CN109633893A - A kind of electromagnetic drive galvanometer and its driving magnetic circuit - Google Patents
A kind of electromagnetic drive galvanometer and its driving magnetic circuit Download PDFInfo
- Publication number
- CN109633893A CN109633893A CN201910104553.4A CN201910104553A CN109633893A CN 109633893 A CN109633893 A CN 109633893A CN 201910104553 A CN201910104553 A CN 201910104553A CN 109633893 A CN109633893 A CN 109633893A
- Authority
- CN
- China
- Prior art keywords
- straight line
- galvanometer
- yoke part
- line section
- iron yoke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 106
- 229910052742 iron Inorganic materials 0.000 claims abstract description 39
- 239000000696 magnetic material Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 14
- 230000003014 reinforcing effect Effects 0.000 claims description 14
- 239000011162 core material Substances 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 12
- 230000004907 flux Effects 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 3
- 230000035699 permeability Effects 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 238000004804 winding Methods 0.000 abstract description 2
- 230000035882 stress Effects 0.000 description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- -1 Antaciron Inorganic materials 0.000 description 1
- PMVSDNDAUGGCCE-TYYBGVCCSA-L Ferrous fumarate Chemical compound [Fe+2].[O-]C(=O)\C=C\C([O-])=O PMVSDNDAUGGCCE-TYYBGVCCSA-L 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
Abstract
The invention belongs to micro photo-electro-mechanical field, a kind of specific electromagnetic drive galvanometer and its driving magnetic circuit.Driving magnetic circuit includes coil and iron core；Iron core is crab tongs shape, including iron yoke part and stem portion, and coil winding is on stem portion；Iron yoke part includes the first iron yoke part, the second iron yoke part and open end being successively wholely set, and the first iron yoke part is wholely set with stem portion, and the sectional area of the first iron yoke part, the second iron yoke part and open end changes from big to small.Electromagnet magnetic field is maximumlly focused at permanent magnet, energy loss is few, and capacity usage ratio is high.
Description
Technical field
The invention belongs to micro photo-electro-mechanical field, a kind of specific electromagnetic drive galvanometer and its driving magnetic circuit.
Background technique
MEMS galvanometer is compared with conventional beam deflecting element, and with micromation, low energy consumption, response is fast, easy of integration, the service life is long
The advantages that, with the development of artificial intelligence and to device high-precision, miniaturization, inexpensive demand, MEMS galvanometer is in three color laser
It yields unusually brilliant results in the fields such as projection, laser radar, 3D measurement.Wherein electromagnetic drive has that linear response, driving force be big, response speed
Fastly, the advantages that driving voltage is low, insensitive to size is one of most common driving method of micro- galvanometer.Electromagnetic drive torsional mirror
It can be divided into from magnetic force source, Lorentz force driving and the interaction of electromagnetic spectrum and alternating magnetic field drive two classes.The former is micro-
Coil is made on torsional mirror, leads to the electric current of mechanical periodicity on coil, and torsional micro-mirror structure is placed in additional eternal magnetic field, line
Circle will generate the Lorentz force of mechanical periodicity, so that torsional micro-mirror be driven to reverse；The latter is usually in scanning torsional micro-mirror structure
Upper production magnetic material film, magnetic material film generate drive under the action of alternating magnetic field that the electric field of external mechanical periodicity generates
Power.
Leakage magnetic flux is inevitable in electromagnetic drive, realizes target rotation angle to galvanometer, and electromagnetism galvanometer module reduces volume,
And power consumption is reduced, capacity usage ratio can only be improved.
Summary of the invention
In order to improve electromagnetic energy utilization rate, the present invention proposes a kind of crab tongs-type electromagnetic core for electromagnetic drive galvanometer
Structure and the electromagnetic drive galvanometer, maximumlly focus on electromagnetism ferrite-magnet field at permanent magnet, driving electromagnetism galvanometer torsion.
The technical solution of the invention is as follows improves the driving magnetic circuit of electromagnetic drive galvanometer a kind of, is characterized in that
Including coil and iron core；
Above-mentioned iron core is crab tongs shape, including iron yoke part and stem portion, and above-mentioned coil winding is on stem portion；
Above-mentioned iron yoke part includes the first iron yoke part, the second iron yoke part and open end being successively wholely set, above-mentioned
First iron yoke part is wholely set with stem portion, and the sectional area of the first iron yoke part, the second iron yoke part and open end is from big
To small variation.
Further, stem portion can be simple bar shaped, can also be for arc or other are linear, guarantee this partial-length, with
Prevent coil around thickness it is excessive, to guarantee that driving coil as close to iron core, improves core field intensity；
Further, core material be the pure iron of high permeability, low-carbon just, iron-nickel alloy, Antaciron or ferrite etc.
Material.
The present invention also provides a kind of electromagnetic drive galvanometer, be characterized in that including electromagnetism galvanometer chip, structural body and
Above-mentioned driving magnetic circuit；Above described structure is for Motionless electromagnetic galvanometer chip and driving magnetic circuit；
Electromagnetism galvanometer chip includes movable structure, torsion beam and fixed frame, and above-mentioned movable structure is fixed by torsion beam
On fixed frame；Above-mentioned movable structure includes movable mirror surface and the magnetic material that movable mirror surface reverse side is arranged in；
The iron core open end of above-mentioned driving magnetic circuit is close to magnetic material；
The magnetic field main flux that coil generates is transmitted to iron core open end along iron yoke, then iron core out, acts on magnetic material,
Magnetic material is driven to drive the vibration of electromagnetic vibration mirror chip.
Further, mirror surface inertia deformation in order to prevent, above-mentioned movable structure further include that movable mirror surface reverse side is arranged in
Reinforcing rib.
Further, the first iron yoke part or the second iron yoke part for driving magnetic circuit are equipped with positioning element, pass through positioning
Component will drive magnetic circuit to be assembled on structural body.
The stress that mirror structures are born when further, in order to reduce system context temperature change, electromagnetism galvanometer core
Stress buffer structure is equipped between piece and structural body；The material of stress buffer structure is identical with electromagnetism galvanometer chip CTE
Or it is close；
Further, in order to improve the problem of stress concentration of torsion beam, above-mentioned torsion beam is symmetrical about galvanometer shaft
Snakelike beam；
Above-mentioned snakelike beam includes first straight line section, about the symmetrical two second straight line sections of first straight line section and two thirds
Straightway；One end of the first straight line section and reinforcing rib or movable mirror surface are connected, the other end of first straight line section by U-shaped or
C-type bending section is connect with one end of second straight line section, and the other end of second straight line section is straight by U-shaped or c-type bending section and third
One end of line segment connects, and the other end of third straightway is fixed on snakelike beam anchor point；Two snakelike beam anchor points are straight about first
Line segment is symmetrical.
The beneficial effects of the present invention are:
1, core design is crab tongs shape iron core, the electromagnetism galvanometer driving magnetic circuit driving vibration of crab tongs shape iron core composition by the present invention
Mirror torsion, maximumlly focuses on electromagnet magnetic field at permanent magnet, and energy loss is few, and capacity usage ratio is high；
2, reducing maximum stress suffered by torsion beam is to prevent torsion beam fracture failure to improve the necessary hand of galvanometer reliability
Section, torsion beam is designed as snakelike beam by the present invention, and the bending part of snakelike beam is designed as C or U-shaped structure, reduces stress collection
In, it is uniformly distributed in snakelike torsion beam to be conducive to stress.
Detailed description of the invention
Fig. 1 is that one electromagnetism galvanometer of the embodiment of the present invention drives magnetic circuit schematic diagram；
Fig. 2 is three electromagnetic drive galvanometer overall schematic of the embodiment of the present invention two or embodiment；
Fig. 3 is that two electromagnetism galvanometer of the embodiment of the present invention drives magnetic circuit and structural body scheme of installation；
Fig. 4 a is electromagnetism galvanometer chip front side schematic diagram in the embodiment of the present invention four；
Fig. 4 b is snakelike girder construction schematic diagram in the embodiment of the present invention four.
