CN1057485C - Method of splitting ceramic substrate and splitting device - Google Patents
Method of splitting ceramic substrate and splitting device Download PDFInfo
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- CN1057485C CN1057485C CN93114172A CN93114172A CN1057485C CN 1057485 C CN1057485 C CN 1057485C CN 93114172 A CN93114172 A CN 93114172A CN 93114172 A CN93114172 A CN 93114172A CN 1057485 C CN1057485 C CN 1057485C
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- ceramic substrate
- belt
- roller
- belt conveyor
- cut apart
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Abstract
The present invention relates to a method of splitting ceramic substrate and splitting device. The invention can reduce machining cost by extending the period of replacement of components necessary for avoiding a failure in division by contriving to lessen wear of components in pressure contact with a ceramic substrate. While a strip-form ceramic substrate 1 is held by a carrying belt 2 and a stopper belt 6 the substrate 1 passes between a pair of dividing rollers 5 and 8 provided with their axes shifted. Then, by a pressing force F of the dividing roller 8 against the dividing roller 5, the strip-form ceramic substrate is cut along its dividing groove into chip-form ceramic substrates 1a.
Description
The present invention relates to the method and the splitting equipment of splitting ceramic substrate, this splitting equipment is suitable for that the banded ceramic substrate that comprises a plurality of slot segmentations that are arranged in parallel is cut apart (disconnection) and becomes the single sheet ceramic member.
The flaky pottery substrate that is used as the basis material of sheet component and similar products thereof can obtain by following method.At first, comprising that a plurality of large tracts of land ceramic substrates vertical and horizontally disposed slot segmentation are divided into banded ceramic substrate along horizontal or vertical slot segmentation.Then, along remaining slot segmentation the ceramic substrate secondary splitting of gained is become the single sheet ceramic substrate.Usually, in order to finish this secondary splitting effectively, adopt following dividing method and splitting equipment.Above-mentioned banded ceramic substrate is placed on the belt conveyor and is transferred, and in this case, ceramic substrate places between metal fixed head and the movable plate, and the top surface of fixed head constitutes the arc ledge.Movable plate can rise to the top of fixed head and have a concave bottom that can hold the arc ledge of fixed head, then, be pressed towards fixed head with the movable plate that adds the air cylinder interconnection, revolve to banded ceramic substrate thus and add bending power, pressurization forces it to contact with the concave bottom of movable plate, thereby ceramic substrate is divided into the single sheet ceramic member.
Except this method and apparatus, the open 2-60493 of Japan Patent has recommended another kind of splitting equipment.In this equipment, on a pair of bearing that drives by the belt conveyor rotation, a rubber rollers is set, rubber rollers is pressurized to be forced with banded ceramic substrate on the belt conveyor and contacts, and revolves to ceramic substrate thus to add bending power, thereby substrate is divided into the single sheet ceramic member.
Yet in above-mentioned preceding a kind of prior art, the pressurized concave bottom of the movable plate that contacts with banded ceramic substrate that forces is is partly worn and torn, thereby is easy to change its sweep.Thus, after dividing processing, be easy to have problems, for example stay some undivided part, or on dividing surface, form burr.In addition, in order to avoid the problems referred to above as much as possible, must change movable plate in a short time, this has increased manufacturing cost inevitably.On the other hand, in a kind of prior art in back, because rubber rollers is pressurized and forces rotatably with banded ceramic substrate and contact that the possibility of the irregular wear on the circumferential surface of roller is quite little.Yet frequent between the elastomeric material that is produced by pressure and the ceramic substrate contacts the wearing and tearing of having quickened rubber rollers.Therefore, the fault during cut apart must be changed rubber rollers in a short time.
Therefore,, the purpose of this invention is to provide a kind of method and apparatus of splitting ceramic substrate in view of above-mentioned existing problem, the wherein error in cut apart, parts were extended until the life-span that must upgrade, had realized the reduction of cost of manufacture.
