CN110265682B - Preparation method of battery test intermediate - Google Patents

Preparation method of battery test intermediate Download PDF

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CN110265682B
CN110265682B CN201910500660.9A CN201910500660A CN110265682B CN 110265682 B CN110265682 B CN 110265682B CN 201910500660 A CN201910500660 A CN 201910500660A CN 110265682 B CN110265682 B CN 110265682B
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layer
row
mold plates
current collecting
mold
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CN110265682A (en
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李致朋
区定容
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Shenzhen Zhiyuan Power Technology Co ltd
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Shenzhen Zhiyuan Power Technology Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/36—Arrangements for testing, measuring or monitoring the electrical condition of accumulators or electric batteries, e.g. capacity or state of charge [SoC]
    • G01R31/385—Arrangements for measuring battery or accumulator variables
    • G01R31/3865—Arrangements for measuring battery or accumulator variables related to manufacture, e.g. testing after manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention provides a preparation method of a battery test intermediate, which comprises the steps of firstly depositing a material layer on a substrate, wherein the thickness of a first electrode layer is gradually reduced along a first direction, the thickness of an electrolyte layer is uniform, and the thickness of a second electrode layer is gradually increased along the first direction; then covering a mold cover on the surface of the second flow collecting layer, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows; and finally, sequentially etching each material layer along the interval region of the template by controlling an ion beam etching device so as to expose the first current collecting layer corresponding to the interval region. The battery test intermediate obtained by the preparation method is convenient for carrying out rapid batch electrochemical performance test on a plurality of batteries with the same component proportion but different cross sectional areas or a plurality of batteries with the same cross sectional area but different component proportions.

Description

Preparation method of battery test intermediate
Technical Field
The invention relates to the technical field of batteries, in particular to a preparation method of a battery test intermediate.
Background
During the production and manufacturing of batteries, different tests of different electrical properties of the batteries, such as resistance and conductivity, are often required. While the resistance and conductivity of the cell are related to its cross-sectional area and component ratio. Therefore, it is very important to study the resistance and conductivity of batteries with different cross-sectional areas or different component ratios.
At present, because the battery comprises a positive current collecting layer, a positive electrode, an electrolyte, a negative electrode, a negative current collecting layer and other multilayer structures, especially for micro-batteries and thin-film batteries of micron level and even nanometer level, it is difficult to simultaneously prepare a plurality of batteries with consistent total thickness, but only the batteries with different cross-sectional areas or different component proportions are used for researching electrochemical properties, and the testing process is time-consuming and tedious. In addition, due to the differences in material and thickness between the existing battery cells, it is difficult to accurately reflect the influence on the electrochemical performance of the battery caused by the difference in cross-sectional area or the difference in component ratio.
Disclosure of Invention
The invention mainly aims to provide a preparation method of a battery test intermediate, aiming at solving the technical problem.
In order to achieve the purpose, the invention provides a preparation method of a battery test intermediate, which comprises the following steps:
s1, controlling a film deposition device to sequentially deposit a first current collecting layer, a first electrode layer, an electrolyte layer, a second electrode layer and a second current collecting layer on a substrate, wherein the thicknesses of the first current collecting layer, the electrolyte layer and the second current collecting layer are respectively uniform, the thickness of the first electrode layer is gradually reduced along a first direction, and the thickness of the second electrode layer is gradually increased along the first direction;
s2, controlling a mold cover to be arranged on the surface of the second flow collecting layer, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the plurality of mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows;
and S3, controlling an ion beam etching device to sequentially etch the second current collecting layer, the second electrode layer, the electrolyte layer and the first electrode layer along the longitudinal direction of the template interval region so as to expose the first current collecting layer corresponding to the interval region.
In one embodiment, the area defined by the mold cap is smaller than the area of the first manifold layer.
In one embodiment, each row of mold caps further comprises a plurality of mold plates with different areas.
In one embodiment, the cross-sectional area of each die plate in each row of die plates is different.
In one embodiment, the cross-sectional area of the outer row of forms decreases gradually in a first direction, and the cross-sectional area of the outer row of forms decreases gradually in a second direction.
In one embodiment, the other row of templates located at the outer side has first template vacant positions different from both ends of the row of template vacant positions, and the other row of templates located at the outer side has second template vacant positions different from both ends of the row of template vacant positions.
In one embodiment, the center-to-center spacing of the templates is the same.
In one embodiment, the template is a square template.