Appended drawing reference in figure are as follows: the movable mirror surface of 11-, 12- torsion beam, 121- first straight line section, 122- second straight line section,
123- third straightway, the snakelike beam anchor point of 124-, 125-U type or c-type bending section, 13- fixed frame, 14- magnetic material, 31-
Electromagnetism galvanometer chip, 32- structural body, 33- stress buffer structure, 34- drive magnetic circuit, 41- coil, 42- stem portion, 43- the
One iron yoke part, the second iron yoke of 44- part, the open end 45-.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
Embodiment one
It will be seen from figure 1 that the present embodiment driving magnetic circuit 34 includes crab tongs shape iron core, core material can be high permeability
Pure iron, low-carbon just, the materials such as iron-nickel alloy, Antaciron, ferrite.
Iron core includes stem portion 42 and iron yoke part, and the coil 41 of certain the number of turns is around in stem portion 42, gives coil 41
The electric current of logical variation just generates changing magnetic field, and iron core magnetic conductivity is much higher than air, and magnetic flux will be concentrated on iron core, iron yoke
Part is made of the first iron yoke part 43, the second iron yoke part 44 and open end 45, is driven for magnetic circuit is directed into as galvanometer
Near dynamic magnetic material.Stem portion 42 can be simple bar shaped, can also be for arc or other are linear, guarantee this partial-length,
With prevent coil 41 around thickness it is excessive, to guarantee that driving coil as close to iron core, improves core field intensity；
Core material is not closed, and open end 45, near by driving magnetic material, the partial magnetic field of iron core can be with magnetism
The magnetic pole of material forms closed magnetic circuit, and changing magnetic field generates the effect of power to magnetic material in iron core；Open end 45 should use up
It measures close to magnetic material, to reduce flux loss, but while preventing galvanometer from vibrating movable mirror surface or magnetic material encounter iron core；
Stem portion 42 and the flux transfer region area of core section of the first iron yoke part 43, the second iron yoke part 44 are relatively opened
Mouth end 45 is big, and to reduce magnetic resistance as far as possible, 45 section of open end suitably reduces, with the closer magnetic material close to mirror surface reverse side of energy
Material, it is appropriate to reduce core section product in the unsaturated situation of core field.
Embodiment two
Figure it is seen that the present embodiment electromagnetic drive galvanometer mainly includes electromagnetism galvanometer chip 31, structural body 32 and drive
Dynamic magnetic circuit 34.The wherein support of structural body 32 and Motionless electromagnetic galvanometer chip 31 and driving magnetic circuit 32,31 He of electromagnetism galvanometer chip
The relative position that driving magnetic circuit 32 is grouped together, and both guarantees, at the same provide electromagnetic drive galvanometer external interface (including
Mechanical interface or holding electrical element or interface).
The present embodiment electromagnetism galvanometer chip 31 includes movable mirror surface 11, torsion beam 12 and fixed frame 13, movable mirror surface 11
It is fixed on fixed frame 13 by torsion beam 12.The reverse side of movable mirror surface 11 is equipped with magnetic material 14 and reinforcing rib, when movable
When the inertia deformation of mirror surface 11 is smaller, reinforcing rib can be saved.Reinforcing rib center is ring-type in the embodiment, is arranged in movable mirror surface
11 reverse side, the center ring that magnetic material 14 passes through reinforcing rib are pasted onto the reverse side of movable mirror surface 11, and reinforcing rib is to magnetic material 14
It is limited.In other embodiments, reinforcing rib can be other arbitrary shapes, and magnetic material Pasting is on the surface of reinforcing rib.
Magnetic material 14, reinforcing rib and movable mirror surface 11 are formed as one the movable structure of electromagnetism galvanometer chip 31.
In order to guarantee that reduction power consumption drives magnetic it is necessary to reduce flux loss to coil to the driving moment of galvanometer, and as far as possible
Road 34 is the driving magnetic circuit in embodiment one, and core material is not closed, and open end 45 is near by driving magnetic material, iron core
Partial magnetic field can form closed magnetic circuit with the magnetic pole of magnetic material, and changing magnetic field generates power to magnetic material in iron core
Effect；Open end 45 should be as close as possible to magnetic material, to reduce flux loss, but while preventing galvanometer from vibrating movable mirror surface or magnetism
Material encounters iron core；Apply the current signal of variation to coil, coil generates changing magnetic field, by iron core magnetic field main flux
It focuses near the fixed magnetic material of galvanometer reverse side, driving magnetic material movement, so that movable mirror surface be driven to move.First iron
Yoke part 43, the second iron yoke part 44 can provide iron core fixed area, can position and be assembled on electromagnetism galvanometer structural body 32,
Such as Fig. 3.
