CN106247991B - The big working distance autocollimation of portable combined zeroing laser and method - Google Patents
The big working distance autocollimation of portable combined zeroing laser and method Download PDFInfo
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- CN106247991B CN106247991B CN201610638927.7A CN201610638927A CN106247991B CN 106247991 B CN106247991 B CN 106247991B CN 201610638927 A CN201610638927 A CN 201610638927A CN 106247991 B CN106247991 B CN 106247991B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of portable combined zeroing laser and method；The device is made of light source, collimating mirror, speculum and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on speculum is recycled to obtain the angle change on measured object surface by adjusting speculum；Since the present invention increases speculum on traditional auto-collimation angle measurement system, therefore it can avoid the problem that measured object reflected light deviates measuring system and leads to not measure, and then have and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, speculum etc., makes the present invention also have miniature portable, high certainty of measurement；It can equally be measured under unstable measuring environment；And the technical advantage quickly measured.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to portable combined zeroing laser is big
Working distance autocollimation and method.
Background technology
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, active demand carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out arbitrary line angle degree
It measures；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measures；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combine, and can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark measures the space line of linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as non-contact, high certainty of measurement, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of light beam of reflection could be acquired by feedback imaging system 6 and be imaged, and then realize and effectively measure.This road Jin Yuan
The condition of return limits so that there are following two aspects disadvantages for the system：
The first, 5 mirror surface normal of measurand cannot be too big with the range of Laser Autocollimator optical axis included angle, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system with autocollimator optical axis deviation minute angle, into
And lead to not realize auto-collimation and micro- angle measurement.
Two above problem makes traditional auto-collimation instrument that can only be limited under low-angle, small operating distance and uses.
Invention content
For two problems present in traditional autocollimator, the invention discloses a kind of portable combined zeroing laser is big
Working distance autocollimation and method have compared with traditional autocollimator and dramatically increase auto-collimation under identical operating distance
Working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this：
Portable combined return to zero the big working distance autocollimation of laser, including light source, reflective collimating mirror, speculum, with
And imaging system is fed back, angled adjustment measuring device is set on the speculum；The light beam of light source outgoing, by reflective standard
It after straight mirror is collimated into collimated light beam, then is reflected by speculum, is incident on the surface of measured object；From the light of measured object surface reflection
Beam after being reflected using speculum, is acquired by feedback imaging system and is imaged；
The feedback imaging system is one kind in following two forms：
The first, feedback imaging system includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope and is arranged in reflective collimating mirror focal point
Imaging sensor；From the light beam of measured object surface reflection, after being reflected using speculum, successively thrown by reflective collimating mirror
It penetrates, the first feedback spectroscope reflects, acquires imaging by imaging sensor；Under conditions of measured object surface is vertical with optical axis, figure
Picture sensor institute is at picture in image plane center position；
Or
Described image sensor imaging system includes the first feedback spectroscope, the first feedback object lens and setting in the first feedback
Imaging sensor at object focal point；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through first
It feeds back spectroscope reflection, the first feedback object lens transmission, be imaged by imaging sensor acquisition；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is at picture in image plane center position；
The 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged in reflective collimating mirror focal point
4 quadrant detector；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through reflective collimating mirror
Projection, the second feedback spectroscope reflection acquire imaging by 4 quadrant detector；In the measured object surface condition vertical with optical axis
Under, 4 quadrant detector institute is at picture in image plane center position；
Or
The 4 quadrant detector imaging system includes that the second feedback spectroscope, the second feedback object lens and setting are anti-second
Present the 4 quadrant detector at object focal point；From the light beam of measured object surface reflection, after being reflected using speculum, successively pass through
Second feedback spectroscope reflection, the second feedback object lens transmission are imaged by 4 quadrant detector acquisition；In measured object surface and optical axis
Under conditions of vertical, 4 quadrant detector institute is at picture in image plane center position；
The second, feedback imaging system includes the first feedback spectroscope and the imaging sensor and four-quadrant that are carried by guide rail
Detector is limited, there are two stall positions altogether for the guide rail, and it is reflective that a stall position makes imaging sensor image plane center correspond to
The focal position of collimating mirror, another stall position make 4 quadrant detector image plane center correspond to the focus position of reflective collimating mirror
It sets；
Or
Feedback imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail
Device and 4 quadrant detector, for the guide rail altogether there are two stall position, a stall position makes imaging sensor image plane center position
In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center be located at the first feedback object lens
Focal position；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；The line of first driver and universal shaft
The line of vertical second driver and universal shaft；Angular deflection measuring device is total light path autocollimator.