In order to achieve the above object, the invention provides a kind of method of splitting ceramic substrate, this substrate comprises a plurality of slot segmentations that are arranged in parallel, this method comprises the following steps: continuously through whole operation, ceramic substrate is clamped between belt conveyor and the pressurization belt, belt conveyor is used for loading and carrying ceramic substrate, and pressurization belt and belt conveyor are staggered relatively, and belt conveyor drives the pressurization belt synergistically by means of ceramic substrate; Making ceramic substrate pass first cuts apart roller and second and cuts apart between the roller, first cuts apart roller is driven rotatably by belt conveyor, second cut apart roller the axle on the throughput direction of ceramic substrate, be positioned at first cut apart roller the axle the oblique top place, second cut apart roller by the pressurization belt drives rotatably; Utilization is cut apart roller by second and is cut apart roller to first and revolve the pressure that adds along the slot segmentation splitting ceramic substrate.
The present invention also provides a kind of equipment of splitting ceramic substrate, comprising: the belt conveyor that is used to load and carry ceramic substrate; The pressurization belt staggered relatively with belt conveyor, belt conveyor drives the pressurization belt synergistically by means of ceramic substrate so that can pressurize ground contact with ceramic substrate on the belt conveyor; First cut apart roller by what belt conveyor drove rotatably; Second cut apart roller by what the pressurization belt drove rotatably, second axle of cutting apart roller is positioned at the first oblique top place of cutting apart the axle of roller on the throughput direction of ceramic substrate; And cut apart roll-in to second to first pressue device of cutting apart roller.
As mentioned above, in the present invention, the ceramic substrate with slot segmentation is transferred belt and pressurization belt clamping; And, make ceramic substrate pass first and second of the mutual displacement of axle and cut apart between the roller by this state.At this moment, bending power imposes on ceramic substrate, thereby the ceramic substrate group of carrying is one by one contacted with the pressurization belt of length under pressure reposefully successively.Therefore, even the pressurization belt uses the back wearing and tearing also very little long-time, thereby it is prolonged until the life-span that the error when avoiding cutting apart needs to upgrade belt.In addition, even if ceramic substrate pass first and second cut apart between the roller and cut apart after, resulting single sheet ceramic member also continues to be transferred belt and pressurization belt clamping, therefore, ceramic substrate can be transferred so that put orderlyly, thereby has improved the processing operation after cutting apart.
Brief Description Of Drawings:
Fig. 1 is the schematic diagram of the structure of splitting equipment according to an embodiment of the invention.
Below with reference to the description of drawings embodiments of the invention.
Fig. 1 has shown the structure according to the splitting equipment of present embodiment.More particularly, it has shown that schematically being used for handle comprises that the banded ceramic substrate 1 of a plurality of slot segmentations that are arranged in parallel is divided into the structure of the equipment of single sheet ceramic substrate spare 1a.
Referring to unique accompanying drawing, the belt conveyor 2 that acrylonitrile-butadiene rubber is made drives by a plurality of driven pulley 3 supportings and by driving wheel 4.Banded ceramic substrate 1 is loaded on the belt conveyor 2, carries to right so that press among the figure.Belt conveyor 2 contacts with the metal rotatable roller 5 of cutting apart pressurizedly.Driving wheel 4 is driven by motor (not shown) and is rotated counterclockwise, and shown in the arrow A of Fig. 1, direction drives belt conveyor 2 shown in the arrow B of Fig. 1 so that press, makes each driven pulley 3 thus and cuts apart roller 5 and rotate by clockwise direction shown in the arrow C.The pressurization belt 6 that acrylonitrile-butadiene rubber is made is supported by a plurality of driven pulleys 7, and is oppositely arranged with belt conveyor 2.The pressurization belt is driven synergistically with belt conveyor 2.In addition, the pressurization belt contact with the metal rotatable roller 8 of cutting apart pressurizedly, cuts apart roller 8 and one and adds air cylinder 9 and interconnect, add air cylinder 9 can be on demand setting air pressure at random.That is, cut apart roller 8 pressurized cylinders 9 to pressing down, so that back(-)up belt 6 contacts with banded ceramic substrate 1 on the belt conveyor 2 pressurizedly, thus, belt conveyor 2 drives pressurization belt 6 by ceramic substrate 1.More particularly, press the pressurization belt 6 that direction drives shown in the arrow D of Fig. 1, collaborative with belt conveyor 2 by the commutation of direction shown in the arrow B, thus by the drive of pressurization belt 6, make and cut apart roller 8 and be rotated counterclockwise by direction shown in the arrow E.The axle 8a of cutting apart roller 8 is than axle 5a right side displacement in figure of cutting apart roller 5.Therefore when cutting apart roller 8 when cutting apart roller 5 and exert pressure F, generation bending power on two banded ceramic substrates of cutting apart between roller 5 and 81 can passed.
