CN108604502B - 用于形成CdTe薄膜太阳能电池的包括金属掺杂步骤的方法和用于执行所述金属掺杂步骤的*** - Google Patents
用于形成CdTe薄膜太阳能电池的包括金属掺杂步骤的方法和用于执行所述金属掺杂步骤的*** Download PDFInfo
- Publication number
- CN108604502B CN108604502B CN201680074171.6A CN201680074171A CN108604502B CN 108604502 B CN108604502 B CN 108604502B CN 201680074171 A CN201680074171 A CN 201680074171A CN 108604502 B CN108604502 B CN 108604502B
- Authority
- CN
- China
- Prior art keywords
- solar cell
- semi
- cdte solar
- finished
- finished cdte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 76
- 239000002184 metal Substances 0.000 title claims abstract description 76
- 229910004613 CdTe Inorganic materials 0.000 title claims abstract 48
- 238000000034 method Methods 0.000 title claims description 40
- 239000010409 thin film Substances 0.000 title description 3
- 239000007864 aqueous solution Substances 0.000 claims abstract description 100
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 17
- 150000002500 ions Chemical class 0.000 claims abstract description 9
- 238000004519 manufacturing process Methods 0.000 claims abstract description 5
- 238000005286 illumination Methods 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 13
- 230000005684 electric field Effects 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 4
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 167
- 239000010949 copper Substances 0.000 description 19
- 229910052802 copper Inorganic materials 0.000 description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 11
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 11
- 238000009826 distribution Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- HBVFXTAPOLSOPB-UHFFFAOYSA-N nickel vanadium Chemical compound [V].[Ni] HBVFXTAPOLSOPB-UHFFFAOYSA-N 0.000 description 2
- 238000007761 roller coating Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910017009 AsCl3 Inorganic materials 0.000 description 1
- 229910021592 Copper(II) chloride Inorganic materials 0.000 description 1
- 229910018030 Cu2Te Inorganic materials 0.000 description 1
- 229910002531 CuTe Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical compound Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- -1 copper salts Chemical class 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 229910000366 copper(II) sulfate Inorganic materials 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 150000004772 tellurides Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2016/112433 WO2018119685A1 (en) | 2016-12-27 | 2016-12-27 | Method for forming a cdte thin film solar cell including a metal doping step and system for performing said metal doping step |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108604502A CN108604502A (zh) | 2018-09-28 |
CN108604502B true CN108604502B (zh) | 2021-08-03 |
Family
ID=62706649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201680074171.6A Active CN108604502B (zh) | 2016-12-27 | 2016-12-27 | 用于形成CdTe薄膜太阳能电池的包括金属掺杂步骤的方法和用于执行所述金属掺杂步骤的*** |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN108604502B (de) |
DE (1) | DE112016006558T5 (de) |
WO (1) | WO2018119685A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112490315A (zh) * | 2019-09-12 | 2021-03-12 | 中国建材国际工程集团有限公司 | 碲化镉太阳能电池及其制备方法 |
CN117080080A (zh) * | 2022-05-10 | 2023-11-17 | 中国建材国际工程集团有限公司 | 用于制造半成品CdTe基薄膜太阳能电池装置的方法 |
CN117080082A (zh) * | 2022-05-10 | 2023-11-17 | 中国建材国际工程集团有限公司 | 制造半成品CdTe基薄膜太阳能电池装置的方法 |
WO2023236106A1 (en) * | 2022-06-08 | 2023-12-14 | China Triumph International Engineering Co., Ltd. | Method for manufacturing cdte based thin film solar cell with graded refractive index profile within the cdte-based absorber layer and cdte based thin film solar cell with graded refractive index profile |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6174727B1 (en) * | 1998-11-03 | 2001-01-16 | Komatsu Electronic Metals, Co. | Method of detecting microscopic defects existing on a silicon wafer |
CN101752444A (zh) * | 2008-12-17 | 2010-06-23 | 中国科学院半导体研究所 | p-i-n型InGaN量子点太阳能电池结构及其制作方法 |
CN102365753A (zh) * | 2008-10-30 | 2012-02-29 | 纳米太阳能公司 | 混合型透明导电电极 |
CN102544375A (zh) * | 2011-12-30 | 2012-07-04 | 中国科学院宁波材料技术与工程研究所 | 一种宽光谱响应的太阳能电池柔性光阳极及其制备方法 |
CN102723384A (zh) * | 2011-03-29 | 2012-10-10 | 比亚迪股份有限公司 | 一种CdTe太阳能电池及其制作方法 |
CN102760580A (zh) * | 2012-07-09 | 2012-10-31 | 湖北大学 | 一种Co掺杂CdSe量子点敏化TiO2纳米棒光电极及其制备方法 |
CN103811579A (zh) * | 2014-02-13 | 2014-05-21 | 吉林大学 | 一种柔性CdTe薄膜太阳能电池及其制备方法 |
CN104854707A (zh) * | 2013-05-29 | 2015-08-19 | 株式会社钟化 | 太阳能电池及其制造方法和太阳能电池模块及其制造方法 |
CN104854708A (zh) * | 2013-05-17 | 2015-08-19 | 株式会社钟化 | 太阳能电池及其制造方法和太阳能电池模块 |
CN105655131A (zh) * | 2016-01-08 | 2016-06-08 | 吉林大学 | 一种太阳能电池Cu2S/FTO对电极及其电化学沉积制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8309387B2 (en) * | 2007-04-13 | 2012-11-13 | David Forehand | Improving back-contact performance of group VI containing solar cells by utilizing a nanoscale interfacial layer |
TWI482292B (zh) * | 2009-11-24 | 2015-04-21 | Ind Tech Res Inst | 量子點染料敏化太陽電池 |
-
2016
- 2016-12-27 DE DE112016006558.2T patent/DE112016006558T5/de active Pending
- 2016-12-27 CN CN201680074171.6A patent/CN108604502B/zh active Active
- 2016-12-27 WO PCT/CN2016/112433 patent/WO2018119685A1/en active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6174727B1 (en) * | 1998-11-03 | 2001-01-16 | Komatsu Electronic Metals, Co. | Method of detecting microscopic defects existing on a silicon wafer |
CN102365753A (zh) * | 2008-10-30 | 2012-02-29 | 纳米太阳能公司 | 混合型透明导电电极 |
CN101752444A (zh) * | 2008-12-17 | 2010-06-23 | 中国科学院半导体研究所 | p-i-n型InGaN量子点太阳能电池结构及其制作方法 |
CN102723384A (zh) * | 2011-03-29 | 2012-10-10 | 比亚迪股份有限公司 | 一种CdTe太阳能电池及其制作方法 |
CN102544375A (zh) * | 2011-12-30 | 2012-07-04 | 中国科学院宁波材料技术与工程研究所 | 一种宽光谱响应的太阳能电池柔性光阳极及其制备方法 |
CN102760580A (zh) * | 2012-07-09 | 2012-10-31 | 湖北大学 | 一种Co掺杂CdSe量子点敏化TiO2纳米棒光电极及其制备方法 |
CN104854708A (zh) * | 2013-05-17 | 2015-08-19 | 株式会社钟化 | 太阳能电池及其制造方法和太阳能电池模块 |
CN104854707A (zh) * | 2013-05-29 | 2015-08-19 | 株式会社钟化 | 太阳能电池及其制造方法和太阳能电池模块及其制造方法 |
CN103811579A (zh) * | 2014-02-13 | 2014-05-21 | 吉林大学 | 一种柔性CdTe薄膜太阳能电池及其制备方法 |
CN105655131A (zh) * | 2016-01-08 | 2016-06-08 | 吉林大学 | 一种太阳能电池Cu2S/FTO对电极及其电化学沉积制备方法 |
Non-Patent Citations (6)
Title |
---|
An Investigation on Copper Doping to CdTe Absorber Layers in CdTe Thin Film Solar Cells;Aris, Kamarul Azrul等;《International Conference on Advances in Electrical, Electronic and Systems Engineering》;20161116;第405-408页 * |
An optimized structure for CdTe solar cells;Chen Yunfei等;《43rd IEEE Photovoltaic Specialists Conference 》;20160610;第423-427页 * |
Annealing effects on physical properties of doped CdTe thin films for photovoltaic applications;Tariq, GH等;《MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING》;20150228;第30卷;第665-671页 * |
CdSe@CdTe核壳II型量子点掺杂的薄膜太阳能电池;管秋梅;《电子元件与材料》;20141005(第2014/10期);第27-31页 * |
Using Diffusion-Reaction Simulation to Study the Formation and Self-Compensation Mechanism of Cu Doping in CdTe;Guo, D.等;《43rd IEEE Photovoltaic Specialists Conference》;20160610;第1964-1967页 * |
高转化效率CdTe薄膜太阳能电池研究与制备;杨瑞龙;《中国博士学位论文全文数据库 工程科技Ⅱ辑》;20150915(第2015/09期);C042-38 * |
Also Published As
Publication number | Publication date |
---|---|
WO2018119685A1 (en) | 2018-07-05 |
DE112016006558T5 (de) | 2018-11-29 |
CN108604502A (zh) | 2018-09-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108604502B (zh) | 用于形成CdTe薄膜太阳能电池的包括金属掺杂步骤的方法和用于执行所述金属掺杂步骤的*** | |
US4251327A (en) | Electroplating method | |
US9496429B1 (en) | System and method for tin plating metal electrodes | |
CN103681956B (zh) | 用于处理包括半导体材料的半导体层的方法 | |
USRE29812E (en) | Photovoltaic cell | |
TWI587532B (zh) | 製造光伏裝置的方法、處理吸收層的方法及系統 | |
US10319871B2 (en) | Photovoltaic device based on Ag2ZnSn(S,Se)4 absorber | |
US20140065762A1 (en) | METHOD OF CONTROLLING THE AMOUNT OF Cu DOPING WHEN FORMING A BACK CONTACT OF A PHOTOVOLTAIC CELL | |
WO2013049168A1 (en) | Methods for making photovoltaic devices | |
US11121282B2 (en) | Method for producing a CdTe thin-film solar cell | |
CN103681931B (zh) | 光伏装置 | |
US20130019948A1 (en) | Stabilized back contact for photovoltaic devices and methods of their manufacture | |
US2865793A (en) | Method of making electrical connection to semi-conductive selenide or telluride | |
TW201108449A (en) | Method and device for the treatment of a substrate | |
CN104851938B (zh) | 制造具有厚度降低的p-掺杂CdTe层的太阳能电池的方法 | |
US10141463B2 (en) | Photovoltaic devices and methods for making the same | |
JP2008184651A (ja) | メッキシステムおよびメッキ方法 | |
EP2804220A2 (de) | Verfahren zur Herstellung einer Dünnschichtsolarzelle, Vorrichtung zur Herstellung einer Dünnschichtsolarzelle und durch das Verfahren hergestellte Dünnschichtsolarzelle mit Pufferschicht | |
US9269850B2 (en) | Method and apparatus for forming copper(Cu) or antimony(Sb) doped zinc telluride and cadmium zinc telluride layers in a photovoltaic device | |
US20140060608A1 (en) | Photovoltaic device and method of making | |
WO2018119675A1 (en) | Method for visualizing defects in a semi-finished cdte thin film solar cell | |
JP2000188410A (ja) | 光起電力素子の製造方法 | |
JPH11233802A (ja) | 光起電力素子の製造方法 | |
US20140374266A1 (en) | Method and apparatus for forming a cadmium zinc telluride layer in a photovoltaic device | |
JP2012248711A (ja) | 化合物半導体層の製造方法および光電変換素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |