CN106052598B - A kind of big working distance autocollimation of high frequency sound and method - Google Patents
A kind of big working distance autocollimation of high frequency sound and method Download PDFInfo
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- CN106052598B CN106052598B CN201610639134.7A CN201610639134A CN106052598B CN 106052598 B CN106052598 B CN 106052598B CN 201610639134 A CN201610639134 A CN 201610639134A CN 106052598 B CN106052598 B CN 106052598B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- Length Measuring Devices By Optical Means (AREA)
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big working distance autocollimation of high frequency sound and method；The device is made of light source, collimating mirror, speculum and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on speculum is recycled to obtain the angle change on measured object surface by adjusting speculum；Since the present invention increases speculum on traditional auto-collimation angle measurement system, therefore it can avoid the problem that measured object reflected light deviates measuring system and leads to not measure, and then have and dramatically increase auto-collimation working range under identical operating distance, or the technical advantage of operating distance is dramatically increased under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, speculum etc., makes the present invention also have the characteristics that simple in structure, low manufacture cost；There is very high measuring speed simultaneously.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big working distance of high frequency sound from
Collimator apparatus and method.
Background technology
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, active demand carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out arbitrary line angle degree
It measures；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measures；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combine, and can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark measures the space line of linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as non-contact, high certainty of measurement, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of light beam of reflection could be acquired by feedback imaging system 6 and be imaged, and then realize and effectively measure.This road Jin Yuan
The condition of return limits so that there are following two aspects disadvantages for the system：
The first, 5 mirror surface normal of measurand cannot be too big with the range of Laser Autocollimator optical axis included angle, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system with autocollimator optical axis deviation minute angle, into
And lead to not realize auto-collimation and micro- angle measurement.
Two above problem makes traditional auto-collimation instrument that can only be limited under low-angle, small operating distance and uses.
Invention content
For two problems present in traditional autocollimator, the invention discloses a kind of big working distance auto-collimations of high frequency sound
Apparatus and method have compared with traditional autocollimator and dramatically increase auto-collimation working range under identical operating distance, or
The technical advantage of operating distance is dramatically increased under identical auto-collimation working range.
The object of the present invention is achieved like this：
A kind of big working distance autocollimation of high frequency sound, including light source, transmission-type collimating mirror, speculum and feedback at
As system, angled adjustment measuring device is set on the speculum；The light beam of light source outgoing, collimates by transmission-type collimating mirror
It is reflected after collimated light beam, then by speculum, is incident on the surface of measured object；From the light beam of measured object surface reflection, using
After speculum reflection, is acquired and be imaged by feedback imaging system；
The feedback imaging system is one kind in following two forms：
The first, it is arranged between light source and transmission-type collimating mirror, including the first feedback spectroscope and setting are in transmission-type quasi
Imaging sensor at straight mirror foci；From the light beam of measured object surface reflection, after being reflected using speculum, successively by transmission
The transmission of formula collimating mirror, the first feedback spectroscope reflection acquire imaging by imaging sensor；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is at picture in image plane center position；
The second, be arranged between transmission-type collimating mirror and speculum, including first feedback spectroscope, first feedback object lens and
Imaging sensor at transmission-type collimation mirror foci is set；From the light beam of measured object surface reflection, reflected using speculum
Afterwards, successively pass through first feed back spectroscope reflection, the first feedback object lens transmission, acquire imaging by imaging sensor；In measured object
Under conditions of surface is vertical with optical axis, imaging sensor institute is at picture in image plane center position；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Speculum, the second speculum, the first laser interferometer of corresponding first reflector position and corresponding second reflector position
Second laser interferometer；Point-blank, the second driver, second are instead for first driver, the first speculum and universal shaft
Penetrate mirror and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis.
A kind of big working distance auto-collimation method of high frequency sound realized on the big working distance autocollimation of above-mentioned high frequency sound, packet
Include following steps：
Step a, bright light source is put, imaging sensor imaging obtains a picture and deviates image plane center position Δ x and Δ y；
Step b, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is made to be returned at picture
To image plane center position；
Step c, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
The above-mentioned big working distance autocollimation of high frequency sound, further includes Wavefront detecting system and wavefront compensation system；
The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and speculum deformation
At least one of wave front detector；The Wavefront detecting spectroscope is arranged between speculum and measured object, air agitation wave
Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and speculum deformation wave front detector is arranged the two of speculum
In secondary reflection light path；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
A kind of big working distance auto-collimation method of high frequency sound realized on the big working distance autocollimation of above-mentioned high frequency sound,
It includes Wavefront detecting spectroscope and air agitation wave front detector to seek Wavefront detecting system only；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance；
Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is made to be returned at picture
To image plane center position；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
A kind of big working distance auto-collimation method of high frequency sound realized on the big working distance autocollimation of above-mentioned high frequency sound,
It includes Wavefront detecting spectroscope and speculum deformation wave front detector to seek Wavefront detecting system only；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Speculum deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and speculum deformation；
Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is made to be returned at picture
To image plane center position；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
A kind of big working distance auto-collimation method of high frequency sound realized on the big working distance autocollimation of above-mentioned high frequency sound,
It seeks Wavefront detecting system while including Wavefront detecting spectroscope, air agitation wave front detector and speculum deformation Wavefront detecting
Device；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by speculum deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Speculum deformation；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation；
Step e, imaging sensor is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, imaging sensor institute is made to be returned at picture
To image plane center position；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
Advantageous effect：
Compared with traditional autocollimator, adjusts and measure invention increases the angle of speculum and setting on the mirror
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case of shifting, measuring device is adjusted by angle and adjusts speculum posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following several technical advantages：
The first, selective transmission formula collimating mirror, keeps apparatus of the present invention simple in structure, and low manufacture cost is easy to use；
The second, select imaging sensor as the image device in feedback imaging system, it is big using image area sensor
The characteristics of, it is ensured that in the case where measured object reflected light and incident light drift angle are larger, reflected light still is able into optical system
Entrance pupil is matched without departing from range of receiving, then with speculum, realizes reflected light quickly real-time return compensation so that the present invention
Auto-collimation working range or operating distance are greatly extended；
Third selects laser interferometer as angular deflection measuring device so that the present invention can high sample frequency (most
High energy reaches 2000Hz) under complete angle measurement, that is, have very high measuring speed；If the first speculum and the second speculum
Using prism of corner cube, the optical characteristics that prism of corner cube can also be utilized to return to incident ray deflection 180 degree makes the angle of the present invention
Degree measurement range is greatly enhanced, i.e., while the present invention has very high measurement speed, also has the technology of wide-angle range
Advantage；
4th, the present invention additionally uses following technology：First driver, the first speculum and universal shaft are straight at one
On line, the second driver, the second speculum and universal shaft point-blank, and the company of the first driver and universal shaft
The line of line vertical second driver and universal shaft；The orthogonal two dimension setting of this two lines so that different line sides
To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Description of the drawings
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the first structural schematic diagram of the big working distance autocollimation specific embodiment of high frequency sound of the present invention one.
Fig. 3 is the structural schematic diagram of angle adjustment measuring device.
Fig. 4 is second of structural schematic diagram of the big working distance autocollimation specific embodiment of high frequency sound of the present invention one.
Fig. 5 is the structural schematic diagram of the big working distance autocollimation specific embodiment of high frequency sound of the present invention two.
Fig. 6 is the structural schematic diagram of the big working distance autocollimation specific embodiment of high frequency sound of the present invention three.
Fig. 7 is the structural schematic diagram of the big working distance autocollimation specific embodiment of high frequency sound of the present invention four.
In figure：1 light source, 21 transmission-type collimating mirrors, 3 speculums, 4 angles adjustment measuring device, 411 first drivers, 412
Second driver, 425 first speculums, 426 second speculums, 427 first laser interferometers, 428 second laser interferometers, 43
Universal shaft, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 65 imaging sensors, 7 waves
Preceding detection system, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 speculum deformation wave front detectors, 8 wavefront
Compensation system, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The present embodiment is the big working distance autocollimation embodiment of high frequency sound.
The big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 2.The autocollimation packet
Light source 1, transmission-type collimating mirror 21, speculum 3 and feedback imaging system 6 are included, angled adjustment is set on the speculum 3
Measuring device 4；The light beam that light source 1 is emitted, reflects after transmission-type collimating mirror 21 is collimated into collimated light beam, then by speculum 3,
It is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, after being reflected using speculum 3, by feedback imaging system
6 acquisition imaging of system；
The feedback imaging system 6 is arranged between light source 1 and transmission-type collimating mirror 21, including the first feedback spectroscope 61
With the imaging sensor 65 in 21 focal point of transmission-type collimating mirror is set；From the light beam of 5 surface reflection of measured object, using reflection
After mirror 3 reflects, successively pass through the transmission of transmission-type collimating mirror 21, the first feedback spectroscope 61 reflection, acquired by imaging sensor 65
Imaging；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on speculum 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first speculum 425, the second speculum 426, corresponding first speculum, 425 position first laser interferometer 427 and
The second laser interferometer 428 of 426 position of corresponding second speculum；First driver 411, the first speculum 425 and universal
Axis 43 point-blank, the second driver 412, the second speculum 426 and universal shaft 43 point-blank, and
The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as lower structure：Setting is transmiting
Between formula collimating mirror 21 and speculum 3, including the first feedback spectroscope 61, first feeds back object lens 63 and setting and is collimated in transmission-type
The imaging sensor 65 of 21 focal point of mirror；Successively pass through after being reflected using speculum 3 from the light beam of 5 surface reflection of measured object
First feedback spectroscope 61 reflection, the first feedback object lens 63 transmission are imaged by the acquisition of imaging sensor 65；On 5 surface of measured object
Under conditions of vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；As shown in Figure 4.
Specific embodiment two
The present embodiment is the big working distance autocollimation embodiment of high frequency sound.
The big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 5.In specific embodiment one
On the basis of, the big working distance autocollimation of high frequency sound of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system
System 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between speculum 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the big working distance autocollimation embodiment of high frequency sound.
The big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 6.In specific embodiment one
On the basis of, the big working distance autocollimation of high frequency sound of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system
System 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and speculum deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between speculum 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the big working distance autocollimation embodiment of high frequency sound.
The big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 7.In specific embodiment one
On the basis of, the big working distance autocollimation of high frequency sound of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system
System 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and speculum shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, speculum deformation wave front detector 73 is arranged in speculum 3
Secondary reflection light path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, also following three points need to illustrate：
The first, the first driver 411 in the described angular adjustment apparatus and the second driver 412 can both select to drive
The stepper motor or motor servo driver of speed, and the driving higher piezoelectric ceramic actuator of precision can be selected, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
The second, the transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, binary optical
It is thinner to learn lens, is conducive to system compact, while binary optical lenses collimation is more preferable, is conducive to improve systematic survey essence
Degree.
Third, in all of above autocollimation embodiment, it is anti-that angular deflection measuring device all only includes two pairs of planes
The combination of mirror and laser interferometer is penetrated, this design acquiescence speculum 3 does not generate translation and makes during the work time；Such as
Fruit influences measurement accuracy in view of speculum 3 generates translation at work, and third pair can be placed at 43 position of universal shaft
The combination of plane mirror and laser interferometer, to offset the identical translation that three laser interferometer generate, it is ensured that measurement accuracy.
Specific embodiment five
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of the high frequency sound described in specific embodiment one is big
Working distance auto-collimation embodiment of the method.
The big working distance auto-collimation method of high frequency sound of the present embodiment, includes the following steps：
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step b, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer 428 that step c, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The main innovative point of the present invention is that increasing speculum 3 and the angle being arranged on speculum 3 adjustment measures dress
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, 4 whole speculum posture of measuring device tune is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure.
However, the introducing of speculum 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance makes the air agitation between speculum 3 and measured object 5 can not ignore again, can also reduce system
Measurement accuracy.As it can be seen that realize high-acruracy survey, it just must take into account 3 face type error of speculum and speculum 3 and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific
Embodiment eight.
Specific embodiment six
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of the high frequency sound described in specific embodiment two is big
Working distance auto-collimation embodiment of the method.
The big working distance auto-collimation method of high frequency sound of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, according to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation；
Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72
Air agitation is detached, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of the high frequency sound described in specific embodiment three is big
Working distance auto-collimation embodiment of the method.
The big working distance auto-collimation method of high frequency sound of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, speculum deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, according to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation and speculum deformation；
Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize speculum deformation wave front detector
Air agitation and speculum deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and speculum
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and speculum influence of crust deformation.
Specific embodiment eight
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of the high frequency sound described in specific embodiment four is big
Working distance auto-collimation embodiment of the method.
The big working distance auto-collimation method of high frequency sound of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and speculum deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by speculum deformation；
Step d,
According to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
It is dynamic；
Or
According to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
Dynamic and speculum deformation；
Or
According to 83 parameter of f5 (G) adjustment transmission liquid crystals spatial light modulator, compensatory light 81, compensatory reflex mirror shape are lighted
Become；
Step e, imaging sensor 65 is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, 3 angle of speculum is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72
Air agitation and speculum deformation are separately separated with speculum deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to speculum deformation or carries out whole benefit to air agitation and speculum deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and speculum influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and speculum deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and speculum deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while speculum processing quality is carried out
Effective evaluation.
Claims (4)
1. a kind of big working distance autocollimation of high frequency sound, which is characterized in that including light source (1), transmission-type collimating mirror (21), anti-
Mirror (3) and feedback imaging system (6) are penetrated, angled adjustment measuring device (4) is set on the speculum (3)；Light source (1)
The light beam of outgoing is reflected after transmission-type collimating mirror (21) is collimated into collimated light beam, then by speculum (3), is incident on tested
The surface of object (5)；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), by feedback imaging system (6)
Acquisition imaging；
The feedback imaging system (6) is one kind in following two forms：
The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and setting are saturating
Penetrate the imaging sensor (65) of formula collimating mirror (21) focal point；From the light beam of measured object (5) surface reflection, using speculum
(3) after reflecting, successively pass through transmission-type collimating mirror (21) transmission, the first feedback spectroscope (61) reflects, by imaging sensor
(65) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image planes
Heart position；
The second, it is arranged between transmission-type collimating mirror (21) and speculum (3), including the first feedback spectroscope (61), first are instead
It presents object lens (63) and the imaging sensor (65) in transmission-type collimating mirror (21) focal point is set；From measured object (5) surface reflection
Light beam, using speculum (3) reflect after, successively pass through first feedback spectroscope (61) reflect, first feedback object lens (63)
Transmission acquires imaging by imaging sensor (65)；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor
(65) institute at picture in image plane center position；
The angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on speculum (3), angular deflection measurement dress
It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed
It is dry including the first speculum (425), the second speculum (426), the first laser of corresponding first speculum (425) position to measure device
The second laser interferometer (428) of interferometer (427) and corresponding second speculum (426) position；First driver (411),
One speculum (425) and universal shaft (43) point-blank, the second driver (412), the second speculum (426) and
Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43)
(412) with the line of universal shaft (43)；
Further include Wavefront detecting system (7) and wavefront compensation system (8)；
The Wavefront detecting system (7) is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope (71) and
Air agitation wave front detector (72)；Situation two including Wavefront detecting spectroscope (71) and speculum deformation wave front detector
(73)；Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and speculum deformation Wavefront detecting
Device (73)；The Wavefront detecting spectroscope (71) is arranged between speculum (3) and measured object (5), air agitation Wavefront detecting
Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and speculum deformation wave front detector (73) setting is being reflected
In the secondary reflection light path of mirror (3)；
The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune
Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type
LCD space light modulator (83) is modulated, and is incident on Wavefront detecting spectroscope (71).
2. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1
Method, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72)；
It is characterized by comprising the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated
Air agitation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains
The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface
Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
3. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1
Method, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and speculum deformation wave front detector (73)；
It is characterized by comprising the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a,
Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated
Air agitation and speculum deformation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains
The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface
Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
4. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1
Method, it is desirable that Wavefront detecting system (7) while including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and anti-
Penetrate mirror deformation wave front detector (73)；
It is characterized by comprising the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and speculum
Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by speculum deformation；
Step d,
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed
Dynamic, f5 indicates 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed
Dynamic and speculum deformation, f5 indicate 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape
Become, f5 indicates 1 function；
Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；
Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains
The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface
Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
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| JP2005241607A (en) * | 2004-02-27 | 2005-09-08 | Sunx Ltd | Apparatus for measuring angle |
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| CN102176088A (en) * | 2011-01-19 | 2011-09-07 | 哈尔滨工业大学 | Two-dimensional photoelectric auto-collimation method and device for polarized light pyramid target common-path compensation |
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