CN106052548B - A kind of big working distance autocollimation of portable high-accuracy and method - Google Patents
A kind of big working distance autocollimation of portable high-accuracy and method Download PDFInfo
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- CN106052548B CN106052548B CN201610639122.4A CN201610639122A CN106052548B CN 106052548 B CN106052548 B CN 106052548B CN 201610639122 A CN201610639122 A CN 201610639122A CN 106052548 B CN106052548 B CN 106052548B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big working distance autocollimation of portable high-accuracy and method；The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror；Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., making the present invention also has miniature portable, measurement accuracy high；There is high measurement accuracy under especially low sample frequency；And the technical advantage of rapid survey.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big work of portable high-accuracy
Make away from autocollimation and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combination, can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan
The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into
And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of big working distances of portable high-accuracy
Autocollimation and method have compared with traditional autocollimator and dramatically increase auto-collimation work model under identical operating distance
It encloses, or dramatically increases the technical advantage of operating distance under identical auto-collimation working range.
The object of the present invention is achieved like this:
A kind of big working distance autocollimation of portable high-accuracy, including light source, reflective collimating mirror, reflecting mirror and
Imaging system is fed back, angled adjustment measuring device is set on the reflecting mirror；The light beam of light source outgoing, by reflective collimation
It after mirror is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object；From the light beam of measured object surface reflection,
After being reflected using reflecting mirror, is acquired and be imaged by feedback imaging system；
The feedback imaging system is one of following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and setting are in reflective standard
Imaging sensor at straight mirror foci；From the light beam of measured object surface reflection, after being reflected using reflecting mirror, successively by reflection
The transmission of formula collimating mirror, the first feedback spectroscope reflection acquire imaging by imaging sensor；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is at picture in image plane center position；
The second, be arranged between reflective collimating mirror and reflecting mirror, including first feedback spectroscope, first feedback object lens and
The imaging sensor of reflective collimating mirror focal point is set；From the light beam of measured object surface reflection, reflected using reflecting mirror
Afterwards, spectroscope reflection, the first feedback object lens transmission successively are fed back by first, imaging is acquired by imaging sensor；In measured object
Under conditions of surface is vertical with optical axis, imaging sensor institute is at picture in image plane center position；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Sheet metal, the second sheet metal, the first capacitor sensor of corresponding first sheet metal position and corresponding second sheet metal position
Second capacitance sensor；First driver, the first sheet metal and universal shaft point-blank, the second driver, the second gold medal
Belong to piece and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis.
A kind of big working distance of portable high-accuracy realized on the big work autocollimation of above-mentioned portable high-accuracy from
Alignment method, comprising the following steps:
Step a, bright light source is put, imaging sensor imaging obtains a picture and deviates image plane center position Δ x and Δ y；
Step b, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step c, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 are indicated
4 functions.
The above-mentioned big working distance autocollimation of portable high-accuracy, further includes Wavefront detecting system and wavefront compensation system；
The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one of wave front detector；The Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation wave
Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged in the two of reflecting mirror
In secondary reflection optical path；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
A kind of big working distance of portable high-accuracy realized on the big working distance autocollimation of above-mentioned portable high-accuracy
Auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 are indicated
4 functions.
A kind of big working distance of portable high-accuracy realized on the big working distance autocollimation of above-mentioned portable high-accuracy
Auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 are indicated
4 functions.
A kind of big working distance of portable high-accuracy realized on the big working distance autocollimation of above-mentioned portable high-accuracy
Auto-collimation method, it is desirable that Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror simultaneously
Deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation；
Step e, imaging sensor is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, mirror angle is adjusted using the first driver and the second driver, returns imaging sensor institute at picture
To image plane center position；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2, be reconverted into reflecting mirror angle change Δ θ andAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 are indicated
4 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspect: collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more obvious；Third is to pass through plating
Membrane technology, the heat absorption that can be realized reflective collimating mirror are far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to guarantee the measuring precision；
The second, select imaging sensor as the image device in feedback imaging system, it is big using image area sensor
The characteristics of, it is ensured that under measured object reflected light and the biggish situation in incident light drift angle, reflected light still is able into optical system
Entrance pupil is matched without departing from range of receiving, then with reflecting mirror, reflected light quickly real-time return compensation is realized, so that of the invention
Auto-collimation working range or operating distance are greatly extended；
Third selects capacitance sensor as angular deflection measuring device, is displaced using the superelevation of capacitance sensor sensitive
It spends characteristic and displacement of the lines is easily converted into the good characteristic of angular displacement within the scope of minute angle, allow the invention to adopt low
There is very high measurement accuracy, angle highest measurement resolving power can be from traditional auto-collimation under the conditions of sample frequency (20Hz and following)
0.005 rad of instrument is increased to 0.0005 rad, improves an order of magnitude；
4th, the present invention additionally uses following technology: the first driver, the first sheet metal and universal shaft are straight at one article
On line, the second driver, the second sheet metal and universal shaft point-blank, and the company of the first driver and universal shaft
The line of line vertical second driver and universal shaft；The orthogonal two dimension setting of this two lines, so that different line sides
To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the first structural representation of the big working distance autocollimation specific embodiment one of portable high-accuracy of the present invention
Figure.
