CN101770182A - Three-degree of freedom flexible precision positioning workbench - Google Patents
Three-degree of freedom flexible precision positioning workbench Download PDFInfo
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- CN101770182A CN101770182A CN201010300607A CN201010300607A CN101770182A CN 101770182 A CN101770182 A CN 101770182A CN 201010300607 A CN201010300607 A CN 201010300607A CN 201010300607 A CN201010300607 A CN 201010300607A CN 101770182 A CN101770182 A CN 101770182A
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Abstract
The invention discloses a three-degree of freedom flexible precision positioning workbench. In a structure of the workbench, six piezoelectric ceramic drivers are adopted, the tail of each driver is connected with a substrate through bolts, and the top end is in threaded connection with a ball joint to realize hertz contact; a flexible structure of the positioning workbench mainly comprises the substrate, six flexible branched chains with identical structures and a movable platform supported by the flexible branched chains; and three position sensors are used for measuring the actual output of the movable platform and are respectively fixed between a rigid support and the movable platform. The precision positioning workbench has the characteristics of high resolution ratio and high speed of dynamic response, and can be used as an assisted positioning platform of a nano-imprint lithography positioning system to realize microscale feeding and precision positioning.
Description
Technical field
The invention belongs to a kind of micro OS, be specially a kind of two translations, one pivoting flexible precise positioning work table that can be applicable to imprint lithography system.
Background technology
Nano-device comprises nano electron device and nano photoelectric device, can be widely used in electronics, optics, micro-mechanical device, novel computer etc., being the most dynamic research field in current new material and the new unit research field, also is components and parts miniaturization, intellectuality, highly integrated etc. mainstream development direction.Nano-device is owing to have potential great market and national defence and be worth, and makes the method, approach, technology etc. of its design and manufacturing become the focus of numerous scientists, government and large enterprise's research and investment.At present, the design of nano-device and manufacturing are in develop rapidly period, and method is varied, and pattern technology is exactly one of them.
Nano imprint lithography is the pattern technology that people develop in the process of exploring more convenient, inexpensive design and preparation nano-device, is used for nano graph and duplicates and can be used to make 3-D nano, structure.Compare with other photoetching technique, nanometer embossing has resolution height, low, the advantage of high production efficiency of cost of manufacture, has become the gordian technique of 32 nanometer technologies of future generation.Have greatly potential competitive power and wide application prospect.In the nanometer embossing evolution at home and abroad, three big mainstream technologys have been formed gradually: soft stamping technique, hot press printing technology, ultraviolet stamping technology.Hot press printing technology can remedy the deficiency of elasticity mould material easy deformation in the soft imprint process; and working (machining) efficiency is than higher; but in the hot padding process; photoresist is through the change procedure of high temperature, high pressure, cooling; metaboly appears in the coining pattern regular meeting that produces after the demoulding, is difficult for carrying out repeatedly or the impression of three-dimensional structure.Compare with the above two, the ultraviolet stamping technology is lower to environmental requirement, only just can carry out under room temperature and low-pressure, has improved the impression precision.Simultaneously because mould material adopts transparency silica glass, be easy to realize aiming between template and the substrate, this makes the ultraviolet stamping technology be more suitable in multi-impression.In addition, the template life cycle is long and to be suitable for producing in batches also be the major advantage of ultraviolet stamping technology.These characteristics all make the ultraviolet stamping technology have irreplaceable superiority in IC manufacturing field.
Moulding process seems simply, but will obtain higher impression precision, then needs to take all factors into consideration from many aspects.To accomplish to guarantee as far as possible the parallel of template and substrate in the moulding process, make template can contact uniformly with substrate.If template and substrate are not parallel, the mould that stays of wedge will be obtained, even an end of template directly contacts substrate.If wedge stays the thickness of mould to surpass the height of impression feature, when follow-up dry method uniform thickness etching, feature will be etched away so.Lateral spread took place in the relative slippage of template and substrate when simultaneously template and substrate not parallel also will cause pressing down, and influenced to impress precision.In addition, when molding, also can damage the impression feature.Therefore must guarantee the depth of parallelism of template and substrate in the moulding process, i.e. the uniform contact of template and substrate.The imprint lithography system structure generally comprises following critical piece: 1. press mechanism; 2. plummer; 3. precise positioning work table; 4. be used to ultraviolet source that solidifies photoresist etc., wherein precise positioning work table is the key component of imprint lithography system, guarantee template and substrate parallel and can uniform contact by its, make relative slip as much as possible little, bearing accuracy between the two be could guarantee like this, impression precision and impression quality guaranteed.
Passive mode is adopted in the adjustment of end-effector in the existing nano-imprinting apparatus (template and the substrate bearing platform) depth of parallelism mostly, promptly is out of shape the depth of parallelism that guarantees between the two by the flexible link of substrate (or template) plummer.B.J.Choi etc. for example, the design of stepping flash imprint lithography locating platform, Precision Engineering, 25 3 phases of volume of calendar year 2001,192 199 (B.J.Choi, S.V.Sreenivasan, S.Johnson, M.Colburn, C.G.Wilson, Design of orientation stage for step and flash imprint lithography, PrecisionEngineering, 2001,25 (3): 192 199.), Jae-Jong Lee etc., be used to prepare the design and analysis of the nano-imprint lithography equipment of 100nm live width feature, Current Applied Physics, 2006 the 6th phases, 1007-1011 (Jae-Jong Lee, Kee-Bong Choi, Gee-Hong Kim, Design and analysis of thesingle-step nanoimprinting lithography equipment for sub-100 nm linewidth.Current Applied Physics 2006,6:1007? 011.), Jae-Jong Lee etc., be used to prepare the ultraviolet stamping photoetching bull nano impression unit of 50nm half slant characteristic, SICEICASE International Joint Conference, 2006,4902-4904 (Jae-Jong Lee, Kee-Bong Choi, Gee-Hong Kim et al, TheUV-Nanoimprint Lithography with Multi-head nanoimprinting Unit for Sub-50nmHalf-pitch Patterns, SICEICASE International Joint Conference 2006 has just reported the equipment and the correlation technique of this type in 4902-4904.); Also some researcher adopts the mode that passive adaptation, active levelling and manual setting combine, as: thin autumn of model etc., the development of the high alignment precision nano impression of wide region model machine, Chinese mechanical engineering, 2005,16 volume supplementary issues, 64-67, Yan Le etc., the development of cold blocking photoetching process precise positioning work table, China's mechanical engineering, 2004,15 1 phases of volume, this type of precise positioning work table design of reporting among the 75-78.; Other researchers then ward off new footpath in addition, such as, Dong Xiaowen etc., the design of air bag air-cylinder type ultraviolet nanometer impression system, semiconductor optoelectronic,, 28 5 phases of volume, the technology of introducing among the 676-684. in 2007.In these existing technology, though self-adaptation is adjusted simple in structure, the compact conformation, with low cost of Precision Position Location System, its bearing accuracy, especially the adjustment precision of the depth of parallelism is lower, thereby has limited the raising of machining precision and quality.Though by initiatively levelling and manual setting mechanism, can improve the depth of parallelism of impression block and substrate to a certain extent, can not compensate the template that causes owing to force of impression is inhomogeneous in the moulding process and the parallelism error of substrate.Air bag air-cylinder type impression system has overcome in the moulding process silica gel and has easily upheld distortion, the force of impression skewness, and template is easily broken etc. not enough but the expensive and impression overlong time of design cost of use its vacuum chamber.Based on the deficiency of above-mentioned Precision Position Location System, have the development of the active adjusting type Precision Position Location System of novel mechanism form and control method, the development that promotes the IC process technology is had important significance for theories and engineering practical value.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of plastic deformation to realize end-effector (moving platform) along x based on single-freedom and flexible hinge and flexible leaf spring in the structure, the microfeed in the imprint lithography process and the three-degree of freedom flexible precision positioning workbench of precision positioning are finished in the translation of y axle and around the active adjustment of the rotation of z axle.