Embodiment three
Between electromagnetism galvanometer chip 31 and structural body 32, due to material difference, thermal expansion coefficient is different, system context
Mirror structures can generate stress when temperature change, lead to the variation of galvanometer working performance such as resonance frequency etc., can from Fig. 2
Out, on the basis of example 2, stress buffer structure is arranged in the present embodiment between electromagnetism galvanometer chip 31 and structural body 32
33.Stress buffer structure 33 can be positioned and secured on structural body 32, while electromagnetism galvanometer chip 31 can be positioned and secured to this
In stress buffer structure 33；Buffer between electromagnetism galvanometer chip 31 and structural body 32 due to material it is different caused by thermal expansion system
The different bring thermal stress issues of number, 33 material of stress buffer structure should be close with 31 thermal expansion coefficient of electromagnetism galvanometer chip
Material, if the material of electromagnetism galvanometer chip 31 is silicon substrate, 33 material of stress buffer structure can be silicon or aluminium oxide ceramics,
The material identical or close with silicon thermal expansion coefficient such as aluminium nitride ceramics.
Example IV
Inhibit other mode while galvanometer Torsion mode frequency to be promoted, the present embodiment is in any of the above-described embodiment
On the basis of, propose a kind of electromagnetic drive galvanometer with low stress torsion beam.
From Fig. 4 a can be seen that the present embodiment electromagnetic drive galvanometer torsion beam be snakelike beam, one end of snakelike beam with can
Index glass face or reinforcing rib are connected, and the other end and fixed frame are connected.
It is seen from fig. 4b that snakelike beam includes first straight line section 121, about first straight line section 121 symmetrical two
Two straightways 122 and two third straightways 123；One end of first straight line section 121 and movable mirror surface or reinforcing rib are connected, and first
The other end of straightway 121 is connect by U-shaped or c-type bending section 125 with one end of second straight line section 122, second straight line section 122
The other end connect by U-shaped or c-type bending section 122 with one end of third straightway 123, the other end of third straightway 123
It is fixed on snakelike beam anchor point 124；Two snakelike beam anchor points 124 are symmetrical about first straight line section 121.The present embodiment is snakelike
Beam is symmetrical about galvanometer shaft, and torsion beam anchor point is symmetrically distributed in galvanometer shaft two sides；Snakelike beam bending place symmetrically add perpendicular to
The c-type or U-shaped structure of rotor shaft direction improve snakelike beam bending place stress concentration.
Claims (9)
1. a kind of driving magnetic circuit of electromagnetic drive galvanometer, it is characterised in that: including coil (41) and iron core；
The iron core is crab tongs shape, including iron yoke part and stem portion (42), the coil (41) are wound on stem portion
(42) on；
The iron yoke part includes the first iron yoke part (43), the second iron yoke part (44) and open end being successively wholely set
(45), first iron yoke part (43) are wholely set with stem portion (42), the first iron yoke part (43), the second iron yoke part
(44) and the sectional area of open end (45) changes from big to small.
2. the driving magnetic circuit of electromagnetic drive galvanometer according to claim 1, it is characterised in that: stem portion (42) is bar shaped
Or arc.
3. the driving magnetic circuit of electromagnetic drive galvanometer according to claim 2, it is characterised in that: core material is high permeability
Pure iron, low-carbon just, iron-nickel alloy, Antaciron or ferrite.
4. a kind of electromagnetic drive galvanometer, it is characterised in that: including electromagnetism galvanometer chip, structural body and any institute of claim 1-3
State driving magnetic circuit；The structural body is for Motionless electromagnetic galvanometer chip and driving magnetic circuit；
Electromagnetism galvanometer chip includes that movable structure, torsion beam (12) and fixed frame (13), the movable structure pass through torsion beam
(12) it is fixed on fixed frame (13)；The movable structure includes movable mirror surface (11) and is arranged in movable mirror surface (11) reverse side
Magnetic material (14)；
The iron core open end of driving magnetic circuit (34) is close to magnetic material；
The magnetic field main flux that coil generates is transmitted to iron core open end along iron yoke, then iron core out, acts on magnetic material, drives
Magnetic material drives the vibration of electromagnetic vibration mirror chip.
5. electromagnetic drive galvanometer according to claim 4, it is characterised in that: the movable structure further includes being arranged movable
The reinforcing rib of mirror surface (11) reverse side.
6. electromagnetic drive galvanometer according to claim 4, it is characterised in that: drive magnetic circuit the first iron yoke part (43) or
Second iron yoke part (44) is equipped with positioning element, magnetic circuit will be driven to be assembled on structural body by positioning element.
7. electromagnetic drive galvanometer according to claim 6, it is characterised in that: electromagnetism galvanometer chip (31) and structural body (32)
Between be equipped with stress buffer structure (33)；The material and electromagnetism galvanometer chip (31) thermal expansion coefficient phase of stress buffer structure (33)
It is same or close.
8. electromagnetic drive galvanometer according to claim 4, it is characterised in that: the torsion beam (12) is snakelike beam；
The snakelike beam includes first straight line section (121), about the symmetrical two second straight line sections of first straight line section (121)
(122) and two third straightways (123)；One end of the first straight line section (121) and movable mirror surface are connected, first straight line section
(121) the other end is connect by U-shaped or c-type bending section (125) with one end of second straight line section (122), second straight line section
(122) the other end is connect by U-shaped or c-type bending section (125) with one end of third straightway (123), third straightway
(123) the other end is fixed on snakelike beam anchor point (124)；Two snakelike beam anchor points (124) are right about first straight line section (121)
Claim distribution.
9. electromagnetic drive galvanometer according to claim 5, it is characterised in that: the torsion beam (12) is snakelike beam；
The snakelike beam includes first straight line section (121), about the symmetrical two second straight line sections of first straight line section (121)
(122) and two third straightways (123)；One end of the first straight line section (121) and reinforcing rib are connected, first straight line section
(121) the other end is connect by U-shaped or c-type bending section (125) with one end of second straight line section (122), second straight line section
(122) the other end is connect by U-shaped or c-type bending section (125) with one end of third straightway (123), third straightway
(123) the other end is fixed on snakelike beam anchor point (124)；Two snakelike beam anchor points (124) are right about first straight line section (121)
Claim distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910104553.4A CN109633893B (en) | 2019-02-01 | Electromagnetic driving vibrating mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910104553.4A CN109633893B (en) | 2019-02-01 | Electromagnetic driving vibrating mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109633893A true CN109633893A (en) | 2019-04-16 |
| CN109633893B CN109633893B (en) | 2024-05-14 |
Family
ID=
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN114341699A (en) * | 2020-02-29 | 2022-04-12 | 深圳市速腾聚创科技有限公司 | Driving device and driving method of electromagnetic galvanometer and laser radar |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1215518A1 (en) * | 2000-12-18 | 2002-06-19 | Olympus Optical Co., Ltd. | Mirror rocking member for optical deflector |
| CN1981230A (en) * | 2004-06-30 | 2007-06-13 | 德克萨斯仪器股份有限公司 | Stabilization of mems mirrors in closed loop operation |
| CN101310207A (en) * | 2005-09-16 | 2008-11-19 | 德克萨斯仪器股份有限公司 | Magnet on frame oscillating device |
| CN101655602A (en) * | 2008-08-21 | 2010-02-24 | 三星电子株式会社 | Mems mirror, mirror scanner, optical scanning unit and image forming apparatus |
| US20100142020A1 (en) * | 2008-12-04 | 2010-06-10 | Samsung Electronics Co., Ltd. | Scanner and image forming apparatus including the same |
| CN101794020A (en) * | 2010-01-27 | 2010-08-04 | 中国人民解放军国防科学技术大学 | Light beam precision pointing device based on resolution multiplied compliant mechanism |
| WO2011121945A1 (en) * | 2010-03-30 | 2011-10-06 | パナソニック株式会社 | Optical reflection element |
| CN104765144A (en) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | Electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror and manufacturing method |
