CN106052598A - High-frequency-response long-working-distance auto-collimation device and method - Google Patents

High-frequency-response long-working-distance auto-collimation device and method Download PDF

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Publication number
CN106052598A
CN106052598A CN201610639134.7A CN201610639134A CN106052598A CN 106052598 A CN106052598 A CN 106052598A CN 201610639134 A CN201610639134 A CN 201610639134A CN 106052598 A CN106052598 A CN 106052598A
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reflecting mirror
light
mirror
driver
angle
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CN106052598B (en
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谭欣然
王超
谭久彬
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The invention relates to a high-frequency-response long-working-distance auto-collimation device and method, and belongs to the fields of precise measurement technology and optical engineering. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. According to the method, the reflector is adjusted so that a reflection light beam returns to the center of an image plane of the feedback imaging system, and an angle deflection measuring device of the reflector is used to obtain angle change of the surface of a tested object. According to the invention, the reflector is added to a traditional auto-collimation angle measuring system, the problem that reflection light of the tested object is deviated the measuring system and further measurement cannot be carried out can be solved, and the auto-collimation work range is increased under the same work distance, or the working distance is increased under the same work range; concrete designs of the collimating mirror, the feedback imaging system, the reflector and the like enable the auto-collimating device to be small, portable and high in measuring precision; the measuring precision is high under low sampling frequency; and the measurement speed is very high.

Description

A kind of high frequency sound big working distance autocollimation and method
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to a kind of big working distance of high frequency sound certainly Collimator apparatus and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field Technology and the development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree Measure;Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured;Maximum functional distance From several meters to rice up to a hundred;Resolving power is from 0.1 rad to 0.001 rad.
Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science Grid combine, and can carry out the measurement of space angle;Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field General application.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6;The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5;From The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road The condition returned limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle Amount;
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter And cause realizing auto-collimation and micro-angular surveying.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of high frequency sound big working distance auto-collimation Apparatus and method, compared with tradition autocollimator, have and dramatically increase auto-collimation working range under identical operating distance, or The technical advantage of operating distance is dramatically increased under identical auto-collimation working range.
The object of the present invention is achieved like this:
A kind of high frequency sound big working distance autocollimation, including light source, transmission-type collimating mirror, reflecting mirror and feed back into As system, described reflecting mirror is provided with angle adjustment measurement apparatus;The light beam of light source outgoing, collimates through transmission-type collimating mirror After becoming collimated light beam, then reflected by reflecting mirror, incide the surface of measured object;From the light beam of measured object surface reflection, then pass through After reflecting mirror reflection, feedback imaging system gather imaging;
Described feedback imaging system is the one in following two form:
The first, it is arranged between light source and transmission-type collimating mirror, including the first feedback spectroscope and be arranged on transmission-type quasi Imageing sensor at straight mirror foci;From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through transmission Formula collimating mirror transmission, first feedback dichroic mirror, gathered imaging by imageing sensor;Vertical with optical axis on measured object surface Under the conditions of, imageing sensor is become a picture in image plane center position;
The second, be arranged between transmission-type collimating mirror and reflecting mirror, including the first feedback spectroscope, first feedback object lens and It is arranged on the imageing sensor at transmission-type collimation mirror foci;From the light beam of measured object surface reflection, then reflect through reflecting mirror After, successively through first feed back dichroic mirror, first feedback object lens transmission, gathered imaging by imageing sensor;At measured object Under conditions of surface is vertical with optical axis, imageing sensor is become a picture in image plane center position;
Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver;Angular deflection measurement apparatus includes first Reflecting mirror, the second reflecting mirror, the first laser interferometer of corresponding first reflector position and corresponding second reflector position Second laser interferometer;First driver, the first reflecting mirror and universal drive shaft are point-blank, the second driver, second anti- Penetrate mirror and universal drive shaft point-blank, and the first driver second driver vertical with the line of universal drive shaft is with universal The line of axle.
A kind of high frequency sound big working distance auto-collimation method realized on above-mentioned high frequency sound big working distance autocollimation, bag Include following steps:
Step a, some bright light source, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step b, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return To image plane center position;
Step c, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and Δβ;Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、 F3, f4 represent 4 functions.
Above-mentioned high frequency sound big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation system;
Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation At least one in wave front detector;Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror In secondary reflection light path;
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator;Mend Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator System, incides on Wavefront detecting spectroscope.
A kind of high frequency sound big working distance auto-collimation method realized on above-mentioned high frequency sound big working distance autocollimation, Wavefront detecting system is asked only to include Wavefront detecting spectroscope and air agitation wave front detector;
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector respectively obtains two groups of data of GA and GB;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air Disturbance;
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return To image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and Δβ;Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、 F3, f4 represent 4 functions.
A kind of high frequency sound big working distance auto-collimation method realized on above-mentioned high frequency sound big working distance autocollimation, Wavefront detecting system is asked only to include Wavefront detecting spectroscope and reflecting mirror deformation wave front detector;
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly;
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air Disturbance and reflecting mirror deformation;
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return To image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and Δβ;Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、 F3, f4 represent 4 functions.
A kind of high frequency sound big working distance auto-collimation method realized on above-mentioned high frequency sound big working distance autocollimation, Ask Wavefront detecting system to include Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror deformation Wavefront detecting simultaneously Device;
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two Group data;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;G2=GC-GD, obtains air agitation with anti- Penetrate the wavefront variation that mirror deformation causes jointly;G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes;
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance;
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and Reflecting mirror deformation;
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation;
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return To image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and Δβ;Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、 F3, f4 represent 4 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range Add the technical advantage of operating distance.
In addition, the present invention also has following a few technical advantage:
The first, selective transmission formula collimating mirror, makes apparatus of the present invention simple in construction, and cost of manufacture is low, easy to use;
The second, select imageing sensor as the image device in feedback imaging system, utilize image area sensor big Feature, it is ensured that in the case of measured object reflection light and incident illumination drift angle are relatively big, reflection light still is able to enter optical system Entrance pupil, without departing from range of receiving, then matches with reflecting mirror, it is achieved reflection light quickly return compensation in real time so that the present invention Auto-collimation working range or operating distance are greatly extended;
3rd, select laser interferometer as angular deflection measurement apparatus so that the present invention can in high sample frequency ( High energy reaches 2000Hz) under complete angular surveying, i.e. there is the highest measuring speed;If the first reflecting mirror and the second reflecting mirror Use prism of corner cube, it is also possible to the optical characteristics utilizing prism of corner cube inclined for incident ray turnback to be returned, make the angle of the present invention Degree measurement scope is greatly enhanced, i.e. the present invention has very while high measurement speed, also has the technology of wide-angle range Advantage;
4th, the present invention additionally uses techniques below: the first driver, the first reflecting mirror and universal drive shaft are straight at one article On line, the second driver, the second reflecting mirror and universal drive shaft point-blank, and the company of the first driver and universal drive shaft Vertical second driver of line and the line of universal drive shaft;The orthogonal two dimension of this two lines is arranged so that different line sides To data non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the first structural representation of high frequency sound of the present invention big working distance autocollimation specific embodiment one.
Fig. 3 is the structural representation of angle adjustment measurement apparatus.
Fig. 4 is the second structural representation of high frequency sound of the present invention big working distance autocollimation specific embodiment one.
Fig. 5 is the structural representation of high frequency sound of the present invention big working distance autocollimation specific embodiment two.
Fig. 6 is the structural representation of high frequency sound of the present invention big working distance autocollimation specific embodiment three.
Fig. 7 is the structural representation of high frequency sound of the present invention big working distance autocollimation specific embodiment four.
