CN108428782A - Polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver - Google Patents
Polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver Download PDFInfo
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- CN108428782A CN108428782A CN201810208260.6A CN201810208260A CN108428782A CN 108428782 A CN108428782 A CN 108428782A CN 201810208260 A CN201810208260 A CN 201810208260A CN 108428782 A CN108428782 A CN 108428782A
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- thermocouple
- thermoelectric
- thermoelectric pile
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
- H02N11/002—Generators
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
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Abstract
Polysilicon nanowire thermocouple Mini-thermoelectric generator in the radio frequency transceiver of the present invention, is mainly made of substrate, horizontal positioned thermoelectric pile and heat-dissipating metal sheet；Wherein, the middle section of silicon substrate carves hole, support construction and heat transfer structure as top silica membrane by deep reaction ion etching technology；One end of thermoelectric pile is located on silicon substrate, and the other end is located at the center of membrane structure；Thermoelectric pile is connected in series by many thermocouples, with multiple output electrodes, and each thermocouple is made of N-type polycrystalline silicon nano wire thermocouple arm and p-type polysilicon nano wire thermocouple arm, include multiple row polysilicon nanowire on thermocouple arm, is used as and is connected using nanometer wire-braced structures between different lines；In the top of thermoelectric pile, the cavity structure produced is discharged by sacrificial layer, silicon nitride film is separated between the metallic plate and thermoelectric pile above cavity.
Description
Technical field
The present invention proposes the polysilicon nanowire thermocouple Mini-thermoelectric generator in a kind of radio frequency transceiver, belongs to
The technical field of microelectromechanical systems (MEMS).
Background technology
Thermal energy can be converted directly into electric energy by Mini-thermoelectric generator, can be various low-power consumption electronic device or
Circuit is powered, such as the wireless network sensing node of environmental monitoring.In order to promoted thermoelectric generator output power and
The performance parameters such as transfer efficiency, the quality factor for improving thermoelectric material are very crucial.Since there is quantum confinements and phonon to dissipate
Effect is penetrated, the thermal conductivity of polysilicon nanowire is much smaller than traditional body material, to improve quality factor, can be used for making high
The thermoelectric generator of performance applies power amplifier in radio frequency transceiver etc. to there is the occasion of sufficient heat source.
Invention content
Technical problem:The object of the present invention is to provide the miniature heat of polysilicon nanowire thermocouple in a kind of radio frequency transceiver
The thermoelectric pile of electric-type generator, thermoelectric generator uses polysilicon nanometer cable architecture, and by etching thermoelectric pile lower substrate
The modes such as cavity are formed with releasing sacrificial layer, the thermal insulation at the cold and hot both ends of thermoelectric pile is realized, improves the heat to electricity conversion of device
Energy.
Technical solution：In order to solve the above technical problems, the present invention proposes the polysilicon nanometer in a kind of radio frequency transceiver
Line thermocouple Mini-thermoelectric generator.Its structure includes mainly that substrate, horizontal positioned thermoelectric pile and heat-dissipating metal sheet are constituted；
Wherein, the middle section of silicon substrate carves hole, the support knot as top silica membrane by deep reaction ion etching technology
Structure and heat transfer structure；One end of thermoelectric pile is located on silicon substrate, and the other end is located at the center of membrane structure, effectively realizes thermoelectricity
Thermal insulation between the cold and hot node of heap；Thermoelectric pile is to be connected in series by many thermocouples, and each thermocouple is by N-type polycrystalline silicon
Nano wire thermocouple arm and p-type polysilicon nano wire thermocouple arm are constituted, and include multiple row polysilicon nanowire on thermocouple arm, no
Between same column the Stability and dependability of structure is improved as connection using nanometer wire-braced structures；Between two semiconductor arms
Metal is interconnected as thermoelectric pile using golden (Au), because heat is all transmitted to cold end by the hot junction of thermoelectric pile, thermocouple exists
It is in parallel on thermal conduction study, it is electrically in series；In order to facilitate the failure for testing and avoiding partial deviations to lead to entire device, thermoelectric (al) type hair
Motor has made multiple output electrodes；In the top of thermoelectric pile, the cavity structure produced is discharged by sacrificial layer, is further increased
Being thermally isolated between strong cold and hot both ends；The cold end of thermoelectric generator has effectively achieved heat dissipation by one piece of metallic plate, increases
The big thermal coupling of thermoelectric pile and ambient enviroment, metallic sheet material are aluminium (Al), be separated between thermoelectric pile silicon nitride film with
Realize insulation；Since heat flow path is perpendicular to chip surface, it is convenient for the encapsulation of device in the application.
The operation principle of Mini-thermoelectric generator is as follows：When the hot and cold side in generator applies certain temperature difference, heat meeting
It injects from hot junction face, after thermoelectric pile, is finally discharged from cold end face, and form certain Temperature Distribution on device；Due to
There are certain thermal resistances for thermoelectric pile, will produce the corresponding temperature difference between the cold and hot node of thermoelectric pile, according to Seebeck effect, heat
The both ends of pile can export the thermoelectrical potential directly proportional to the temperature difference, and power output can be achieved after connection load.
The Mini-thermoelectric generator is used in radio frequency transceiver, the power amplification for being affixed on radio frequency transceiver on one side of device
The top of the high power consumption module such as device or microprocessor, as hot junction, another side is connected with radiator, as cold end, realizes and dissipates
Heat；When work, after heat that radio frequency transceiver generates is by thermoelectric generator, then exchanged in ambient enviroment by radiator；
The temperature difference at cold and hot both ends can be converted to electric energy by device, after the energy of collection is by DC-DC conversion modules, be stored in chargeable
Can be the various wireless sensing nodes power supply for being arranged in radio frequency transceiver periphery in battery.
Advantageous effect：The present invention has the following advantages relative to existing generator：
1. using ripe CMOS technology and MEMS technology manufacture, advantage in the Mini-thermoelectric generator technique of the present invention
Have it is small, at low cost, can batch micro operations, and can with microelectronic circuit realize single-chip integration；
2. Mini-thermoelectric generator uses hybrid architecture, i.e. heat flow path is perpendicular to chip surface, and current path
It is parallel to chip surface, simplifies the encapsulation of device perpendicular to the heat flow path of chip surface, and the heat in chip plane
Pile can be used the making of IC compatible technologies, have higher integration density and larger output voltage density；
3. thermoelectric generator is solid state energy converter, without movable member, reliability is high, and service life is long, is not necessarily to
It safeguards, when work not will produce noise；
4. the complicated electricity that all electrodes of Mini-thermoelectric generator in same plane, avoid similar via connects
It connects.
5. thermocouple uses polysilicon nanowire, because of quantum confinement and phonon scattering effect, the thermal conductivity of polysilicon nanowire
Rate is far below conventional bulk, improves the conversion efficiency of thermoelectric of thermoelectric generator；
Description of the drawings
Fig. 1 is that the polysilicon of the polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver of the present invention is received
Rice noodles thermocouple arm configuration schematic diagram；
Fig. 2 is the plan structure of the polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver of the present invention
Schematic diagram；
Fig. 3 is the overlooking structure diagram after the completion of prepared by thermoelectric generator electrode of the present invention；
Fig. 4 is the microgenerator A-A ' of vertical-type nanometer thermoelectric even summation superlattices photoconductive structure of the present invention to sectional view.
Figure includes：Polysilicon nanowire 1, nanometer wire-braced structures 2, silicon chip 3, silica membrane 4, N-type polycrystalline silicon
Nano wire thermocouple arm 5, p-type polysilicon nano wire thermocouple arm 6, thermoelectric pile interconnection metal 7, silicon nitride film 8, metallic plate 9,
Output electrode 10.
Specific implementation mode
The following further describes the specific embodiments of the present invention with reference to the drawings.
