CN105702609A - 用于把半导体晶片从载体衬底分离的装置和方法 - Google Patents

用于把半导体晶片从载体衬底分离的装置和方法 Download PDF

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CN105702609A
CN105702609A CN201610219706.6A CN201610219706A CN105702609A CN 105702609 A CN105702609 A CN 105702609A CN 201610219706 A CN201610219706 A CN 201610219706A CN 105702609 A CN105702609 A CN 105702609A
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product substrate
thin film
fragment
carrier substrates
articulamentum
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CN105702609B (zh
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F.P.林德纳
J.布尔格拉夫
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EV Group GmbH
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Abstract

用于借助安装在薄膜框架（1）上的柔性薄膜（3）把半导体晶片（4）从通过连接层（6）与所述半导体晶片（4）相连接的载体衬底（2）分离的装置和方法，所述薄膜包含粘合层（3s）以在所述薄膜（3）的接触面片段（3k）中容纳所述半导体晶片（4），其中所述薄膜（3）在所述薄膜框架（1）上安装在薄膜（3）的围绕所述接触面片段（3k）的固定片段（3b）中，并且其中所述薄膜（3）包含位于所述接触面片段（3k）与所述固定片段（3b）之间的可张紧片段（3a），并且其中从外周（4u）开始引起所述半导体晶片（4）从所述载体衬底（2）的分离。

Description

用于把半导体晶片从载体衬底分离的装置和方法
技术领域
本分案申请的母案申请日为2010年08月20日、申请号为201080038912.8、发明名称为“用于把半导体晶片从载体衬底分离的装置和方法”。本发明涉及用于把产品衬底从载体衬底分离的装置和方法。
背景技术
产品衬底的背面薄化在半导体工业中经常需要，并可以机械地和/或化学地进行。为了进行背面薄化，所述产品衬底通常被暂时固定在载体上，其中对于固定有不同的方法。作为载体材料例如采用薄膜、玻璃衬底或硅晶片。
根据所采用的载体材料以及在载体和产品衬底之间所采用的连接层，已知有不同的方法来溶解或破坏所述连接层，例如采用UV光、激光束、温度作用或溶剂。
所述分离逐渐成为最重要的处理步骤之一，因为具有几μm衬底厚度的薄的衬底在分离/剥落时容易破裂，或者由于分离过程所需的力而遭受损坏。
另外，薄的衬底几乎不、直至不具有形状稳定性，并且在没有支撑材料的情况下典型地卷起。从而在处理背面薄化的晶片期间晶片的固定和支持在实际中是必不可少的。
发明内容
因此本发明的任务是说明一种装置和一种方法，以尽可能无破坏地从载体上分离这种产品衬底。
所述任务通过独立权利要求的特征而得到解决。本发明的有利的改进在从属权利要求中说明。在说明书、权利要求和/或附图中所说明的至少两个特征的所有组合也属于本发明的范畴。在所说明的值范围中，位于所述界限内的值也应该作为界限值被公开，并应该以任意的组合而要求保护。