In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412 Second driver, 425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometer, 428 second laser interferometer, 43 Universal drive shaft, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 65 imageing sensors, 7 ripples Front detection system, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation wave front detectors, 8 wavefront Compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is high frequency sound big working distance autocollimation embodiment.
The high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 2.This autocollimation bag Include light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, described reflecting mirror 3 is provided with angle adjustment Measurement apparatus 4;The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, then is reflected by reflecting mirror 3, Incide the surface of measured object 5;From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, by feedback imaging system System 6 collection imaging;
Described feedback imaging system 6 is arranged between light source 1 and transmission-type collimating mirror 21, including the first feedback spectroscope 61 With the imageing sensor 65 being arranged on transmission-type collimating mirror 21 focal point;From the light beam of measured object 5 surface reflection, then through reflection After mirror 3 reflection, successively reflect through transmission-type collimating mirror 21 transmission, the first feedback spectroscope 61, gathered by imageing sensor 65 Imaging;Under conditions of measured object 5 surface is vertical with optical axis, imageing sensor 65 is become a little as in image plane center position;
Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412;Angular deflection measurement apparatus Including first reflecting mirror the 425, second reflecting mirror 426, the first laser interferometer 427 of corresponding first reflecting mirror 425 position and Second laser interferometer 428 of corresponding second reflecting mirror 426 position;First driver the 411, first reflecting mirror 425 and universal Axle 43 point-blank, second driver the 412, second reflecting mirror 426 and universal drive shaft 43 point-blank, and One driver 411, second driver 412 vertical with the line of universal drive shaft 43 and the line of universal drive shaft 43;As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on transmission Between formula collimating mirror 21 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on transmission-type collimation The imageing sensor 65 of mirror 21 focal point;From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively pass through First feedback spectroscope 61 reflect, first feedback object lens 63 transmission, gathered imaging by imageing sensor 65;On measured object 5 surface Under conditions of vertical with optical axis, imageing sensor 65 is become a little as in image plane center position;As shown in Figure 4.
Specific embodiment two
The present embodiment is high frequency sound big working distance autocollimation embodiment.
The high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 5.At specific embodiment one On the basis of, the high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system System 8;
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72;Described wavefront Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3;
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83;The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is high frequency sound big working distance autocollimation embodiment.
The high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 6.At specific embodiment one On the basis of, the high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system System 8;
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73;Described ripple Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3;
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83;The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is high frequency sound big working distance autocollimation embodiment.
The high frequency sound big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 7.At specific embodiment one On the basis of, the high frequency sound big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system System 8;
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape Become wave front detector 73;Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3 Secondary reflection light path on;
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83;The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, also following three points needs to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator;Those skilled in the art can basis It is actually needed and rationally selects.
The second, described transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, binary optical Learning lens thinner, beneficially system compact, binary optical lenses collimation is more preferable simultaneously, is conducive to improving systematic survey essence Degree.
3rd, in all above autocollimation embodiment, it is anti-that angular deflection measurement apparatus all only includes two pairs of planes Penetrating the combination of mirror and laser interferometer, this design acquiescence reflecting mirror 3 does not the most produce translation and makes;As Fruit produces translation at work in view of reflecting mirror 3 and affects certainty of measurement, can place the 3rd in universal drive shaft 43 position right Plane mirror and the combination of laser interferometer, to offset the identical translation that three laser interferometer produce, it is ensured that certainty of measurement.
Specific embodiment five
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of high frequency sound described in specific embodiment one is big Working distance auto-collimation embodiment of the method.
The high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, some bright light source 1, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step b, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 Become a little as returning to image plane center position;
Step c, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes Change Δ α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3 Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6 Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system;With Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment six, specific embodiment seven and concrete Embodiment eight.
Specific embodiment six
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of high frequency sound described in specific embodiment two is big Working distance auto-collimation embodiment of the method.
The high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate Air agitation;
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 Become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes Change Δ α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72 Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation The high-acruracy survey of impact.
