CN104154828A - V type MEMS actuator for detonator protection device based on buckling amplification - Google Patents
V type MEMS actuator for detonator protection device based on buckling amplification Download PDFInfo
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- CN104154828A CN104154828A CN201410369768.6A CN201410369768A CN104154828A CN 104154828 A CN104154828 A CN 104154828A CN 201410369768 A CN201410369768 A CN 201410369768A CN 104154828 A CN104154828 A CN 104154828A
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Abstract
The invention discloses a V type MEMS actuator for a detonator protection device based on buckling amplification. The actuator comprises a monocrystalline silicon substrate, wherein accelerating boring holes are formed in the monocrystalline silicon substrate; a silicon dioxide insulating layer grows on the monocrystalline silicon substrate; a monocrystalline silicon structure and the monocrystalline silicon substrate on which the silicon dioxide insulating layer grows are linked; a metal electrode layer is deposited on anchor points of the monocrystalline silicon structure; the MEMS actuator is prepared in the monocrystalline silicon structure; an etching technique is used for preparing a dynamic structure layer; the thermo electric effect is use for generating corresponding output; parts prepared by using a related MEMS-related technique is small in volume and has the advantages of low cost, high intelligence and easiness in integration.
Description
Technical field
The present invention relates to Fuze Technology field, be specifically related to a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling.
Background technology
Fuse is to utilize target and environmental information, the control device (system) of ignition or the ammunition warhead charge that ignites under predetermined condition, conventionally be arranged on rocket, guided missile warhead and big gun/tank/mortar ammunition etc. upper, according to the difference of ammunition kind and tackle target need to select different fuses.Fuse is the vitals in armament systems, and it is by environment, target being surveyed with obtaining information and processing, identifying information, and realizes safe condition control and the Optimal Burst control of fuse.The basic function of fuse is " safety " and " reliably igniting warhead ".Safety locking motion in fuse is the important component part of fuze system, and its basic function is the potential energy that reaches main charge by elimination, stops unexpected detonation, is mainly to stop the energy transmission of whole explosive train to realize.For this target, safety protection device usually stops unexpected arming by coaxial mechanical device, thus " partition " explosive train.When in safe mode, dividing plate will speed up thorax hole and blocks, and stops flier plate material to pass through, thereby stops the unexpected detonation of explosive train.In the time that weapon environment of living in meets initiation conditions, dividing plate is removed, and for flier plate material is opened passage, ensures that flier plate material can arrive high explosive powder charge.
There is the shortcomings such as volume is large, difficult integrated in tradition fuse.Along with the development of ammunition technology, require fuze function constantly to strengthen and expansion, and the volume of fuse restrict the expansion of fuze function.MEMS technology is applied in the design of fuse, will well solves this contradiction.MEMS fuse safety insurance device has that volume is little, reliability is high, can mass etc. many advantages, make conventional ammunition have more space to hold multi-sensor detection circuit and main charge, improve accuracy and the lethality of ammunition, the intellectuality of fuse and dexterity are changed into as possibility.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the invention is to propose a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling, utilize lithographic technique to make movable structure layer, there is low cost, high intelligent, easy of integration feature.
In order to achieve the above object, the technical solution adopted in the present invention is:
The fuse safety protection device V-type MEMS actuator amplifying based on buckling,
Comprise monocrystalline substrate 1, in monocrystalline substrate 1, being manufactured with diameter is the acceleration thorax hole 5 of 150～180um, accelerating thorax hole 5 is passages of flier plate material, silicon dioxide insulating layer 2 is grown in monocrystalline substrate 1, growth thickness is 2～3um, monocrystalline substrate 1 bonding by monocrystal silicon structure layer 3 with the silicon dioxide insulating layer 2 of having grown, the thickness of monocrystal silicon structure layer 3 is 50～100um, metal electrode layer 4 is deposited on the anchor point 3-2 of monocrystal silicon structure layer 3;
Also comprise anchor point 3-2, become the two ends of the V-type beam thermoelectricity driver element 3-1 of array structure to be connected with anchor point 3-2, intermediate arm 3-3 is positioned at the centre of V-type beam thermoelectricity driver element 3-1 and interfixes with it, the two ends of linking arm 3-4 are connected with the head end of upper and lower both sides amplification beam 3-5 respectively, the mid portion of linking arm 3-4 is connected with the head end of intermediate arm 3-3, dividing plate 3-6 is connected with the end of left and right sides amplification beam 3-5 respectively, and dividing plate 3-6 will speed up thorax hole 5 and blocks;
Remove and the part of anchor point 3-2 bonding, remaining silicon dioxide insulating layer 2 will be corroded, make thermoelectricity driver element 3-1, intermediate arm 3-3, linking arm 3-4, amplify beam 3-5 and dividing plate 3-6 unsettled, form final movable structure.