In one embodiment, the area of the template is in the range of 0.05 × 0.05-500 × 500 μm2The total thickness d of the first electrode layer, the electrolyte layer, the second electrode layer and the second current collector layer1In the range of 10 to 500 μm, the thickness d of the first current collecting layer2The range of (A) is 0.1 to 10 μm.
In one embodiment, the step S3 includes the following steps:
controlling the etching depth of the ion beam etching device to be d3Wherein d is1≤d3＜d1+d2。
The preparation method of the battery test intermediate provided by the invention comprises the steps of firstly, sequentially depositing battery material layers on a substrate, wherein the thickness of a first electrode layer is gradually reduced along a first direction, and the thickness of a second electrode layer is gradually increased along the first direction; then covering a mold cover on the surface of the second flow collecting layer, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows; and finally, sequentially etching each material layer along the longitudinal direction of the interval region of the template by controlling an ion beam etching device so as to expose the first current collecting layer corresponding to the interval region. The preparation method can obtain the battery test intermediate with a plurality of battery monomers through one-step molding, and is convenient for carrying out quick batch electrochemical performance test on a plurality of batteries with the same component proportion but different cross-sectional areas or a plurality of batteries with the same cross-sectional area but different component proportions, so that a plurality of groups of data can be obtained at one time, the time for producing a plurality of different battery test monomers in batch is greatly reduced, the efficiency of batch production and batch test is improved, and the influence of the cross-sectional area difference or the component proportion difference on the electrochemical performance of the batteries can be accurately reflected.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a process diagram of one embodiment of a method for preparing a battery test intermediate provided by the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of a battery test intermediate prepared according to the present invention;
FIG. 3 is a top view of the battery test intermediate of FIG. 2;
fig. 4 is a schematic view of the connection of the test intermediate to the test electrode of the cell shown in fig. 2.
The reference numbers illustrate:
reference numerals Name (R) Reference numerals Name (R)
1 Battery testing intermediate 10 Substrate
20 First current collecting layer 30 Unit assembly
31 A first electrode layer 32 Electrolyte layer
33 A second electrode layer 34 Second current collector layer
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The embodiment of the invention provides a preparation method of a battery test intermediate, and please refer to fig. 1, the preparation method of the battery test intermediate comprises the following steps:
s1, controlling a film deposition device to sequentially deposit a first current collecting layer 20, a first electrode layer 31, an electrolyte layer 32, a second electrode layer 33 and a second current collecting layer 34 on a substrate 10, wherein the thicknesses of the first current collecting layer 20, the electrolyte layer 32 and the second current collecting layer 34 are respectively uniform, the thickness of the first electrode layer 31 is gradually reduced along a first direction, and the thickness of the second electrode layer 33 is gradually increased along the first direction;
s2, controlling a mold cover to cover the surface of the second current collecting layer 34, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the plurality of mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows;
and S3, controlling an ion beam etching device to sequentially etch the second current collecting layer 34, the second electrode layer 33, the electrolyte layer 32 and the first electrode layer 31 along the longitudinal direction of the template interval region so as to expose the first current collecting layer 20 corresponding to the interval region.
In step S1, different thin film deposition methods, including sputter deposition, laser pulse deposition, evaporation deposition, chemical vapor deposition, and molecular beam epitaxy, may be used according to the nature of the battery material to be deposited. In this embodiment, a silicon substrate is used as the substrate 10.
In step S3, since the mask is disposed on the surface of the second current collecting layer 34, and the plurality of templates in the mask are disposed at intervals, the ion beam can only etch the interval regions between the templates, and the region of each layer of battery material layer that is blocked by the template remains. It should be noted that the etching depth of the ion beam only reaches the surface of the first current collecting layer 20, so that the first current collecting layer 20 corresponding to the spacing region is exposed, and a plurality of battery cells separated from each other are formed, and the plurality of battery cells share the first current collecting layer 20.
Referring to fig. 2 and 3, the intermediate for cell testing 1 obtained by the above-described preparation method includes a substrate 10, a first current collector layer 20, and a plurality of unit modules 30 arranged in an array. The first current collecting layer 20 is disposed on the surface of the substrate 10, and a plurality of unit assemblies 30 are spaced apart from the upper surface of the first current collecting layer 20. Each of the unit components 30 includes a first electrode layer 31, an electrolyte layer 32, a second electrode layer 33, and a second current collecting layer 34. The total thickness of the unit assembly 30 is uniform, and the thicknesses of the first current collecting layer 20, the electrolyte layer 32, and the second current collecting layer 34 are also uniform, respectively.
Each row of the unit modules 30 is arranged in a first direction, and each column of the unit modules 30 is arranged in a second direction perpendicular to the first direction. The thickness of each first electrode layer 31 is gradually reduced along a first direction, and the thickness of each second electrode layer 33 is gradually increased along the first direction. The upper surface of each of the first electrode layers 31 is located on the same inclined plane, and the lower surface of each of the second electrode layers 33 is also located on the same inclined plane. Each column of unit modules 30 includes at least two unit modules 30 with different cross-sectional areas, and a plurality of unit modules 30 includes at least two unit modules 30 with the same cross-sectional area and located in different columns.
The uniform total thickness of the unit cell assemblies 30 means that the total thickness of all the unit cell assemblies 30 is substantially the same, and the thickness deviation of any two unit cell assemblies 30 is allowed to be within ± 0.5% on the premise that the battery performance is not affected. Similarly, the thicknesses of all of the first current collector layer 20, the electrolyte layer 32, and the second current collector layer 34 are also substantially the same.
Specifically, since the thicknesses of the first electrode layer 31 and the second electrode layer 33 of different unit assemblies 30 located on the same column are respectively the same, the proportions of the first electrode layer 31 and the second electrode layer 33 of different unit assemblies 30 located on the same column are the same; since the thicknesses of the first electrode layer 31 and the second electrode layer 33 of the unit assemblies 30 located on different columns are different, the proportions of the first electrode layer 31 and the second electrode layer 33 of the unit assemblies 30 located on different columns are also different. Thus, each column of unit modules 30 includes a plurality of unit modules 30 having the same composition ratio but different cross-sectional areas, and a plurality of unit modules 30 having the same cross-sectional area but different composition ratios include a plurality of unit modules 30.
During the production and manufacturing of batteries, different tests of different electrical properties of the batteries, such as resistance and conductivity, are often required. While the resistance and conductivity of the cell are related to its cross-sectional area and component ratio. Therefore, it is very important to study the resistance and conductivity of batteries with different cross-sectional areas or different component ratios. At present, because the battery comprises a positive electrode current collecting layer, a positive electrode, an electrolyte, a negative electrode current collecting layer and other multilayer structures, especially for micro-scale and even nano-scale micro-batteries and thin film batteries, it is difficult to simultaneously prepare a plurality of batteries with consistent total thickness, but only batteries with different cross-sectional areas or different component proportions are used for researching electrochemical performance, and the preparation of similar battery samples and corresponding test processes are time-consuming and tedious. In addition, due to the differences in material and thickness between the existing battery cells, it is difficult to accurately reflect the influence on the electrochemical performance of the battery caused by the difference in cross-sectional area or the difference in component ratio.
The invention provides a preparation method of a battery test intermediate, which comprises the steps of firstly, sequentially depositing battery material layers on a substrate, wherein the thickness of a first electrode layer is gradually reduced along a first direction, and the thickness of a second electrode layer is gradually increased along the first direction; then covering a mold cover on the surface of the second flow collecting layer, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows; and finally, sequentially etching each material layer along the longitudinal direction of the interval region of the template by controlling an ion beam etching device so as to expose the first current collecting layer corresponding to the interval region. The preparation method can obtain the battery test intermediate with a plurality of battery monomers through one-step molding, and is convenient for carrying out quick batch electrochemical performance test on a plurality of batteries with the same component proportion but different cross-sectional areas or a plurality of batteries with the same cross-sectional area but different component proportions, so that a plurality of groups of data can be obtained at one time, the time for producing a plurality of different battery test monomers in batch is greatly reduced, the efficiency of batch production and batch test is improved, and the influence of the cross-sectional area difference or the component proportion difference on the electrochemical performance of the batteries can be accurately reflected.
Further, as shown in fig. 1, the area defined by the mold cap is smaller than the area of the first current collector layer 20. Specifically, in the step S2, the control mask is disposed on a partial region of the surface of the second current collecting layer 34, and an edge region is reserved, so that, in the ion beam etching process, the battery material layer corresponding to the edge region is etched away, so that the edge region of the first current collecting layer 20 is exposed, and the test electrode is conveniently electrically connected to the first current collecting layer 20. It is understood that, since all the unit assemblies 30 share the first current collector layer 20, each unit assembly 30 and the first current collector layer 20 constitute a battery cell. In the process of the conductivity test, as shown in fig. 4, only one of the test electrodes needs to be electrically connected to the first current collector, so that the test electrode is electrically connected to all the battery cells, and then the other test electrode is electrically connected to the second current collecting layer 34 of any one of the battery cells, so that the battery cell can be tested. In this embodiment, as shown in fig. 2, the width d of the exposed edge region in the first current collector layer 200The range of (1) is 0.1 to 10 mm.
Further, each row of the mold caps further includes a plurality of mold plates having different areas, so that each row of the unit assemblies of the resulting battery test intermediate 1 includes a plurality of unit assemblies 30 having different cross-sectional areas. It will be appreciated that in this manner, conductivity data may be obtained simultaneously for a plurality of sets of cell assemblies 30 having the same cross-sectional area but different component ratios (different cross-sectional areas of the cell assemblies 30 of different sets).
In one embodiment, as shown in fig. 3, the cross-sectional area of each of the templates in each row of the templates is different, so that the cross-sectional area of each of the unit modules 30 in each row of the unit modules of the resulting battery test intermediate 1 is different. As shown in fig. 2, the first and third rows of cell assemblies each comprise four cell assemblies A, B, C, D of different cross-sectional areas, and the second and fourth rows of cell assemblies comprise three cell assemblies B, C, D of different cross-sectional areas. The cell units A, B, C, D are arranged in a periodic regular pattern according to the first direction and the second direction. In other embodiments, each row of cell assemblies may include other numbers of cell assemblies 30 having different cross-sectional areas.
Further, the cross-sectional area of the formwork in one row at the outer side is gradually reduced along the first direction, and the cross-sectional area of the formwork in one column at the outer side is gradually reduced along the second direction. Accordingly, the cross-sectional area of one row of the unit assemblies 30 positioned at the outer side is gradually decreased along the first direction, and the cross-sectional area of one column of the unit assemblies 30 positioned at the outer side is gradually decreased along the second direction. As shown in fig. 3, the four unit assemblies 30 in the first row of unit assemblies are arranged in the order of decreasing cross-sectional area, and similarly, the four unit assemblies 30 in the first row of unit assemblies are also arranged in the order of decreasing cross-sectional area, specifically, the area sizes of the four unit assemblies 30 are ordered as follows: a > B > C > D. It can be understood that, thus, the test data is convenient to arrange and the data rule is convenient to find.
The other row of templates positioned on the outer side is provided with first template vacant positions, the first template vacant positions are different from two ends of the row of template vacant positions, the other row of templates positioned on the outer side is provided with second template vacant positions, and the first template vacant positions are different from two ends of the row of template vacant positions. Therefore, the other row of unit assemblies positioned on the outer side is provided with first unit assembly vacancy positions, the first unit assembly vacancy positions are different from the two ends of the row of unit assemblies, the other row of unit assemblies positioned on the outer side is provided with second unit assembly vacancy positions, and the second unit assembly vacancy positions are different from the two ends of the row of unit assemblies. One unit cell is absent from one of the rows and one of the columns near the edge of the battery test intermediate 1, respectively. This is because for the unit components with the area size of micron level, the unit components to be tested need to be positioned by an optical microscope in the testing process, so that one unit component is absent from one row and one column on the edge, thereby being convenient for distinguishing different rows and columns, and avoiding the condition of missing testing or retesting.
Further, the center-to-center distances of the templates are the same, which corresponds to establishing a coordinate system on the surface of the first current collector layer 20 of the battery test intermediate 1, so that the first current collector layer 20 has a plurality of center points with the same lateral distance and/or longitudinal distance, and the plurality of unit assemblies 30 are respectively located on the center points. It can be understood that the unit components 30 are orderly arranged, and the unit components 30 are correspondingly located on the central points respectively, so that each battery monomer can be accurately positioned through the coordinate system, and therefore the battery monomer to be tested can be conveniently and quickly found, and the efficiency of batch testing is greatly improved.
Further, the template is a square template so that the cross section of the prepared unit assembly 30 is square. The cross section of the unit assembly 30 is designed to be square, on one hand, the area of the square is easy to calculate, so that the testing efficiency can be improved, and the testing data can be conveniently arranged; on the other hand, the square unit assembly 30 is easy to manufacture and convenient to manufacture in batch. Of course, in other embodiments, the template may have a circular, triangular, rectangular, etc. shape, such that the cross-sectional shape of the corresponding prepared unit assembly 3030 is circular, triangular, rectangular, etc.
In one embodiment, the area of the template is in the range of 0.05 × 0.05-500 × 500 μm2So that the cross-sectional area of the prepared unit assembly 30 is in the range of 0.05X 0.05 to 500X 500. mu.m2. In this embodiment, as shown in FIG. 3, the cross-sectional areas of four cell assemblies A, B, C, D are as follows: sA＝80×80μm2，SB＝40×40μm2，SC＝20×20μm2，SD＝10×10μm2. Specifically, the four kinds of unit modules 30 are arranged in an array, and the area of the unit module 30 in each row is different, and the area of the unit module 30 in each column is also different.
Further, as shown in fig. 2, the total thickness d of the unit assembly 301In the range of 10 to 500 μm, the thickness d of the first current collecting layer 202The range of (2) is 0.1 to 10 μm, and the thickness of the electrolyte layer 32 is 0.05 to 0.5 μm. On the premise of satisfying the action of the electrolyte layer 32, the thinner the electrolyte layer 32 is, the better the electrolyte layer 32 is, the shorter the path through which ions need to shuttle is, the higher the conductivity is, and the better the battery performance is.
Further, as shown in fig. 2, the step S3 includes the following steps:
controlling the etching depth of the ion beam etching device to be d3Wherein d is1≤d3＜d1+d2。
It can be understood that the etching depth d of the ion beam3Must be greater than or equal to d1So that the first current collecting layer 20 corresponding to the spacing region is exposed, and the single batteries are separated from each other, so as to obtain accurate test data of the single batteries; in addition, the etching depth d3May be greater than d1But must be less than d1+d2Since the surface of the first current collector layer 20 is partially etched without affecting the test, it is only necessary that the first current collector layer 20 does not have a fault.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (10)

1. A method for preparing a battery test intermediate, comprising:
s1, controlling a film deposition device to sequentially deposit a first current collecting layer, a first electrode layer, an electrolyte layer, a second electrode layer and a second current collecting layer on a substrate, wherein the thicknesses of the first current collecting layer, the electrolyte layer and the second current collecting layer are respectively uniform, the thickness of the first electrode layer is gradually reduced along a first direction, and the thickness of the second electrode layer is gradually increased along the first direction;
s2, controlling a mold cover to be arranged on the surface of the second flow collecting layer, wherein the mold cover comprises a plurality of mold plates arranged at intervals, the plurality of mold plates are in an array shape, each row of mold plates at least comprises two mold plates with different cross sectional areas, and the plurality of mold plates at least comprises two mold plates with the same cross sectional area but positioned in different rows;
and S3, controlling an ion beam etching device to sequentially etch the second current collecting layer, the second electrode layer, the electrolyte layer and the first electrode layer along the longitudinal direction of the template interval region so as to expose the first current collecting layer corresponding to the interval region.
2. The method of making a battery test intermediate of claim 1, wherein the mold cap defines an area that is less than an area of the first current collector layer.
3. The method of claim 2, wherein each row of mold caps further comprises a plurality of mold plates having different areas.
4. The method of preparing a battery test intermediate of claim 3, wherein the cross-sectional area of each template in each row of templates is different.
5. The method of preparing a battery test intermediate of claim 4, wherein the cross-sectional area of the one row of the die plates located on the outer side is gradually decreased in the first direction, and the cross-sectional area of the one row of the die plates located on the outer side is gradually decreased in the second direction.
6. The method of claim 4, wherein the other outer row of templates has first template vacancies at opposite ends of the row of templates, and the other outer row of templates has second template vacancies at opposite ends of the row of templates.
7. The method of preparing a battery test intermediate according to claim 6, wherein the templates have the same center-to-center distance such that the first current collecting layer has a plurality of center points having the same lateral distance and/or longitudinal distance, and a plurality of the templates are located on the center points in a one-to-one correspondence.
8. The method of preparing a battery test intermediate of claim 7, wherein the template is a square template.
9. The method for producing a battery test intermediate according to any one of claims 1 to 8, wherein the area of the template is in the range of 0.05 x 0.05 to 500 x 500 μm2The total thickness d of the first electrode layer, the electrolyte layer, the second electrode layer and the second current collector layer1In the range of 10 to 500 μm, the thickness d of the first current collecting layer2The range of (A) is 0.1 to 10 μm.
10. The method for preparing a battery test intermediate according to claim 9, wherein the step S3 includes the steps of:
controlling the etching depth of the ion beam etching device to be d3Wherein d is1≤d3＜d1+d2。
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