions through the serpentine beam component.
As a refinement, the serpentine beam assembly includes a first element for limiting displacement of the assembly in the X-axis direction and a second element for limiting displacement of the assembly in the Y-axis direction.
As an improvement, the assembly comprises a first single body, a second single body and a sixth serpentine beam, the first single body is provided with a cavity, the second single body is arranged in the cavity, two sides of the second single body are connected with the inner side wall of the cavity through the sixth serpentine beam, the first single body is connected with the third anchor part through the serpentine beam assembly, and the second single body is connected with the moving platform through the fifth serpentine beam.
The second purpose of the invention is realized by adopting the following technical scheme:
an actuator comprises a plurality of electrostatic comb tooth assemblies and the motion control structure, wherein a part of the electrostatic comb tooth assemblies are connected with the first executing part to drive the first executing part to displace along the X-axis direction, a part of the electrostatic comb tooth assemblies are connected with the second executing part to drive the second executing part to displace along the Y-axis direction, and a part of the electrostatic comb tooth assemblies are connected with the assembly to drive the assembly to displace along the Z-axis direction.
Compared with the prior art, the external driver can directly drive the motion platform to realize six-degree-of-freedom motion through the motion control structure, namely, the motion platform can translate along the X axis, the Y axis and the Z axis and rotate around the X axis, the Y axis and the Z axis, so that the application range is wide; the first actuating mechanism and the second actuating mechanism are directly connected with the motion platform, and the first actuating mechanism and the second actuating mechanism can directly transmit motion to the motion platform.
[ description of the drawings ]
FIG. 1 is a schematic structural diagram of a motion control structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a first actuator and a motion platform according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a second actuator and a motion platform according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the displacement of the motion control structure along the X-axis according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of the displacement of the motion control structure along the Y-axis according to the embodiment of the present invention;
FIG. 6 is a schematic view of a motion control structure provided in an embodiment of the present invention as rotated about a Z-axis;
FIG. 7 is a schematic view of a movement control structure according to an embodiment of the present invention displaced along the Z-axis;
FIG. 8 is a schematic view of a motion control structure provided in an embodiment of the present invention rotating about an X-axis;
FIG. 9 is a schematic view of a motion control structure rotating about the Y-axis according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of a driving mechanism provided in an embodiment of the present invention;
fig. 11 is a schematic structural diagram of an electrostatic comb assembly according to an embodiment of the present invention;
FIG. 12 is a schematic view of the electrostatic comb assembly driving the driven object to translate;
fig. 13 is a schematic diagram of the electrostatic comb tooth assembly driving the driven object to move vertically.
[ detailed description ] embodiments
The invention is further described with reference to the following figures and embodiments.
It should be noted that all directional indicators (such as upper, lower, left, right, front, back, inner, outer, top, bottom … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components in a specific posture (as shown in the figure), and if the specific posture is changed, the directional indicator is changed accordingly.
It will also be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Referring to fig. 1-3, a motion control structure 100 according to an embodiment of the present invention includes:
a motion platform 10 for connecting with a driven object;
the first execution mechanism 20 is used for driving the motion platform 10 to translate along an X axis or translate along a Y axis or rotate around a Z axis, the first execution mechanism 20 surrounds the periphery of the motion platform 10, the first execution mechanism 20 comprises first execution units 21 arranged on two opposite sides of the motion platform 10 along the X axis direction and second execution units 22 arranged on two opposite sides of the motion platform 10 along the Y axis direction, the first execution units 21 comprise first execution pieces 211 connected with the motion platform 10, the first execution pieces 211 can displace along the X axis direction, the second execution units 22 comprise second execution pieces 221 connected with the motion platform 10, and the second execution pieces 221 can displace along the Y axis direction;
the second actuator 30 is used for driving the moving platform 10 to translate along the Z axis or rotate around the X axis or rotate around the Y axis, the second actuator 30 surrounds the inner periphery of the moving platform 10, the second actuator 30 includes a third actuator 31 arranged corresponding to the inner edge of the moving platform 10, the third actuator 31 includes a combination 311 connected with the moving platform 10, and the combination 311 is driven by an external driver to displace along the Z axis direction.
In this embodiment, by providing the first actuator 20 and the second actuator 30 directly connected to the motion platform 10, the first actuator 20 and the second actuator 30 can directly transmit the motion to the motion platform 10, and this direct transmission manner enables the motion to be accurately and rapidly transmitted to the driven object, and the response speed is high.