Referring to Fig. 1-4, the present invention proposes the polysilicon nanowire thermocouple Mini-thermoelectric in a kind of radio frequency transceiver
Generator, the Mini-thermoelectric generator are mainly made of substrate 3, horizontal positioned thermoelectric pile and heat-dissipating metal sheet 9；Wherein,
The middle section of silicon substrate 3 by deep reaction ion etching technology carve hole, as top silica membrane 4 support construction and
Heat transfer structure；One end of thermoelectric pile is located on silicon substrate 3, and the other end is located at the center of membrane structure, effectively realizes thermoelectric pile
Thermal insulation between cold and hot node；Thermoelectric pile is to be connected in series by many thermocouples, and each thermocouple is received by N-type polycrystalline silicon
Rice noodles thermocouple arm 5 and p-type polysilicon nano wire thermocouple arm 6 are constituted, and include multiple row polysilicon nanowire 1 on thermocouple arm,
The width of nano wire is 1-100nm, and length is 1-10 μm, and the spacing between same row polysilicon nanowire 1 is 1-100nm, no
The Stability and dependability of structure is improved, because of quantum confinement and phonon as connection using nanometer wire-braced structures 2 between same column
The thermal conductivity of scattering effect, polysilicon nanowire 1 is far below conventional bulk, improves the heat to electricity conversion effect of thermoelectric generator
Rate；Between two semiconductor arms using Au as thermoelectric pile interconnection metal 7 because heat be all transmitted to by the hot junction of thermoelectric pile it is cold
End, so thermocouple is in parallel on thermal conduction study, it is electrically in series；Lead to entire device in order to facilitate testing and avoiding partial deviations
Failure, thermoelectric generator made multiple output electrodes 10；In the top of thermoelectric pile, produced by sacrificial layer release
Cavity structure further enhances being thermally isolated between cold and hot both ends；The cold end of thermoelectric generator has by one piece of metallic plate 9
Heat dissipation is realized to effect, increases the thermal coupling of thermoelectric pile and ambient enviroment, 9 material of metallic plate is Al, the interval with thermoelectric pile
There is silicon nitride film 8 to realize insulation；Since heat flow path is perpendicular to chip surface, it is convenient for the encapsulation of device in the application.
The operation principle of Mini-thermoelectric generator is as follows：When the hot and cold side in generator applies certain temperature difference, heat meeting
It injects from hot junction face, after thermoelectric pile, is finally discharged from cold end face, and form certain Temperature Distribution on device；Due to
There are certain thermal resistances for thermoelectric pile, will produce the corresponding temperature difference between the cold and hot node of thermoelectric pile, according to Seebeck effect, heat
The both ends of pile can export the thermoelectrical potential directly proportional to the temperature difference, and power output can be achieved after connection load.
The Mini-thermoelectric generator is used in radio frequency transceiver, the power amplification for being affixed on radio frequency transceiver on one side of device
The top of the high power consumption module such as device or microprocessor, as hot junction, another side is connected with radiator, as cold end, realizes and dissipates
Heat；When work, after heat that radio frequency transceiver generates is by thermoelectric generator, then exchanged in ambient enviroment by radiator；
The temperature difference at cold and hot both ends can be converted to electric energy by device, after the energy of collection is by DC-DC conversion modules, be stored in chargeable
Can be the various wireless sensing nodes power supply for being arranged in radio frequency transceiver periphery in battery.
The preparation method of polysilicon nanowire thermocouple Mini-thermoelectric generator in the radio frequency transceiver of the present invention is such as
Under：
1) it selects silicon chip as substrate 3, and impregnates in a solution of hydrofluoric acid, remove the impurity such as metallic particles；
2) using plasma enhancing chemical vapor deposition (PECVD) technique deposit layer of silicon dioxide film 4, thickness are
0.2 μm, as electrical insulator layer；
3) low-pressure chemical vapor phase deposition (LPCDV) technique is used to grow a layer thickness for 1 μm of polysilicon membrane；
4) electron beam lithography or extreme ultraviolet lithography is used to form polysilicon nanowire 1；
5) doping of N-type phosphonium ion is carried out to 1 corresponding region of polysilicon nanowire respectively and p-type boron ion is adulterated, respectively shape
At N-type polycrystalline silicon nano wire thermocouple arm 5 and p-type polysilicon nano wire thermocouple arm 6；
6) layer gold that evaporation a layer thickness is 0.2 μm, stripping method molding form thermoelectric pile interconnection metal 7 and output electrode
10；
7) pecvd process is used to grow one layer of silicon nitride film 8, thickness is 0.1 μm, as dielectric insulation layer and protection
Layer；
8) polyimides that spin coating a layer thickness is 3 μm, and photoetching is molded, as sacrificial layer；
9) metallic aluminium that plating a layer thickness is 1 μm, photoetching molding, the heat-dissipating metal sheet 9 as device；
10) deep reaction ion etching is carried out, the silicon below specific region is removed, forms membrane structure；
11) after being cleaned by ultrasonic, silicon chip is put into acetone 10 minutes, then is immediately placed in ethyl alcohol 10 minutes, and release polyimides is sacrificial
Domestic animal layer, finally washes by water and dries.
Distinguish whether be the structure standard it is as follows：
The present invention radio frequency transceiver in polysilicon nanowire thermocouple Mini-thermoelectric generator, mainly by substrate 3,
Horizontal positioned thermoelectric pile and heat-dissipating metal sheet 9 are constituted；Wherein, the middle section of silicon substrate 3 passes through deep reaction ion etching skill
Art carves hole, support construction and heat transfer structure as top silica membrane 4；One end of thermoelectric pile is located on silicon substrate 3, separately
One end is located at the center of membrane structure；Thermoelectric pile is to be connected in series by many thermocouples, and each thermocouple is by N-type polycrystalline silicon
Nano wire thermocouple arm 5 and p-type polysilicon nano wire thermocouple arm 6 are constituted, and include multiple row polysilicon nanowire on thermocouple arm
1, improve the Stability and dependability of structure as connection using nanometer wire-braced structures 2 between different lines, because of quantum confinement and
The thermal conductivity of phon scattering effect, polysilicon nanowire is far below conventional bulk, and the thermoelectricity for improving thermoelectric generator turns
Change efficiency；Metal 7 is interconnected as thermoelectric pile using Au between two semiconductor arms, while having made multiple output electrodes 10；
The top of thermoelectric pile discharges the cavity structure produced by sacrificial layer, and the top of cavity is metallic plate 9, between thermoelectric pile
It is separated with silicon nitride film 8.
Meet conditions above structure be considered as the present invention radio frequency transceiver in polysilicon nanowire thermocouple it is miniature
Thermoelectric generator.
Claims (2)
1. the polysilicon nanowire thermocouple Mini-thermoelectric generator in a kind of radio frequency transceiver, it is characterized in that：The miniature heat
Electric-type generator is mainly made of substrate (3), horizontal positioned thermoelectric pile and heat-dissipating metal sheet (9)；Wherein, in substrate (3)
Region is entreated to carve hole, support construction and heat transfer structure as top silica membrane (4) by deep reaction ion etching technology；
One end of thermoelectric pile is located on silicon substrate (3), and the other end is located at the center of membrane structure, effectively realizes the cold and hot node of thermoelectric pile
Between thermal insulation；Thermoelectric pile is to be connected in series by many thermocouples, and each thermocouple is by N-type polycrystalline silicon nano wire thermoelectricity
Even arm (5) and p-type polysilicon nano wire thermocouple arm (6) are constituted；Lead to entire device in order to facilitate testing and avoiding partial deviations
The failure of part, thermoelectric generator have made multiple output electrodes (10)；In the top of thermoelectric pile, is discharged and made by sacrificial layer
The cavity structure gone out further enhances being thermally isolated between cold and hot both ends；The cold end of thermoelectric generator passes through one block of metal
Plate (9) has effectively achieved heat dissipation, and metallic plate (9) is separated with silicon nitride film (8) to realize insulation between thermoelectric pile；Thermocouple
Include multiple row polysilicon nanowire (1) on arm, the width of polysilicon nanowire (1) is 1-100nm, and length is 1-10 μm, same
Spacing between row polysilicon nanowire (1) is 1-100nm, is used as and is connected using nanometer wire-braced structures (2) between different lines,
Improve the Stability and dependability of structure；Because of quantum confinement and phonon scattering effect, the thermal conductivity of polysilicon nanowire (1) is far low
In conventional bulk, the conversion efficiency of thermoelectric of thermoelectric generator is improved.
2. the polysilicon nanometer thin film thermocouple miniature energy in a kind of radio frequency transceiver according to claim 1 is collected
Device, it is characterized in that：The material of substrate (3) is silicon, and it is Au that thermoelectric pile, which interconnects metal (7) material, and metallic plate (9) material is Al.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208260.6A CN108428782A (en) | 2018-03-14 | 2018-03-14 | Polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810208260.6A CN108428782A (en) | 2018-03-14 | 2018-03-14 | Polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver |
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| CN108428782A true CN108428782A (en) | 2018-08-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810208260.6A Withdrawn CN108428782A (en) | 2018-03-14 | 2018-03-14 | Polysilicon nanowire thermocouple Mini-thermoelectric generator in radio frequency transceiver |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109411594A (en) * | 2018-10-17 | 2019-03-01 | 大连海事大学 | A kind of miniature self energizing device and preparation method thereof based on MTEG |
| CN109450287A (en) * | 2018-10-17 | 2019-03-08 | 大连海事大学 | The miniature self energizing device that a kind of thermal energy based on MTEG and film Patting type TENG and wind energy are provided multiple forms of energy to complement each other |
| CN110282597A (en) * | 2019-06-19 | 2019-09-27 | 南京邮电大学 | A kind of stack thermoelectric pile of hybrid connected structure |
| CN110993780A (en) * | 2019-12-03 | 2020-04-10 | 中国科学院微电子研究所 | Thermoelectric device and preparation method thereof |
| CN111146326A (en) * | 2019-12-03 | 2020-05-12 | 中国科学院微电子研究所 | Thermoelectric device and preparation method thereof |
| CN111595479A (en) * | 2020-06-05 | 2020-08-28 | 南昌欧菲显示科技有限公司 | Film type thermocouple, temperature sensor and intelligent wearable device |
| CN112414609A (en) * | 2021-01-25 | 2021-02-26 | 南京高华科技股份有限公司 | Pressure sensor based on thermopile principle |
-
2018
- 2018-03-14 CN CN201810208260.6A patent/CN108428782A/en not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109411594A (en) * | 2018-10-17 | 2019-03-01 | 大连海事大学 | A kind of miniature self energizing device and preparation method thereof based on MTEG |
| CN109450287A (en) * | 2018-10-17 | 2019-03-08 | 大连海事大学 | The miniature self energizing device that a kind of thermal energy based on MTEG and film Patting type TENG and wind energy are provided multiple forms of energy to complement each other |
| CN110282597A (en) * | 2019-06-19 | 2019-09-27 | 南京邮电大学 | A kind of stack thermoelectric pile of hybrid connected structure |
| CN110282597B (en) * | 2019-06-19 | 2022-05-24 | 南京邮电大学 | Stack type thermopile with series-parallel structure |
| CN110993780A (en) * | 2019-12-03 | 2020-04-10 | 中国科学院微电子研究所 | Thermoelectric device and preparation method thereof |
| CN111146326A (en) * | 2019-12-03 | 2020-05-12 | 中国科学院微电子研究所 | Thermoelectric device and preparation method thereof |
| CN110993780B (en) * | 2019-12-03 | 2023-09-22 | 中国科学院微电子研究所 | Thermoelectric device and method for manufacturing the same |
| CN111146326B (en) * | 2019-12-03 | 2024-04-05 | 中国科学院微电子研究所 | Thermoelectric device and preparation method thereof |
| CN111595479A (en) * | 2020-06-05 | 2020-08-28 | 南昌欧菲显示科技有限公司 | Film type thermocouple, temperature sensor and intelligent wearable device |
| CN112414609A (en) * | 2021-01-25 | 2021-02-26 | 南京高华科技股份有限公司 | Pressure sensor based on thermopile principle |
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Application publication date: 20180821 |