| CN206039040U (en) * | 2016-09-23 | 2017-03-22 | 南通芯识电子技术有限公司 | Electromagnetic drive twists reverse mirror subassembly a little |
| TW201815660A (en) * | 2016-10-19 | 2018-05-01 | 德商羅伯特博斯奇股份有限公司 | Micromechanical component and method for producing a micromechanical component |
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1215518A1 (en) * | 2000-12-18 | 2002-06-19 | Olympus Optical Co., Ltd. | Mirror rocking member for optical deflector |
| CN1981230A (en) * | 2004-06-30 | 2007-06-13 | 德克萨斯仪器股份有限公司 | Stabilization of mems mirrors in closed loop operation |
| CN101310207A (en) * | 2005-09-16 | 2008-11-19 | 德克萨斯仪器股份有限公司 | Magnet on frame oscillating device |
| CN101655602A (en) * | 2008-08-21 | 2010-02-24 | 三星电子株式会社 | Mems mirror, mirror scanner, optical scanning unit and image forming apparatus |
| US20100142020A1 (en) * | 2008-12-04 | 2010-06-10 | Samsung Electronics Co., Ltd. | Scanner and image forming apparatus including the same |
| CN101794020A (en) * | 2010-01-27 | 2010-08-04 | 中国人民解放军国防科学技术大学 | Light beam precision pointing device based on resolution multiplied compliant mechanism |
| WO2011121945A1 (en) * | 2010-03-30 | 2011-10-06 | パナソニック株式会社 | Optical reflection element |
| CN104765144A (en) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | Electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror and manufacturing method |
| CN206039040U (en) * | 2016-09-23 | 2017-03-22 | 南通芯识电子技术有限公司 | Electromagnetic drive twists reverse mirror subassembly a little |
| TW201815660A (en) * | 2016-10-19 | 2018-05-01 | 德商羅伯特博斯奇股份有限公司 | Micromechanical component and method for producing a micromechanical component |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN110347119B (en) * | 2019-06-29 | 2021-11-16 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN114341699A (en) * | 2020-02-29 | 2022-04-12 | 深圳市速腾聚创科技有限公司 | Driving device and driving method of electromagnetic galvanometer and laser radar |
| CN114341699B (en) * | 2020-02-29 | 2023-10-31 | 深圳市速腾聚创科技有限公司 | Driving device and driving method of electromagnetic galvanometer and laser radar |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109683308A (en) | A kind of electromagnetic drive galvanometer reducing oscillating motion | |
| JP6349229B2 (en) | Biaxial optical deflector and manufacturing method thereof | |
| CN207752230U (en) | Large scale MEMS micromirror chip and its encapsulating structure based on electromagnetic principle driving | |
| CN103399402B (en) | Electromagnetic-driven miniature two-dimensional scanning mirror device | |
| CN102792571B (en) | Linear electric machine | |
| CN104765144A (en) | Electromagnetism-static electricity hybrid driven two-dimensional micro scanning mirror and manufacturing method | |
| CN102967934A (en) | Electromagnetic-driven micro mirror | |
| TW201128224A (en) | Optical multi-ring scanner | |
| CN104597596B (en) | Electromagnetic drive two-dimensional scanning micro mirror for laser scanning display | |
| CN107659208B (en) | Two-dimensional linear moving-iron type micro-angular displacement electromagnetic activation device and its actuation method | |
| CN101527494A (en) | Flat plate type linear motor | |
| JP2018521364A (en) | Device for deflecting a laser beam | |
| CN109633893A (en) | A kind of electromagnetic drive galvanometer and its driving magnetic circuit | |
| EP1164601A2 (en) | Electromagnetic actuator, its manufacturing method, and optical scanner using the same actuator | |
| CN109633893B (en) | Electromagnetic driving vibrating mirror | |
| JP2002064967A (en) | Electromagnetic linear actuator | |
| CN102130567A (en) | Voice coil motor | |
| CN109150003B (en) | Cantilever type piezoelectric linear driver for adjusting friction through magneto-rheological electromagnetic coupling | |
| CN112731654A (en) | MEMS micro-mirror based on radial magnetic field distribution | |
| CN209844808U (en) | High-frequency direct-acting type power motor | |
| CN208079039U (en) | A kind of electromagnetic drive bistable light switch | |
| CN103698854A (en) | Encapsulation structure and encapsulation method for MEMS (micro-electromechanical system) variable optical attenuator | |
| JPS5831563B2 (en) | light switch | |
| CN204719329U (en) | A kind of tunable optical driver of combination drive | |
| CN108347239A (en) | A kind of electromagnetic drive bistable light switch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |