CN108103481B - 衬底自动挟式石英舟 - Google Patents

衬底自动挟式石英舟 Download PDF

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CN108103481B
CN108103481B CN201810073146.7A CN201810073146A CN108103481B CN 108103481 B CN108103481 B CN 108103481B CN 201810073146 A CN201810073146 A CN 201810073146A CN 108103481 B CN108103481 B CN 108103481B
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quartz boat
substrate
pressing
boat body
swing arm
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CN108103481A (zh
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谢鹏飞
蒋健伟
孙正乾
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Wuxi Flexsemi Semiconductor Technology Co ltd
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Wuxi Flexsemi Semiconductor Technology Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract

本发明涉及一种衬底自动挟式石英舟，包括石英舟本体，其特征是：在所述石英舟本体的两侧转动设置压紧摆臂，压紧摆臂的上端设置压紧部，压紧部位于石英舟本体的上部，压紧摆臂的下端延伸至石英舟本体的下部。本发明能够防止石英舟在运动过程中受到振动或者是气流吹动的影响导致衬底倾斜或者掉落的情况，保证沉积工艺的稳定及可靠。

Description

衬底自动挟式石英舟
技术领域
本发明涉及一种石英舟，尤其是一种衬底自动挟式石英舟。
背景技术
石英舟是扩散沉积工艺的必备工具，石英舟耐高温不变形，不污染器件而且能重复使用，尤其是近几年来由于太阳能产业发展迅速，人们使用石英舟的式样也越来越多。
目前普通的石英舟没有专门设计衬底固定结构，材料沉积所需样品源放置在石英舟的前端，沉积用的衬底倒扣于石英舟上方，以维持衬底和样品源之间的距离，从而保证沉积的效果。在材料沉积工艺过程中，石英舟及扣在石英舟上方的衬底需送入反应腔室内部时，由于气流和振动的影响，衬底很有可能会滑落或者倾斜，因而影响了整个材料沉积的过程，甚至无法沉积材料。
发明内容
本发明的目的是克服现有技术中存在的不足，提供一种衬底自动挟式石英舟，能够防止石英舟在运动过程中受到振动或者是气流吹动的影响导致衬底倾斜或者掉落的情况，保证沉积工艺的稳定及可靠。
按照本发明提供的技术方案，所述衬底自动挟式石英舟，包括石英舟本体，其特征是：在所述石英舟本体的两侧转动设置压紧摆臂，压紧摆臂的上端设置压紧部，压紧部位于石英舟本体的上部，压紧摆臂的下端延伸至石英舟本体的下部。
进一步地，所述压紧摆臂转动安装在石英舟本体下侧部的安装座上。
进一步地，所述压紧部的表面呈圆弧形。
本发明具有以下优点：
（1）本发明采用压紧摆臂石英舟本体一体式结构，操作简单不需要额外夹持工具；
（2）本发明提高了衬底装夹过程的可靠性保证了材料沉积工艺质量；
（3）沉积衬底在石英舟上的位置可以随意调整，确保了沉积工艺的灵活性。
附图说明
图1为本发明所述衬底自动挟式石英舟将衬底压紧状态的示意图。
图2为本发明所述衬底自动挟式石英舟将衬底压紧状态的侧视图。
图3为本发明所述衬底自动挟式石英舟将衬底松开状态的示意图。
图4为本发明所述衬底自动挟式石英舟将衬底松开状态的侧视图。
附图标记说明：1-石英舟本体、2-压紧摆臂、3-沉积衬底、4-安装座、5-压紧部。
具体实施方式
下面结合具体附图对本发明作进一步说明。
如图1-图4所示，本发明所述衬底自动挟式石英舟包括石英舟本体1，在石英舟本体1的两侧转动设置压紧摆臂2，压紧摆臂2转动安装在石英舟本体1下侧部的安装座4上，压紧摆臂2的上端设置压紧部5，压紧部5位于石英舟本体1的上部，压紧摆臂2的下端延伸至石英舟本体1的下部。
为了避免压紧部5刮伤沉积衬底3的表面，所述压紧部5的表面呈圆弧形。
本发明所述衬底自动挟式石英舟的工作过程：
1、衬底松开：
石英舟本体1放在桌面上，此时石英舯本体1的下部受到压力，使压紧摆臂2发生转动，自行打开，在压紧部5和石英舟本体1上表面之间留出一个间隙放置沉积衬底3，在沉积衬底3的放置和取样时都不会刮伤沉积衬底3表面沉积的材料并且一人单手操作即可，保证了结构的可操作性和简易性。
2、衬底夹紧：
当石英舟本体1拿起来的时候，由于重力的原因压紧摆臂2会由于重力的原因发生转动，使压紧部5紧紧的压在沉积衬底3表面，保证了沉积衬底3不会由于其他外界因素掉落或者倾斜。
本发明在现有的石英舟的基础上进行了改造，使石英舟在针对材料沉积工艺时候有相当大的优势，简化了操作流程，给沉积工艺带来了便利，结构简单。改进后的结构可以避免因振动及气流等因素造成的不好影响，保证沉积工艺的稳定及可靠。此外，衬底放置操作简单，省去人工定位带来的不稳定因素，节省时间，避免因操作失误带来的样品污染、衬底污染及样品源位置被搅动等严重影响材料沉积效果的风险。

Claims (3)

1.一种衬底自动挟式石英舟，包括石英舟本体（1），其特征是：在所述石英舟本体（1）的两侧转动设置压紧摆臂（2），压紧摆臂（2）的上端设置压紧部（5），压紧部（5）位于石英舟本体（1）的上部，压紧摆臂（2）的下端延伸至石英舟本体（1）的下部；
当所述压紧摆臂（2）的下端受到压力时，能够使压紧摆臂（2）发生转动，并在压紧部（5）和石英舟本体（1）上表面之间留出一个间隙放置沉积衬底（3）；
当所述压紧摆臂（2）的下端不受到压力时，所述压紧摆臂（2）通过重力作用发生转动，使压紧部（5）压在沉积衬底（3）表面。
2.如权利要求1所述的衬底自动挟式石英舟，其特征是：所述压紧摆臂（2）转动安装在石英舟本体（1）下侧部的安装座（4）上。
3.如权利要求1所述的衬底自动挟式石英舟，其特征是：所述压紧部（5）的表面呈圆弧形。
CN201810073146.7A 2018-01-25 2018-01-25 衬底自动挟式石英舟 Active CN108103481B (zh)

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