CN105984700B - 基板传送*** - Google Patents
基板传送*** Download PDFInfo
- Publication number
- CN105984700B CN105984700B CN201510671752.5A CN201510671752A CN105984700B CN 105984700 B CN105984700 B CN 105984700B CN 201510671752 A CN201510671752 A CN 201510671752A CN 105984700 B CN105984700 B CN 105984700B
- Authority
- CN
- China
- Prior art keywords
- substrate
- alignment
- unit
- substrate transfer
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0036256 | 2015-03-16 | ||
KR1020150036256A KR102270563B1 (ko) | 2015-03-16 | 2015-03-16 | 기판 이송 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105984700A CN105984700A (zh) | 2016-10-05 |
CN105984700B true CN105984700B (zh) | 2020-06-26 |
Family
ID=57039597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510671752.5A Expired - Fee Related CN105984700B (zh) | 2015-03-16 | 2015-10-15 | 基板传送*** |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR102270563B1 (ko) |
CN (1) | CN105984700B (ko) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1433940A (zh) * | 2002-01-09 | 2003-08-06 | Asml美国公司 | 利用机器人分划板末端执行器来输送和加装分划板所用的方法和装置 |
KR100560628B1 (ko) * | 1997-11-19 | 2006-08-10 | 삼성전자주식회사 | 반도체 웨이퍼 승강식 정렬장치 및 이를 이용한 웨이퍼 이송방법 |
CN101533225A (zh) * | 2008-03-11 | 2009-09-16 | 株式会社阿迪泰克工程 | 玻璃掩模和掩模保持器的位置对准装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5102280A (en) * | 1989-03-07 | 1992-04-07 | Ade Corporation | Robot prealigner |
KR20050035714A (ko) * | 2003-10-14 | 2005-04-19 | 삼성전자주식회사 | 웨이퍼 핸들링 시스템 |
-
2015
- 2015-03-16 KR KR1020150036256A patent/KR102270563B1/ko active IP Right Grant
- 2015-10-15 CN CN201510671752.5A patent/CN105984700B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100560628B1 (ko) * | 1997-11-19 | 2006-08-10 | 삼성전자주식회사 | 반도체 웨이퍼 승강식 정렬장치 및 이를 이용한 웨이퍼 이송방법 |
CN1433940A (zh) * | 2002-01-09 | 2003-08-06 | Asml美国公司 | 利用机器人分划板末端执行器来输送和加装分划板所用的方法和装置 |
CN101533225A (zh) * | 2008-03-11 | 2009-09-16 | 株式会社阿迪泰克工程 | 玻璃掩模和掩模保持器的位置对准装置 |
Also Published As
Publication number | Publication date |
---|---|
CN105984700A (zh) | 2016-10-05 |
KR102270563B1 (ko) | 2021-06-30 |
KR20160111602A (ko) | 2016-09-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200626 Termination date: 20211015 |