CN106017360B - The big working distance autocollimation of portable array zeroing high frequency sound and method - Google Patents
The big working distance autocollimation of portable array zeroing high frequency sound and method Download PDFInfo
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- CN106017360B CN106017360B CN201610638789.2A CN201610638789A CN106017360B CN 106017360 B CN106017360 B CN 106017360B CN 201610638789 A CN201610638789 A CN 201610638789A CN 106017360 B CN106017360 B CN 106017360B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of portable array zeroing high frequency sound and method；The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror；Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and dramatically increase auto-collimation working range under identical operating distance, or dramatically increase the technical advantage of operating distance under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., makes the present invention also have the characteristics that miniature portable, measurement accuracy are high；There is very high measuring speed simultaneously.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to portable array zeroing high frequency sound
Big working distance autocollimation and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combination, can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan
The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into
And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of portable array zeroing high frequency sounds
Big working distance autocollimation and method have compared with traditional autocollimator and dramatically increase autocollimatic under identical operating distance
Straight working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this:
Portable array returns to zero the big working distance autocollimation of high frequency sound, including light source, reflective collimating mirror, reflecting mirror,
And imaging system is fed back, angled adjustment measuring device is set on the reflecting mirror；The light beam of light source outgoing, process are reflective
It after collimating mirror is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object；From the light of measured object surface reflection
Beam after reflecting using reflecting mirror, is acquired by feedback imaging system and is imaged；
The feedback imaging system is in following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and setting are reflective
The 4 quadrant detector of focal plane of collimating mirror and multiple single pixel photoelectric converters, the single pixel photoelectric converter is at array point
Cloth, 4 quadrant detector be not only located at array center but also be located on feedback imaging system optical axis；From the light of measured object surface reflection
Beam after reflecting using reflecting mirror, is successively visited by the transmission of reflective collimating mirror, the first feedback spectroscope reflection, by four-quadrant
Survey device or the acquisition imaging of single pixel photoelectric converter；
The second, be arranged between reflective collimating mirror and reflecting mirror, including first feedback spectroscope, first feedback object lens and
The 4 quadrant detector and multiple single pixel photoelectric converters of reflective focal plane of collimating mirror, the single pixel photoelectric conversion are set
At array distribution, 4 quadrant detector had not only been located at array center but also had been located on feedback imaging system optical axis device；From measured object surface
The light beam of reflection, after being reflected using reflecting mirror, successively by first feedback spectroscope reflection, first feedback object lens transmission, by
4 quadrant detector or the acquisition imaging of single pixel photoelectric converter；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Reflecting mirror, the second reflecting mirror, the first laser interferometer of corresponding first reflector position and corresponding second reflector position
Second laser interferometer；Point-blank, the second driver, second are instead for first driver, the first reflecting mirror and universal shaft
Penetrate mirror and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high frequency sound portable portable
The formula array zeroing big working distance auto-collimation method of high frequency sound, comprising the following steps:
Step a, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step b；
The second, the point image position obtained is directly entered step b in 4 quadrant detector region；
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step c, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
The above-mentioned portable array zeroing big working distance autocollimation of high frequency sound further includes that Wavefront detecting system and wavefront are mended
Repay system；
The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one of wave front detector；The Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation wave
Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged in the two of reflecting mirror
In secondary reflection optical path；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high frequency sound portable portable
The formula array zeroing big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air
Disturb wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance；