Fig. 3 is the structural schematic diagram of angle adjustment measuring device.
Fig. 4 is second of structural representation of the big working distance autocollimation specific embodiment one of portable high-accuracy of the present invention
Figure.
Fig. 5 is the structural schematic diagram of the big working distance autocollimation specific embodiment two of portable high-accuracy of the present invention.
Fig. 6 is the structural schematic diagram of the big working distance autocollimation specific embodiment three of portable high-accuracy of the present invention.
Fig. 7 is the structural schematic diagram of the big working distance autocollimation specific embodiment four of portable high-accuracy of the present invention.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitor sensors, 424 second capacitance sensors, 43
Universal shaft, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 65 imaging sensors, 7 waves
Preceding detection system, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation wave front detectors, 8 wavefront
Compensation system, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy.
The big working distance autocollimation of the portable high-accuracy of the present embodiment, structural schematic diagram are as shown in Figure 2.The auto-collimation
Device includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, is provided with angle on the reflecting mirror 3
Degree adjustment measuring device 4；The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then by reflecting mirror
3 reflections, are incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, after being reflected using reflecting mirror 3, by feeding back
The acquisition imaging of imaging system 6；
The feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope 61
With the imaging sensor 65 that reflective 22 focal point of collimating mirror is arranged in；From the light beam of 5 surface reflection of measured object, using reflection
After mirror 3 reflects, successively acquired by the transmission of reflective collimating mirror 22, the first feedback spectroscope 61 reflection, by imaging sensor 65
Imaging；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first sheet metal 421, the second sheet metal 422, corresponding first sheet metal, 421 position first capacitor sensor 423 and
Second capacitance sensor 424 of corresponding second sheet metal, 422 position；First driver 411, the first sheet metal 421 and universal
Axis 43 point-blank, the second driver 412, the second sheet metal 422 and universal shaft 43 point-blank, and
The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 is it is also an option that such as flowering structure: setting is being reflected
Between formula collimating mirror 22 and reflecting mirror 3, including the first feedback spectroscope 61, first feeds back object lens 63 and is arranged in reflective collimation
The imaging sensor 65 of 22 focal point of mirror；Successively pass through after being reflected using reflecting mirror 3 from the light beam of 5 surface reflection of measured object
First feedback spectroscope 61 reflection, the first feedback object lens 63 transmission are imaged by the acquisition of imaging sensor 65；On 5 surface of measured object
Under conditions of vertical with optical axis, 65 institute of imaging sensor is at picture in image plane center position；As shown in Figure 4.
Specific embodiment two
The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy.
The big working distance autocollimation of the portable high-accuracy of the present embodiment, structural schematic diagram are as shown in Figure 5.Specific real
On the basis of applying example one, the big working distance autocollimation of the portable high-accuracy of the present embodiment is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy.
The big working distance autocollimation of the portable high-accuracy of the present embodiment, structural schematic diagram are as shown in Figure 6.Specific real
On the basis of applying example one, the big working distance autocollimation of the portable high-accuracy of the present embodiment is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the big working distance autocollimation embodiment of portable high-accuracy.
The big working distance autocollimation of the portable high-accuracy of the present embodiment, structural schematic diagram are as shown in Figure 7.Specific real
On the basis of applying example one, the big working distance autocollimation of the portable high-accuracy of the present embodiment is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3
Secondary reflection optical path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following two points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving
The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
The second, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals
With the combination of capacitance sensor, this design default reflecting mirror 3 does not generate translation during the work time and makes；If examined
Consider reflecting mirror 3 to generate translation at work and influence measurement accuracy, third can be placed at 43 position of universal shaft to metal
The combination of piece and capacitance sensor, to offset the identical translation that three capacitance sensors generate, it is ensured that measurement accuracy.
Specific embodiment five
The present embodiment is realized on the big working distance autocollimation of the portable high-accuracy described in specific embodiment
Take the big working distance auto-collimation embodiment of the method for formula high-precision.
The big working distance auto-collimation method of the portable high-accuracy of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step b, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step c, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then obtain 5 surface of measured object angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 indicate 4 functions.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, the whole reflecting mirror posture of measuring device tune 4 is adjusted by angle, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system
Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment six, specific embodiment seven and specific
Embodiment eight.
Specific embodiment six
The present embodiment is realized just on the big working distance autocollimation of the portable high-accuracy described in specific embodiment two
Take the big working distance auto-collimation embodiment of the method for formula high-precision.
The big working distance auto-collimation method of the portable high-accuracy of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated
Air agitation；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then obtain 5 surface of measured object angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment two, can utilize air agitation wave front detector 72
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment seven
The present embodiment is realized just on the big working distance autocollimation of the portable high-accuracy described in specific embodiment three
Take the big working distance auto-collimation embodiment of the method for formula high-precision.