As an improvement of this embodiment, the moving platform 10 is in a shape of a square, two sets of first execution units 21 are provided, the two sets of first execution units 21 are respectively located at two sides of the moving platform 10 along the X-axis direction, each set of first execution units 21 includes two first execution pieces 211 arranged at intervals along the Y-axis direction; two groups of second execution units 22 are arranged, the two groups of second execution units 22 are respectively located on two sides of the motion platform 10 along the Y-axis direction, and each group of second execution units 22 comprises second execution pieces 221 arranged at intervals along the X-axis direction; the third executing unit 31 has four sets, the four sets of the third executing units 31 are respectively disposed corresponding to the four inner edges of the moving platform 10, and each set of the third executing unit 31 includes an assembling unit 311.
Through the above arrangement, the motion control structure 100 can directly drive the motion platform 10 to realize the motion with six degrees of freedom, which are respectively translation along the X-axis, the Y-axis and the Z-axis and rotation around the X-axis, the Y-axis and the Z-axis, by the driving of the external driver. In the following, six embodiments are described to illustrate how 100 indirectly drives the motion platform 10 to realize six degrees of freedom motion.
Referring to fig. 4, for illustrating how the first executing unit 21 drives the moving platform 10 to move along the X-axis direction, the two first executing parts 211 located at the left side of fig. 4 are subjected to an external force F1The two first actuators 211 on the right side of fig. 4 are subjected to an external force F2Two first actuators 211 located on the left side of fig. 4 and two first actuators located on the right side of fig. 4The member 211 cooperates to drive the motion stage 10 in a positive X-axis displacement. Conversely, the motion platform 10 is driven to displace in the negative X-axis direction.
Referring to fig. 5, for illustrating how the second executing unit 22 drives the moving platform 10 to move along the Y-axis direction, the two second executing parts 221 located above the moving platform in fig. 5 are subjected to an external force F3Under the action of the external force F, the two second actuators 221 located at the lower part of fig. 5 are subjected to4The two second actuators 221 located above fig. 5 and the two second actuators 221 located below fig. 5 cooperate to drive the motion platform to displace in the negative Y-axis direction. Otherwise, the motion platform 10 is driven to move in the positive direction of the Y axis.
Referring to fig. 6, it is illustrated how the first executing unit 21 and the second executing unit 22 cooperate to drive the moving platform 10 to rotate around the Z axis, and the two first executing members 211 located at the left side of fig. 6 are subjected to an external force F5、F6Under the action of the external force F, the two second actuators 221 located at the bottom of fig. 6 are subjected to7、F8By displacing the two first actuators 211 on the right side of fig. 6 by an external force F9、F10The two second actuators 221 located above the position shown in fig. 6 are subjected to an external force F11、F12The four first actuators 211 and the four second actuators 221 cooperate to drive the motion platform 10 to rotate clockwise about the Z-axis. Instead, the motion platform 10 is driven to rotate counterclockwise about the Z-axis.
Referring to fig. 7, illustrating how the third execution unit 31 drives the motion platform 10 to displace along the Z-axis direction, the four assemblies 31 are respectively subjected to an outward force F perpendicular to fig. 713To drive the motion platform 10 to move along the positive direction of the Z-axis. Conversely, the motion platform 10 is driven to displace in a negative direction toward the Z-axis.
Referring to FIG. 8, illustrating how the third actuator 31 drives the motion platform to rotate around the X-axis, the assembly 31 above FIG. 8 is subjected to an outward force F perpendicular to FIG. 814By the action of the assembly 31 located below in fig. 8, is subjected to a force F directed inwards perpendicular to fig. 815The assembly 31 located above in fig. 8 and the assembly 31 located below in fig. 8 cooperate to drive the motion platform 10 clockwise about the X-axis. Otherwise, the driving movementThe platform 10 rotates counterclockwise about the X-axis.
Referring to FIG. 9, illustrating how the third execution unit 31 drives the motion platform to rotate around the Y-axis direction, the assembly 31 on the left side of FIG. 9 is subjected to an outward force F perpendicular to FIG. 916By the action of the assembly 31 on the right side of fig. 9, is subjected to a force F directed inwards perpendicular to the projection 917The assembly 31 on the left side of fig. 9 and the assembly 31 on the right side of fig. 9 cooperate to drive the motion platform 10 clockwise about the Y-axis. Instead, the motion stage 10 is driven to rotate counterclockwise about the Y-axis.
Referring to fig. 1-3 again, as a modification of this embodiment, each first actuator unit 21 further includes a first serpentine beam 212, and the first actuator 211 is connected to the moving platform 10 through the first serpentine beam 212. By providing the first actuator 211 connected to the motion platform 10 via the first serpentine beam 212, the first serpentine beam 212 transmits the motion of the first actuator 211 to the motion platform 10 to displace the motion platform 10 in the X-axis direction.
As a modification of this embodiment, each first actuator unit 21 further includes a second serpentine beam 213 and three first anchor portions 214 spaced apart along the Y-axis direction, one first actuator 211 is disposed between every two adjacent first anchor portions 214, and both sides of each first actuator 211 are connected to the first anchor portions 214 through the second serpentine beam 213. The first anchor portion 214 is used for fixing the first actuator 21, for example, the first actuator 21 is fixed on the circuit board by the first anchor portion 214. By arranging that the two sides of each first actuator 211 are respectively connected with the first anchor part 214 through the second serpentine beam 213, the second serpentine beam 213 can inhibit the first actuator 211 from moving in the Y-axis direction, so that the driving direction of the first actuator 211 is single, the driving stability is improved, and the difficulty in controlling the motion platform 10 is reduced.
As a modification of this embodiment, each second actuator 22 further comprises a third serpentine beam 222, and the second actuator 221 is connected to the moving platform 10 through the third serpentine beam 222. By providing the second actuator 221 connected to the motion platform 10 through the third serpentine-shaped beam 222, the third serpentine-shaped beam 222 transmits the motion of the second actuator 221 to the motion platform 10 to displace the motion platform 10 in the Y-axis direction.
As a modification of the present embodiment, each second actuator 22 further includes a fourth snake-shaped beam 223 and three second anchor portions 224 spaced apart from each other in the X-axis direction, one second actuator 221 is disposed between every two adjacent second anchor portions 224, and both sides of each second actuator 221 are connected to the second anchor portions 224 through the fourth snake-shaped beam 223. The second anchor portion 224 is used for fixing the second actuator 22, for example, the second actuator 22 is fixed on the circuit board by the second anchor portion 224. By arranging that the two sides of each second actuator 221 are respectively connected with the second anchor portion 224 through the fourth snake-shaped beam 223, the fourth snake-shaped beam 223 can inhibit the second actuator 221 from moving in the X-axis direction, so that the driving direction of the second actuator 221 is single, the driving stability is improved, and the difficulty in controlling the motion platform 10 is reduced.
Further, when the first serpentine beam 212 transmits the motion of the first actuator 211 to the motion platform 10 to displace the motion platform 10 along the X-axis direction, on one hand, the third serpentine beam 222 connecting the motion platform 10 and the second actuator 221 absorbs the displacement of the motion platform 10, the displacement of the motion platform 10 causes the third serpentine beam 222 to deform and does not cause the displacement of the second actuator 221, and on the other hand, the second actuator 221 connected with the second anchor portion 224 through the fourth serpentine beam 223 cannot displace along the X-axis direction without affecting the displacement of the motion platform 10, so as to ensure the motion independence of the first actuator 211 and the second actuator 221, thereby improving the stability of electrostatic driving and simultaneously reducing the difficulty of controlling the motion platform.
Further, when the third serpentine beam 222 transmits the motion of the second actuator 221 to the motion platform 10 to drive the motion platform 10 to displace along the Y-axis direction, on one hand, the first serpentine beam 212 connecting the motion platform 10 and the first actuator 211 absorbs the displacement of the motion platform 10, and the displacement of the motion platform 10 causes the first serpentine beam 212 to deform without causing the displacement of the first actuator 211, so that the first serpentine beam 212 does not transmit the motion to the first actuator 211 on the premise of not affecting the displacement of the motion platform 10, and on the other hand, the first actuator 211 connected to the first anchor portion 214 through the second serpentine beam 213 cannot displace along the Y-axis direction, so as to ensure the motion independence of the first actuator 211 and the second actuator 221, thereby improving the stability of electrostatic driving and reducing the difficulty of controlling the motion platform. As a modification of this embodiment, each third execution unit 31 further includes a combination 311, a fifth serpentine beam 312, a serpentine beam component 313, and third anchor portions 314 disposed on both sides of the combination 311. The assembly 311 comprises a first body 315, a second body 316 and a sixth serpentine beam 317, the first body 315 having a cavity 318, the second body 316 being disposed in the cavity 318, the second body 316 being connected on either side to the inner side wall of the cavity 318 by the sixth serpentine beam 317, the first body 315 being connected to the third anchor 314 by the serpentine beam assembly 313, the second body 316 being connected to the motion platform 10 by the fifth serpentine beam 312.
