CN109949856B - Modularized six-degree-of-freedom precise micro-motion mechanism based on flexible hinge - Google Patents
Modularized six-degree-of-freedom precise micro-motion mechanism based on flexible hinge Download PDFInfo
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Abstract
The invention discloses a modularized six-degree-of-freedom precision micro-motion mechanism based on a flexible hinge, which comprises a first original driving block, an output frame, a second original driving block, a third original driving block, a fixed panel and an installation panel, wherein the first original driving block is connected with the output frame; the device is driven by a piezoelectric system, wherein the piezoelectric driving system comprises a signal generator, a power amplifier and piezoelectric ceramics; the signal generator generates a signal source, the output signal of the signal generator is amplified through the power amplifier, so that the piezoelectric ceramic is actuated to generate linear displacement, and in addition, the piezoelectric ceramic pushes the flexible hinge to enable the device to realize various displacements; the first original driving block, the second original driving block and the third original driving block are all vertically arranged in a parallelogram structure formed by straight beam type hinges.
Description
Technical Field
The invention relates to the technical field of vibration-assisted machining, in particular to a modularized six-degree-of-freedom precision micro-motion mechanism based on a flexible hinge.
Background
The vibration auxiliary processing technology is a technology for processing parts with complicated micro-size shapes, such as the surface of a microstructure, and the like by utilizing a numerical control processing technology and a vibration device. Different from the traditional machining process, the vibration-assisted machining generates a machining strategy according to the surface characteristics of the machined surface, namely the feed motion of a tool and a workpiece is established, and the tool and the workpiece are disassembled into a control part of a numerical control machine tool and a control part of a micro-motion device according to the change frequency and the size of a feed motion curve. The part with large feeding amount or relatively low frequency change is realized by numerical control machining, and the part with small feeding amount or relatively high frequency change is realized by a micro-motion device. The micro-motion device auxiliary manufacturing has a vital role particularly for the processing of the micro-structure type surface, on one hand, the high-frequency output of the micro-motion device increases the processing efficiency, on the other hand, the motion precision and the sensitivity of the micro-motion device are higher, and a solution is provided for the micro-structure type surface and even the micro-nano surface which is difficult to manufacture by a common numerical control machine.
For the vibration-assisted machining technology, the design of the micro-motion device directly influences the machining flexibility, the machining efficiency and the machining precision. Under the condition of more processing shafts, the micro-motion device is required to have the micro-motion capability with multiple degrees of freedom, and the design of the spatial six-degree-of-freedom device greatly improves the processing flexibility. Because the rotational inertia and limited motion precision exist in the running process of the numerical control machine tool, the six-degree-of-freedom micro-motion device indirectly eliminates the motion error of the micro-motion of the machine tool, improves the machining precision range of the machine tool and enables the micro-structure type surface machining technology to be more stable and efficient.
The precise positioning/feeding is a key technology in the fields of micro-nano processing technology, microelectronic engineering, bioengineering, precise engineering, metering science and technology and the like. With the development of precision positioning technology, the requirement for positioning precision is also increased. Traditional close location platform all adopts the parallel form, also can satisfy the demand under most situations, but clearance, friction, wearing and tearing scheduling problem in the rigid member motion process are difficult to solve. Due to these factors, rigid tight positioning accuracy only stays at the micrometer level. The design of the flexible hinge mechanism avoids the defects and improves the positioning level to the nanometer level. The six-degree-of-freedom compact micromotion mechanism also adopts a parallel connection mode, and the precision is improved by utilizing the flexible hinge on the basis of parallel connection of rigid members. The six-degree-of-freedom precise micro-motion mechanism also provides great convenience for the flexibility of positioning of the device.
Disclosure of Invention
The invention designs and develops a modularized six-degree-of-freedom precise micro-motion mechanism based on a flexible hinge, and aims to solve the problems in vibration-assisted machining, improve the degree of freedom of an auxiliary device, namely the flexibility of machining, improve the inherent frequency of the auxiliary device, namely the machining efficiency, and improve the operation precision of the auxiliary device, namely the machining precision. The piezoelectric ceramic is used for driving, so that the micro-nano resolution of processing is realized, and the problems of micro-structure creation and processing are solved.
The technical scheme provided by the invention is as follows:
a flexible hinge-based modular six-degree-of-freedom precision micro-motion mechanism comprises:
installing a panel;
a fixing panel fixedly and detachably mounted on the mounting panel;
a first original driving block detachably mounted on the fixed panel;
the first original driving block comprises a plurality of first vertical supporting frames, a first direct driving block flexibly connected among the first vertical supporting frames and a first output block flexibly connected with the first direct driving block;
a second original driving block detachably mounted on the fixing panel;
the second original driving block comprises a plurality of vertical supporting plates, a plurality of second vertical supporting frames, a second direct driving block flexibly connected among the vertical supporting plates, a third direct driving block flexibly connected between the second direct driving block and the second vertical supporting frames, and a second output block flexibly connected with the second direct driving block and the third direct driving block at the same time;
two third original driving blocks which are detachably arranged on the fixed panel;
the third original driving block comprises a plurality of third vertical supporting frames, a fourth direct driving block, a fifth direct driving block and a third output block, wherein the fourth direct driving block, the fifth direct driving block and the third output block are flexibly connected with the fourth direct driving block and the fifth direct driving block at the same time;
an output frame detachably connected to the first output block, the second output block, and the third output block at the same time;
the first original driving block, the second original driving block and the third original driving block are all formed by vertically arranging a parallelogram structure formed by straight beam type flexible chains on the fixed panel.