Specific embodiment seven
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of high frequency sound described in specific embodiment three is big Working distance auto-collimation embodiment of the method.
The high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly;
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate Air agitation and reflecting mirror deformation;
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 Become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes Change Δ α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is that the high frequency sound realized on the big working distance autocollimation of high frequency sound described in specific embodiment four is big Working distance auto-collimation embodiment of the method.
The high frequency sound big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC With two groups of data of GD;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;G2=GC-GD, obtains air agitation with anti- Penetrate the wavefront variation that mirror deformation causes jointly;G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes;
Step d,
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed Dynamic;
Or
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed Move and reflecting mirror deformation;
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape Become;
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65 Become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428 The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes Change Δ α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72 With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation Amount.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously Effective evaluation.

Claims (6)

1. a high frequency sound big working distance autocollimation, it is characterised in that include light source (1), transmission-type collimating mirror (21), anti- Penetrate mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4);Light source (1) The light beam of outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then is reflected by reflecting mirror (3), incides tested The surface of thing (5);From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feedback imaging system (6) Gather imaging;
Described feedback imaging system (6) is the one in following two form:
The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) be arranged on Penetrate the imageing sensor (65) of formula collimating mirror (21) focal point;From the light beam of measured object (5) surface reflection, then through reflecting mirror (3), after reflection, successively reflect, by imageing sensor through transmission-type collimating mirror (21) transmission, the first feedback spectroscope (61) (65) imaging is gathered;Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image planes Heart position;
The second, it is arranged between transmission-type collimating mirror (21) and reflecting mirror (3), including the first feedback spectroscope (61), first anti- Present object lens (63) and be arranged on the imageing sensor (65) of transmission-type collimating mirror (21) focal point;Reflect from measured object (5) surface Light beam, then through reflecting mirror (3) reflect after, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) Transmission, by imageing sensor (65) gather imaging;Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) become a little as in image plane center position;
Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412);Angular deflection is surveyed Amount device includes that the first reflecting mirror (425), the second reflecting mirror (426), the first laser of corresponding first reflecting mirror (425) position are done Second laser interferometer (428) of interferometer (427) and corresponding second reflecting mirror (426) position;First driver (411), One reflecting mirror (425) and universal drive shaft (43) point-blank, the second driver (412), the second reflecting mirror (426) and Universal drive shaft (43) point-blank, and the first driver (411) second driver vertical with the line of universal drive shaft (43) (412) with the line of universal drive shaft (43).
High frequency sound the most according to claim 1 big working distance autocollimation, it is characterised in that also include Wavefront detecting system System (7) and wavefront compensation system (8);
Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73);Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3);
Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83);The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
3. the high frequency sound big working distance auto-collimation realized on the big working distance autocollimation of high frequency sound described in claim 1 Method, it is characterised in that comprise the following steps:
Step a, some bright light source (1), imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step b, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position;
Step c, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428) The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface Degree changes delta α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
4. the high frequency sound big working distance auto-collimation realized on the big working distance autocollimation of high frequency sound described in claim 2 Method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72);
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation;
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428) The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface Degree changes delta α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
5. the high frequency sound big working distance auto-collimation realized on the big working distance autocollimation of high frequency sound described in claim 2 Method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73);
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD;
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly;
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation;
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428) The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface Degree changes delta α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
6. the high frequency sound big working distance auto-collimation realized on the big working distance autocollimation of high frequency sound described in claim 2 Method, it is desirable to Wavefront detecting system (7) includes Wavefront detecting spectroscope (71), air agitation wave front detector (72) and anti-simultaneously Penetrate mirror deformation wave front detector (73);
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction;
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD;
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes;G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly;G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes;
Step d,
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic;
Or
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation;
Or
Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become;
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y;
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor (65) become a little as returning to image plane center position;
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428) The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface Degree changes delta α and Δ β;Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
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