CN107535018A - 热隔绝电接触探针 - Google Patents
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Abstract
一种热隔绝电接触探针包括:安装板,具有管状的销引导件,所述销引导件界定销通路;盖,耦合至安装板并具有颈部,所述颈部包围所述销引导件;以及绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于销通路内并界定导体通路,所述凸缘部在销引导件的顶部上方自杆部沿径向向外延伸,所述空腔部自凸缘部延伸且界定空腔。所述电接触探针还可包括:弹簧,安置于凸缘部与安装板的中间,所述弹簧使凸缘部偏置离开安装板;电接触垫,安置于空腔内;以及电导体,耦合至电接触垫且延伸贯穿导体通路。
Description
技术领域
本发明的实施例涉及电连接装置领域,且更具体而言,涉及一种热隔绝电接触探针。
背景技术
离子植入(ion implantation)是一种用于将用来改变导电性的杂质引入至例如晶圆等基板或其他工件中的技术。在离子束植入机的离子源中将所期望杂质材料离子化,所述离子被加速以形成具有规定能量的离子束,且所述离子束被引导于基板的表面。离子束中的高能离子(energetic ion)穿透至基板材料的主体中并内嵌至所述材料的晶格(crystalline lattice)中以形成具有所期望导电性的区。
在某些离子植入工艺中,通过在高温下将离子植入至目标基板中而实现所期望掺杂轮廓(doping profile)。可通过在离子植入工艺期间在受热台板上支撑基板来实现对基板的加热。传统受热台板可经由多个电接触探针而连接至电源。可将额外的电接触探针连接至受热台板,以使得能够对基板进行静电夹持(electrostatic clamping)。
在操作期间,连接至受热台板的各种电接触探针可自所述受热台板吸热并可降低受热台板的邻近于所述电接触探针的局部区域中的温度。如将理解,受热台板的材料的任何温度变化均可影响被传递至由受热台板支撑及加热的目标基板的热的均匀性,因而对离子植入工艺潜在地具有不利效果。在某些实例中,受热台板中的温度变化可造成受热台板翘曲、弯曲、或甚至开裂。
综上所述,需要通过在受热台板中进行电连接来减轻热损失,以实现均匀的台板温度。
发明内容
提供此发明内容是为了以简化形式介绍一系列概念。此发明内容并非旨在识别所主张主题的关键特征或本质特征、抑或旨在用以帮助确定所主张主题的范围。
根据本发明的示例性实施例的一种用于向受热台板提供电连接的热隔绝电接触探针可包括:安装板,具有管状的销引导件,管状的销引导件界定销通路;盖,耦合至所述安装板并具有颈部,所述颈部包围所述销引导件;以及绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于所述销通路内并界定导体通路,所述凸缘部在所述销引导件的顶部上方自所述杆部沿径向向外延伸,所述空腔部自所述凸缘部延伸且界定空腔。所述电接触探针还可包括:弹簧,安置于所述凸缘部与所述安装板的中间,所述弹簧使所述凸缘部偏置离开所述安装板;电接触垫,安置于所述空腔内;以及电导体,耦合至所述电接触垫且延伸贯穿所述导体通路。
根据本发明的另一示例性实施例的一种用于向受热台板提供电连接的热隔绝电接触探针可包括:安装板,具有管状的销引导件,所述销引导件界定销通路;盖,耦合至所述安装板并具有颈部,所述颈部包围所述销引导件;安装凸起,自所述安装板延伸且延伸贯穿所述盖中的贯穿孔;第一绝缘垫圈,安置于所述安装板的顶面上并具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内;第二绝缘垫圈,安置于所述盖的顶面上并具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内;以及绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于所述销通路内并界定导体通路,所述凸缘部在所述销引导件的顶部上方自所述杆部沿径向向外延伸,所述空腔部自所述凸缘部延伸且界定空腔。所述电接触探针还可包括:螺旋弹簧(coil spring),环绕所述销引导件且安置于所述凸缘部与所述安装板的中间,所述弹簧使所述凸缘部偏置离开所述安装板;电接触垫,安置于所述空腔内;以及电导体,耦合至所述电接触垫且延伸贯穿所述导体通路。
根据本发明的示例性实施例的受热台板总成可包括:受热台板;基座,耦合至所述受热台板;热屏蔽件,安置于所述受热台板与所述基座的中间且耦合至所述受热台板及所述基座;电接触探针,耦合至所述基座并延伸贯穿所述基座及所述热屏蔽件,所述电接触探针包括:安装板,具有管状的销引导件,所述销引导件界定销通路;盖,耦合至所述安装板并具有颈部,所述颈部包围所述销引导件;以及绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于所述销通路内并界定导体通路,所述凸缘部在所述销引导件的顶部上方自所述杆部沿径向向外延伸,所述空腔部自所述凸缘部延伸且界定空腔。所述受热台板总成还可包括:电接触垫,安置于所述空腔内;电导体,耦合至所述电接触垫且贯穿所述导体通路;以及弹簧,安置于所述凸缘部与所述安装板的中间,所述弹簧使所述凸缘部偏置离开所述安装板并使所述电接触垫保持啮合所述受热台板的背面上的金属化层。
附图说明
现在将参照附图以举例方式阐述所公开设备的各种实施例,在附图中:
图1a是说明根据本发明的热隔绝电接触探针的示例性实施例的立体图。
图1b是说明沿平面A-A截取的图1a中所示热隔绝电接触探针的剖视图。
图2是说明包括图1a及1b中所示热隔绝电接触探针的根据本发明的受热台板总成的示例性实施例的剖视图。
图3是说明根据本发明的受热台板总成的示例性实施例的仰视立体图。
具体实施方式
参照图1a及图1b,其示出根据本发明的热隔绝电接触探针10(在下文中称作“探针10”)的示例性实施例。探针10可被提供用于在电源与离子植入机的受热台板之间建立电连接,例如用于加热台板或用于促成对安置于受热台板上的基板的静电夹持。在操作期间,探针10能够操作以将自受热台板所吸收的热量最小化,以减轻整个受热台板的温度变化。如将理解,探针10可实作于用于在加工基板期间支撑基板的受热台板中。举例而言,受热台板可用于在以下工艺期间支撑基板:离子植入工艺、等离子体沉积工艺、蚀刻工艺、化学机械平坦化工艺、或一般而言任何其中半导体基板将被支撑于受热台板上的工艺。因此,以下阐述示例性受热台板总成。本发明的实施例不受本文所述示例性受热台板总成限制,且可在各种半导体制造工艺中所使用的各种其他台板应用中的任意应用中得到应用。
探针10可大体包括安装板12、盖14、绝缘销16、螺旋弹簧18(图1b)、电接触垫20及电导体22。为方便及清晰起见,本文中可能使用例如“顶部”、“底部”、“上方的”、“下方的”、“垂直的”、“水平的”、“侧向的”、“纵向的”、“径向的”、“内”及“外”等用语来阐述探针10的组件相对于图1a及图1b中所出现的探针10的几何结构及取向的相对放置及取向。所述术语将包括所具体提及的词语、其派生词、及具有类似含义的词语。
探针10的安装板12可包括大体为平的基座部24,基座部24具有自其顶面延伸出的一对管状的安装凸起26a、26b。安装凸起26a、26b可界定延伸贯穿安装板12的相应紧固件通路28a、28b,以容纳如以下所进一步阐述的对应机械紧固件。基座部26还可具有在安装凸起26a与安装凸起26b的中间自基座部26的顶面延伸出的管状的销引导件30(图1b)。销引导件30可界定延伸贯穿安装板12的销通路32,以容纳如以下所进一步阐述的绝缘销16及电导体22。安装板12可由耐高温的、热隔绝的及电绝缘的材料(例如,氧化锆、氧化铝、各种热塑性塑料等)形成。
参照图1b,绝缘销16可为大体为管状的构件,所述构件具有空腔部34、杆部38及凸缘部42,空腔部34界定空腔36,杆部38自空腔部34的底部延伸出且界定自空腔36的底部延伸出的导体通路40,凸缘部42自杆部38的顶部沿纵向向外延伸。导体通路40可与空腔36同轴且可具有比空腔36小的直径。绝缘销16可由耐高温的、热隔绝的及电绝缘的材料(例如,氧化锆、氧化铝、各种热塑性塑料等)形成。
弹簧18可为由耐高温金属形成的螺旋弹簧。弹簧18可环绕销引导件30且可在销引导件30上方延伸,且可位于安装板12中的环状沟槽44内,以防止弹簧18相对于安装板12过度地水平移动。绝缘销16的凸缘部42可位于弹簧18的顶部上,且绝缘销16的杆部38可向下延伸贯穿销引导件30的销通路32且可自安装板12的底部突出。杆部38的外直径可比销通路32的直径小(例如,小至少0.0015英寸),以在杆部38与销引导件30之间建立自由移行的、位置方面的间隙配合。因此,杆部38可在销通路32内垂直地自由移动,且也可如以下所进一步阐述在销通路32内水平地移位或倾斜。
探针10的盖14可由低发射性材料(例如,铝或镍)形成。盖14可安置于安装板12的顶部上且可包括大体为平的基座部46及自基座部46的顶面延伸出的大体为管状的颈部48。颈部48可界定容置销引导件30、绝缘销16及弹簧18的内部腔室50。环状凸缘52可自颈部48的顶部沿径向向内延伸并可界定开孔54,开孔54的直径大于绝缘销16的空腔部34的外直径且小于绝缘销16的凸缘部42的外直径。
盖14的基座部46可包括一对通孔56a、56b,以经由所述一对通孔56a、56b而分别接纳安装板12的安装凸起26a、26b。第一对下绝缘垫圈58a、58b可分别位于环绕安装凸起26a、26b的安装板12的基座部24的顶部上,且可分别具有延伸至位于安装凸起26a、26b与盖的中间的径向间隙62a、62b内的相应带凸缘部(flanged portion)60a、60b。相似地,第二对上绝缘垫圈64a、64b可分别位于环绕安装凸起26a、26b的盖14的基座部46的顶部上,且可分别具有延伸至径向间隙62a、62b内的相应带凸缘部66a、66b。一对保持环70a、70b可在上绝缘垫圈64a、64b上方可移除地安置于安装凸起26a、26b的外表面中的相应凹槽72a、72b内,进而将上绝缘垫圈64a、64b、盖14的基座部46及下绝缘垫圈58a、58b以垂直堆叠排列方式抵靠安装板12的基座部24进行固定。下绝缘垫圈58a、58b及上绝缘垫圈64a、64b可由低导热性材料(例如,氧化铝、氧化锆、各种热塑性塑料等)形成,以如以下所进一步阐述减轻盖14与安装板12之间的传导性热传递(conductive heat transfer)。
电接触垫20可由例如镍等耐热的、导电的材料制成,且可被钎焊至或铜焊至电导体22。电接触垫20可安置于绝缘销16的空腔部34的空腔36内,且电导体22可延伸贯穿绝缘销16的杆部38的导体通路40且可耦合至电源(图中未示出)。电接触垫20的直径可比导体通路40的直径大(例如,大至少0.010英寸)且比空腔36的直径小(例如,至少小0.010英寸)。因此,电接触垫20可位于在空腔36与导体通路40的接合处所界定的环形的凸肩74上,其中凸肩74充当用于将电接触垫20保持于空腔36内的下部行进止挡件。
图2是说明示例性受热台板总成80中所装设的探针10的实施例的剖视图。受热台板总成80可包括以各种已知方式中的任意方式以垂直间隔开且堆叠的关系耦合于一起的受热台板82、金属化层83、热屏蔽件84及基座86。
金属化层83可包括多个金属线迹(metallic trace),所述多个金属线迹印刷于或以其他方式施加至受热台板82的下侧或后侧上且覆盖有由玻璃或其他电绝缘材料形成的层。当电流被施加至金属化层83时,金属化层83可将一些电能转换成热。这些热可经由受热台板82传导,借此对安置于受热台板82上的基板进行加热。
热屏蔽件84可起到减少自受热台板82传递至相对冷的基座86的热量的作用。热屏蔽件84可因此被配置成使自基座86离开的热朝向并反射回受热台板82。
受热台板82可由耐热材料形成,所述耐热材料包括例如氧化铝、氮化铝、氮化硼、或类似介电陶瓷(dielectric ceramic)等陶瓷材料。热屏蔽件84可由例如铝、不锈钢、钛、或其他低发射性金属等热反射材料形成。基座86可由任意具有适宜刚性的且耐用的材料形成且可为扫描机构(未示出)的一部分或可耦合至所述扫描机构,所述扫描机构能够在加工操作期间以各种角度位置及/或旋转位置对台板82进行取向。
探针10可安置于基座86的底部中的互补凹陷88内并可分别通过延伸贯穿安装凸起26a、26b中的紧固件通路28a、28b的一对机械紧固件90a、90b(例如,螺钉或螺栓)而可移除地紧固至基板86。盖14的颈部48可向上延伸贯穿基座86及热屏蔽件84中的相应开孔92a、92b。
探针10的弹簧18可在安装板12与绝缘销16的凸缘部42之间保持于压缩状态,且可因此迫使绝缘销16向上离开安装板12。绝缘销16且尤其是绝缘销16的空腔部34中的凸肩74可转而迫使电接触垫12向上抵靠金属化层83。因此,弹簧18可在使电接触垫20保持牢牢啮合金属化层83以在电导体22与金属化层83之间维持所期望电连接的同时允许电接触垫20及绝缘销16垂直地位移,电接触垫20及绝缘销16的垂直位移可例如在基板被装载至受热台板82的支撑表面85或自受热台板82的支撑表面85移除时发生。盖14的颈部48的凸缘52可充当用于限制绝缘销16向上移动的上部行进止挡件,且安装板12的销引导件30可充当用于限制绝缘销16的向下移动的下部行进止挡件。
在台板总成80的工作期间,电流可经由电导体22及电接触垫20而施加至金属化层83。所述电流可被提供用于以上述方式对受热台板82进行加热,及/或用于产生静电力(electrostatic force)以将基板夹持至受热台板82的支撑表面85。在这两种情形中,热量均可经由传导性热传递及/或辐射性热传递(对流热传递一般因台板总成80可能处于被保持为真空的加工环境中而被阻止)而自受热台板82传递至相对冷的基座86。自受热台板82至基座86进行的显著热传递一般被视为不期望的,原因在于这种热传递可在受热台板82中产生温度变化。如将理解,受热台板82的材料中的任何温度变化均可影响被传递至由受热台板82支撑的目标基板的热的均匀性,进而对影响离子82可造成受热台板82翘曲、弯曲、或甚至开裂。
探针10的上述结构性特征及构造可协同减少自受热台板82传递至相对冷的基座86的热,进而提高受热台板82中的温度均匀性。举例而言,探针10与金属化层83直接接触的部分仅为电接触垫20,且电接触垫20及所附着的电导体22通过绝缘销16而与探针10的其余部分热隔绝。探针10与金属化层83之间的此种有限接触可约束经由探针10而自受热台板82至基座86进行的传导性热传递。此外,由于绝缘销16的空腔部34的空腔36的直径比电接触垫20的直径大,因此电接触垫20的底面90接触绝缘销16,且电接触垫20的侧壁91沿径向与绝缘销16间隔开。电接触垫20与绝缘销16之间的此种有限接触还可约束经由探针10而自受热台板82至基座86进行的传导性热传递。另外,位于绝缘销16的杆部38与销引导件30之间的上述自由移行配合在杆部38与销引导件30之间造成最低限度的实体接触。此可进一步约束经由探针10而自受热台板82至基座86进行的传导性热传递。另外,由低导热性材料形成的且将盖14与安装板12完全分隔开的下绝缘垫圈58a、58b及上绝缘垫圈64a、64b可约束自盖14至安装板12进行的传导性传递。此可进一步约束经由探针10而自受热台板82至基座86进行的传导性热传递。另外,由低发射性材料形成的盖14可在受热台板82与探针10的下伏组件之间充当辐射屏蔽件。此可约束自受热台板82至探针10进行的辐射性热传递,进而减轻自探针10至基座86进行的传导性热传递。
除减轻自受热台板82至相对冷的基座86进行的热传递以外,探针10的上述结构性特征及构造还可协同在与受热台板82维持所期望电连接的同时允许受热台板82相对于基座86进行热膨胀及收缩。举例而言,由于绝缘销16的空腔部34的空腔36的直径比电接触垫20的直径大,因此在维持电接触垫20与受热台板82之间的实体连接的同时,电接触垫20可能够当受热台板82膨胀及收缩时在空腔36内水平地移动。此外,由于绝缘销16的杆部38的外直径比销引导件30中的销通路32的直径小,因此在使电接触垫20保持牢牢啮合受热台板82的同时,绝缘销16能够当受热台板82膨胀及收缩时在销引导件30内水平地倾斜或摇动。
在再一些实施例中,与上述探针10类似的多个电接触探针可以各种构造及排列实作于台板总成中,以提供电连接来对台板进行加热、对基板实现静电夹持及/或促成台板总成的需要电力的各种其他特征。举例而言,参照图3中所示台板总成94的仰视立体图,与上述探针10类似的第一组多个电接触探针101-6可装设于台板总成94的基座96中,以使得能够将基板静电夹持至台板总成94的受热台板98。与上述探针10类似的第二组多个电接触探针107-10可装设于基座96中以用于对受热台板98进行加热。
因此,上述示例性探针10相对于用于对受热台板提供电连接的台板总成中所通常采用的传统电接触探针而言可提供许多优点。举例而言,探针10可极大地减轻自受热台板总成的受热台板传递至相对冷的基座的热量。此可提高受热台板中的温度均匀性,进而提高离子植入工艺的可靠性且降低灾难性台板故障的可能性。此外,探针10可在与受热台板维持所期望电连接的同时允许受热台板相对于受热台板总成的基座进行热膨胀及收缩。另外,探针10可有效地操作,且可在受热台板总成的真空环境内赋予所有上述优点。
本发明不受本文所述具体实施例的范围限制。实际上,通过阅读以上说明及附图,除本文中所述实施例以外的本发明其他各种实施例及对本发明进行的润饰将对所属领域中的普通技术人员显而易见。因此,此种其他实施例及润饰旨在落于本发明的范围内。此外,尽管本文中已在用于特定目的的特定环境中的特定实施方式的上下文中阐述了本发明,然而所属领域中的普通技术人员将认识到其适用性并非仅限于此。本发明的实施例可有利地实作于用于任意数目的目的的任意数目的环境中。因此,必须虑及本文所述本发明的全部广度及精神来解释以上所述权利要求。
Claims (15)
1.一种热隔绝电接触探针,其特征在于,包括:
安装板,具有管状的销引导件,所述销引导件界定销通路;
盖,耦合至所述安装板并具有颈部,所述颈部包围所述销引导件;
绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于所述销通路内并界定导体通路,所述凸缘部在所述销引导件的顶部上方自所述杆部沿径向向外延伸,所述空腔部自所述凸缘部延伸且界定空腔;
弹簧,安置于所述凸缘部与所述安装板的中间,所述弹簧使所述凸缘部偏置离开所述安装板;
电接触垫,安置于所述空腔内;以及
电导体,耦合至所述电接触垫且延伸贯穿所述导体通路。
2.根据权利要求1所述的热隔绝电接触探针,其特征在于,还包括至少一个热隔绝垫圈,所述至少一个热隔绝垫圈安置于所述盖与所述安装板的中间且分隔所述盖与所述安装板。
3.根据权利要求1所述的热隔绝电接触探针,其特征在于,还包括安装凸起,所述安装凸起自所述安装板延伸且贯穿所述盖中的贯穿孔。
4.根据权利要求3所述的热隔绝电接触探针,其特征在于,还包括热隔绝垫圈,所述热隔绝垫圈安置于所述安装板的顶面上并具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内。
5.根据权利要求3所述的热隔绝电接触探针,其特征在于,还包括热隔绝垫圈,所述热隔绝垫圈安置于所述盖的顶面上且具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内。
6.根据权利要求1所述的热隔绝电接触探针,其特征在于,所述空腔的直径比所述电接触垫的直径大至少0.010英寸,以允许所述电接触垫在所述空腔内水平地移动。
7.根据权利要求1所述的热隔绝电接触探针,其特征在于,所述销通路的直径比所述绝缘销的所述杆部的直径大至少0.0015英寸,以在所述杆部与所述销引导件之间建立自由移行配合并允许所述杆部在所述销通路内倾斜。
8.根据权利要求1所述的热隔绝电接触探针,其特征在于,在所述空腔与所述导体通路的接合处界定有环形的凸肩,所述凸肩提供用于限制所述电接触垫的移动的行进止挡件。
9.一种受热台板总成,其特征在于,包括:
受热台板;
基座,耦合至所述受热台板;
热屏蔽件,安置于所述受热台板与所述基座的中间且耦合至所述受热台板及所述基座;
电接触探针,耦合至所述基座并延伸贯穿所述基座及所述热屏蔽件,所述电接触探针包括:
安装板,具有管状的销引导件,所述销引导件界定销通路;
盖,耦合至所述安装板并具有颈部,所述颈部包围所述销引导件;
绝缘销,具有杆部、凸缘部及空腔部,所述杆部安置于所述销通路内并界定导体通路,所述凸缘部在所述销引导件的顶部上方自所述杆部沿径向向外延伸,所述空腔部自所述凸缘部延伸且界定空腔;
电接触垫,安置于所述空腔内;
电导体,耦合至所述电接触垫且延伸贯穿所述导体通路;以及
弹簧,安置于所述凸缘部与所述安装板的中间,所述弹簧使所述凸缘部偏置离开所述安装板并使所述电接触垫保持啮合所述受热台板的背面上的金属化层。
10.根据权利要求9所述的热隔绝电接触探针,其特征在于,还包括安装凸起,所述安装凸起自所述安装板延伸且延伸贯穿所述盖中的贯穿孔。
11.根据权利要求10所述的热隔绝电接触探针,其特征在于,还包括热隔绝垫圈,所述热隔绝垫圈安置于所述安装板的顶面上并具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内。
12.根据权利要求10所述的热隔绝电接触探针,其特征在于,还包括热隔绝垫圈,所述热隔绝垫圈安置于所述盖的顶面上并具有凸缘,所述凸缘延伸至位于所述安装凸起与所述盖的中间的径向间隙内。
13.根据权利要求9所述的热隔绝电接触探针,其特征在于,所述空腔的直径比所述电接触垫的直径大至少0.010英寸,以允许所述电接触垫在所述空腔内水平地移动。
14.根据权利要求9所述的热隔绝电接触探针,其特征在于,所述销通路的直径比所述绝缘销的所述杆部的直径大至少0.0015英寸,以在所述杆部与所述销引导件之间建立自由移行配合并允许所述杆部在所述销通路内倾斜。
15.根据权利要求9所述的热隔绝电接触探针,其特征在于,在所述空腔与所述导体通路的接合处界定有环形的凸肩,所述凸肩提供用于限制所述电接触垫的移动的行进止挡件。
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CN209090065U (zh) * | 2018-09-30 | 2019-07-12 | 深圳市艾维普思科技有限公司 | 电子烟的导电接触件的安装结构及电子烟 |
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US20180131115A1 (en) | 2018-05-10 |
JP2018516366A (ja) | 2018-06-21 |
JP6685577B2 (ja) | 2020-04-22 |
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KR102600377B1 (ko) | 2023-11-09 |
JP6934080B2 (ja) | 2021-09-08 |
KR102562059B1 (ko) | 2023-08-01 |
KR20170139597A (ko) | 2017-12-19 |
TW201944079A (zh) | 2019-11-16 |
US10826218B2 (en) | 2020-11-03 |
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US20160315407A1 (en) | 2016-10-27 |
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TWI671528B (zh) | 2019-09-11 |
KR20230118195A (ko) | 2023-08-10 |
CN111586904B (zh) | 2022-04-19 |
US9887478B2 (en) | 2018-02-06 |
WO2016172036A1 (en) | 2016-10-27 |
TW201638590A (zh) | 2016-11-01 |
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