The big working distance auto-collimation method of the portable high-accuracy of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated
Air agitation and reflecting mirror deformation；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then obtain 5 surface of measured object angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is realized just on the big working distance autocollimation of the portable high-accuracy described in specific embodiment four
Take the big working distance auto-collimation embodiment of the method for formula high-precision.
The big working distance auto-collimation method of the portable high-accuracy of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed
It is dynamic；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed
Dynamic and reflecting mirror deformation；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape
Become；
Step e, imaging sensor 65 is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, 3 angle of reflecting mirror is adjusted using the first driver 411 and the second driver 412, makes imaging sensor 65
Institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2, be reconverted into reflecting mirror 3 angle change Δ θ andAnd then obtain 5 surface of measured object angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize air agitation wave front detector 72
Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out
Effective evaluation.
Claims (4)
1. a kind of big working distance autocollimation of portable high-accuracy, which is characterized in that including light source (1), reflective collimating mirror
(22), reflecting mirror (3) and feedback imaging system (6), are arranged angled adjustment measuring device (4) on the reflecting mirror (3)；
The light beam of light source (1) outgoing reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3), incident
To the surface of measured object (5)；It is imaged after reflecting mirror (3) reflection by feedback from the light beam of measured object (5) surface reflection
System (6) acquisition imaging；
The feedback imaging system (6) is one of following two form:
The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting are anti-
Penetrate the imaging sensor (65) of formula collimating mirror (22) focal point；From the light beam of measured object (5) surface reflection, using reflecting mirror
(3) after reflecting, successively by reflective collimating mirror (22) transmission, the first feedback spectroscope (61) reflection, by imaging sensor
(65) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image planes
Heart position；
The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first are instead
Object lens (63) and setting are presented in the imaging sensor (65) of reflective collimating mirror (22) focal point；From measured object (5) surface reflection
Light beam, using reflecting mirror (3) reflection after, successively by first feedback spectroscope (61) reflection, first feedback object lens (63)
Transmission acquires imaging by imaging sensor (65)；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor
(65) institute is at picture in image plane center position；
Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress
It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed
Measure the first capacitor biography that device includes the first sheet metal (421), the second sheet metal (422), corresponding first sheet metal (421) position
Sensor (423) and second capacitance sensor (424) of corresponding second sheet metal (422) position；First driver (411),
One sheet metal (421) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422) and
Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43)
(412) with the line of universal shaft (43)；
It further include Wavefront detecting system (7) and wavefront compensation system (8)；
The Wavefront detecting system (7) is one of following three kinds of situations: situation one including Wavefront detecting spectroscope (71) and
Air agitation wave front detector (72)；Situation two including Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector
(73)；Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation Wavefront detecting
Device (73)；The Wavefront detecting spectroscope (71) is arranged between reflecting mirror (3) and measured object (5), air agitation Wavefront detecting
Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and reflecting mirror deformation wave front detector (73) setting is being reflected
In the secondary reflection optical path of mirror (3)；
The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune
Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type
LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
2. the portable high-accuracy realized on a kind of big working distance autocollimation of the portable high-accuracy described in claim 1 is big
Working distance auto-collimation method, it is desirable that Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air agitation wavefront are visited
It surveys device (72)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated
Air agitation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read
Changes delta C2, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain the angle change Δ on measured object (5) surface
α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、
F2, f3, f4 indicate 4 functions.
3. the portable high-accuracy realized on a kind of big working distance autocollimation of the portable high-accuracy described in claim 1 is big
Working distance auto-collimation method, it is desirable that before Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation waves
Detector (73)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated
Air agitation and reflecting mirror deformation, f5 indicate 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read
Changes delta C2, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain the angle change Δ on measured object (5) surface
α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、
F2, f3, f4 indicate 4 functions.
4. the portable high-accuracy realized on a kind of big working distance autocollimation of the portable high-accuracy described in claim 1 is big
Working distance auto-collimation method, it is desirable that Wavefront detecting system (7) includes Wavefront detecting spectroscope (71), the spy of air agitation wavefront simultaneously
Survey device (72) and reflecting mirror deformation wave front detector (73)；
Characterized by comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and reflecting mirror
Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed
Dynamic, f5 indicates 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed
Dynamic and reflecting mirror deformation, f5 indicate 1 function；
Or
Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape
Become, f5 indicates 1 function；
Step e, imaging sensor (65) is imaged, and obtains a picture and deviates image plane center position Δ x and Δ y；
Step f, reflecting mirror (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor
(65) institute returns to image plane center position at a picture；
Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read
Changes delta C2, be reconverted into reflecting mirror (3) angle change Δ θ andAnd then obtain the angle change Δ on measured object (5) surface
α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、
F2, f3, f4 indicate 4 functions.
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