Step e, bright light source is put, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high frequency sound portable portable
The formula array zeroing big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and reflection
Mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
It is realized on the above-mentioned portable array zeroing big working distance autocollimation of high frequency sound portable portable
The formula array zeroing big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system includes simultaneously Wavefront detecting spectroscope, sky
Gas disturbance wave front detector and reflecting mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation；
Step e, imaging system images are fed back, if:
The first, the point image position obtained is in single pixel photoelectric converter region, according to single pixel photoelectric converter coordinate,
It obtains a picture and deviates image plane center direction, adjust mirror angle using the first driver and the second driver, return to a picture
4 quadrant detector region, enters step f；
The second, the point image position obtained is directly entered step f in 4 quadrant detector region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 indicate 4 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspect: collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more obvious；Third is to pass through plating
Membrane technology, the heat absorption that can be realized reflective collimating mirror are far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to guarantee the measuring precision；
The second, select multiple single pixel photoelectric converters and 4 quadrant detector collectively as in feedback imaging system at
As device, the advantage that multiple single pixel photoelectric converter areas are big and 4 quadrant detector position resolution is high is combined；Its
In, multiple single pixel photoelectric converters combine, it can be ensured that under measured object reflected light and the biggish situation in incident light drift angle,
Reflected light still is able to the entrance pupil into optical system, without departing from range of receiving；On this basis, reflecting mirror is recycled to realize instead
Light quickly real-time return compensation is penetrated, reflected light is adjusted to 4 quadrant detector position, and can be according to 4 quadrant detector
High position resolution advantage obtain higher angle-measurement accuracy；Therefore, by multiple single pixel photoelectric converters and four-quadrant
Limit detector combines, and not only makes auto-collimation working range or operating distance of the present invention greatly be extended, but also be conducive to
Improve angle-measurement accuracy；
Third selects laser interferometer as angular deflection measuring device, allow the invention to high sample frequency (most
High energy reaches 2000Hz) under complete angle measurement, that is, have very high measuring speed；If the first reflecting mirror and the second reflecting mirror
Using prism of corner cube, the optical characteristics that can also be returned to incident ray deflection 180 degree using prism of corner cube makes angle of the invention
Degree measurement range is greatly enhanced, i.e., while the present invention has very high measurement speed, also with the technology of wide-angle range
Advantage；
4th, the present invention additionally uses following technology: the first driver, the first reflecting mirror and universal shaft are straight at one article
On line, the second driver, the second reflecting mirror and universal shaft point-blank, and the company of the first driver and universal shaft
The line of line vertical second driver and universal shaft；The orthogonal two dimension setting of this two lines, so that different line sides
To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the first of the portable array zeroing big working distance autocollimation specific embodiment one of high frequency sound of the present invention
Structural schematic diagram.
Fig. 3 is the structural schematic diagram of angle adjustment measuring device.
Fig. 4 is second of the portable array zeroing big working distance autocollimation specific embodiment one of high frequency sound of the present invention
Structural schematic diagram.
Fig. 5 is that the structure of the portable array zeroing big working distance autocollimation specific embodiment two of high frequency sound of the present invention is shown
It is intended to.
Fig. 6 is that the structure of the portable array zeroing big working distance autocollimation specific embodiment three of high frequency sound of the present invention is shown
It is intended to.
Fig. 7 is that the structure of the portable array zeroing big working distance autocollimation specific embodiment four of high frequency sound of the present invention is shown
It is intended to.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412
Second driver, 425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometers, 428 second laser interferometers, 43
Universal shaft, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 66 4 quadrant detectors,
67 single pixel photoelectric converters, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflections
Mirror deformation wave front detector, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal space light modulations
Device.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high frequency sound.
The portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 2.
The autocollimation includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feeds back imaging system 6, on the reflecting mirror 3
Angled adjustment measuring device 4 is set；The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then
It is reflected by reflecting mirror 3, is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, reflected using reflecting mirror 3
Afterwards, it is acquired and is imaged by feedback imaging system 6；
The feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope
61 and the 4 quadrant detector 66 and multiple single pixel photoelectric converters 67 of reflective 22 focal plane of collimating mirror are set, it is described
At array distribution, 4 quadrant detector 66 had not only been located at array center but also had been located at feedback imaging system 6 single pixel photoelectric converter 67
On optical axis；From the light beam of 5 surface reflection of measured object, after being reflected using reflecting mirror 3, thoroughly by reflective collimating mirror 22 successively
It penetrates, the first feedback spectroscope 61 reflects, by 4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first reflecting mirror 425, the second reflecting mirror 426, corresponding first reflecting mirror, 425 position first laser interferometer 427 and
The second laser interferometer 428 of corresponding second reflecting mirror, 426 position；First driver 411, the first reflecting mirror 425 and universal
Axis 43 point-blank, the second driver 412, the second reflecting mirror 426 and universal shaft 43 point-blank, and
The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as flowering structure: setting is being reflected
Between formula collimating mirror 22 and reflecting mirror 3, including the first feedback spectroscope 61, first feeds back object lens 63 and is arranged in reflective collimation
The 4 quadrant detector 66 of 22 focal plane of mirror and multiple single pixel photoelectric converters 67, the single pixel photoelectric converter 67 is at array
Distribution, 4 quadrant detector 66 be not only located at array center but also be located on feedback 6 optical axis of imaging system；From 5 surface reflection of measured object
Light beam, using reflecting mirror 3 reflect after, successively by first feedback spectroscope 61 reflection, first feedback object lens 63 transmission, by
4 quadrant detector 66 or the acquisition imaging of single pixel photoelectric converter 67；As shown in Figure 4.
Specific embodiment two
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high frequency sound.
The portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 5.
On the basis of specific embodiment one, the portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment is also set up
There are Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high frequency sound.
The portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 6.
On the basis of specific embodiment one, the portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment is also set up
There are Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable array zeroing big working distance autocollimation embodiment of high frequency sound.
The portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment, structural schematic diagram are as shown in Figure 7.
On the basis of specific embodiment one, the portable array zeroing big working distance autocollimation of high frequency sound of the present embodiment is also set up
There are Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3
Secondary reflection optical path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following two points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving
The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
The second, in all of above autocollimation embodiment, it is anti-that angular deflection measuring device all only includes two pairs of planes
The combination of mirror and laser interferometer is penetrated, this design default reflecting mirror 3 does not generate translation during the work time and makes；Such as
Fruit influences measurement accuracy in view of reflecting mirror 3 generates translation at work, and third pair can be placed at 43 position of universal shaft
The combination of plane mirror and laser interferometer, to offset the identical translation that three laser interferometer generate, it is ensured that measurement accuracy.
Specific embodiment five
The present embodiment is on the portable array zeroing big working distance autocollimation of high frequency sound described in specific embodiment one
The portable array zeroing big working distance auto-collimation embodiment of the method for high frequency sound realized.
The portable array zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step b；
The second, the point image position obtained is directly entered step b in 66 region of 4 quadrant detector；
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
The change in displacement Δ x1 and second laser interferometer 428 that step c, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, measuring device 4 is adjusted by angle and adjusts reflecting mirror posture, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system
Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific
Embodiment eight.
Specific embodiment six
The present embodiment is on the portable array zeroing big working distance autocollimation of high frequency sound described in specific embodiment two
The portable array zeroing big working distance auto-collimation embodiment of the method for high frequency sound realized.
The portable array zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated
Air agitation；
Step e, bright light source 1 is put, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is on the portable array zeroing big working distance autocollimation of high frequency sound described in specific embodiment three
The portable array zeroing big working distance auto-collimation embodiment of the method for high frequency sound realized.
The portable array zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated
Air agitation and reflecting mirror deformation；
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is on the portable array zeroing big working distance autocollimation of high frequency sound described in specific embodiment four
The portable array zeroing big working distance auto-collimation embodiment of the method for high frequency sound realized.
The portable array zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed
It is dynamic；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed
Dynamic and reflecting mirror deformation；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape
Become；
Step e, feedback imaging system 6 is imaged, if:
The first, the point image position obtained is in 67 region of single pixel photoelectric converter, according to single pixel photoelectric converter 67
Coordinate obtains a picture and deviates image plane center direction, the first driver 411 and the second driver 412 is utilized to adjust 3 jiaos of reflecting mirror
Degree, makes a picture return to 66 region of 4 quadrant detector, enters step f；
The second, the point image position obtained is directly entered step f in 66 region of 4 quadrant detector；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
The change in displacement Δ x1 and second laser interferometer 428 that step g, reading first laser interferometer 427 obtains
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72
Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out
Effective evaluation.
Claims (4)
- The big working distance autocollimation of high frequency sound 1. portable array returns to zero, which is characterized in that including light source (1), reflective standard Angled adjustment measuring device is arranged on the reflecting mirror (3) in straight mirror (22), reflecting mirror (3) and feedback imaging system (6) (4)；The light beam of light source (1) outgoing reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3), It is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, by feeding back Imaging system (6) acquisition imaging；The feedback imaging system (6) is one of following two form:The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting In the 4 quadrant detector (66) and multiple single pixel photoelectric converters (67) of reflective collimating mirror (22) focal plane, the single pixel Photoelectric converter (67) had not only been located at array center but also had been located at feedback imaging system (6) at array distribution, 4 quadrant detector (66) On optical axis；Successively pass through reflective collimating mirror after reflecting mirror (3) reflection from the light beam of measured object (5) surface reflection (22) transmission, the first feedback spectroscope (61) are reflected, are acquired by 4 quadrant detector (66) or single pixel photoelectric converter (67) Imaging；The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first are instead It presents object lens (63) and the 4 quadrant detector (66) in reflective collimating mirror (22) focal plane and multiple single pixel photoelectric conversions is set Device (67), the single pixel photoelectric converter (67) are not only located at array center but also position at array distribution, 4 quadrant detector (66) In on feedback imaging system (6) optical axis；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, successively By the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) acquisition imaging；Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed It is dry including the first reflecting mirror (425), the second reflecting mirror (426), the first laser of corresponding first reflecting mirror (425) position to measure device The second laser interferometer (428) of interferometer (427) and corresponding second reflecting mirror (426) position；First driver (411), One reflecting mirror (425) and universal shaft (43) point-blank, the second driver (412), the second reflecting mirror (426) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43)；It further include Wavefront detecting system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is one of following three kinds of situations: situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72)；Situation two including Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73)；Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation Wavefront detecting Device (73)；The Wavefront detecting spectroscope (71) is arranged between reflecting mirror (3) and measured object (5), air agitation Wavefront detecting Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and reflecting mirror deformation wave front detector (73) setting is being reflected In the secondary reflection optical path of mirror (3)；The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
- 2. the portable array realized on the portable array zeroing big working distance autocollimation of high frequency sound described in claim 1 Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and empty Gas disturbance wave front detector (72)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated Air agitation；F5 indicates 1 function；Step e, bright light source (1) is put, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain measured object (5) surface Angle change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
- 3. the portable array realized on the portable array zeroing big working distance autocollimation of high frequency sound described in claim 1 Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and anti- Penetrate mirror deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated Air agitation and reflecting mirror deformation；F5 indicates 1 function；Step e, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain measured object (5) surface Angle change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
- 4. the portable array realized on the portable array zeroing big working distance autocollimation of high frequency sound described in claim 1 Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable that Wavefront detecting system (7) includes Wavefront detecting spectroscope (71), sky simultaneously Gas disturbance wave front detector (72) and reflecting mirror deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and reflecting mirror Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；Step d,Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed It is dynamic；F5 indicates 1 function；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and reflecting mirror deformation；F5 indicates 1 function；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape Become；F5 indicates 1 function；Step e, feedback imaging system (6) imaging, if:The first, the point image position obtained is in single pixel photoelectric converter (67) region, according to single pixel photoelectric converter (67) Coordinate obtains a picture and deviates image plane center direction, the first driver (411) and the second driver (412) is utilized to adjust reflecting mirror (3) angle makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the point image position obtained is directly entered step f in 4 quadrant detector (66) region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.
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