CN105036062B - A kind of manufacture method of MEMS lithium batteries - Google Patents
A kind of manufacture method of MEMS lithium batteries Download PDFInfo
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- CN105036062B CN105036062B CN201510381891.4A CN201510381891A CN105036062B CN 105036062 B CN105036062 B CN 105036062B CN 201510381891 A CN201510381891 A CN 201510381891A CN 105036062 B CN105036062 B CN 105036062B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of manufacture method of MEMS lithium batteries, including manufacturing the first shell respectively, a cavity is formed with thereon and anode is integrally formed in cavity, and second housing, it is made of material identical with the first shell, a cavity for connecing relative with the first shell is formed with thereon, and GND is integrally formed in cavity；Then the first shell and second housing are packaged together to form battery.Lithium battery preparation process is simple of the invention, can mass production, reduction production cost；The uniformity and reliability of battery preparation can be greatly improved；Electrode can be made to become three-dimensional structure by two-dimensional structure, the surface area of electrode greatly improved, reduce charge transfer resistance, improve transference number of ions so that the energy density and power density of battery are largely increased；Ion transfer distance can be shortened, shorten the charging interval of battery.
Description
Technical field
The present invention relates to battery manufacturing field, relate more specifically to a kind of manufacture method of MEMS lithium batteries.
Background technology
MEMS (Micro-Electro-Mechanical System, MEMS), also referred to as mems
System, micro-system or micromechanics, grow up on the basis of microelectric technique (semiconductor fabrication), merged photoetching,
The high-tech electronic mechanical device of the fabrication techniques such as burn into film, LIGA, silicon micromachined, non-silicon micromachined and precision optical machinery processing
Part.
MEMS collection microsensor, microactrator, micro mechanical structure, the micro- energy of micro battery, signal transacting and control circuit, height
Performance electronics integrated device, interface, communication etc., in one, are a revolutionary new technologies, are widely used in new and high technology product
Industry, its system dimension is at several millimeters or even smaller, and its internal structure is general in micron even nanometer scale.MEMS can in high volume give birth to
Produce, common product include mems accelerometer, MEMS microphone, micro motor, Micropump, micro-oscillator, MEMS optical pickocffs,
MEMS pressure sensor, MEMS gyroscope, MEMS humidity sensors, MEMS gas sensors etc., and their integrated products.
The development of MEMS technology, brings the change of many technologies and material, wherein for many independent MEMS devices
For, it is relatively difficult to its offer energy because size is especially small, as the branch of MEMS technology, current micro- energy part master
To include fuel cell.But fuel cell all also exists endless at aspects such as supplement fuel, generation gaseous product, service lifes
Such as the place of people's will.
The content of the invention
In view of this, one of main object of the present invention is to provide a kind of MEMS lithium batteries and its manufacture method, so that
Lithium battery can be manufactured using micro code-lock technique.
To achieve these goals, the invention provides a kind of preparation method of MEMS lithium batteries, comprise the following steps：
With the substrate that semi-conducting material is the first housing, the first extraction electrode, the first three-dimensional column array are formed on
And first pond body, wherein the described first three-dimensional column array is located in first pond body；
The first nano material is fixed as positive pole in the described first three-dimensional column array surface modification；
Using same method, the second housing comprising negative pole is prepared, second is formed on second housing and is drawn
Electrode, the second three-dimensional column array and the second pond body, and fix second nanometer in the described second three-dimensional column array surface modification
Material is used as negative pole, wherein the described second three-dimensional column array is located in second pond body, and second pond body with it is described
First pond body is aligned to form an accommodating cavity, and the described first three-dimensional column array and the second three-dimensional column array are wrong each other
Open；
First housing and the second housing are aligned and encapsulated, the housing of the MEMS lithium batteries is formed.
Wherein, it is described first housing and the second housing are aligned and encapsulated the step of after, also including from reserved
Note sample hole injection electrolyte, matter to be electrolysed full of note sample hole is sealed after pond body, the step of so as to obtain the MEMS lithium batteries.
Wherein, the step of the described second three-dimensional column array surface modification fixes the second nano material as negative pole it
Afterwards, before the step of first housing and the second housing being aligned and encapsulated, first housing and second shell are additionally included in
The step of colloidal electrolyte being filled in pond body on body.
Wherein, the first/second pond is formed on the first/second housing by deep etching or chemical etching technology
Body and the reserved column in the first/second pond body, described is formed by photoetching process on the reserved column
One/the second three-dimensional column array.
Wherein, the semi-conducting material is silicon substrate, carbon-based or GaAs material.
Wherein, it is described the step of first/second extraction electrode is formed in substrate in, including formed on the substrate
The step of Au/Cr metal levels are as mask, wherein the Au thickness degree is 100~500nm, Cr thickness degree is 10~50nm.
Wherein, the Au thickness degree is 200nm, and Cr thickness degree is 20nm.
Wherein, the preparation of first housing comprising positive pole and the second housing comprising negative pole in no particular order order.
Wherein, it is described the step of first housing and the second housing are encapsulated in, using bonded seal or BCB sealing technologies.
Wherein, before first extraction electrode and/or the second extraction electrode is formed, by deep etching or chemical attack
Technique forms first boss and/or second boss on the upper surface of substrate of first housing and/or the second housing, so that
Thereafter in etching process procedure, interdigital structure is formed using the first boss and second boss.
Understand that MEMS lithium batteries of the invention have advantages below and beneficial effect based on above-mentioned technical proposal：(1) this hair
Bright use silicon as substrate, using bulk silicon technological, processed in 2 silicon substrates respectively the positive pole of three-dimensional body structure, negative pole and
Battery pond body, its preparation technology is relatively simple, can mass production, reduction production cost；(2) in different silicon substrates,
Positive pole and negative pole are prepared respectively, can be avoided modifying fixed positive electrode and negative material is mutually mixed interference, cause electric pole short circuit,
The uniformity and reliability of battery preparation can be greatly improved；(3) miniature silicon column array is processed on a silicon substrate as electrode
The support of (positive pole and negative pole), can make electrode become three-dimensional structure by two-dimensional structure, and the surface area of electrode greatly improved, and improve
Transference number of ions so that the energy density and power density of battery are largely increased；(4) positive pole forms interdigital knot with negative pole
Structure, can shorten Ion transfer distance, shorten the charging interval of battery, and improve the power density of battery；(5) using Graphene or
CNT can greatly improve the body surface area of negative pole as negative material, reduce charge transfer resistance, improve Ion transfer
Number.
Brief description of the drawings
Figure 1A -1D are the housings of each step of the half of battery container of manufacture in MEMS lithium batteries manufacture method of the invention
Schematic cross-section；
Fig. 2 is the schematic perspective view of the battery container including positive pole after the completion of MEMS lithium batteries of the invention；
Fig. 3 is the schematic perspective view of the battery container including negative pole after the completion of MEMS lithium batteries of the invention；
Fig. 4 is the schematic perspective view that be packaged together for two battery containers by MEMS lithium batteries of the invention；
Fig. 5 is the schematic diagram of the porous loose structure on the three-dimensional column array of MEMS lithium batteries of the invention；
Fig. 6 is the top view of the three-dimensional column array (11- positive pole columns, 12- negative poles column) of MEMS lithium batteries of the invention
Figure；
Fig. 7 is the battery electrode of MEMS lithium batteries of the invention and the Longitudinal cross section schematic of divider wall (13).
Specific embodiment
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
Fundamental design idea of the invention is in two substrates, to process regular distribution respectively using MEMS technology
Three-dimensional column array and pond body, the column array in the two different bases are respectively used to the branch as three-dimensional positive pole and negative pole
Frame, then modifies the different nano material of fixation to form positive pole and negative pole, then both are aligned on array column respectively again
Sealing, is finally injected electrolyte by note sample hole, note sample hole is sealed after filling and forms battery.Further preferably
Ground, the column array being dislocatedly distributed can form interdigital structure, and the cross one another depth of the interdigital structure is by institute in technique preparation
The height of boss is formed to determine and adjust.
More specifically, MEMS lithium batteries of the invention include：
First shell, is made of semi-conducting material, a cavity is formed with thereon and institute is integrally formed in the cavity
State the positive pole of battery；The semi-conducting material for example can be using materials such as silicon substrate, glass, carbon-based, GaAs, wherein it is preferred that silicon substrate
Material.
Second housing, is made of the semi-conducting material of material identical with the first shell, and one is formed with thereon with described
One shell is integrally formed the negative pole of the battery with respect to the cavity for connecing and in the cavity；
Electrolyte, is contained in the cavity between the first shell and second housing.
In the present invention, positive pole can for example select llowing group of materials：
(1)LiCoO2、LiNiO2、LiMnO2、LiFePO4Deng；
(2) trielement composite material：Such as Li [Ni1/3Co1/3Mn1/3]O2、LiNi1-xMnxO2、LiNi1-xCoxO2、LiNi1-x- yCoxMnyO2Deng, wherein x, y be real number, 0 ＜ x ＜ 1,0 ＜ y ＜ 1.
(3) by LiCoO2、LiNiO2、LiMnO2、LiFePO4Deng by doping, cladding etc. modified method, formed it is new just
Pole material, such as LiFePO4/C、LiCoO2/C、LiNi1-xCoxO2Deng composite.Wherein, the element of doping for example include Mg,
Ni, Mn, Zr, Ti, V, Mo, Ga etc..The material of cladding for example includes C, CuO, Al2O3、ZrO2、Co3O4、Li4Ti5O12、LaF3、
AlF3Deng.
Wherein, it is preferred to use Li [Ni1/3Co1/3Mn1/3]O2As positive electrode.
In the present invention, negative pole can for example select llowing group of materials：
(1) graphite；
(2) it is starting material synthesizing new composite with Graphene, such as metal or metal oxide are compound with Graphene,
The material of introducing for example includes Si, Ge, Sb, Sn, Pt and Fe3O4、NiO、Co3O4、SnO2Deng.Metal oxide for example includes
SnO、SnO2、WO2、MoO2、VO2、TiO2、LixFe2O3、Li4Mn2O12、Li4Ti5O12Deng.
Wherein, it is preferred to use SnO2With the composite of Graphene as negative material.
Positive pole and negative pole can choose electrode material and shape, the shape of both positive and negative polarity according to the species of battery and application scenario
Shape for example can be membranaceous, cylindric, three-dimensional column array etc..Used as a preferred embodiment, both of which is using three-dimensional column
Array structure, and using column array as support, fix different nano materials in its surface modification respectively with formed positive pole and
Negative pole.
Negative pole and positive electrode surface are conductive using after nanometer-material-modified, therefore can be by the metal electrode on its surface
Or conductive coating is drawn out on the binding post of outside, so that the positive pole and negative pole that form battery outwards convey power supply.
In the present invention, positive pole and negative pole preferably use three-dimensional column array as carrier, each in three-dimensional column array
The shape of individual column can be cylinder, cone, round platform, bottle shape, positive six face prism, other polyhedron prisms, Y-shaped rib
Post etc., it is preferred to use cylinder and Y-shaped prism structure.The shape of cross section of each unit column can be circle, Y-shaped, square
Shape, square, star or other shapes, for shape of cross section, there is no particular limitation, as long as being conducive to increasing vertical damaged surface
Long-pending shape.The surface modification of each column has different nano materials in three-dimensional column array, such as when as lithium
During battery, the nano material that positive pole is modified can be single nano material or composite nano materials, such as can be Ni/NiO
Composite Nano foam, Ni/Sn alloy nano-wires, Au/Sn nanometer films etc., the nano material that negative pole is modified can be single nanometers
Material or composite nano materials, such as can be Graphene, CNT；When as Ni-MH battery, positive pole uses Ni
(OH)2, negative pole is using carbon black, CoSi, hydrogen bearing alloy etc..
Column array can be arranged in a regular fashion in the cavity between the first housing and the second housing, it is also possible to
No- L aw Order, used as a preferred embodiment, positive pole and negative pole form two matrixes for staggering respectively, more excellent as one
The embodiment of choosing, positive pole and negative pole column array can form interdigital structure, and so-called interdigital structure refers to each column of anode
Array and the column array dislocation cross arrangement of negative pole, such that it is able to significantly shorten Ion transfer distance, shorten the charging of battery
Time, and the power density of battery can be improved.
Used as a preferred embodiment, the three-dimensional column array in the present invention is using Y-shaped prism battle array as shown in Figure 6
Row, it also has the advantage that in addition to having the advantages that other column array structures：The netted column battle array of this " trap " formula
Row, surface area is bigger, and the nano material for modifying fixation is more, can greatly improve migration ion populations, improves power density；Nanometer
Modification of the material in the structure of this " trap " formula is fixed more stable, it is not easy to because vibration and caused by anode and negative electrode nanometer
Material cross-mixing.
In the present invention, electrolyte is for example with non-water system electrolyte, preferably non-water system organic bath, such as with lithium
Salt is dissolved in the non-aqueous organic bath that organic solvent is made for solute, and further preferred electrolyte is：LiPF6It is dissolved in ethene
Match somebody with somebody in the quaternary solvent that carbonic ester, dimethyl carbonate, diethyl carbonate and methyl ethyl carbonate are prepared by a certain percentage
The electrolyte being made.Additionally, electrolyte can also be colloid form, so as to the battery for preparing is colloid battery, keeping quality
Can be more remarkable with service life.
In a preferred embodiment, as shown in fig. 7, divider wall can also be set between both positive and negative polarity (equivalent to tradition
The barrier film of battery), its effect is to allow ion to pass through, and prevents both positive and negative polarity short circuit.The material of divider wall is consistent with the material of substrate, leads to
It is prepared by the method for crossing deep etching or chemical attack.
In a preferred embodiment, conductive coating can also be set on plus plate current-collecting body, and the coating is, for example, aluminium foil
Coating, to effectively improve the adhesive force of positive plate, reduces the usage amount of binding agent, and be obviously improved battery electrical property.
For the sealing between the first shell and second housing, i.e., the sealing of whole battery can use bonded seal,
Can be sealed using BCB, or other adhesive sealings.Do not limited for sealing technology, as long as ensure that whole electricity
The firmness and sealing in pond.
The battery size of above-mentioned preparation is very small, due to being prepared by MEMS technology, such that it is able to as surface mount elements
Mount in the electronic circuits such as wiring board, power supply is provided to corresponding component.
Because the battery size of above-mentioned preparation is very small, the voltage and capacitance of battery output are all less than normal, therefore can adopt
With the mode of array, grid composition battery pack is lined up, carried out common outwards power supply, held with improving supply voltage and battery
Amount.
The invention also discloses a kind of preparation method of chip battery, comprise the following steps：
With semi-conducting material as substrate, by sputtering or electron beam evaporation layer of Au/Cr, Au thickness is 100~500nm,
It is preferred that 200nm, Cr thickness are 10~50nm, preferably 20nm, photoetching is carried out as photoresist using dry film (negative glue), then chemistry
Corrosion, removes the Au/Cr of other parts, forms extraction electrode；
Deposit layer of metal on upper surface of substrate, such as Au, Al, preferably aluminium, one layer is then fixed on upper surface of substrate
Dry film carries out photoetching as photoresist, forms Minisize pillar array pattern, outside removing column array using chemical corrosion method
Metal, recycle deep etching process etch the pond body to form Minisize pillar array and the housing of battery first；
In the fixed nano material of Minisize pillar array surface modification as positive pole；
Using same method, the second housing pond body and its extraction electrode of negative pole are prepared, and in its Minisize pillar battle array
Row surface modification nano material is used as negative pole.
Treat that modification secures nano material respectively on two pond bodies and column array, after foring positive pole and negative pole, first
One layer of corrosion-resistant glue of insulation of coating on the sealing surface of housing and the second housing, such as adhesive of BCB adhesive or other models, so
The first housing and the second housing are aligned and contacted afterwards, after the encapsulation that battery is completed after adhesive solidification, the shell of battery is formed
Body.
Electrolyte is injected from reserved note sample hole, matter to be electrolysed is full of after pond body, you can sealing note sample hole, so as to obtain
MEMS batteries.
Wherein, before extraction electrode is formed, it is also possible to by deep etching or chemical etching technology surface on this substrate
Upper formation boss, so that in etching process procedure behind, interdigital structure is formed using the boss.
In order to improve the body surface area of supporting construction to greatest extent, pass through in array leg surface the invention discloses one kind
The method of electrochemical corrosion, as shown in figure 5, one layer of porosity and looseness shape structure is formed on three-dimensional column array, i.e., in column battle array
List face forms one layer of porous silicon layer, and pore size, porosity and porous silicon layer thickness can be by the bars of electrochemical corrosion
Part (factor such as the ratio of each composition, etching time, extraneous loading current such as in corrosive liquid) is adjusted.In leg surface growth
After porous silicon layer, its surface area can improve the 1-3 order of magnitude, can greatly improve the nano-electrode material for modifying fixation, increase
Plus transference number of ions, improve the energy density and power density of battery.
More specifically, as a preferred embodiment, one is entered the invention discloses a kind of electrode surface in silicon-based substrate
Step carries out modifying the method to form loose and porous structure, comprises the following steps：
(1) corrosive liquid, HF: H are prepared2O2: ethanol: H2O=11: 1: 4: 12, the effect of wherein ethanol is to eliminate silicon face
Bubble, makes the porosity of porous layer and aperture basically identical；HF and H2O2It is mainly used in the semi-conducting materials such as corrosion silicon substrate；
(2) electrode is made, with silicon chip as substrate, layer of metal, such as Au, Pt, preferably Pt is sputtered on its surface；
(3) it is Pt electrodes is vertical face-to-face with the silicon-based substrate (substrate where positive pole and negative pole) of porous silicon layer to be prepared
It is placed in corrosive liquid, and is connected with external power source；
(4) switch on power, pass to 20~150mA/cm2Electric current, preferably 80mA/cm2, corrode 20~60 minutes, corrosion speed
Rate is corroded 20 minutes in 0.8 micron/min, you can form porous layer in pond body and leg surface.
The thickness of porous silicon can be selected between 1~50 micron, and in an embodiment of the present invention, the thickness of porous silicon is excellent
Elect 15 microns as.
Below in conjunction with the accompanying drawings and by the present invention is further elaborated the explanation of the specific embodiment of silicon-based substrate.
As shown in Figure 1A, it is the silicon base 1 chosen.
As shown in Figure 1B, in order to form interdigital structure, deep etching or chemical attack work are passed through in the upper surface of the silicon base 1
Skill forms boss；
By sputtering or electron beam evaporation layer of Au/Cr, Au thickness is 200nm, and Cr thickness is 20nm, (negative using dry film
Glue) photoetching is carried out as photoresist, the Au/Cr of other parts is removed in then chemical attack, forms extraction electricity as shown in Figure 1 C
Pole；
Layer of metal aluminium is deposited in boss face, one layer of dry film is then fixed in boss face carries out light as photoresist
Carve, form column array pattern, the Al outside column array is removed using chemical corrosion method, recycle deep etching process etching
Form Minisize pillar array as shown in figure iD and battery pond body (dotted line is represented in figure)；
In the fixed nano material Ni/NiO composite Nanos foam of Minisize pillar array surface modification as positive pole, such as Fig. 2
It is shown；
Using same method, the pond body and its extraction electrode of negative pole are prepared, and repair in its Minisize pillar array surface
Decorations Graphene as negative pole, as shown in Figure 3.
Treat to modify fixed nano material in pond body and column array in two silicon substrates respectively, after forming positive pole and negative pole,
One layer of BCB glue is coated on two silicon substrate sealing surfaces, then the silicon substrate where positive pole is aligned and contacted with the silicon substrate where negative pole, such as
Shown in Fig. 4, the encapsulation of battery is completed after BCB gellings are solid, form the housing of battery.
From note sample hole injection electrolyte, matter to be electrolysed is full of after pond body, you can sealing note sample hole, so as to obtain MEMS lithiums electricity
Pond.
Understood by theoretical calculation, the cell power density >=5mWcm of the theoretical valuation of MEMS lithium batteries of the invention-2μ
m-1, operating temperature can be between -50 DEG C~70 DEG C.By the practical probation of small lot, MEMS lithium batteries of the invention also take
Obtained satisfied technique effect.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only specific embodiment of the invention, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in protection of the invention
Within the scope of.
Claims (8)
1. a kind of preparation method of MEMS lithium batteries, comprises the following steps：
With the substrate that semi-conducting material is the first housing, the first extraction electrode, the first three-dimensional are formed by MEMS technology thereon
Column array and the first pond body, wherein the described first three-dimensional column array is located in first pond body；Wherein, it is described in substrate
In the step of the first extraction electrode of upper formation, including the step of form Au/Cr metal levels on the substrate as mask, wherein
The Au thickness degree is 100~500nm, and Cr thickness degree is 10~50nm；
The first nano material is fixed as positive pole in the described first three-dimensional column array surface modification；
Using same method, the second housing comprising negative pole is prepared by MEMS technology, formed on second housing
Second extraction electrode, the second three-dimensional column array and the second pond body, and fixed in the described second three-dimensional column array surface modification
Second nano material is used as negative pole, wherein the described second three-dimensional column array is located in second pond body, and second pond
Body is aligned to form an accommodating cavity with first pond body, the first three-dimensional column array and the second three-dimensional column battle array
Row offset one from another；Wherein, it is described the step of the second extraction electrode is formed in substrate in, including form Au/ on the substrate
The step of Cr metal levels are as mask, wherein the Au thickness degree is 100~500nm, Cr thickness degree is 10~50nm；
First housing and the second housing are aligned and encapsulated, the housing of the MEMS lithium batteries is formed；
Wherein, before first extraction electrode and/or the second extraction electrode is formed, by deep etching or chemical etching technology
First boss and/or second boss are formed on the upper surface of substrate of first housing and/or the second housing, so that behind
Etching process procedure in, form interdigital structure using the first boss and second boss.
2. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein described by first housing and second shell
After the step of body is aligned and encapsulates, also including injecting electrolyte from reserved note sample hole, matter to be electrolysed is full of sealing after pond body
Note sample hole, the step of so as to obtain the MEMS lithium batteries.
3. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein being repaiied in the described second three-dimensional column array surface
After the step of decorations fix the second nano material as negative pole, the step of first housing and the second housing are aligned and are encapsulated
Before, it is additionally included in the step of filling colloidal electrolyte in the pond body on first housing and the second housing.
4. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein by deep etching or chemical etching technology in institute
State and the first/second pond body and the reserved column in the first/second pond body are formed on first/second housing, lead to
Cross photoetching process and the first/second three-dimensional column array is formed on the reserved column.
5. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein the semi-conducting material is silicon substrate, carbon-based or arsenic
Change gallium material.
6. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein the Au thickness degree is 200nm, Cr thickness degree
It is 20nm.
7. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein first housing comprising positive pole and comprising
The preparation of the second housing of negative pole in no particular order order.
8. the preparation method of MEMS lithium batteries as claimed in claim 1, wherein described encapsulate the first housing and the second housing
The step of in, using bonded seal or BCB sealing technologies.
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| CN1901255A (en) * | 2000-10-20 | 2007-01-24 | 麻省理工学院 | Reticulated and controlled porosity battery structures |
| CN101689679A (en) * | 2007-04-02 | 2010-03-31 | 皇家飞利浦电子股份有限公司 | Electrochemical energy source and dispose the electronic installation of this electrochemical energy source |
| CN102007617A (en) * | 2008-02-12 | 2011-04-06 | 麻省理工学院 | Small-scale batteries and electrodes for use thereof |
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