The portable combined zeroing laser realized on the above-mentioned portable combined zeroing big working distance autocollimation of laser
Big working distance auto-collimation method, includes the following steps：
Step a, bright light source is put, imaging sensor imaging deviates image plane center direction according to a picture, utilizes the first driver
Mirror angle is adjusted with the second driver, a picture is made to return to imaging sensor image plane center region；
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step c, by total light path autocollimator obtain speculum angle change Δ θ andAnd then obtain measured object table
The angle change Δ α and Δ β in face；Wherein,WithF3, f4 indicate 2 functions.
The above-mentioned portable combined zeroing big working distance autocollimation of laser, further includes Wavefront detecting system and wavefront compensation
System；
The Wavefront detecting system is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope and sky
Gas disturbance wave front detector, the Wavefront detecting spectroscope are arranged between speculum and measured object, air agitation Wavefront detecting
Device is arranged on the spectroscopical reflected light path of Wavefront detecting；Before situation two including Wavefront detecting spectroscope and speculum deformation waves
Detector, the Wavefront detecting spectroscope are arranged between speculum and measured object, and the setting of speculum deformation wave front detector exists
In the secondary reflection light path of speculum；Situation three including Wavefront detecting spectroscope, air agitation wave front detector and speculum shape
Become wave front detector, the Wavefront detecting spectroscope is arranged between speculum and measured object, and air agitation wave front detector is set
It sets on the spectroscopical reflected light path of Wavefront detecting, the secondary reflection light path in speculum is arranged in speculum deformation wave front detector
On；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
The portable combined zeroing laser realized on the above-mentioned portable combined zeroing big working distance autocollimation of laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance, f5 indicate a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, by total light path autocollimator obtain speculum angle change Δ θ andAnd then obtain measured object table
The angle change Δ α and Δ β in face；Wherein,WithF3, f4 indicate 2 functions.
The portable combined zeroing laser realized on the above-mentioned portable combined zeroing big working distance autocollimation of laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and speculum deformation Wavefront detecting
Device；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Speculum deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and speculum deformation, f5 indicate a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, by total light path autocollimator obtain speculum angle change Δ θ andAnd then obtain measured object table
The angle change Δ α and Δ β in face；Wherein,WithF3, f4 indicate 2 functions.
The portable combined zeroing laser realized on the above-mentioned portable combined zeroing big working distance autocollimation of laser
Big working distance auto-collimation method, it is desirable that Wavefront detecting system is simultaneously including Wavefront detecting spectroscope, air agitation wave front detector
With speculum deformation wave front detector；
Include the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by speculum deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5
Indicate a function；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Speculum deformation, f5 indicate a function；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation,
F5 indicates a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, by total light path autocollimator obtain speculum angle change Δ θ andAnd then obtain measured object table
The angle change Δ α and Δ β in face；Wherein,WithF3, f4 indicate 2 functions.
Advantageous effect：
Compared with traditional autocollimator, adjusts and measure invention increases the angle of speculum and setting on the mirror
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case of shifting, measuring device is adjusted by angle and adjusts speculum posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following several technical advantages：
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspect：Collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more apparent；Third is to pass through plating
Membrane technology can realize that the heat absorption of reflective collimating mirror is far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to ensure the measuring precision；
The second, select imaging sensor and 4 quadrant detector collectively as the image device in feedback imaging system, knot
The advantage that image area sensor is big and 4 quadrant detector position resolution is high is closed；Wherein, imaging sensor can be true
It protects in the case where measured object reflected light and incident light drift angle are larger, reflected light still is able to the entrance pupil into optical system, will not
Beyond range of receiving；On this basis, it recycles speculum to realize reflected light quickly real-time return compensation, reflected light is adjusted to
4 quadrant detector position, and higher angle can be obtained according to the high position resolution advantage of 4 quadrant detector and surveyed
Accuracy of measurement；Therefore, imaging sensor and 4 quadrant detector are combined, not only so that auto-collimation working range or work of the present invention
Greatly extended as distance, and is conducive to improve angle-measurement accuracy；
Third selects total light path autocollimator as angular deflection measuring device, and total light path autocollimator is utilized to measure essence
Degree is influenced small good characteristic by air environment variation so that it is of the invention can under the unstable measuring environment of air environment,
Ensure to measure effective progress；
4th, the present invention additionally uses following technology：First driver the second driver vertical with the line of universal shaft with
The line of universal shaft；The orthogonal two dimension setting of this two lines so that the data in different line directions are non-interference, nothing
Operation need to be decoupled, calibration can be facilitated in this way, simplifies calculating process, improves measuring speed.
Description of the drawings
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the structural representation of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser one
Figure.
Fig. 3 is the structural schematic diagram of angular adjustment apparatus in angle adjustment measuring device.
Fig. 4 is the first structural schematic diagram of angular deflection measuring device in angle adjustment measuring device.
Fig. 5 is second of structural schematic diagram of angular deflection measuring device in angle adjustment measuring device.
Fig. 6 is second of structural schematic diagram of imaging sensor imaging system.
Fig. 7 is second of structural schematic diagram of 4 quadrant detector imaging system.
Fig. 8 is the first knot of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser two
Structure schematic diagram.
Fig. 9 is second of knot of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser two
Structure schematic diagram.
Figure 10 is that the structure of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser three is shown
It is intended to.
Figure 11 is that the structure of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser four is shown
It is intended to.
Figure 12 is that the structure of the big working distance autocollimation specific embodiment of portable combined of the present invention zeroing laser five is shown
It is intended to.
In figure：1 light source, 22 reflective collimating mirrors, 3 speculums, 4 angles adjustment measuring device, 411 first drivers, 412
Second driver, 429 traditional auto-collimation systems, 43 universal shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes,
62 second feedback spectroscopes, 63 first feedback object lens, 64 second feedback object lens, 65 imaging sensors, 66 4 quadrant detectors, 68
Guide rail, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 speculum deformation Wavefront detectings
Device, 8 wavefront compensation systems, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of laser.
The portable combined zeroing big working distance autocollimation of laser of the present embodiment, structural schematic diagram are as shown in Figure 2.It should
Autocollimation includes light source 1, reflective collimating mirror 22, speculum 3 and feedback imaging system 6, is set on the speculum 3
It is equipped with angle adjustment measuring device 4；The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then by
Speculum 3 reflects, and is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, after being reflected using speculum 3,
It is acquired and is imaged by feedback imaging system 6；
The feedback imaging system 6 includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope 61 and is arranged in 21 focus of transmission-type collimating mirror
The imaging sensor 65 at place；From the light beam of 5 surface reflection of measured object, after being reflected using speculum 3, successively pass through transmission-type quasi
The straight projection of mirror 21, the first feedback spectroscope 61 reflection are imaged by the acquisition of imaging sensor 65；It hangs down on 5 surface of measured object and optical axis
Under conditions of straight, 65 institute of imaging sensor is at picture in image plane center position；
The 4 quadrant detector imaging system includes that the second feedback spectroscope 62, second feeds back object lens 64 and setting the
The 4 quadrant detector 66 of two feedback 64 focal points of object lens；From the light beam of 5 surface reflection of measured object, reflected using speculum 3
Afterwards, successively pass through second feed back the reflection of spectroscope 62, the second feedback object lens 64 transmission, acquire imaging by 4 quadrant detector 66；
Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image plane center position；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on speculum 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；First driver 411 with
The line of line vertical second driver 412 and universal shaft 43 of universal shaft 43, as shown in Figure 3；Angular deflection measuring device is
Light path autocollimator 429 altogether, the light path autocollimator 429 altogether may be mounted at the arbitrary one side of speculum 3, such as Fig. 4 and Fig. 5
It is shown.
It should be noted that：
The first, in the present embodiment, imaging sensor imaging system is also an option that such as lower structure：Including the first feedback point
Light microscopic 61, first feeds back object lens 63 and the imaging sensor 65 in the first feedback 63 focal point of object lens is arranged；From 5 surface of measured object
The light beam of reflection, it is successively saturating by the first feedback spectroscope 61 reflection, the first feedback object lens 63 after being reflected using speculum 3
It penetrates, imaging is acquired by imaging sensor 65；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at point
As in image plane center position；As shown in fig. 6, in the figure, 4 quadrant detector imaging system is omitted.
The second, in the present embodiment, 4 quadrant detector imaging system is also an option that such as lower structure：Including the second feedback
Spectroscope 62 and the 4 quadrant detector 66 in 21 focal point of transmission-type collimating mirror is set；From the light beam of 5 surface reflection of measured object,
After being reflected using speculum 3, successively pass through the projection of transmission-type collimating mirror 21, the second feedback spectroscope 62 reflection, by four-quadrant
The acquisition imaging of detector 66；Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image planes
Center；As shown in fig. 7, in the figure, imaging sensor imaging system is omitted.
Specific embodiment two
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of laser.
The portable combined of the present embodiment returns to zero the big working distance autocollimation of laser, it is different from specific embodiment one
In the structure of feedback imaging system 6；The structure that the present embodiment feeds back imaging system 6 is one kind in following two forms：
The first, feedback imaging system 6 includes the first imaging sensor 65 for feeding back spectroscope 61 and being carried by guide rail 68
With 4 quadrant detector 66, as shown in Figure 8；For the guide rail 68 altogether there are two stall position, a stall position makes image sensing
65 image plane center of device corresponds to the focal position of reflective collimating mirror 22, another stall position makes in 66 image planes of 4 quadrant detector
The heart corresponds to the focal position of reflective collimating mirror 22；
The second, feedback imaging system 6 includes that the first feedback spectroscope 61, first feeds back object lens 63 and held by guide rail 68
The imaging sensor 65 and 4 quadrant detector 66 of load, as shown in Figure 9；There are two stall positions altogether for the guide rail 68, and one is stopped
Position makes 65 image plane center of imaging sensor be located at the focal positions of the first feedback object lens 63, another stall position makes four-quadrant
Limit the focal position that 66 image plane center of detector is located at the first feedback object lens 63.
Specific embodiment three
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of laser.
The portable combined zeroing big working distance autocollimation of laser of the present embodiment, structural schematic diagram are as shown in Figure 10.
On the basis of specific embodiment one, the portable combined zeroing big working distance autocollimation of laser of the present embodiment is additionally provided with
Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between speculum 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of laser.
The portable combined zeroing big working distance autocollimation of laser of the present embodiment, structural schematic diagram are as shown in figure 11.
On the basis of specific embodiment one, the portable combined zeroing big working distance autocollimation of laser of the present embodiment is additionally provided with
Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and speculum deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between speculum 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment five
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of laser.
The portable combined zeroing big working distance autocollimation of laser of the present embodiment, structural schematic diagram are as shown in figure 12.
On the basis of specific embodiment one, the portable combined zeroing big working distance autocollimation of laser of the present embodiment is additionally provided with
Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and speculum shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, speculum deformation wave front detector 73 is arranged in speculum 3
Secondary reflection light path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, also following two points need to illustrate：
The first, the first driver 411 in the described angular adjustment apparatus and the second driver 412 can both select to drive
The stepper motor or motor servo driver of speed, and the driving higher piezoelectric ceramic actuator of precision can be selected, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
Although second, specific embodiment three, specific embodiment four and specific embodiment five are all in specific embodiment
Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two
Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments a system with
Easily wavefront is arranged on the basis of specific embodiment two in these three by the difference between system described in specific embodiment two
The system building of detection system 7 and wavefront compensation system 8 comes out, therefore is no longer described in detail here.
Specific embodiment six
The present embodiment is real on the portable combined zeroing big working distance autocollimation of laser described in specific embodiment one
The existing portable combined zeroing big working distance auto-collimation embodiment of the method for laser.
The portable combined zeroing big working distance auto-collimation method of laser of the present embodiment, includes the following steps：
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and is deviateed image plane center direction according to a picture, is utilized first to drive
411 and second driver 412 of dynamic device adjusts 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step c, by total light path autocollimator 429 obtain speculum 3 angle change Δ θ andAnd then it is tested
The angle change Δ α and Δ β on 5 surface of object；Wherein,WithF3, f4 indicate 2 functions.
It should be noted that if the present embodiment is the method realized in the system described in specific embodiment two,
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at
Picture.
The main innovative point of the present invention is that increasing speculum 3 and the angle being arranged on speculum 3 adjustment measures dress
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, measuring device 4 is adjusted by angle and adjusts speculum posture, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measure.
However, the introducing of speculum 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance makes the air agitation between speculum 3 and measured object 5 can not ignore again, can also reduce system
Measurement accuracy.As it can be seen that realize high-acruracy survey, it just must take into account 3 face type error of speculum and speculum 3 and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment seven, specific embodiment eight and specific
Embodiment nine.
Specific embodiment seven
The present embodiment is real on the portable combined zeroing big working distance autocollimation of laser described in specific embodiment three
The existing portable combined zeroing big working distance auto-collimation embodiment of the method for laser.
The portable combined zeroing big working distance auto-collimation method of laser of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, according to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, by total light path autocollimator 429 obtain speculum 3 angle change Δ θ andAnd then it is tested
The angle change Δ α and Δ β on 5 surface of object；Wherein,WithF3, f4 indicate 2 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize air agitation wave front detector 72
Air agitation is detached, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment eight
The present embodiment is real on the portable combined zeroing big working distance autocollimation of laser described in specific embodiment four
The existing portable combined zeroing big working distance auto-collimation embodiment of the method for laser.
The portable combined zeroing big working distance auto-collimation method of laser of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, speculum deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, according to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation and speculum deformation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, by total light path autocollimator 429 obtain speculum 3 angle change Δ θ andAnd then it is tested
The angle change Δ α and Δ β on 5 surface of object；Wherein,WithF3, f4 indicate 2 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize speculum deformation wave front detector
Air agitation and speculum deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and speculum
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and speculum influence of crust deformation.
Specific embodiment nine
The present embodiment is real on the portable combined zeroing big working distance autocollimation of laser described in specific embodiment five
The existing portable combined zeroing big working distance auto-collimation embodiment of the method for laser.
The portable combined zeroing big working distance auto-collimation method of laser of the present embodiment, includes the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and speculum deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by speculum deformation；
Step d,
According to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
Dynamic, f5 indicates a function；
Or
According to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
Dynamic and speculum deformation, f5 indicate a function；
Or
According to 83 parameter of f5 (G) adjustment transmission liquid crystals spatial light modulator, compensatory light 81, compensatory reflex mirror shape are lighted
Become, f5 indicates a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, by total light path autocollimator 429 obtain speculum 3 angle change Δ θ andAnd then it is tested
The angle change Δ α and Δ β on 5 surface of object；Wherein,WithF3, f4 indicate 2 functions.
The method for implementing the present embodiment on the device of specific embodiment five, can utilize air agitation wave front detector 72
Air agitation and speculum deformation are separately separated with speculum deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to speculum deformation or carries out whole benefit to air agitation and speculum deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and speculum influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and speculum deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and speculum deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while speculum processing quality is carried out
Effective evaluation.
It should also be noted that, if specific embodiment three, specific embodiment four and specific embodiment five are based on tool
Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine,
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at
Picture.
Claims (6)
- The big working distance autocollimation of laser 1. portable combined returns to zero, which is characterized in that including light source (1), reflective collimation Mirror (22), speculum (3) and feedback imaging system (6), are arranged angled adjustment measuring device on the speculum (3) (4)；The light beam of light source (1) outgoing reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by speculum (3), It is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), by feeding back Imaging system (6) acquisition imaging；The feedback imaging system (6) is one kind in following two forms：The first, feedback imaging system (6) includes imaging sensor imaging system and 4 quadrant detector imaging system；Described image sensor imaging system includes the first feedback spectroscope (61) and is arranged in reflective collimating mirror (22) focus The imaging sensor (65) at place；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), successively pass through anti- Penetrate formula collimating mirror (22) projection, the first feedback spectroscope (61) reflects, acquires imaging by imaging sensor (65)；In measured object (5) under conditions of surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position；OrDescribed image sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged first Feed back the imaging sensor (65) of object lens (63) focal point；From the light beam of measured object (5) surface reflection, using speculum (3) After reflection, successively pass through the first feedback spectroscope (61) reflection, the first feedback object lens (63) are transmitted, adopted by imaging sensor (65) Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position It sets；The 4 quadrant detector imaging system includes the second feedback spectroscope (62) and setting in reflective collimating mirror (22) coke 4 quadrant detector (66) at point；It is successively passed through after being reflected using speculum (3) from the light beam of measured object (5) surface reflection Cross reflective collimating mirror (22) projection, the second feedback spectroscope (62) reflects, acquires imaging by 4 quadrant detector (66)；In quilt Under conditions of survey object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image plane center position；OrThe 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged the The 4 quadrant detector (66) of two feedback object lens (64) focal points；From the light beam of measured object (5) surface reflection, using speculum (3) after reflecting, successively pass through the second feedback spectroscope (62) reflection, the second feedback object lens (64) transmit, by 4 quadrant detector (66) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image planes Center；The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imaging sensor by guide rail (68) carrying (65) it is total to there are two stall position with 4 quadrant detector (66), the guide rail (68), a stall position makes imaging sensor (65) image plane center corresponds to the focal position of reflective collimating mirror (22), another stall position make 4 quadrant detector (66) as Face center corresponds to the focal position of reflective collimating mirror (22)；OrImaging system (6) is fed back to include the first feedback spectroscope (61), the first feedback object lens (63) and carried by guide rail (68) Imaging sensor (65) and 4 quadrant detector (66), the guide rail (68) is altogether there are two stall position, a stall position Imaging sensor (65) image plane center is set to be located at the focal position of the first feedback object lens (63), another stall position makes four-quadrant Detector (66) image plane center is located at the focal position of the first feedback object lens (63)；The angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on speculum (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；First driver (411) line of vertical with the line of universal shaft (43) the second driver (412) and universal shaft (43)；Angular deflection measuring device For total light path autocollimator (429).