The total length of described V-type beam thermoelectricity driver element 3-1 is 1000～2000um, and wide is 30～40um, and middle angle is 160～170 °, and the spacing between every group of V-type beam thermoelectricity driver element 3-1 is 80～100um.
The length of described amplification beam 3-5 is 1500～2000um, and width is 10～15um, and inclination angle is 2～5 °.
Described dividing plate 3-6 is the square structure of the length of side 200～250um.
With compared with actuator, advantage of the present invention is with traditional fuse safety protection device: cost degradation, utilize the IC technique of existing maturation, and can realize extensive manufacture, effectively reduce the cost of product; Intellectuality, traditional fuse safety protection device mostly is spring structure with actuator, produces output accordingly by environmental forces (as acceleration), be subject to environment for use constraint larger, the present invention utilizes pyroelectric effect to produce corresponding output, and by signal of telecommunication control, intelligent degree is higher; Integrated, the device volume that utilizes MEMS related process to make is little, with compared with actuator, in equal area, more sensor and the present invention can be integrated to the adaptive faculty of raising device under complex environment with traditional fuse safety protection device.
Brief description of the drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is the structural representation of MEMS actuator of the present invention.
Fig. 3 is the structure thermal expansion schematic diagram after V-type beam thermoelectricity driver element 3-1 energising is stablized.
Fig. 4 is subject to malformation schematic diagram after external force for amplifying beam 3-5 and dividing plate 3-6.
Fig. 5 is the stable rear malformation schematic diagram that produced by the present invention switches on.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further described.
With reference to Fig. 1, a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling, comprise monocrystalline substrate 1, in monocrystalline substrate 1, being manufactured with diameter is the acceleration thorax hole 5 of 150～180um, accelerating thorax hole 5 is passages of flier plate material, silicon dioxide insulating layer 2 is grown in monocrystalline substrate 1, growth thickness is 2～3um, monocrystalline substrate 1 bonding by monocrystal silicon structure layer 3 with the silicon dioxide insulating layer 2 of having grown, the thickness of monocrystal silicon structure layer 3 is 50～100um, and metal electrode layer 4 is deposited on the anchor point 3-2 of monocrystal silicon structure layer 3;
With reference to Fig. 2, MEMS actuator is made in monocrystal silicon structure layer 3, MEMS actuator comprises anchor point 3-2, become the two ends of the V-type beam thermoelectricity driver element 3-1 of array structure to be connected with anchor point 3-2, improve the fan-out capability of device, intermediate arm 3-3 is positioned at the centre of V-type beam thermoelectricity driver element 3-1 and interfixes with it, the motion that ensures every group of thermoelectricity driver element is consistent, the two ends of linking arm 3-4 are connected with the head end of upper and lower both sides amplification beam 3-5 respectively, the mid portion of linking arm 3-4 is connected with the head end of intermediate arm 3-3, the displacement of the V-type beam thermoelectricity driver element 3-1 that becomes array structure is delivered to amplification beam 3-5, dividing plate 3-6 is connected with the end of left and right sides amplification beam 3-5 respectively, dividing plate 3-6 will speed up thorax hole 5 and blocks.
Described MEMS actuator is to remove and the part of anchor point 3-2 bonding, remaining silicon dioxide insulating layer 2 will be corroded, make thermoelectricity driver element 3-1, intermediate arm 3-3, linking arm 3-4, amplification beam 3-5 and dividing plate 3-6 unsettled, form final movable structure.
The total length of described V-type beam thermoelectricity driver element 3-1 is 1000～2000um, and wide is 30～40um, and middle angle is 160～170 °, and the spacing between every group of V-type beam thermoelectricity driver element is 80～100um.
The length of described amplification beam 3-5 is 1500～2000um, and width is 10～15um, and inclination angle is 2～5 °.
