CN110265682A - The preparation method of battery testing intermediate - Google Patents
The preparation method of battery testing intermediate Download PDFInfo
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- CN110265682A CN110265682A CN201910500660.9A CN201910500660A CN110265682A CN 110265682 A CN110265682 A CN 110265682A CN 201910500660 A CN201910500660 A CN 201910500660A CN 110265682 A CN110265682 A CN 110265682A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/36—Arrangements for testing, measuring or monitoring the electrical condition of accumulators or electric batteries, e.g. capacity or state of charge [SoC]
- G01R31/385—Arrangements for measuring battery or accumulator variables
- G01R31/3865—Arrangements for measuring battery or accumulator variables related to manufacture, e.g. testing after manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention provides a kind of preparation method of battery testing intermediate, and first by deposition materials layer on substrate, wherein the thickness of first electrode layer is gradually reduced along first direction, and the thickness of electrolyte layer is uniform, and the thickness of the second electrode lay is gradually increased along first direction；Then mould cover is provide on the surface of the second current collector layer, mould cover includes multiple spaced templates, multiple template is in array-like, and the different template of two cross-sectional areas, template identical including at least two cross-sectional areas but being located at different lines in multiple template are included at least in each column template；It is sequentially etched layers of material layer along form spacing region finally by control ion beam etching device, so that corresponding first current collector layer of interval region is exposed.The battery testing intermediate obtained by the preparation method, convenient but battery that cross-sectional area different identical to multiple component ratios or the battery that multiple cross-sectional areas are identical but component ratio is different carry out the electrochemical property test of quick mass.
Description
Technical field
The present invention relates to battery technology field, in particular to a kind of preparation method of battery testing intermediate.
Background technique
During battery production and manufacture, it is often necessary to different tests is carried out to the different electric properties of battery,
Such as the test of resistance and conductivity.And the resistance and conductivity of battery and its cross-sectional area and component ratio have relationship.Therefore,
The research of resistance and conductivity for the battery of different cross-sectional areas or different component ratio is very important.
Currently, since battery includes the multilayered structures such as anode collection layer, anode, electrolyte, cathode and negative pole currect collecting layer, it is special
It is not minicell and the hull cell for micron level or even Nano grade, it is difficult to while preparing multiple overall thickness one
It causes, but only cross-sectional area is different or only the different battery of component ratio carries out the research of chemical property, and tests
Journey is time-consuming, cumbersome.In addition, due to the difference of material and thickness between existing battery cell, it is difficult to accurately reflect transversal
To the influence of the chemical property of battery brought by area discrepancy or component ratio difference.
Summary of the invention
The main object of the present invention is to propose a kind of preparation method of battery testing intermediate, it is intended to solve above-mentioned technology and ask
Topic.
To achieve the above object, the present invention proposes that a kind of preparation method of battery testing intermediate, the preparation method include
Following steps:
S1. control film deposition apparatus is sequentially depositing the first current collector layer, first electrode layer, electrolyte layer, the on substrate
Two electrode layers and the second current collector layer, wherein the thickness of first current collector layer, the electrolyte layer and second current collector layer point
Not uniform, the thickness of the first electrode layer is gradually reduced along first direction, and the thickness of the second electrode lay is along first direction
It is gradually increased；
S2. control mould cover covers at the surface of second current collector layer, and the mould cover includes multiple interval setting templates, more
A template is in array-like, includes at least the different template of two cross-sectional areas in each column template, in multiple templates
Template that is identical including at least two cross-sectional areas but being located at different lines；
S3. control ion beam etching device along the longitudinal direction in the form spacing region be sequentially etched second current collector layer,
The second electrode lay, the electrolyte layer and the first electrode layer, so that corresponding first current collector layer of the interval region
It is exposed.
In one embodiment, region area defined by the mould cover is less than the area of first current collector layer.
In one embodiment, each row's mould cover further includes the different template of multiple areas.