- The big working distance autocollimation of laser 2. portable combined according to claim 1 returns to zero, which is characterized in that also wrap Include Wavefront detecting system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72), the Wavefront detecting spectroscope (71) are arranged between speculum (3) and measured object (5), Air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71)；Situation two including wavefront are visited Spectroscope (71) and speculum deformation wave front detector (73) are surveyed, the Wavefront detecting spectroscope (71) is arranged in speculum (3) Between measured object (5), speculum deformation wave front detector (73) is arranged in the secondary reflection light path of speculum (3)；Situation Three, including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and speculum deformation wave front detector (73), institute It states Wavefront detecting spectroscope (71) to be arranged between speculum (3) and measured object (5), air agitation wave front detector (72) setting On the reflected light path of Wavefront detecting spectroscope (71), speculum deformation wave front detector (73) is arranged the two of speculum (3) In secondary reflection light path；The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and is incident on Wavefront detecting spectroscope (71).
- 3. the portable combined tune realized on the portable combined zeroing big working distance autocollimation of laser described in claim 1 The big working distance auto-collimation method of zero laser, which is characterized in that include the following steps：Step a, point bright light source (1), imaging sensor (65) imaging deviate image plane center direction according to a picture, utilize first to drive Dynamic device (411) and the second driver (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center Region；Step b, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；Step c, by total light path autocollimator (429) obtain speculum (3) angle change Δ θ andAnd then it is tested The angle change Δ α and Δ β on object (5) surface；Wherein,WithF3, f4 indicate 2 functions.
- 4. the portable combined tune realized on the portable combined zeroing big working distance autocollimation of laser described in claim 2 The big working distance auto-collimation method of zero laser, it is desirable that Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air are disturbed Dynamic wave front detector (72)；It is characterized by comprising the following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated Air agitation, f5 (G1) indicate one using the G1 obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；Step g, by total light path autocollimator (429) obtain speculum (3) angle change Δ θ andAnd then it is tested The angle change Δ α and Δ β on object (5) surface；Wherein,WithF3, f4 indicate 2 functions.
- 5. the portable combined tune realized on the portable combined zeroing big working distance autocollimation of laser described in claim 2 The big working distance auto-collimation method of zero laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and speculum Deformation wave front detector (73)；It is characterized by comprising the following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated Air agitation and speculum deformation, f5 (G2) indicate one using the G2 obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；Step g, by total light path autocollimator (429) obtain speculum (3) angle change Δ θ andAnd then it is tested The angle change Δ α and Δ β on object (5) surface；Wherein,WithF3, f4 indicate 2 functions.
- 6. the portable combined tune realized on the portable combined zeroing big working distance autocollimation of laser described in claim 2 The big working distance auto-collimation method of zero laser, it is desirable that Wavefront detecting system (7) while including that Wavefront detecting spectroscope (71), air are disturbed Dynamic wave front detector (72) and speculum deformation wave front detector (73)；It is characterized by comprising the following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and speculum Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by speculum deformation；Step d,Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed Dynamic, f5 (G1) indicates one using the G1 obtained in step c as the function of parameter；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and speculum deformation, f5 (G2) indicate one using the G2 obtained in step c as the function of parameter；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape Become, f5 (G) indicates one using the G obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust speculum (3) angle using the first driver (411) and the second driver (412), a picture are made to return To 4 quadrant detector (66) image plane center position；Step g, by total light path autocollimator (429) obtain speculum (3) angle change Δ θ andAnd then it is tested The angle change Δ α and Δ β on object (5) surface；Wherein,WithF3, f4 indicate 2 functions.
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