Preferably, the first primitive driving block further includes:
a first base plate detachably mounted to the fixing panel;
the number of the first vertical supporting frames is 2, and the first vertical supporting frames are symmetrically and fixedly installed on the first bottom plate.
Preferably, the second primitive driving block further includes:
a second base plate detachably mounted on the fixing plate;
the vertical support plate and the second vertical support frame are fixedly arranged on the second bottom plate;
the second vertical support frame comprises 2 second vertical main support frames and second vertical auxiliary support frames;
wherein the third direct drive block is flexibly connected between the second vertical secondary support frame and the second direct drive block.
Preferably, the second primitive driving block further includes:
and the connecting block is flexibly connected between the second vertical main supporting frames and is flexibly connected with the second output block at the same time.
Preferably, the third primitive driving block further includes:
a third base plate detachably mounted on the fixing plate;
the third vertical supporting frame is fixedly arranged on the third bottom plate;
the third vertical support frame comprises 4 second vertical main support frames and 2 second vertical auxiliary support frames;
the fourth direct driving block is flexibly connected between the third vertical auxiliary supporting frames, and the fifth direct driving block is flexibly connected between the third vertical main supporting frames close to the third vertical auxiliary supporting frames.
Preferably, the output rack further includes:
the first guide block is detachably connected with the first output block;
the second guide block is detachably connected with the second output block;
the two ends of the third guide block are detachable and are simultaneously connected with the two third output blocks; and
and the fourth output block is flexibly connected between the first guide block and the second guide block and is flexibly connected with the middle part of the third guide block.
Preferably, the first bottom plate, the second bottom plate and the third bottom plate are all provided with through holes which are used for being detachably connected with the fixed panel;
preferably, the first bottom plate, the second bottom plate and the third bottom plate are all provided with pre-tightening threaded holes for pre-tightening the piezoelectric ceramics.
Preferably, the first bottom plate, the second bottom plate and the third bottom plate are all provided with pin holes for respectively positioning the first original driving block, the second original driving block and the third original driving block.
Preferably, the first output block, the second output block and the third output block are all provided with assembling holes for detachably mounting the output frame.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention is composed of different modules, and different modules can be equipped in different application occasions. If the output displacement is required to be larger, the required range can be provided, and a displacement amplification structure is added to the two-degree-of-freedom module; if the output response frequency needs to be improved, the module can be adjusted to a module with better response frequency performance. For different performance requirements. If five degrees of freedom are required, the module can be replaced. For example, if the X-direction degrees of freedom of the first original driving block and the second original driving block are removed, the output end is actually a five-degree-of-freedom motion mechanism which moves along the direction Y, Z and rotates around the axis X, Y, Z;
2. all the moving mechanisms of the invention adopt the electric spark integrated processing, and the connection between the modules adopts rigid connection, thus avoiding the moving error. The piezoelectric ceramic is adopted for driving, so that the high-precision displacement or angle output of the mechanism under different motion measurement is ensured. The piezoelectric ceramics are pre-tightened by screws and fixed with the mechanism, flexible hinges in all directions are concentrated in the center of the device, and the piezoelectric ceramics are arranged on the outermost layer, so that the mechanism is more compact;
3. the mechanism adopts symmetrical design at multiple positions, including the design of a parallelogram mechanism and the symmetry among parts, thereby avoiding the influence of external influence and increasing the motion reliability;
4. the whole mechanism operates on the principle of a parallel structure, and three degrees of freedom of movement along X, Y direction and rotation around a Z axis are realized by adopting a three-branch-chain parallel strategy on an XOY plane. The three degrees of freedom of movement along the Z direction and rotation around the X, Y axis are realized by adopting a four-branch-chain parallel strategy in the Z direction, the structure is simple, and the operation is reliable;
5. the motion transmission form adopts a flexible hinge mechanism, is realized by the principle of sheet elastic deformation, has the advantages of zero-clearance transmission, zero friction and the like, and ensures the motion precision of the precise micro-motion mechanism.
Drawings
FIG. 1 is a structural diagram of a flexible hinge-based modular six-degree-of-freedom precision micromotion mechanism of the invention.
FIG. 1A is another view structure diagram of the flexible hinge-based modular six-degree-of-freedom precision micromotion mechanism.
Fig. 2 is a diagram of a first primitive driver block of the present invention.
Fig. 2A is a front view of a first original drive block of the present invention.
FIG. 2B is a top view of the first original drive block of the present invention.
Figure 2C is a side view of the first original drive block of the present invention.
Fig. 3 is a second original driving block diagram according to the present invention.
Fig. 3A is a front view of a second original drive block of the present invention.
FIG. 3B is a top view of the second original drive block of the present invention.
Figure 3C is a side view of a second original drive block of the present invention.
Fig. 3D is another perspective view structural diagram of the third original driving block of the present invention.
Fig. 4 is a diagram of a third original driving block of the present invention.
Fig. 4A is a front view of a third original drive block of the present invention.
Fig. 4B is a side view of a third original drive block of the present invention.
Fig. 4C is a top view of a third original drive block of the present invention.
Fig. 5 is a structural view of an output frame of the present invention.
Fig. 6 is a view showing the structure of the mounting panel of the present invention.
Fig. 7 is a view showing the structure of a fixing panel according to the present invention.
FIG. 8 is a schematic diagram of X-direction translation and rotation about the Z-axis.
Fig. 9 illustrates the principle of Y-direction translation.
FIG. 10 is a schematic view of the Z translation and rotation about the X and Y axes.
Fig. 11 is a three-dimensional view of the mechanism of the present invention.
Fig. 12 is a three-dimensional view of the mechanism of the present invention.
Fig. 13 is a partial three-dimensional view of the mechanism of the present invention.
FIG. 14 is a diagram illustrating the finite element simulation results of X-direction motion.
FIG. 15 is a diagram of finite element simulation results for rotation about the Y-axis.
FIG. 16 is a diagram illustrating the finite element simulation results of Z-direction motion.
FIG. 17 is a diagram of finite element simulation results of rotational motion about the X-axis.
FIG. 18 is a diagram of finite element simulation results of Y-direction motion.
FIG. 19 is a diagram of finite element simulation results of rotational motion about the Z-axis.
Detailed Description
The present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.
As shown in fig. 1, the present invention provides a flexible hinge-based modular six-degree-of-freedom precision micromotion mechanism, the main structure of which comprises a first original driving block 100, an output frame 200, a second original driving block 300, a third original driving block 400, a fixed panel 500, and an installation panel 600; the fixing panel 500 is fixedly and detachably mounted on the mounting panel 600; the first original driving block 100 is detachably mounted on the fixing panel 500; the first original driving block 100 comprises a plurality of first vertical supporting frames 111 and 112, a first direct driving block 120 flexibly connected between the first vertical supporting frames 111 and 112, and a first output block 130 flexibly connected with the first direct driving block 120; the second original driving block 300 is detachably mounted on the fixing panel 500; the second original driving block 300 comprises a plurality of vertical supporting plates 351 and 352, a plurality of second vertical supports 311 and 312 and 313, a second direct driving block 322 flexibly connected among the vertical supporting plates, a third direct driving block 321 flexibly connected between the second direct driving block 322 and the second vertical supporting frame 312 and a second output block 330 flexibly connected with the second direct driving block 322 and the third direct driving block 321 at the same time; two third original driving blocks 400 are detachably mounted on the fixing panel 500; the third original driving block 400 comprises a plurality of third vertical supporting frames 411-415, a fourth direct driving block 431 flexibly connected among the third vertical supporting frames, a fifth direct driving block 432 and a third output block 440 flexibly connected with the fourth direct driving block 431 and the fifth direct driving block 432 at the same time; the output frame 200 is simultaneously detachably coupled to the first output block 130, the second output block 330, and the third output block 440.
The device is driven by a piezoelectric system, wherein the piezoelectric driving system comprises a signal generator, a power amplifier and piezoelectric ceramics; the signal generator generates a signal source, the output signal of the signal generator is amplified through the power amplifier, so that the piezoelectric ceramic is actuated to generate linear displacement, and in addition, the piezoelectric ceramic pushes the flexible hinge to enable the device to realize various displacements.
The first original driving block 100, the second original driving block 300 and the third original driving block 400 are all vertically arranged in a parallelogram structure formed by straight beam type hinges; the first original drive block 100 has X, Z two degrees of freedom; wherein, the Z direction is directly driven by the electric ceramic, and the degree of freedom of the X direction is that the output block on the output frame 200 has the degree of freedom of the X direction; the second original driving block 300 also has two degrees of freedom in the X direction and the Z direction, and both directions X, Z are directly driven by piezoelectric ceramics; the third original driving block 400 has Y, Z degrees of freedom in two directions, and both directions Y, Z are directly driven by piezoelectric ceramics; the four driving ends of the output frame 200 are respectively connected with the output ends of the first original driving block 100, the second original driving block 300 and the third original driving block 400 to induce the output end of the output frame to generate six-degree-of-freedom displacement; the flatness of the upper surface of the assembly plate 500 is guaranteed, and four parts of the first original driving block 100, the second original driving block 300 and the two third original driving blocks 400 are assembled through pin positioning; from the overall principle, the three degrees of freedom of the XOY plane are formed by connecting three branched chains in parallel; three degrees of freedom of Z-direction movement and rotation around the X, Y axis are formed by connecting four Z-direction branched chains in parallel.
In the invention, the six-degree-of-freedom mechanism refers to the movement along the X, Y, Z three-direction and the rotation around the X, Y, Z three-direction, in order to reduce the assembly error, the flexible hinges are all processed by a wire cut electrical discharge machining process, the modules are all rigidly connected, and the materials are aluminum alloys. The flexible hinge adopts a straight beam type flexible hinge.
In another embodiment, shown in fig. 2 and 2A-2C, the first primary actuating mass 100 is a flexible hinge mechanism driven by piezoelectric ceramics with two degrees of freedom in the X and Z directions, to achieve the X-direction movement of the final output, the first original drive block 100 is fitted with only one drive, because the piezoelectric ceramic load has a large influence on the output displacement, and meanwhile, in order to make the structure simpler and improve the frequency of the device, two piezoelectric ceramics are directly and vertically arranged, a pair of straight beam type flexible hinges is directly pushed to drive the output tail end to move, a parallelogram structure formed by a direct driving block and a rack ensures the translation of the direct output block along the piezoelectric direction, the piezoelectric ceramics are prevented from bearing shearing force, the straight beam type hinges are all arranged in pairs, the parallelogram structure is formed to play a role in guiding, parasitic errors are reduced, and the operation precision is improved; preferably, in the present embodiment, the first original driving block 100 includes a first vertical supporting frame 111, a first vertical supporting frame 112, a first direct driving block 120, and a first output block 130; the first vertical support frame 111 and the first vertical support frame 112 are identical in structure and are connected with a first original driving block bottom plate, and the first vertical support frame 111 and the first vertical support frame 112 play a role in supporting and fixing and reserve a space for piezoelectric ceramic assembly; the bottom plate of the first original driving block is provided with a through hole 141, a through hole 142, a through hole 143 and a through hole 144 for the threaded fixed connection of the first original driving block 100 and the fixed panel 500; the Z-direction positioning depends on the bottom surface of the first original driving block; the first original driving block 100 is provided with a conical pin hole 151 and a conical pin hole 152 for XOY plane positioning of the first original driving block 100; the first direct driving block 120 is directly driven in the Z direction by piezoelectric, and a parallelogram structure constructed by the straight beam type hinge ensures the stable output of the first direct driving block 120 in the Z direction, so that the piezoelectric ceramics can be prevented from being subjected to shearing force; the first direct connection block 120 and the vertical support frames 111 and 112 are respectively connected with two pairs of X-direction hinges and Z-direction hinges in a vertical state, so that the parallelogram principle is ensured to avoid overlarge coupling; the first output block 130 is the output end of the first original driving block 100, and has two degrees of freedom, but in actual operation, the part only has one driving in the Z direction, and the other degree of freedom in the X direction is used for matching the movement of the output frame 200; the first primitive driving block 100 output assembly hole 131 is used for fixing the output frame 200, and a spring washer or a stop washer is used for preventing the output frame 200 from having rotational freedom around a bolt from loosening; a pre-tightening threaded hole 160 is formed in the bottom plate of the first original driving block 100 and is designed to be a counter bore, a bolt is installed from bottom to top, the bolt is provided with fine threads, and a bolt cap is completely sunk into a body to prevent Z-direction positioning from being influenced; the supporting frame, the direct driving block, the connecting block and the output block are connected by a pair of flexible hinges, and the flexible hinges are arranged in a parallelogram manner, so that the blocks are ensured to translate along each direction, and the output stability and the operation precision are improved; the threaded hole on the output block is used for being fixed with the output frame.
As shown in fig. 3 and fig. 3A to 3D, in another embodiment, the second original driving block 300 also has a flexible hinge mechanism with two degrees of freedom in the X direction and the Z direction, but has two drivers to realize displacement in two directions, unlike the first original driving block 100, and the straight beam type hinges are arranged in pairs to form a parallelogram structure; preferably, in the present embodiment, the second original driving block 300 includes a second vertical supporting frame 311, a second vertical supporting frame 312, a second vertical supporting frame 313, a second direct driving block 322, a connecting block 340, a second output block 330, a third direct driving block 321, a vertical supporting plate 352, and a vertical supporting plate 351; the second vertical support frame 311 and the second vertical support frame 313 have the same structure and are used for supporting and fixing the straight beam type flexible hinge; the second vertical support frame 312 plays a role in supporting and fixing, and provides an assembly space for the piezoelectric ceramics; the vertical support plate 352 and the vertical support plate 351 have the same structure and play a role in supporting and fixing, and provide an assembly space for the piezoelectric ceramics; the third direct driving block 321 is directly driven in the piezoelectric Z direction, and the parallelogram structure constructed by the straight beam type hinge ensures the stable output of the third direct driving block 321 in the Z direction, so that the piezoelectric ceramic can be prevented from being subjected to shearing force; the connecting block 340 is connected with two pairs of X-direction and Z-direction hinges in a vertical state, so that the parallelogram principle is ensured to avoid overlarge coupling; the fitting hole 331 is used for fixing the output frame 200, and a spring washer or a stop washer is used for preventing the output frame 200 from having rotational freedom around a bolt; the second output block 330 has degrees of freedom in two directions, namely an X direction and a Z direction, and in the actual use process, two drivers of piezoelectric ceramics in different directions are respectively arranged to realize displacement in two directions; the second direct driving block 322 is directly driven by the piezoelectric X direction, and the straight beam type hinge also ensures the stable output along the X direction; the threaded hole 361 is designed as a counter bore, and a bolt is installed from right to left to tightly push the piezoelectric ceramic; the bottom plate of the second original driving block is provided with a through hole 371, a through hole 372 and a through hole 373 for fixing the second original driving block 200 and the fixed panel 500; the second original driving block 300 is provided with a conical pin hole 381 and a conical pin hole 382 for XOY plane positioning of the second original driving block 300, and the Z-direction positioning depends on the bottom surface of the second original driving block 300 and the surface of the fixed panel 500 for positioning; a threaded hole 362 is formed in the bottom plate of the second original driving block and is designed as a countersunk hole, a bolt is installed from bottom to top to push the piezoelectric ceramic tightly, and a bolt cap is sunk into the hole to avoid influencing Z-direction positioning; the supporting frame, the direct driving block, the connecting block and the output block are connected by a pair of flexible hinges, and the flexible hinges are arranged in a parallelogram manner, so that the blocks are ensured to translate along each direction, and the output stability and the operation precision are improved; the threaded hole on the output block is used for being fixed with the output frame.