In one embodiment, the cross-sectional area of each template is different in every row's template.
In one embodiment, the cross-sectional area positioned at wherein row's template in outside gradually successively decreases along first direction, is located at
The cross-sectional area of a wherein column template in outside gradually successively decreases in a second direction.
In one embodiment, another row's template positioned at outside has the first template vacancy position, the first template vacancy
Position is different from the both ends of row's template vacancy position, and another column template positioned at outside is with the second template vacancy position, first mould
Both ends of the plate vacancy position different from the column template vacancy position.
In one embodiment, the center spacing of the template is identical.
In one embodiment, the template is square template.
In one embodiment, the areal extent of the template is 0.05 × 0.05~500 × 500 μm2, the first electrode
Layer, electrolyte layer, the second electrode lay and the second current collector layer overall thickness d1Range be 10~500 μm, first current collector layer
Thickness d2Range be 0.1~10 μm.
In one embodiment, the step S3 the following steps are included:
The etching depth for controlling ion beam etching device is d3, wherein d1≤d3< d1+d2。
The preparation method of battery testing intermediate proposed by the present invention, first by being sequentially depositing battery material on substrate
Layer, wherein the thickness of first electrode layer is gradually reduced along first direction, and the thickness of the second electrode lay is gradually increased along first direction；
Then it is provide with mould cover on the surface of the second current collector layer, mould cover includes multiple spaced templates, and multiple template is in array-like, often
The different template of two cross-sectional areas is included at least in one column template, it is identical to include at least two cross-sectional areas in multiple template
But it is located at the template of different lines；Each layer is sequentially etched along the longitudinal direction in form spacing region finally by control ion beam etching device
Material layer, so that corresponding first current collector layer of interval region is exposed.By the preparation method can one-pass molding obtain have it is more
The battery testing intermediate of a battery cell, the battery that convenience is identical to multiple component ratios but cross-sectional area is different, Huo Zheduo
The battery that a cross-sectional area is identical but component ratio is different carries out the electrochemical property test of quick mass, thus disposably
Multi-group data can be obtained, the time for producing multiple and different battery testing monomers in batches is greatly reduced, it is raw to improve batch
The efficiency with batch testing is produced, and can accurately reflect cross-sectional area difference or component ratio difference to the electricity of battery
The influence of chemical property.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is by the process schematic of one embodiment of preparation method of battery testing intermediate provided by the present invention；
Fig. 2 is the structural schematic diagram for one embodiment of battery testing intermediate that the present invention is prepared；
Fig. 3 is the top view of battery testing intermediate shown in Fig. 2；
Fig. 4 is the schematic diagram that battery testing intermediate shown in Fig. 2 is connect with test electrode.
Drawing reference numeral explanation:
| Label | Title | Label | Title |
| 1 | Battery testing intermediate | 10 | Substrate |
| 20 | First current collector layer | 30 | Unit block |
| 31 | First electrode layer | 32 | Electrolyte layer |
| 33 | The second electrode lay | 34 | Second current collector layer |
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that if relating to directionality instruction (such as up, down, left, right, before and after ...) in the embodiment of the present invention,
Then directionality instruction be only used for explain under a certain particular pose (as shown in the picture) between each component relative positional relationship,
Motion conditions etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
In addition, being somebody's turn to do " first ", " second " etc. if relating to the description of " first ", " second " etc. in the embodiment of the present invention
Description be used for description purposes only, be not understood to indicate or imply its relative importance or implicitly indicate indicated skill
The quantity of art feature." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one spy
Sign.
It in addition, the technical solution between each embodiment can be combined with each other, but must be with ordinary skill
Based on personnel can be realized, this technical side will be understood that when the combination of technical solution appearance is conflicting or cannot achieve
The combination of case is not present, also not the present invention claims protection scope within.