In the splitting equipment that constitutes as mentioned above, the belt conveyor 2 that loads banded ceramic substrate 1 is driven by direction shown in the arrow B, thus ceramic substrate 1 is carried to the right direction of Fig. 1, ceramic substrate 1 is by belt conveyor 2 and 6 clampings of pressurization belt, so that pass a pair of cutting apart between roller 5 and 8 by this state simultaneously.At this moment, cut apart roller 8 to cutting apart roller 5 F that exerts pressure, thereby on banded ceramic substrate 1, produce bending power.So ceramic substrate 1 is divided into the single sheet ceramic member along its slot segmentation, and so the single sheet ceramic substrate spare 1a that obtains to the conveying of the right side of Fig. 1 by belt 2 and 6 clampings.
As mentioned above, in above embodiment, be loaded into banded ceramic substrate 1 on the belt conveyor 2 belt 6 that pressurizeed and press, and cut apart roller 5 and 8 in this state and cut apart.Therefore, the banded ceramic substrate that is transferred one by one can contact with the pressurization belt of length for 1 group reposefully successively, and the eroded area of pressurization belt 6 is evenly distributed, and has also reduced the wearing and tearing frequency, has realized after the long-time use very little wearing and tearing only being arranged.That is, splitting equipment shown in Figure 1 even pressurization belt 6 is changed for a long time, also can keep good mode of operation, and the error in can not causing cutting apart is compared with traditional splitting equipment, has prolonged the life-span that needs the parts of renewal significantly.In addition, except these advantages, splitting equipment of the present invention has strengthened changes the ease for operation of belt 6 of pressurizeing cheaply, thereby can obviously reduce the job costs of cutting operation.
And, in the above-described embodiments, even cut apart after roller 5 and 8 is divided into the single sheet ceramic member at banded ceramic substrate 1, the layered ceramic substrate spare 1a that is obtained also is transferred belt 2 and pressurization belt 6 continues clampings, thereby they can be carried in an orderly manner, have improved the processing operation after cutting apart.
Can be well understood to from the above description, the present invention has the following advantages.
As mentioned above, in the present invention, the ceramic substrate with slot segmentation is failed Send belt and pressurization belt clamping, and in this state from a pair of axle phase Pass cutting apart between the roller of displacement mutually. At this moment, bending power imposes on ceramic substrate. According to the present invention of above-mentioned formation, owing to contact with ceramic substrate with pressurizeing The wearing and tearing of pressurization belt are very little, and the present invention makes to produce when avoiding cutting apart and loses The life-span of mistake and the pressurization belt that need to upgrade is prolonged, also strengthened with The ease for operation of the replacing of the pressurization belt that low cost is won victory. And, even After being divided into the single sheet ceramic member, ceramic substrate also is transferred belt and adds Press clamping that belt continues, the single sheet ceramic substrate spare that obtains can continue Carry in an orderly manner, improved thus the processing operation after cutting apart.
Claims (2)
1, a kind of method of splitting ceramic substrate, this ceramic substrate comprise a plurality of slot segmentations that are arranged in parallel, and said method comprising the steps of:
Continuously through whole operation, described ceramic substrate is clamped between belt conveyor and the pressurization belt, belt conveyor is used for loading and carrying described ceramic substrate, pressurization belt and described belt conveyor are oppositely arranged, and described belt conveyor drives described pressurization belt synergistically by means of described ceramic substrate;
Making described ceramic substrate pass first cuts apart roller and second and cuts apart between the roller, first cuts apart roller is driven rotatably by described belt conveyor, second cut apart roller the axle on the throughput direction of described ceramic substrate, be positioned at described first cut apart roller the axle the sloped top face place, described second cuts apart roller is driven rotatably by described pressurization belt; With
Utilization is cut apart roller by described second and is cut apart the roller applied pressure to described first and cut apart described ceramic substrate along described slot segmentation.