The technical scheme that the present invention solves imprint lithography precision positioning technology problem is:
Three-degree of freedom flexible precision positioning workbench, it comprises rigid support and is connected the pedestal at described rigid support top, in the middle of described pedestal by six flexible side chains moving platform that to be connected with its xsect be rectangle, described six flexible side chains wherein two be provided with along the center line direction of two relative sides up and down of moving platform respectively, other four flexible side chains in twos one group of relative side place, the left and right sides that is positioned at described moving platform respectively and about be symmetrically distributed with respect to the vertical axis of symmetry of described moving platform between two groups of flexible side chains and be provided with, the axis of forming two flexible side chains of every group of flexible side chain is parallel to each other and is symmetrically distributed with respect to the horizontal symmetry axis of described moving platform, each described flexible side chain includes a rigidity movable block, the forward part of described rigidity movable block is embedded in driven platform side in the inner moving platform groove that extends of moving platform, the rear section of described rigidity movable block is embedded in out in the base recess in pedestal, at the front end of the forward part of described rigidity movable block and be positioned on the left and right sides sidewall of end of forward part of lateral location of moving platform and have first successively, two groups of semicircle grooves, coupling part between two semicircle cambered surfaces of first group of described semicircle groove forms preceding single-freedom and flexible hinge, coupling part between two semicircle cambered surfaces of second group of described semicircle groove forms the back single-freedom and flexible hinge of connecting and being provided with described preceding single-freedom and flexible hinge, the single-freedom and flexible hinge links to each other with described moving platform before described, the flexible leaf spring of yi word pattern that the left and right sides, the rear section wall of described rigidity movable block is provided with two parallel connections separately one distolateral wall is vertical links to each other, the other end sidewall of two flexible leaf springs of described yi word pattern and vertical the linking to each other of madial wall of described base recess, on described pedestal, have six rectangular through slot that link to each other with each rigidity movable block rear section tail end sidewall, level is equipped with six piezoelectric ceramic actuators in described six rectangular through slot, the front end of the described piezoelectric ceramic actuator globe joint that has been threaded, described globe joint withstands on the tail end sidewall of described rigidity movable block rear section, the tail end of described piezoelectric ceramic actuator links to each other with pedestal by bolt, on the moving platform bottom surface and the equally spaced battery lead plate that is fixed with three capacitive position transducers respectively of the same circumferencial direction in end face upper edge of rigid support.
Compared with prior art, worktable of the present invention has following remarkable advantage:
The precise positioning work table of the present invention's design, its compliant mechanism and support all can utilize line to cut integrated process technology integral body and process, and avoid assembling, no gap, do not have friction, need not lubricate, and are beneficial to and realize the micro/nano level hi-Fix.
The precise positioning work table of the present invention's design adopts the flexible parallel connection structure, has advantages such as high rigidity, high precision, low inertia, compact conformation, error free accumulation.
Precise positioning work table of the present invention adopts single-freedom and flexible hinge and flexible leaf spring as gear train, has and does not have machinery friction, gapless advantage.In addition, the present invention is based on the elastic deformation of material, corner that flexible hinge and flexible leaf spring produced and distortion and executor tail end work space are all very small, can effectively eliminate shortcomings such as parallel institution unintentional nonlinearity.
The active adjustment of relative position between template and substrate in six piezoelectric ceramic actuators promotions of precise positioning work table employing driving links realization imprint lithography processes of the present invention's design, can be used as the nano-imprint lithography auxiliary positioning platform, realize microfeed and precision positioning.
Description of drawings
Fig. 1 is a three-degree of freedom flexible precision positioning workbench compliant mechanism synoptic diagram of the present invention;
Fig. 2 is a three-degree of freedom flexible precision positioning workbench support synoptic diagram of the present invention;
Fig. 3 is a three-degree of freedom flexible precision positioning workbench one-piece construction synoptic diagram of the present invention;
Fig. 4 is the cross sectional representation of compliant mechanism shown in Figure 1.
Embodiment
Below in conjunction with drawings and Examples,, be described in detail as follows according to embodiment provided by the invention, structure, feature and effect thereof.