As shown in fig. 4 and fig. 4A to 4C, in another embodiment, the third original driving block 400 is a flexible hinge mechanism driven by piezoelectric ceramics and having two degrees of freedom in Y direction and Z direction, but the difference is that two third original driving blocks 400 drive the same output frame 200 together, and the third guiding block 213 should have the degrees of freedom in Y direction, Z direction movement and rotation around Y, Z direction under the driving of different strategies of the two third original driving blocks 400, so the selection of the straight beam type hinge also has the capability of moving the output block under the driving of two-way moment, so that under the driving of the two third original driving blocks 400, the third guiding block 213 has the degree of freedom capable of realizing Y, Z two-way movement and also has the degree of freedom in rotation around Y, Z direction; preferably, in this embodiment, the third original driving block 400 includes a third vertical supporting frame 411, a third vertical supporting frame 412, a third direct driving block 321, a third output block 440, a fifth direct driving block 432, a lateral supporting frame 421, a lateral supporting frame 422, a third vertical supporting frame 413, a third vertical supporting frame 414, and a third vertical supporting frame 415; the threaded hole 462 is used for pre-tightening the piezoelectric ceramics, and is designed as a countersunk hole, so that the bolt cap is completely sunk into the body, the influence on the Z-direction positioning of the fourth direct drive block 431 is avoided, and the pre-tightening bolt is fine threads; the third vertical support frame 411 and the third vertical support frame 412 have the same structure and play a role in supporting and fixing, so that an assembly space is provided for the piezoelectric ceramics; the fourth direct drive block 431 is driven by piezoelectric ceramics along the Z direction, and the straight beam type flexible hinge forms a parallelogram structure, so that the fourth direct drive block 431 is ensured to output stably along the Z axis; the third output block 440 has two degrees of freedom in the Y direction and the Z direction, and the two driver piezoelectric ceramics provide two directions of displacement for the output end; the assembly hole 441 is used for fixing the output frame 200, and a spring washer or a stop washer is adopted for preventing the output frame 200 from having rotational freedom around a bolt; the fifth direct driving block 432 is driven by piezoelectric ceramics along the Y direction, and the straight beam type flexible hinge forms a parallelogram structure, so that the fourth direct driving block 431 is ensured to output stably along the Y axis; the transverse support frame 421 and the transverse support frame 422 have the same structure and play a role in fixing, and provide an assembly space for the piezoelectric ceramics; the third original driving block 400 is provided with a bottom plate threaded hole 461 which is designed as a counter bore, a bolt is installed from right to left, and the piezoelectric ceramic is tightly propped; the third vertical support frame 413 and the third vertical support frame 414 have the same structure and play a role in supporting and fixing, so that the transverse support frame is connected with the bottom plate and fixed on the assembly frame; the third original driving block 400 is provided with a conical pin hole 470 for XOY plane positioning, and Z-direction positioning is ensured by the bottom plane and the surface of the assembling plate; the third original driving block 400 is provided with a through hole 451, a through hole 452 for fixing the third guide block 213 to the fixing panel 500; the supporting frame, the direct driving block, the connecting block and the output block are connected by a pair of flexible hinges, and the flexible hinges are arranged in a parallelogram manner, so that the blocks are ensured to translate along each direction, and the output stability and the operation precision are improved; the threaded hole on the output block is used for being fixed with the output frame.
As shown in fig. 5, in another embodiment, the output frame 200 includes a first guide block 211, a fourth output block 220, a second guide block 212, and a third guide block 213; the through hole 231 is used for fixing with the third output block 440 of the third original driving block 400; the through hole 232 is used for fixing with the first output block 130 of the first original driving block 100; the first guide block 211 inherits the degree of freedom of the first original driving block 100 and has degrees of freedom in both the X direction and the Z direction, and the first guide block 211 can move in the Z direction under the pushing of the output end of the first original driving block 100; the fourth output block 220 is the final output end of the device, with six degrees of freedom moving three-way along X, Y, Z and rotating three-way around X, Y, Z; the second guide block 212 inherits the degree of freedom of the second original driving block 300 and has the degrees of freedom in the X direction and the Z direction, and the second guide block 212 can move in the X direction and the Z direction under the pushing of the output end of the second original driving block 300; the through hole 234 is used for fixing with the second output block 330 of the second original driving block 300; the through hole 233 is used for fixing with the third output block 440 of the third original driving block 400; the third guide block 213 inherits the motion of the two third original driving blocks 400, and has two degrees of freedom of movement in the Y direction and movement in the Z direction, and derives a degree of freedom of rotation around the Z axis; the two straight beam-type flexible hinges between the fourth output block 220 and the third guide block 213 constitute a parallelogram mechanism, so that the fourth output block 220 is always parallel to the third guide block 213, and the fourth output block 220 also has two degrees of freedom because the third guide block 213 has two degrees of freedom for displacement along the Y axis and rotation around the Z axis; since the first guide block 211 and the second guide block 212 both have the freedom of movement in the X direction, the fourth output block 220 has the freedom of movement in the X direction by being driven by the second guide block 212; since the first guide block 211, the second guide block 212, and the third guide block 213 have a degree of freedom in the Z direction, the fourth output block 220 has three degrees of freedom in movement along the Z axis and rotation around the X axis and the Y axis.
The X-direction moving assembly in the invention is shown in fig. 1 and 1A; in the second original driving block 300, the X-direction piezoelectric ceramic actuator provides X-direction linear displacement, the X-direction direct driving block is subjected to a force along the X-direction, and the two pairs of straight beam-type flexible hinges generate deformation along the X-direction, so that the direct driving block stably moves along the X-direction. The Z-direction straight beam type hinge is of a vertical plate type in the X direction, namely the Z-direction flexible hinge has higher rigidity in the X direction, so that the deformation is extremely small and can be ignored; the Z-direction flexible hinge is connected with the output end, so that the output end is driven by a driving force along the X direction; because X-direction flexible hinges are arranged between the output end and the Z-direction direct driving block and between the output end and the fixed frame, the rigidity of the mechanism in the X direction is low, and the output block moves along the X direction under the condition that the output block is driven by X-direction driving force; the second output block 330 is in turn connected to the output frame second guide block 212, thereby transmitting force to the output frame 200.