2, a kind of equipment of splitting ceramic substrate comprises a belt conveyor that is used to load and carry described ceramic substrate; It is characterized in that described equipment further comprises:
A pressurization belt that is oppositely arranged with described belt conveyor, described belt conveyor drives described pressurization belt synergistically by means of described ceramic substrate so that can pressurize ground contact with described ceramic substrate on the described belt conveyor;
First cut apart roller by what described belt conveyor drove rotatably for one;
Second cut apart roller by what described pressurization belt drove rotatably for one, described second axle of cutting apart roller is positioned at the oblique top place of described first axle of cutting apart on the throughput direction of described ceramic substrate; With
Cut apart roller to described second and push described first pressue device of cutting apart roller to.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26496792A JP3423014B2 (en) | 1992-10-02 | 1992-10-02 | Method and apparatus for dividing ceramic substrate |
| JP264967/1992 | 1992-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1092013A CN1092013A (en) | 1994-09-14 |
| CN1057485C true CN1057485C (en) | 2000-10-18 |
Family
ID=17410699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN93114172A Expired - Fee Related CN1057485C (en) | 1992-10-02 | 1993-09-28 | Method of splitting ceramic substrate and splitting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3423014B2 (en) |
| CN (1) | CN1057485C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104766821A (en) * | 2014-01-02 | 2015-07-08 | 大族激光科技产业集团股份有限公司 | Cell splitting device and cell splitting method |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5650075A (en) * | 1995-05-30 | 1997-07-22 | Motorola, Inc. | Method for etching photolithographically produced quartz crystal blanks for singulation |
| US7646092B2 (en) | 2005-12-06 | 2010-01-12 | Yamaha Corporation | Semiconductor device and manufacturing method thereof |
| JP5023661B2 (en) * | 2005-12-06 | 2012-09-12 | ヤマハ株式会社 | Semiconductor device and manufacturing method thereof |
| DE102007016334B4 (en) * | 2007-04-04 | 2011-04-21 | Siemens Ag | Wire saw and method of making a wire saw |
| JP5384872B2 (en) * | 2008-08-11 | 2014-01-08 | デクセリアルズ株式会社 | Manufacturing method of magnetic sheet |
| JP5552773B2 (en) * | 2009-08-26 | 2014-07-16 | 三菱マテリアル株式会社 | Divided body manufacturing apparatus and manufacturing method |
| JP6539487B2 (en) * | 2015-04-27 | 2019-07-03 | 株式会社ディスコ | Apparatus for dividing plate-like object, processing apparatus and method for dividing plate-like object |
| CN111086214B (en) * | 2019-11-27 | 2022-04-26 | 汕头大学 | Flexible rod of belt powder paving device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2252363A (en) * | 1939-03-27 | 1941-08-12 | Baker Perkins Co Inc | Cracker machine |
| JPH0260493B2 (en) * | 1983-02-15 | 1990-12-17 | Matsushita Electric Ind Co Ltd |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0445850Y2 (en) * | 1987-12-07 | 1992-10-28 |
-
1992
- 1992-10-02 JP JP26496792A patent/JP3423014B2/en not_active Expired - Fee Related
-
1993
- 1993-09-28 CN CN93114172A patent/CN1057485C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2252363A (en) * | 1939-03-27 | 1941-08-12 | Baker Perkins Co Inc | Cracker machine |
| JPH0260493B2 (en) * | 1983-02-15 | 1990-12-17 | Matsushita Electric Ind Co Ltd |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104766821A (en) * | 2014-01-02 | 2015-07-08 | 大族激光科技产业集团股份有限公司 | Cell splitting device and cell splitting method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1092013A (en) | 1994-09-14 |
| JP3423014B2 (en) | 2003-07-07 |
| JPH06120367A (en) | 1994-04-28 |
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