Referring to Fig. 1 ~ 4, a kind of three-degree-of-freedom precision-positioning workbench that is used for nano-imprint lithography system.It comprises rigid support 7 and is connected the pedestal 2 at described rigid support 7 tops, in the middle of described pedestal 2 by six flexible side chains moving platform 4 that to be connected with its xsect be rectangle, described six flexible side chains wherein two be provided with along the center line direction of two relative sides up and down of moving platform 4 respectively, other four flexible side chains in twos one group of relative side place, the left and right sides that is positioned at described moving platform respectively and about be symmetrically distributed with respect to the vertical axis of symmetry of described moving platform between two groups of flexible side chains and be provided with, the axis of forming two flexible side chains of every group of flexible side chain is parallel to each other and is symmetrically distributed with respect to the horizontal symmetry axis of described moving platform, each described flexible side chain includes a rigidity movable block 3, the forward part of described rigidity movable block is embedded in driven platform side in the inner moving platform groove that extends of moving platform, the rear section of described rigidity movable block is embedded in out in the base recess in pedestal, at the front end of the forward part of described rigidity movable block 3 and be positioned on the left and right sides sidewall of end of forward part of lateral location of moving platform 4 and have first successively, two groups of semicircle grooves, coupling part between two semicircle cambered surfaces of first group of described semicircle groove forms preceding single-freedom and flexible hinge 51, coupling part between two semicircle cambered surfaces of second group of described semicircle groove forms the back single-freedom and flexible hinge 52 of connecting and being provided with described preceding single-freedom and flexible hinge, single-freedom and flexible hinge 51 links to each other with described moving platform 4 before described, the flexible leaf spring 1 of yi word pattern that the left and right sides, the rear section wall of described rigidity movable block is provided with two parallel connections separately one distolateral wall is vertical links to each other, the other end sidewall of two flexible leaf springs 1 of described yi word pattern and vertical the linking to each other of madial wall of described base recess, on described pedestal, have six rectangular through slot that link to each other with each rigidity movable block rear section tail end sidewall, (see Fig. 4, profile line among the figure partly is the bore portion of opening on entity), level is equipped with six piezoelectric ceramic actuators 10 in described six rectangular through slot, described six piezoelectric ceramic actuators 10 link to each other with pedestal 2 by six holes 21, the front end of the described piezoelectric ceramic actuator globe joint 9 that has been threaded, described globe joint withstands on the tail end sidewall of described rigidity movable block rear section, on described moving platform bottom surface and the equally spaced battery lead plate that is fixed with three capacitive position transducers 6 respectively of the same circumferencial direction in end face upper edge of described rigid support.
Break away from the course of the work for fear of piezoelectric ceramics and compliant mechanism driving link, six piezoelectric ceramic actuator 10 afterbodys link to each other with pedestal 2 by six holes 21, are installed in compliant mechanism with the interference fit and drive between link and the pedestal 2, realize pretension; Globe joint is installed by screw thread in the piezoelectric ceramic actuator top, makes and forms hertz contacting of small size between driver and the drive point.The moving platform of pedestal, six on all four flexible side chains of structure and support thereof utilizes line cutting technology integral body to process.The projection 8 of four structure unanimities of support four ends angle position distribution is used for supporting and fixing flexible mechanism.
Piezoelectric ceramic actuator 10 afterbodys are fixed on the pedestal 2 by mounting hole 21 screw threads respectively.The flexible leaf springs 1 of two in parallel in-lines play and support movable block 3 and guarantee that its motion stabilization avoids the effect of tilting between movable block 3 and pedestal; Two single-freedom and flexible hinge 5-1,5-2 are series between movable block 3 and the moving platform 4 successively, the transmission of supporting moving platform 4 and realizing moving.In six flexible side chains, wherein two are symmetrically distributed in moving platform about in the of 4 on the central axis of both sides of the edge, be used to realize that moving platform 4 is along the axial translational degree of freedom of y, other four side chains are divided into two groups, be distributed in two ends up and down, edge, moving platform 4 left and right sides, and parallel axes in twos is used for realizing that moving platform 4 is along the axial translational degree of freedom of x with around the rotational freedom of z axle.
As Fig. 1 and 2, the worktable compliant mechanism is connected with support 7 bolts by four holes 22.Three position transducers 6 are individually fixed on the support 7 between the plane and moving platform 4 lower planes, and three position transducers 6 all uniformly-spaced evenly distribute along circumference, and will guarantee its position alignment when installing.