In the output frame 200, since the first guide block 211, the fourth output block 220, and the second guide block 212 are connected by the Z-direction hinge, the rigidity in the output plus the X-direction is large. Meanwhile, the fourth output block 220 is connected with the third guide block 213 through a pair of parallelogram structures, so that the third guide block 213 is parallel to the fourth output block 220, and the stability of the Z-direction straight beam type hinge is prevented from being reduced under the condition of lateral disturbance. The third guide block 213 and the fourth output block 220 are connected by an X-direction flexible hinge, so that X-direction displacement occurs when X-direction force is applied to the X-direction with low X-direction stiffness.
In conclusion, the driving force can be provided in the X direction, the rigidity in the X direction of the output guide part is smaller, and therefore the output block moves along the X direction under the driving of the X direction piezoelectric ceramics.
The Y-direction moving assembly and the Z-axis rotating assembly in the invention are shown in fig. 1 and 1A; in the two third original driving blocks 400, the Y-direction piezoelectric ceramic is actuated to provide Y-direction linear displacement, the Y-direction direct driving block is subjected to a force along the Y-direction, and the two pairs of straight beam-shaped flexible hinges generate deformation along the Y-direction, so that the direct driving block stably moves along the Y-direction. The direct driving block transmits force to the Z-direction flexible hinge, and the Z-direction straight beam type hinge is of a vertical plate type in the Y direction, namely the Z-direction flexible hinge has higher rigidity in the Y direction, so that the deformation is extremely small and can be ignored. The Z-direction flexible hinge is connected with the output end, so that the output end is driven along the Y direction. Because the output end and the Z-direction direct driving block are provided with the Y-direction flexible hinges, the rigidity of the mechanism in the Y direction is low, and the output block moves along the Y direction under the condition that the output block is subjected to the Y-direction driving force. The third output block 440 is in turn connected to the third guide block 213, so that the force is transmitted to the output frame 200.
In the output frame 200, since the third guide block 213 is connected to the two third original driving blocks 400 and the two third original driving blocks 400 are both displaced in the Y direction, the third guide block 213 is displaced in the Y direction, the third guide block 213 and the fourth output block 220 are directly connected by a pair of X-direction straight beam type flexible hinges, since the X-direction hinges have a high rigidity in the Y direction, the Y-direction force is transmitted to the output blocks, the fourth output block 220 is connected to the first guide block 211 and the second guide block 212 by a single Y-direction straight beam type hinge, and since the Y-direction straight beam type hinges have a low rigidity in the Y direction, the fourth output block 220 is moved in the Y direction when receiving the Y-direction force. The fourth output block 220 is connected with the third guide block 213 through a pair of straight beam type hinges to form a parallelogram structure, so that the stable output of the fourth output block 220 is ensured.
If the output displacements of the two third original driving blocks 400 are not consistent, the third guide block 213 rotates around the Z-axis. Because the third guide block 213 and the fourth output block 220 are formed by a pair of straight beam type flexible hinges, the fourth output block 220 and the third guide block 213 are ensured to be parallel, namely, the third guide block 213 transmits torque rotating around the Z axis to the fourth output block 220, and the fourth output block 220, the first guide block 211 and the second guide block 212 are connected by single straight beam type hinges, so that the fourth output block 220 has smaller rotating rigidity around the Z axis. When the fourth output block 220 is subjected to a torque about the Z-axis at this time, the fourth output block 220 should rotate about the Z-axis.
The Z-direction movement in the present invention, rotating the assembly around the X-axis and Y-axis, is shown in FIG. 1 and FIG. 1A; in the first original driving block 100, Z-direction piezoelectric ceramic actuation provides Z-direction linear displacement, the Z-direction direct driving block is subjected to force along the Z direction, and two pairs of straight beam-type flexible hinges generate deformation along the Z direction, so that the direct driving block stably moves along the Z direction. The direct driving block transmits force to the X-direction flexible hinge, and the X-direction straight beam type hinge is of a vertical plate type in the Z direction, namely the X-direction flexible hinge is high in rigidity in the Z direction, so that deformation is extremely small and negligible. The X-direction flexible hinge is connected with the output end, so that the output end is driven by a Z-direction driving force. The first output block 130 is in turn connected to the first guide block 211, so that the force is transmitted to the output frame 200.
In the second original driving block 300, Z-direction piezoelectric ceramic actuation provides Z-direction linear displacement, the Z-direction direct driving block is subjected to force along the Z-direction, and two pairs of straight beam-type flexible hinges generate deformation along the Z-direction, so that the direct driving block stably moves along the Z-direction. The direct driving block transmits force to the X-direction flexible hinge, and the X-direction straight beam type hinge is of a vertical plate type in the Z direction, namely the X-direction flexible hinge is high in rigidity in the Z direction, so that deformation is extremely small and negligible. The X-direction flexible hinge is connected with the output end, so that the output end is driven by a Z-direction driving force. Because Z-direction flexible hinges are arranged between the output end and the Z-direction direct driving block and between the output end and the fixed frame, the rigidity of the mechanism in the Z direction is low, and the output block moves along the Z direction under the condition that the output block is subjected to Z-direction driving force. The second output block 330 is in turn connected to the second guide block 212, thereby transmitting force to the output frame 200.