Described dividing plate 3-6 is the square structure of the length of side 200～250um.
With reference to Fig. 3, utilize pyroelectric effect, on metal electrode layer 4, apply DC voltage, when by V-type beam thermoelectricity driver element 3-1, will produce corresponding heat, due to heat conduction, the existence of thermal convection current and thermoradiation efficiency, the heat producing and the heat of dissipation finally can reach balance, temperature on V-type beam thermoelectricity driver element 3-1 can reach stable, when its temperature will produce certain thermal expansion amount during higher than environment temperature, because overall structure is fixed on anchor point 3-2, limit the vertical movement of V-type beam thermoelectricity driver element 3-1, and make its final distortion be created in horizontal direction.
With reference to Fig. 4, amplify beam 3-5 and be used for amplifying the displacement that V-type beam thermoelectricity driver element 3-1 produces.Dividing plate 3-6, compared with amplifying beam 3-5, has larger physical dimension, can be considered rigid body, can not produce distortion in the time that displacement amplifying mechanism is stressed.In the time that symmetrical Input Forces is applied to the head end of left and right sides amplification beam 3-5, can cause it to produce corresponding buckling distortion, the displacement that V-type beam thermoelectricity driver element 3-1 is produced is amplified, and makes dividing plate 3-6 produce enough displacements.
With reference to Fig. 5, when apply certain DC voltage on metal electrode layer 4 time, pyroelectric effect can make V-type beam thermoelectricity driver element 3-1 produce corresponding heat, and thermal expansion effects makes structure generation initial deformation, initial deformation is amplified by amplifying beam 3-5, and promotes dividing plate 3-6 and produce corresponding displacement.
Principle of the present invention is:
Pyroelectric effect and the thermal expansion effects of silicon materials are utilized, on metal electrode layer 4, apply DC voltage, in the time passing through the V-type beam thermoelectricity driver element 3-1 of single crystal silicon material, will produce corresponding heat, due to heat conduction, the existence of thermal convection current and thermoradiation efficiency, the heat producing and the heat of dissipation finally can reach balance, temperature on V-type beam thermoelectricity driver element 3-1 can reach stable, when its temperature will produce certain thermal expansion amount during higher than environment temperature, because overall structure is fixed on anchor point 3-2, limit the vertical movement of V-type beam thermoelectricity driver element 3-1, and make its final distortion be created in horizontal direction.Because thermal expansion amount is less, can not meet design requirement under normal circumstances, need to design displacement amplifying mechanism produced displacement is amplified.Here design amplification beam 3-5 and amplified the displacement that V-type beam thermoelectricity driver element 3-1 produces.Dividing plate 3-6, compared with amplifying beam 3-5, has larger physical dimension, can be considered rigid body, and stress deformation only can occur on the amplification beam 3-5 that rigidity is lower.In the time that being applied to the head end of left and right sides amplification beam 3-5, the initial deformation of V-type beam thermoelectricity driver element 3-1 generation can cause it to produce corresponding buckling distortion, initial deformation is amplified, the dividing plate 3-6 that blocks acceleration thorax hole 5 is removed, for flier plate material is opened passage, ensure that flier plate material can arrive high explosive powder charge.
Claims (4)
1. the fuse safety protection device V-type MEMS actuator amplifying based on buckling, is characterized in that:
Comprise monocrystalline substrate (1), in monocrystalline substrate (1), being manufactured with diameter is the acceleration thorax hole (5) of 150～180um, accelerating thorax hole (5) is the passage of flier plate material, silicon dioxide insulating layer (2) is in the upper growth of monocrystalline substrate (1), growth thickness is 2～3um, monocrystalline substrate (1) bonding by monocrystal silicon structure layer (3) with grown silicon dioxide insulating layer (2), the thickness of monocrystal silicon structure layer (3) is 50～100um, metal electrode layer (4) is deposited on the anchor point (3-2) of monocrystal silicon structure layer (3),
Also comprise anchor point (3-2), become the two ends of the V-type beam thermoelectricity driver element (3-1) of array structure to be connected with anchor point (3-2), intermediate arm (3-3) is positioned at the centre of V-type beam thermoelectricity driver element (3-1) and interfixes with it, the two ends of linking arm (3-4) are connected with the head end of upper and lower both sides amplification beams (3-5) respectively, the mid portion of linking arm (3-4) is connected with the head end of intermediate arm (3-3), dividing plate (3-6) is connected with the end of left and right sides amplification beam (3-5) respectively, dividing plate (3-6) will speed up thorax hole (5) and blocks,
Remove the part with anchor point (3-2) bonding, remaining silicon dioxide insulating layer (2) will be corroded, make thermoelectricity driver element (3-1), intermediate arm (3-3), linking arm (3-4), amplification beam (3-5) and dividing plate (3-6) unsettled, form final movable structure.