In order to improve the control accuracy of worktable of the present invention, worktable of the present invention can adopt computing machine to control, described computing machine is used for output voltage signal and gives six piezoelectric ceramic actuators, reads the displacement signal of described three capacitive position transducers output and relatively exports displacement bucking voltage control signal to described six piezoelectric ceramic actuators in the back with the setting value in the computing machine.
The course of work of this device is as follows:
See also Fig. 1 ~ 4, the amplifier of computer control six passages provides piezoelectric ceramic actuator 10 flexible required electric currents.Piezoelectric ceramic actuator extends (or shortening) and promotes movable block 3, movable block 3 produces under the support of the flexible leaf spring 1 in both sides and moves, and then make two single-freedom and flexible hinge 5-1 on the flexible side chain and 5-2 produce to move and the distortion of the corresponding elasticity of flexure, thereby make moving platform 4 move according to the control signal that is provided.
It (is along the x direction in the surface level that this three-degree-of-freedom precision-positioning workbench has two translational degree of freedom, moving of y direction) and rotational freedom (promptly in surface level around the rotation of horizontal normal), here suppose that in the driving water plane along lower limb center line on the moving platform 4 be y axle (promptly the central axis of two soft drive side chains) up and down, moving platform 4 left and right edges center lines are the x axle, the z axle satisfies right-hand rule and vertical with plane, xy axle place, the implementation of precise positioning work table three motions that can realize is respectively so: (1) is along the translation of x direction: the amplifier of computer control six passages provides forward drive current to the piezoelectric ceramic actuator 10 that is arranged in two soft drive side chains of moving platform 4 left hand edges, (for convenience, here be called left piezoelectric ceramic actuator), simultaneously apply the reverse drive electric current to the piezoelectric ceramic actuator 10 (being called right piezoelectric ceramic actuator) that is arranged in two soft drive side chains of moving platform 4 right hand edges, be positioned at that two piezoelectric ceramic actuators of lower limb do not drive on the moving platform 4, so described two left piezoelectric ceramic actuators extend, and two right piezoelectric ceramic actuators shrink, moving to the right along the x axle takes place in the movable block 3 that the left piezoelectric ceramic actuator of elongation promotes its front end, transmission through movable block 3 and two single-freedom and flexible hinges 51 and 52, this translation action is passed to moving platform 4, it is taken place along the axial translation of x.Then can apply the drive current opposite with above-mentioned direction by two groups of piezoelectric ceramic actuators in the flexible side chain of moving platform left and right edges respectively along the translation opposite with above-mentioned direction of motion of x axle realizes.(2) along the translation of y direction: the amplifier of computer control six passages provides forward drive current to the piezoelectric ceramic actuator 10 that is arranged in moving platform 4 lower limb soft drive side chains, (for convenience, here be called the lower piezoelectric ceramic driver), simultaneously apply the reverse drive electric current to the piezoelectric ceramic actuator 10 that is arranged in moving platform 4 coboundary soft drive side chains (being called piezoelectric ceramic actuator), two groups of piezoelectric ceramic actuators 10 that are positioned at moving platform 4 left and right edges do not drive, so described lower piezoelectric ceramic driver extends, shrink and go up piezoelectric ceramic actuator, the movable block 3 that the lower piezoelectric ceramic driver of elongation promotes its front end take place along the y axle make progress move, transmission through movable block 3 and two single-freedom and flexible hinge 5-1 and 5-2, this translation action is passed to moving platform 4, it is taken place along the axial translation of y.Along the translation opposite of y axle with above-mentioned direction of motion then can by respectively on moving platform two piezoelectric ceramic actuators in the flexible side chain of lower limb apply the drive current opposite and realize with above-mentioned direction.(3) around the rotation of z axle: the amplifier of computer control six passages provides forward drive current to two piezoelectric ceramic actuators 10 that are arranged in moving platform 4 left hand edges upper end soft drive side chain and right hand edge lower end soft drive side chain simultaneously, in addition, provide the reverse drive electric current to two piezoelectric ceramic actuators 10 that are arranged in flexible side chain in moving platform 4 left hand edge lower ends and right hand edge upper end soft drive side chain simultaneously, two piezoelectric ceramic actuators 10 of lower limb do not drive on the moving platform and be positioned at, so described left hand edge upper end, two piezoelectric ceramic actuators 10 in right hand edge lower end all extend, promote direction respectively opposite move of movable block 3 generations of its front end along the y axle, transmission through movable block 3 and two single-freedom and flexible hinge 5-1 and 5-2, this translation action is passed to moving platform 4, owing to be positioned at the soft drive side chain of the soft drive side chain of moving platform left hand edge upper end and the right hand edge lower end segment distance that staggers up and down, form the arm of force, like this when two above-mentioned piezoelectric ceramic actuators 10 drive simultaneously, just on moving platform 4, form a effect, thereby make the rotation of its generation around the z axle around the couple of z axle.The rotation opposite with above-mentioned direction of motion around the z axle then can realize by applying the drive current opposite with above-mentioned direction to each piezoelectric ceramic actuator respectively.
For the influence of the hysteresis phenomenon that overcomes piezoelectric ceramic actuator, three high-precision capacitive position transducers 8 in the moving platform motion process, the actual output of real-time detection moving platform 4, and form closed-loop control system.Utilize the positioning error of the model of foundation, and the voltage of making up the difference is applied on the piezoelectric ceramic actuator 10 in real time at the line computation moving platform.One quick 16 hyperchannel D/A and A/D converter are used for realizing the conversion between simulating signal and the digital signal.
Claims (2)
1. three-degree of freedom flexible precision positioning workbench, it is characterized in that: it comprises rigid support and is connected the pedestal at described rigid support top, in the middle of described pedestal by six flexible side chains moving platform that to be connected with its xsect be rectangle, described six flexible side chains wherein two be provided with along the center line direction of two relative sides up and down of moving platform respectively, other four flexible side chains in twos one group of relative side place, the left and right sides that is positioned at described moving platform respectively and about be symmetrically distributed with respect to the vertical axis of symmetry of described moving platform between two groups of flexible side chains and be provided with, the axis of forming two flexible side chains of every group of flexible side chain is parallel to each other and is symmetrically distributed with respect to the horizontal symmetry axis of described moving platform, each described flexible side chain includes a rigidity movable block, the forward part of described rigidity movable block is embedded in driven platform side in the inner moving platform groove that extends of moving platform, the rear section of described rigidity movable block is embedded in out in the base recess in pedestal, at the front end of the forward part of described rigidity movable block and be positioned on the left and right sides sidewall of end of forward part of lateral location of moving platform and have first successively, two groups of semicircle grooves, coupling part between two semicircle cambered surfaces of first group of described semicircle groove forms preceding single-freedom and flexible hinge, coupling part between two semicircle cambered surfaces of second group of described semicircle groove forms the back single-freedom and flexible hinge of connecting and being provided with described preceding single-freedom and flexible hinge, the single-freedom and flexible hinge links to each other with described moving platform before described, the flexible leaf spring of yi word pattern that the left and right sides, the rear section wall of described rigidity movable block is provided with two parallel connections separately one distolateral wall is vertical links to each other, the other end sidewall of two flexible leaf springs of described yi word pattern and vertical the linking to each other of madial wall of described base recess, on described pedestal, have six rectangular through slot that link to each other with each rigidity movable block rear section tail end sidewall, level is equipped with six piezoelectric ceramic actuators in described six rectangular through slot, the front end of the described piezoelectric ceramic actuator globe joint that has been threaded, described globe joint withstands on the tail end sidewall of described rigidity movable block rear section, the tail end of described piezoelectric ceramic actuator links to each other with pedestal by bolt, on the moving platform bottom surface and the equally spaced battery lead plate that is fixed with three capacitive position transducers respectively of the same circumferencial direction in end face upper edge of rigid support.
2. three-degree of freedom flexible precision positioning workbench according to claim 1, it is characterized in that: it also comprises a computing machine, described computing machine is used for output voltage signal and gives six piezoelectric ceramic actuators, reads the displacement signal of described three capacitive position transducers output and relatively exports displacement bucking voltage control signal to described six piezoelectric ceramic actuators in the back with the setting value in the computing machine.
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