The embodiment of the present invention proposes a kind of preparation method of battery testing intermediate, refering to Figure 1, the battery testing
The preparation method of intermediate the following steps are included:
S1. control film deposition apparatus is sequentially depositing the first current collector layer 20, first electrode layer 31, electrolyte on substrate 10
Layer 32, the second electrode lay 33 and the second current collector layer 34, wherein first current collector layer 20, the electrolyte layer 32 and described second
The thickness difference of current collector layer 34 is uniform, and the thickness of the first electrode layer 31 is gradually reduced along first direction, the second electrode
The thickness of layer 33 is gradually increased along first direction；
S2. control mould cover covers at the surface of second current collector layer 34, and the mould cover includes multiple interval setting templates,
Multiple templates are in array-like, include at least the different template of two cross-sectional areas in each column template, in multiple template extremely
Template that is identical including two cross-sectional areas less but being located at different lines；
S3. control ion beam etching device is sequentially etched second current collector layer along the longitudinal direction in the form spacing region
34, the second electrode lay 33, the electrolyte layer 32 and the first electrode layer 31, so that the interval region corresponding
One current collector layer 20 is exposed.
In the step S1, the difference of the battery material property deposited as needed, can be heavy using different films
Product method, including sputtering sedimentation, pulsed laser deposition, vapor deposition, chemical vapor deposition and molecular beam epitaxy deposition.This implementation
In example, substrate 10 uses silicon substrate.
In the step S3, since the face cap in the second current collector layer 34 is equipped with mould cover, the multiple template in mould cover is in
Interval setting, therefore, ion beam is only capable of etching away the interval region between template, is blocked in each layer cell material layers by template
Region then remain.It is worth noting that, the etching depth of ion beam only reaches to the surface of the first current collector layer 20, so that
Corresponding first current collector layer 20 in septal area domain is exposed, and forms multiple mutually separated battery cells, and multiple battery cells share the
One current collector layer 20.
It please refers to shown in Fig. 2 and Fig. 3, includes substrate 10, first by the battery testing intermediate 1 that above-mentioned preparation method obtains
Current collector layer 20 and multiple unit blocks 30 being arranged in array.First current collector layer 20 is set to the surface of the substrate 10, more
A interval of the unit block 30 is set to the upper surface of first current collector layer 20.Each unit block 30 includes first
Electrode layer 31, electrolyte layer 32, the second electrode lay 33 and the second current collector layer 34.The overall thickness of the unit block 30 is uniform, institute
The thickness for stating the first current collector layer 20, electrolyte layer 32 and the second current collector layer 34 is also respectively uniform.
Every row's unit block 30 is arranged along first direction, and each column unit block 30 is along the second direction vertical with first direction
Arrangement.The thickness of each first electrode layer 31 is gradually decreased along first direction, the thickness of each the second electrode lay 33
Degree is gradually increased along first direction.The upper surface of each first electrode layer 31 is located on same inclined-plane, and each described
The lower surface of two electrode layers 33 also is located at same inclined-plane.It is different that two cross-sectional areas are included at least in each column unit component 30
It is identical and be located at the unit block of different lines to include at least two cross-sectional areas in multiple unit blocks 30 for unit block 30
30。
It should be noted that the overall thickness of unit block 30 is uniform, refer to the overall thickness of all unit blocks 30 substantially
It is identical, premised on not influencing battery performance, allow the thickness deviation of any two unit block 30 within ± 0.5%.Together
Sample, the first all current collector layers 20, electrolyte layer 32, the thickness of the second current collector layer 34 are also respectively roughly the same.
Specifically, due to the first electrode layer 31 and the second electrode lay 33 that are located at different units component 30 in same row
Thickness difference is identical, therefore is located at the first electrode layer 31 of different units component 30 and the ratio of the second electrode lay 33 in same row
It is identical；And not due to the thickness of the first electrode layer 31 of the unit block 30 in different lines and the second electrode lay 33 difference
Together, the first electrode layer 31 of the unit block 30 therefore in different lines and the ratio of the second electrode lay 33 are also different.In this way,
Each column unit block 30 includes the unit block 30 that multiple component ratios are identical but cross-sectional area is different, multiple unit blocks
It include the unit block 30 that multiple cross-sectional areas are identical but component ratio is different in 30.
During battery production and manufacture, it is often necessary to different tests is carried out to the different electric properties of battery,
Such as the test of resistance and conductivity.And the resistance and conductivity of battery and its cross-sectional area and component ratio have relationship.Therefore,
The research of resistance and conductivity for the battery of different cross-sectional areas or different component ratio is very important.Currently,
Since battery includes the multilayered structures such as anode collection layer, anode, electrolyte, cathode and negative pole currect collecting layer, especially for micron
The minicell and hull cell of rank or even Nano grade, it is difficult to while it is consistent to prepare multiple overall thickness, but only cross section
Product is different or only the different battery of component ratio carries out the research of chemical property, and prepares similar battery sample,
And corresponding test process is time-consuming, cumbersome.In addition, due to the difference of material and thickness between existing battery cell, it is difficult
Accurately to reflect the influence brought by cross-sectional area difference or component ratio difference to the chemical property of battery.
And the present invention proposes a kind of preparation method of battery testing intermediate, first by being sequentially depositing battery on substrate
Material layer, wherein the thickness of first electrode layer is gradually reduced along first direction, the thickness of the second electrode lay along first direction gradually
Increase；Then it is provide with mould cover on the surface of the second current collector layer, mould cover includes multiple spaced templates, and multiple template is in array
Shape includes at least the different template of two cross-sectional areas in each column template, includes at least two cross-sectional areas in multiple template
Template that is identical but being located at different lines；It is successively carved finally by control ion beam etching device along the longitudinal direction in form spacing region
Layers of material layer is lost, so that corresponding first current collector layer of interval region is exposed.By the preparation method can one-pass molding obtain
Battery testing intermediate with multiple battery cells, the battery that convenience is identical to multiple component ratios but cross-sectional area is different,
Or the battery that multiple cross-sectional areas are identical but component ratio is different carries out the electrochemical property test of quick mass, thus
Multi-group data can be disposably obtained, the time for producing multiple and different battery testing monomers in batches is greatly reduced, improves
The efficiency of batch production and batch testing, and can accurately reflect cross-sectional area difference or component ratio difference to electricity
The influence of the chemical property in pond.
Further, as shown in Figure 1, region area defined by the mould cover less than the first current collector layer 20 area.Tool
Body, in the step S2, control mould cover covers at the partial region on the surface of the second current collector layer 34, reserves marginal zone
Domain, in this way, the corresponding cell material layers of fringe region are etched away in ion beam etching of Fresnel, so that the first current collector layer
20 fringe region is exposed, and test electrode is facilitated to be electrically connected with the foundation of the first current collector layer 20.It is appreciated that due to all units
Component 30 shares the first current collector layer 20, and each unit block 30 and the first current collector layer 20 constitute a battery cell.In conductivity
In test process, as shown in Figure 4, it is only necessary to will wherein a test electrode be electrically connected with the first collector, and allow for the test electrode
It just all establishes and is electrically connected with all battery cells, then, by the second afflux of another test electrode and any one battery cell
Layer 34 is electrically connected, and can be tested the battery cell.In the present embodiment, as shown in Fig. 2, naked in the first current collector layer 20
The fringe region width d of dew0Range be 0.1~10mm.
Further, each row's mould cover further includes the different template of multiple areas, so that in obtained battery testing
Every row's unit block of mesosome 1 includes the different unit block 30 of multiple cross-sectional areas.It is appreciated that in this way, can obtain simultaneously
The conductivity data of the unit block 30 identical but different component ratio to multiple groups cross-sectional area be (unit block 30 of difference group
Cross-sectional area is different).
In one embodiment, as shown in figure 3, the cross-sectional area of each template is different in every row's template, so that acquired
Battery testing intermediate 1 every row's unit block in each unit block 30 cross-sectional area it is different.As shown in Fig. 2, the
One row and third row's unit block include unit block A, B, C, D of four kinds of varying cross-sections product, and second row and the 4th row are single
First component then includes unit block B, C, D of three kinds of varying cross-sections product.Unit block A, B, C, D according to first direction, and
Second direction is arranged in periodic regular.In other embodiments, every row's unit block may include the cross section of other quantity
The different unit block 30 of product.
Further, the cross-sectional area positioned at wherein row's template in outside gradually successively decreases along first direction, is located at outside
The cross-sectional area of a wherein column template gradually successively decrease in a second direction.Correspondingly, so that being located at wherein row's unit in outside
The cross-sectional area of component 30 gradually successively decreases along first direction, positioned at outside a wherein column unit component 30 cross-sectional area along
Gradually successively decrease in two directions.As shown in figure 3, in first row unit block four unit blocks 30 gradually successively decrease by cross-sectional area it is suitable
Sequence arrangement, likewise, four unit blocks 30 are also arranged by the sequence that cross-sectional area gradually successively decreases in first row unit block, tool
Body, the size sequence of four unit blocks 30 is as follows: A > B > C > D.It is appreciated that in this way, facilitating arrangement test number
According to and data easy to find rule.
Another row's template positioned at outside has the first template vacancy position, and the first template vacancy position is different from row's template
The both ends of vacancy position, another column template positioned at outside have the second template vacancy position, and the first template vacancy position is different from this
The both ends of column template vacancy position.In this way, making another row's unit block positioned at outside that there is first unit component vacancy position, institute
First unit component vacancy position is stated different from the both ends of row's unit block, another column unit component positioned at outside has the second list
First component vacancy position, both ends of the second unit component vacancy position different from the column unit component.Among battery testing
A wherein row at 1 edge of body and column difference one unit block of vacancy.This is because other in the micron-scale for area size
Unit block needs to go to position unit block to be tested by optical microscopy in test process, makes a row and one at edge
One unit block of column vacancy, can be in order to distinguish different row and columns, to avoid there is a situation where test leakage or resurvey.
Further, the center spacing of the template is identical, in this way, being equivalent in obtained battery testing intermediate 1
20 surface of the first current collector layer on establish coordinate system so that the first current collector layer 20 have between multiple horizontal spacings and/or longitudinal direction
Away from identical central point, and multiple unit blocks 30 respectively correspond on the central point.It is appreciated that by unit block 30
Orderly arrangement is carried out, unit block 30 respectively corresponds on central point, accordingly, it is possible to by coordinate system to each electricity
Pond monomer is accurately positioned, and so as to quickly and easily search out battery cell to be tested, greatly improves mass
The efficiency of test.
Further, the template is square template, so that the cross section for the unit block 30 being prepared is pros
Shape.The cross section design of unit block 30 is square, the area on the one hand allowing for square is easy to calculate, and thus may be used
To improve testing efficiency, facilitate arrangement test data；Unit block 30 when another aspect in view of square is easy preparation, side
Just prepared by mass.Certainly, in other embodiments, the shape of the template can be round, triangle and rectangle etc., so that
The cross-sectional shape of the corresponding unit block 3030 being prepared is round, triangle and rectangle etc..
In one embodiment, the areal extent of the template is 0.05 × 0.05~500 × 500 μm2, so as to be prepared
Unit block 30 cross sectional area range be 0.05 × 0.05~500 × 500 μm2.In the present embodiment, as shown in figure 3, four kinds
The cross-sectional area of unit block A, B, C, D are as follows: SA=80 × 80 μm2, SB=40 × 40 μm2, SC=20 × 20 μm2, SD=10
×10μm2.Specifically, four kinds of unit blocks 30 are in array-like, and the area of the unit block 30 in each row is different, Mei Yilie
In unit block 30 area it is also different.
Further, as shown in Fig. 2, the overall thickness d of unit block 301Range be 10~500 μm, the first current collector layer 20
Thickness d2Range be 0.1~10 μm, the thickness range of electrolyte layer 32 is 0.05-0.5 μm.Wherein, meeting electrolyte
Under the premise of 32 effect of layer, the thickness of electrolyte layer 32 gets over Bao Yuehao, and electrolyte layer 32 is thinner, and the path that ion needs to shuttle is just
Shorter, conductivity is higher, and battery performance is better.
Further, as shown in Fig. 2, the step S3 the following steps are included:
The etching depth for controlling ion beam etching device is d3, wherein d1≤d3< d1+d2。
It is appreciated that the etching depth d of ion beam3Have to be larger than or be equal to d1, so that corresponding first afflux of interval region
Layer 20 is exposed, and makes to separate between battery cell, to obtain the test data of accurate single battery monomer；In addition,
Etching depth d3D can be greater than1But it is necessarily less than d1+d2, because the surface of the first current collector layer 20 is partially etched can't shadow
Ring test, it is only necessary to which the first current collector layer 20 does not plan a successor.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of preparation method of battery testing intermediate characterized by comprising
S1. control film deposition apparatus is sequentially depositing the first current collector layer, first electrode layer, electrolyte layer, the second electricity on substrate
Pole layer and the second current collector layer, wherein the thickness difference of first current collector layer, the electrolyte layer and second current collector layer is equal
One, the thickness of the first electrode layer is gradually reduced along first direction, the thickness of the second electrode lay along first direction gradually
Increase；
S2. control mould cover covers at the surface of second current collector layer, and the mould cover includes multiple interval setting templates, Duo Gesuo
Template is stated in array-like, includes at least the different template of two cross-sectional areas in each column template, in multiple templates at least
Template that is identical including two cross-sectional areas but being located at different lines；
S3. control ion beam etching device is sequentially etched second current collector layer, described along the longitudinal direction in the form spacing region
The second electrode lay, the electrolyte layer and the first electrode layer, so that corresponding first current collector layer of the interval region is exposed.
2. the preparation method of battery testing intermediate as described in claim 1, which is characterized in that area defined by the mould cover
Domain area is less than the area of first current collector layer.
3. the preparation method of battery testing intermediate as claimed in claim 2, which is characterized in that each row's mould cover further includes more
A different template of area.
4. the preparation method of battery testing intermediate as claimed in claim 3, which is characterized in that each template in every row's template
Cross-sectional area it is different.
5. the preparation method of battery testing intermediate as claimed in claim 4, which is characterized in that the wherein row positioned at outside
The cross-sectional area of template gradually successively decreases along first direction, positioned at outside a wherein column template cross-sectional area in a second direction by
Gradually successively decrease.
6. the preparation method of battery testing intermediate as claimed in claim 4, which is characterized in that another row's mould positioned at outside
Plate have the first template vacancy position, the first template vacancy position different from row's template vacancy position both ends, positioned at the another of outside
One column template has the second template vacancy position, both ends of the first template vacancy position different from the column template vacancy position.
7. the preparation method of battery testing intermediate as claimed in claim 6, which is characterized in that the center spacing of the template
It is identical.
8. the preparation method of battery testing intermediate as claimed in claim 7, which is characterized in that the template is square mould
Plate.
9. the preparation method of battery testing intermediate as claimed in any of claims 1 to 8 in one of claims, which is characterized in that described
The areal extent of template is 0.05 × 0.05~500 × 500 μm2, the first electrode layer, electrolyte layer, the second electrode lay and
The overall thickness d of second current collector layer1Range be 10~500 μm, the thickness d of first current collector layer2Range be 0.1~10 μm.
10. the preparation method of battery testing intermediate as claimed in claim 9, which is characterized in that the step S3 include with
Lower step:
The etching depth for controlling ion beam etching device is d3, wherein d1≤d3< d1+d2。
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