Both sides of the assembly 311 are connected to a third anchor portion 314 by a serpentine beam member 313. The serpentine beam assembly 313 limits the displacement of the first monomer 315 in the X-axis and Y-axis directions, so that the first monomer 315 can only displace in the Z-axis direction, thereby ensuring that the driving direction of the first monomer 315 is single, improving the stability of electrostatic driving, and reducing the control difficulty of the motion platform 10.
Referring to fig. 10, an actuator 300 is further provided in an embodiment of the present invention, which includes the motion control structure 100 and twelve electrostatic comb tooth assemblies 200 as described above, wherein four electrostatic comb tooth assemblies 200 are respectively connected to four first actuators 211 to drive the first actuators 211 to displace along the X-axis direction, four electrostatic comb tooth assemblies 200 are respectively connected to four second actuators 221 to drive the second actuators 221 to displace along the Y-axis direction, and four electrostatic comb tooth assemblies 200 are respectively connected to four assemblies 31 to drive the assemblies 31 to displace along the Z-axis direction. It is understood that the number of the electrostatic comb-tooth assemblies 200 is not limited to twelve, and the number of the electrostatic comb-tooth assemblies 200 is determined by the number of the first actuator 211, the second actuator 221 and the assembly 31. The electrostatic comb assembly 200 may be a conventional lateral comb structure or a vertical comb structure, and is not limited in the embodiment of the present invention and may be selected according to the actual application.
Referring to fig. 11-13, each electrostatic comb assembly 200 includes a first fixed tooth 201, a first movable tooth 202, a second fixed tooth 203, and a second movable tooth 204, the first movable tooth 202 is disposed in a staggered manner with respect to the first fixed tooth 201, the second movable tooth 204 is disposed in a staggered manner with respect to the second fixed tooth 203, and the first movable tooth 202 or the second movable tooth 204 drives the driven object 400 to move by driving the motion control structure 100. When the driven object 400 needs to be driven to translate, a preset electric signal is applied to the electrostatic comb assembly 200, and the first moving tooth 202 pulls the driven object 400 to displace towards the first fixed tooth 201, so that the driven object 400 is pulled to translate. When the driven object 400 needs to be driven to vertically move, a preset electric signal is introduced into the electrostatic comb-tooth assembly 200, and one end of the second movable tooth 204 connected with the driven object 400 is tilted upwards, so that the driven object 400 is driven to vertically displace. In this embodiment, the driven object 400 is the first actuator 211, the second actuator 221 or the assembly 31. It should be noted that the structure of the electrostatic comb assembly 200 in fig. 11 to 13 is only used for illustrating the displacement of the driven object 400, and the specific structure thereof is not limited, and the motion control structure 100 is not specifically shown here.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (9)
1. A motion control structure, comprising:
the motion platform is used for being connected with a driven object;
the first execution mechanism is used for driving the motion platform to translate along an X axis or translate along a Y axis or rotate around a Z axis, the first execution mechanism surrounds the periphery of the motion platform, the first execution mechanism comprises first execution units arranged on two opposite sides of the motion platform along the X axis direction and second execution units arranged on two opposite sides of the motion platform along the Y axis direction, the first execution units comprise first execution pieces connected with the motion platform, the first execution pieces can displace along the X axis direction, the second execution units comprise second execution pieces connected with the motion platform, and the second execution pieces can displace along the Y axis direction;
the second execution mechanism is used for driving the moving platform to translate along the Z axis or rotate around the X axis or rotate around the Y axis, the second execution mechanism surrounds the inner periphery of the moving platform, the second execution mechanism comprises a third execution unit arranged corresponding to the inner edge of the moving platform, the third execution unit comprises an assembly connected with the moving platform, and the assembly can displace along the Z axis direction;
each first execution unit further comprises a first snake-shaped beam connecting the first execution piece and the motion platform, and the first snake-shaped beam transmits the motion of the first execution piece to the motion platform to enable the motion platform to displace along the X-axis direction;
each first execution unit further comprises a second snake-shaped beam and three first anchor parts, wherein the second snake-shaped beam is used for limiting the first execution part to move towards the Y-axis direction, the first anchor parts are arranged at intervals along the Y-axis direction, one first execution part is arranged between every two adjacent first anchor parts, and two sides of each first execution part are respectively connected with the first anchor parts through the second snake-shaped beam.