In the third original driving block 400, the Z-direction piezoelectric ceramic is actuated to provide Z-direction linear displacement, the Z-direction direct driving block is subjected to a force along the Z-direction, and the two pairs of straight beam-type flexible hinges generate deformation along the Z-direction, so that the direct driving block stably moves along the Z-direction. The direct driving block transmits force to the Y-direction flexible hinge, and the Y-direction straight beam type hinge is of a vertical plate type in the Z direction, namely the Y-direction flexible hinge has higher rigidity in the Z direction, so that deformation is extremely small and can be ignored. The Y-direction flexible hinge is connected with the output end, so that the output end is driven by a Z-direction driving force. Because Z-direction flexible hinges are arranged between the output end and the Z-direction direct driving block and between the output end and the fixed frame, the rigidity of the mechanism in the Z direction is low, and the output block moves along the Z direction under the condition that the output block is subjected to Z-direction driving force. The third output block 440 is in turn connected to the third guide block 213, so that the force is transmitted to the output frame 200.
In the output frame 200, the first guide block 211, the second guide block 212 and the third guide block 213 are respectively connected to the first original driving block 100, the second original driving block 300 and the third original driving block 400, and the output blocks connected to the first original driving block 100, the second original driving block 300 and the third original driving block 400 all generate Z-direction motion, so that the output blocks generate Z-direction motion. Meanwhile, if the displacements are inconsistent, the output block deflects around the X axis or the Y axis, and thus the degree of freedom of rotation around the X axis and the Y axis is provided.
As shown in fig. 6, the mounting panel 600 is provided with a plurality of limiting mounting holes, pin holes, and countersunk connecting holes; wherein, the limiting installation hole plays a role of fixing with the fixing panel 500; the pin holes respectively play a role in positioning the first original driving block 100, the second original driving block 300 and the third original driving block 400; the countersunk head connection holes are respectively used for fixing the first original driving block 100, the second original driving block 300 and the third original driving block 400.
In the present invention, the pin holes are used for positioning the micro-motion mechanism on the XOY plane of the mounting panel.
The working principle of the modularized six-degree-of-freedom precise micro-motion mechanism based on the flexible hinge is described as follows by combining the flexible hinge-based precise micro-motion mechanism provided by the invention:
as shown in fig. 8, the X-direction translation principle and the rotation principle around the Z-axis are as follows: when masses 3 and 4 are fixed ends, mass 1 translates in the X-direction when the displacements driven by F1 and F2 are equal, and mass 2 also translates with mass 1 in the X-direction according to the parallelogram principle.
When the displacements driven by F1 and F2 are not equal, as the displacement driven by F1 is greater than the displacement driven by F2, the block 1 rotates around the Z axis, and the block 2 rotates around the Z axis along with the block 1 according to the parallelogram principle.
As shown in fig. 9, the principle of Y-direction translation is: when the blocks 4 and 5 are fixed ends, under the action of F3, the blocks 1, 2 and 3 all move along the Y direction, because the blocks 2 and 4 are formed by connecting two parallel connecting rods, according to the parallelogram principle, the moving direction of the block 2 should be parallel to the block 4, and the design of the block 3 is to realize the basic symmetry of the structure, namely to ensure that the block 2 is not subjected to the torque under the action of the load F3 as much as possible.
As shown in fig. 10, the principles of Z-direction translation and rotation about the X and Y axes are: 1. the 2, 3 and 4 blocks are sliders moving only in the Z direction, and the 4 block is an output block. When the displacements driven by the F4, the F5, the F6 and the F7 are equal, the output platform translates along the z direction. When the displacement driven by one of the forces F4, F5, F6 and F7 is small, the output platform can rotate around the X axis when the output platform is inclined along the direction of the force, for example, the displacement driven by the F4 is equal to the displacement driven by the F5, and the displacement driven by the F6 is equal to the displacement driven by the F7 and larger than the displacement driven by the F4. When the displacement driven by the F5 is equal to that driven by the F6, and the displacement driven by the F4 is equal to that driven by the F7 and larger than that driven by the F5, the output platform can rotate around the Y axis.
Finite element verification of the modularized six-degree-of-freedom precise micro-motion mechanism based on the flexible hinge provided by the invention is described as follows:
the piezoelectric positions No. 1-3 set by the mechanism are shown in FIG. 11, FIG. 12 is a three-dimensional view of another visual angle, the upper half of the mechanism is obtained by dividing according to a plane and is shown in FIG. 13, and the piezoelectric driving positions No. 4-7 are shown in FIG. 13; the finite element simulation element types of FIGS. 14-19 employ solid 10node 187 with a modulus of elasticity of 70MPa and a Poisson's ratio of 0.3.
As shown in fig. 14, the X-direction movement finite element verification parameters are set, full displacement constraint is applied to the fixed frame, 100N concentrated load is applied to the number 1 piezoelectric driving point, and the output block is displaced by 3um along the X direction.
As shown in fig. 15, the finite element verification parameters moving along the Y axis are set, full displacement constraint is applied to the fixed frame, 100N concentrated load is applied to piezoelectric driving surfaces No. 4 and 5, 130N concentrated load is applied to piezoelectric driving surface No. 6, 70N concentrated load is applied to piezoelectric driving surface No. 7, the moving displacement cloud picture in the Z direction is observed, the simulation result is obtained, and the output block is displaced by 4.95um along the Y direction.