2. a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling according to claim 1, it is characterized in that: the total length of described V-type beam thermoelectricity driver element (3-1) is 1000～2000um, wide is 30～40um, middle angle is 160～170 °, and the spacing between every group of V-type beam thermoelectricity driver element (3-1) is 80～100um.
3. a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling according to claim 1, is characterized in that: the length of described amplification beam (3-5) is 1500～2000um, and width is 10～15um, and inclination angle is 2～5 °.
4. a kind of fuse safety protection device V-type MEMS actuator amplifying based on buckling according to claim 1, is characterized in that: described dividing plate (3-6) is the square structure of the length of side 200～250um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410369768.6A CN104154828B (en) | 2014-07-30 | 2014-07-30 | A kind of based on the fuse safety protection device V-type MEMS actuator of amplifying of buckling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410369768.6A CN104154828B (en) | 2014-07-30 | 2014-07-30 | A kind of based on the fuse safety protection device V-type MEMS actuator of amplifying of buckling |
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| CN104154828A true CN104154828A (en) | 2014-11-19 |
| CN104154828B CN104154828B (en) | 2016-04-06 |
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| CN201410369768.6A Expired - Fee Related CN104154828B (en) | 2014-07-30 | 2014-07-30 | A kind of based on the fuse safety protection device V-type MEMS actuator of amplifying of buckling |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157490A (en) * | 2015-08-19 | 2015-12-16 | 湖北三江航天红林探控有限公司 | Micro electro mechanical system fuse security device |
| CN105371713A (en) * | 2015-11-17 | 2016-03-02 | 西安交通大学 | Partition-type micro-electromechanical system (MEMS) fuze |
| CN105737694A (en) * | 2016-02-01 | 2016-07-06 | 西安交通大学 | Linear driving MEMS fuse security device based on electro-thermal effect |
| CN108238582A (en) * | 2018-01-10 | 2018-07-03 | 北京理工大学 | A kind of minute yardstick MEMS energy applied to fuse dredges device and preparation method thereof |
| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103274348A (en) * | 2013-05-14 | 2013-09-04 | 西安交通大学 | Cold-hot arm structure MEMS actuator for detonating sequence |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
-
2014
- 2014-07-30 CN CN201410369768.6A patent/CN104154828B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103274348A (en) * | 2013-05-14 | 2013-09-04 | 西安交通大学 | Cold-hot arm structure MEMS actuator for detonating sequence |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157490A (en) * | 2015-08-19 | 2015-12-16 | 湖北三江航天红林探控有限公司 | Micro electro mechanical system fuse security device |
| CN105371713A (en) * | 2015-11-17 | 2016-03-02 | 西安交通大学 | Partition-type micro-electromechanical system (MEMS) fuze |
| CN105371713B (en) * | 2015-11-17 | 2017-03-01 | 西安交通大学 | A kind of partition-type MEMS fuse |
| CN105737694A (en) * | 2016-02-01 | 2016-07-06 | 西安交通大学 | Linear driving MEMS fuse security device based on electro-thermal effect |
| CN108238582A (en) * | 2018-01-10 | 2018-07-03 | 北京理工大学 | A kind of minute yardstick MEMS energy applied to fuse dredges device and preparation method thereof |
| CN108238582B (en) * | 2018-01-10 | 2020-07-10 | 北京理工大学 | Micro-scale MEMS energy dredging device applied to fuze and preparation method thereof |
| CN110347119A (en) * | 2019-06-29 | 2019-10-18 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
| CN110347119B (en) * | 2019-06-29 | 2021-11-16 | 瑞声科技（南京）有限公司 | Motion control structure and actuator |
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| CN104154828B (en) | 2016-04-06 |
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