2. The motion control structure according to claim 1, wherein the motion platform is in a shape of a square, and the first execution units are provided in two groups, the two groups of first execution units are respectively located on two sides of the motion platform along an X-axis direction, and each group of first execution units comprises two first execution members arranged at intervals along a Y-axis direction; the two groups of second execution units are respectively positioned on two sides of the motion platform along the Y-axis direction, and each group of second execution units comprises second execution pieces arranged at intervals along the X-axis direction; the third execution units are provided with four groups, the four groups of third execution units are respectively arranged corresponding to four inner edges of the motion platform, and each group of third execution units comprises one assembly.
3. The motion control structure of claim 1 or 2, wherein each second actuator unit further comprises a third serpentine beam connecting the second actuator to the motion platform, the third serpentine beam transmitting motion of the second actuator to the motion platform to displace the motion platform in the Y-axis direction.
4. The motion control structure of claim 3, wherein each second actuator unit further comprises a fourth serpentine beam for limiting the displacement of the second actuator toward the X-axis direction and three second anchor portions spaced apart from each other along the X-axis direction, one second actuator is disposed between every two adjacent second anchor portions, and both sides of each second actuator are connected to the second anchor portions through the fourth serpentine beam.
5. The motion control structure of claim 1 or 2, wherein each of the third actuators further comprises a fifth serpentine beam connecting the assembly to the motion platform, the fifth serpentine beam transmitting motion of the assembly to the motion platform to displace the motion platform along the Z-axis.
6. The motion control structure of claim 5, wherein each of the third actuator units further comprises a serpentine beam assembly and third anchor portions disposed on either side of the assembly, the two sides of the assembly being connected to the third anchor portions by the serpentine beam assembly.
7. The motion control structure of claim 6, wherein the serpentine beam assembly includes a first element for limiting displacement of the combination in an X-axis direction and a second element for limiting displacement of the combination in a Y-axis direction.
8. The motion control structure of claim 7, wherein the assembly comprises a first unitary body having a cavity, a second unitary body disposed in the cavity, and a sixth serpentine beam connecting both sides of the second unitary body to the inner side walls of the cavity, the first unitary body being connected to the third anchor portion by the serpentine beam assembly, and the second unitary body being connected to the motion platform by the fifth serpentine beam.
9. An actuator comprising a plurality of electrostatic comb assemblies and a motion control structure according to any of claims 1-8, wherein a portion of the electrostatic comb assemblies are coupled to the first actuator to drive the first actuator to displace in the X-axis direction, a portion of the electrostatic comb assemblies are coupled to the second actuator to drive the second actuator to displace in the Y-axis direction, and a portion of the electrostatic comb assemblies are coupled to the assembly to drive the assembly to displace in the Z-axis direction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2020/080345 WO2021004089A1 (en) | 2019-06-29 | 2020-03-20 | Motion control structure and actuator |
| US16/995,791 US11891297B2 (en) | 2019-07-05 | 2020-08-17 | Motion control structure and actuator |
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| CN2019093995 | 2019-06-29 | ||
| CNPCT/CN2019/093995 | 2019-06-29 |
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| CN110347119B (en) * | 2019-06-29 | 2021-11-16 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN111153378B (en) * | 2019-12-31 | 2023-07-07 | 瑞声科技（南京）有限公司 | MEMS driver and imaging anti-shake device |
| CN112965240B (en) * | 2021-02-09 | 2022-04-26 | 无锡微视传感科技有限公司 | Off-axis MEMS (micro-electromechanical system) micro-mirror and preparation method thereof |
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| CN110347119A (en) | 2019-10-18 |
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