As shown in fig. 16, the finite element verification parameters moving along the Z-axis are set, full displacement constraint is applied to the fixed frame, 100N concentrated loads are applied to the number 2 and 3 piezoelectric driving points, and the output block is displaced by 6.98um along the Z-axis according to the obtained simulation result, but a certain coupling condition also exists at the same time.
As shown in fig. 17, the finite element verification parameters of the rotation around the X axis are set, full displacement constraint is applied to the fixed frame, 100N concentrated loads are applied to the piezoelectric driving surfaces No. 4 and No. 5, respectively, and the output block deflects 11.87urad around the X axis according to the obtained simulation result.
As shown in fig. 18, the finite element verification parameters set for rotation around the Y axis, full displacement constraint was applied to the mount, 100N concentrated force was applied to the piezoelectric drive point No. 2, and the resulting simulation results, the output block rotated 12.15urad around the Y axis.
As shown in fig. 19, the finite element verification parameters of the rotation around the Z axis are set, full displacement constraint is applied to the fixed frame, 100N concentrated load is applied to the piezoelectric driving surface No. 5, 130N concentrated load is applied to the piezoelectric driving surface No. 6, and the output block deflects around the Y axis by 6.87urad according to the obtained simulation result.
While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.
Claims (10)
1. A modularized six-degree-of-freedom precise micro-motion mechanism based on a flexible hinge is characterized by comprising:
installing a panel;
a fixing panel fixedly and detachably mounted on the mounting panel;
a first original driving block detachably mounted on the fixed panel;
the first original driving block comprises a plurality of first vertical supporting frames, a first direct driving block flexibly connected among the first vertical supporting frames and a first output block flexibly connected with the first direct driving block;
a second original driving block detachably mounted on the fixing panel;
the second original driving block comprises a plurality of vertical supporting plates, a plurality of second vertical supporting frames, a second direct driving block flexibly connected among the vertical supporting plates, a third direct driving block flexibly connected between the second direct driving block and the second vertical supporting frames, and a second output block flexibly connected with the second direct driving block and the third direct driving block at the same time;
two third original driving blocks which are detachably arranged on the fixed panel;
the third original driving block comprises a plurality of third vertical supporting frames, a fourth direct driving block, a fifth direct driving block and a third output block, wherein the fourth direct driving block, the fifth direct driving block and the third output block are flexibly connected with the fourth direct driving block and the fifth direct driving block at the same time;
an output frame detachably connected to the first output block, the second output block, and the third output block at the same time;
the first original driving block, the second original driving block and the third original driving block are all formed by vertically arranging a parallelogram structure formed by straight beam type flexible chains on the fixed panel.
2. The flexible hinge-based modular six degree-of-freedom precision micro-motion mechanism of claim 1, wherein the first original drive block further comprises:
a first base plate detachably mounted to the fixing panel;
the number of the first vertical supporting frames is 2, and the first vertical supporting frames are symmetrically and fixedly installed on the first bottom plate.
3. The flexible hinge-based modular six degree-of-freedom precision micro-motion mechanism of claim 2, wherein the second original drive block further comprises:
a second base plate detachably mounted on the fixing panel;
the vertical support plate and the second vertical support frame are fixedly arranged on the second bottom plate;
the second vertical support frame comprises 2 second vertical main support frames and second vertical auxiliary support frames;
wherein the third direct drive block is flexibly connected between the second vertical secondary support frame and the second direct drive block.
4. The flexible hinge-based modular six degree-of-freedom precision micro-motion mechanism of claim 3, wherein the second original drive block further comprises:
and the connecting block is flexibly connected between the second vertical main supporting frames and is flexibly connected with the second output block at the same time.
5. The flexible hinge based modular six degree of freedom precision micromotion mechanism of claim 4 wherein said third primitive actuation block further comprises:
a third base plate detachably mounted on the fixing panel;
the third vertical supporting frame is fixedly arranged on the third bottom plate;
the third vertical support frames comprise 4 third vertical main support frames and 2 third vertical auxiliary support frames;
the fourth direct driving block is flexibly connected between the third vertical auxiliary supporting frames, and the fifth direct driving block is flexibly connected between 2 third vertical main supporting frames close to the third vertical auxiliary supporting frames.
6. The flexible hinge based modular six degree-of-freedom precision micro-motion mechanism of claim 5, wherein the output frame further comprises:
the first guide block is detachably connected with the first output block;
the second guide block is detachably connected with the second output block;
the two ends of the third guide block are detachable and are simultaneously connected with the two third output blocks; and
and the fourth output block is flexibly connected between the first guide block and the second guide block and is flexibly connected with the middle part of the third guide block.
7. The flexible hinge based modular six degree of freedom precision micromotion mechanism of claim 5 wherein said first base plate, said second base plate and said third base plate are all provided with through holes for detachable connection with said fixed panel.
8. The flexible hinge-based modular six-degree-of-freedom precision micromotion mechanism of claim 7, wherein the first base plate, the second base plate and the third base plate are provided with pre-tightening threaded holes for pre-tightening the piezoelectric ceramics.
9. The flexible hinge based modular six degree of freedom precision micromotion mechanism of claim 8 wherein said first base plate, said second base plate and said third base plate are provided with pin holes for positioning said first original drive block, said second original drive block and said third original drive block respectively.
10. The flexible hinge-based modular six-degree-of-freedom precision micromotion mechanism of claim 9, wherein the first output block, the second output block and the third output block are all provided with assembly holes for detachably mounting the output frame.
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