本发明所基于的想法是，对一种普通的装置以及一种普通的方法进行改进，其方式是，利用安装在薄膜框架上的薄膜的弹性或柔性来轻柔地并从产品衬底的边缘开始分离所述产品衬底，而且通过薄膜的变形、尤其是在薄膜的分离切口中的变形来进行。通过这种方式所述产品衬底直接在分离之后提供给其他的处理步骤所用，并通过所述薄膜和所述薄膜框架保护。许多处理步骤可以直接对安装在薄膜框架上的产品衬底来执行。
也就是说：柔性的薄膜借助施加在薄膜框架上的力以及在所述薄膜的接触面片段中与所述产品衬底相接触的粘合层而在所述产品衬底上产生牵引力，由此把产品衬底从载体衬底分离，尤其是剥离。
用产品衬底来表示诸如半导体晶片的产品衬底，其通常薄化为在0.5μm和250μm之间的厚度，其中趋势是越来越薄的产品衬底。本发明尤其有效地用本身具有与安装在薄膜框架上的薄膜相类似柔性的产品衬底工作。所述产品衬底在本发明的装置以及在本发明的方法中从载体衬底剥离，尤其是同心地从产品衬底的外周开始。
作为载体例如采用具有在50μm和5000μm之间、尤其在500μm和1000μm之间的厚度的载体衬底。
作为连接层可以考虑粘合剂，例如可溶解的粘合剂，尤其是热塑性塑料，其例如有选择地施加在所述载体衬底-产品衬底复合物的边缘区域中，尤其是在0.1至20mm的边缘区域中。替换的，可以全面地施加所述粘合剂，其中在中心处的粘合力可以通过粘合降低层、例如氟聚合物、优选聚四氟乙烯而降低。
作为接收装置特别适合的是夹头（Chuck），尤其是用于尤其借助低压（Unterdruck）来接收载体衬底的旋转夹头，例如吸取轨道、孔或吸取杯。替换的，可以考虑机械式的接收，例如通过侧面的夹子。在另一可替换扩展方案中进行静电接收。
所述分离工具包含安装在所述薄膜框架上的薄膜和容纳所述薄膜框架并施加力的薄膜框架接收器。
有利地除了分离工具之外还设置连接分离工具，以至少部分地去除在所述载体衬底和所述产品衬底之间由所述连接层引起的连接。
如果所述装置具有加热工具以加热所述载体衬底-产品衬底复合物，所述加热工具尤其是集成在载体衬底接收器中，那么就可以采用热塑熔融的粘合剂来作为连接层。最大的加热温度为250℃，优选最大为175℃。
在本发明的一个有利的实施方案中规定，所述连接分离工具构造成基本不加热地工作。这样就可以放弃任何的加热装置。
在本发明的另一有利的实施方案中规定，所述连接分离工具包含用于去除所述连接层的液体介质，尤其是有选择地溶解所述连接层的溶剂。连接层的化学溶解对于所述产品衬底是特别轻柔的，并在相应进行材料选择的情况下也可以非常快速地进行溶解，尤其当仅所述产品衬底的边缘区域设置有连接层时，使得所述溶剂可以从侧面开始来快速发挥作用。这样就可以省略在载体衬底和/或产品衬底中的钻孔。
在本发明的另一替换实施方案中规定，所述连接分离工具包含用于去除所述连接层的机械分离工具，尤其是用于切割所述连接层的刀片。由此实现了所述产品衬底从载体的特别快速的分离。也可以考虑由机械分离工具和液体介质构成的组合。
在本发明的另一替换实施方案中规定，所述连接分离工具包含用于去除所述连接层的UV光源。所述实施方案也可以与机械分离工具的实施方案和/或具有液体介质的实施方案相组合。
如果所述连接分离工具尤其是构造成仅仅从所述产品衬底的侧面边缘开始发挥作用，那么就可以省略从上侧和/或从下侧、尤其是从所述产品衬底的位于侧面边缘内的内部区域来对所述产品衬底和/或所述载体施加作用。
通过设置用于旋转所述载体衬底、产品衬底和/或具有薄膜的薄膜框架的旋转装置，可以省略在所述产品衬底的整个外周上设置连接分离工具，并且在所述产品衬底的外周上部分地进行施加就足够了。
如果所述分离片段位于所述产品衬底的外轮廓之外和/或与所述接触片段邻接，那么就可以通过薄膜的变形而最佳地把分离力传输到所述产品衬底上。
为了给所述连接层施加液体介质并为了容纳所述液体介质，有利地设置固定在所述载体衬底或载体衬底接收器上的、尤其是密封的溶剂容器，所述溶剂容器的上边缘至少延伸至由所述产品衬底形成的平面。通过使所述溶剂容器至少部分地围绕所述侧面边缘或产品衬底的外周，能够对所述连接层进行特别有效的作用。另外，通过围绕的这种措施，能够避免液体介质从所述溶剂容器中逸出或损失UV光强。在采用机械分离工具的情况下，避免了可能的污染从所述溶剂容器中逸出并污染所述产品衬底。所述溶剂容器在有利的扩展中可以以L或U形的截面来构造。
在本发明的另一有利的扩展中规定，所述溶剂容器仅在所述产品衬底的所述侧面边缘或外周的外周段上延伸。所述溶剂容器有利地在产品衬底中心方向上仅稍微延伸到所述载体衬底或产品衬底的侧面边缘或外周上，从而可以在所述载体衬底上施加力Fs。所述力Fs也可以通过所述溶剂容器而被传输到所述载体衬底上。
根据本发明的一个有利的实施方案而规定，通过作用在所述载体衬底上的力Fs以及与所述力Fs方向相反的、作用在所述薄膜框架上的力Ff来导致分离。所述装置可以把所述力Ff作为局部力、尤其是点状地在所述薄膜框架的至少一个位置上导入地来构造。所述力Ff有利地被分布在所述薄膜框架外周上的多个点上来导入，其中也可以导入不同的力，并可以通过所述装置引起所述薄膜框架相对于所述载体衬底或载体衬底接收器翻转。通过所述薄膜可以由所述力Fs和所述力Ff在分离片段中进行变形、尤其是张紧，在所述产品衬底的外周上按照所期望的分离形式实现均匀的力分布。
根据本发明的另一有利的实施方案而规定，可以通过所述力Fs以及所述力Ff来引起所述薄膜框架相对于所述载体衬底移动，其中由此在所述薄膜框架内产生了槽，所述槽为了把声波传输到所述产品衬底和/或溶剂而具有声波生成工具，其尤其是由可容纳于所述槽中的液体和淹没在所述液体中的声波发生器形成。产品衬底的分离通过由超声波或兆声波所产生的气蚀作用而被明显加速，使得分离明显更轻柔并同时更快速地进行。
另外还有利地规定，从所述产品衬底的外周向所述产品衬底的中心同心地进行所述产品衬底的分离。
尤其有利的是，所述产品衬底构造为在所述分离过程期间粘合在薄膜上，因为由此保证了全面的接收和保护,根据本发明的第一方面，提供一种用于借助安装在薄膜框架（1）上的柔性薄膜（3）把产品衬底（4）从通过连接层（6）与所述产品衬底（4）相连接的载体衬底（2）分离的装置，所述薄膜包含粘合层（3s）以在所述薄膜（3）的接触面片段（3k）中容纳所述产品衬底（4），其中所述薄膜（3）在所述薄膜框架（1）上安装在薄膜（3）的围绕所述接触面片段（3k）的固定片段（3b）中，并且其中所述薄膜（3）包含位于所述接触面片段（3k）与所述固定片段（3b）之间的分离片段（3a），并且其中所述装置具有分离工具以引起所述产品衬底（4）从所述产品衬底（4）的外周（4u）开始从所述载体衬底（2）分离，其特征在于，所述分离工具被构造为，使得从所述产品衬底（4）的外周（4u）向所述产品衬底（4）的中心（4z）同心地进行所述产品衬底（4）的分离。根据本发明的第二方面，提供一种用于借助安装在薄膜框架（1）上的柔性薄膜（3）把产品衬底（4）从通过连接层（6）与所述产品衬底（4）相连接的载体衬底（2）分离的方法，所述薄膜包含粘合层（3s）以在所述薄膜（3）的接触面片段（3k）中容纳所述产品衬底（4），其中所述薄膜（3）在所述薄膜框架（1）上安装在薄膜（3）的围绕所述接触面片段（3k）的固定片段（3b）中，并且其中所述薄膜（3）包含位于所述接触面片段（3k）与所述固定片段（3b）之间的分离片段（3a），其特征在于，从所述产品衬底（4）的外周（4a）向所述产品衬底（4）的中心（4z）同心地进行所述产品衬底（4）从所述载体衬底（2）的分离。
附图说明
本发明的其他优点、特征和细节由下文对优选实施例的说明以及借助附图给出；其中：
图1a示出了在薄膜框架上的由产品衬底、载体衬底和连接层所组成的衬底复合物的示意性俯视图，
图1b示出了图1a的具有详细视图的示意性侧视图，
图2示出了根据本发明的在把所述产品衬底从载体衬底分离时的具有详细视图的示意性图示，
图3示出了根据本发明的在把所述产品衬底从载体衬底分离时的具有详细视图的示意性图示，以及
图4示出了本发明的实施方案的示意性图示。
在附图中相同的部件和具有相同功能的部件用相同的附图标记来表示。
具体实施方式
在图1a中示出了在所述实施方案中至少在内周li上成圆形的薄膜框架1，该薄膜框架具有安装、尤其是粘合在其下侧的薄膜3。具有至所述薄膜框架1的内周li的径向距离地，在所述薄膜框架1内产品衬底-载体衬底复合物与所述薄膜框架1同心地粘合在所述薄膜3的粘合层3s上（见图1b）。
所述产品衬底-载体衬底复合物由粘合在薄膜3上的产品衬底4、载体衬底2和连接所述产品衬底4和所述载体衬底2的连接层6组成。所述产品衬底4和所述载体衬底2的直径基本是相同的，而所述产品衬底4的厚度小于所述载体衬底2的厚度。
所述薄膜3包括在所述情况下成圆环状的固定片段3b，在该固定片段3b中用所述薄膜框架1固定所述薄膜3。另外所述薄膜3还包括接触面片段3k，在该接触面片段3k中所述产品衬底4可以固定在所述薄膜3的粘合层3s上。在所述固定片段3b与所述接触面片段3k之间具有尤其与所述固定片段3b和所述接触面片段3k同心设置的分离片段3a，所述分离片段具有根据本发明的重要功能。所述分离片段3a从而从所述产品衬底4的外周4u延伸至所述薄膜框架的内周li，在此被表示为距离A。在所述薄膜框架1的厚度D与所述距离A之间的比值有利地为至少1比2至1比50，尤其是1比5至1比25，优选地为1比19或1比10。
在图1b中所示的初始位置中，所述产品衬底4的接触所述薄膜3的侧面和所述薄膜框架1的接触所述薄膜3的侧面同心并设置在一个平面E中。在图1a和1b中所示的部分被组合构造在已知的薄膜框架接收器（Filmframemounter）中。
在图2和3中以两个变型方案示意性示出了分离过程，而且是在所述产品衬底2从所述载体衬底4分离开始之后的短时间内。
通过导入作用相反的力Ff（或Ff1和Ff2）和Fs，所述产品衬底-载体衬底复合物和所述薄膜3的粘合在该复合物上的接触面片段3k在载体衬底接收器7的方向上从所述薄膜框架1移出。在运动学上相反地，所述薄膜框架1也可以通过力Ff借助未示出的薄膜框架接收器、例如机械臂而被移动。
从所述载体衬底接收器7到所述载体衬底2的力传输通过在所述载体衬底接收器7的表面中所构建的真空轨道8以及连接到该真空轨道的未示出的真空装置来进行。所述载体衬底接收器7与所述装置固定地用地脚螺丝固定。
替换的，可以机械地（例如通过夹紧）或者静电地进行所述载体衬底2的接收。
如图2所示，作用于所述薄膜框架1上的力Ff可以均匀分布地作为平面力而作用于所述薄膜框架1，使得通过所述分离片段3a的变形从边缘开始来进行所述产品衬底4从所述载体衬底2的分离，如在图2的详图中放大地示出的。所述力Ff1在此与所述力Ff2相同。所述力可以点状分布在所述薄膜框架1的外周上地被导入，或者通过薄膜框架接收器分布地被引入。
在图3中所示的实施例中，在所述薄膜框架1的外周上的力分布是不同的，而且力Ff1大于在对侧上的力Ff2，使得所述产品衬底4首先在其上被导入较大力Ff1的侧面上分离。用于把力导入所述薄膜框架1的接收装置因此必须构造得允许所述薄膜框架1翻转。
所述产品衬底4促进分离，因为它与薄膜3类似地有弹性，并从而从产品衬底-载体衬底复合物逐步地从该复合物的边缘开始分离。
按照图4，溶剂容器20设置在所述载体衬底2上，使得在所述产品衬底-载体衬底复合物的施加了力的位置中实现了所述产品衬底-载体衬底复合物的浸没。所述溶剂容器20在所述情况中成环形地在所述载体衬底2的外周上尤其是密封地设置，使得能够如前一样在所述溶剂容器20内把力导入到所述载体衬底2上。所述力导入也可以替换地在所述溶剂容器20上来进行，例如当所述溶剂容器20压紧配合地设置在所述载体衬底2上。所述溶剂容器20的外周壁21至少延伸至由所述产品衬底4所形成的平面，从而在所述溶剂容器20中的溶剂22至少到达所述连接层6，并能够通过所述溶剂22溶解所述连接层6。所述外周壁21有利地越过由所述产品衬底4所形成的平面而几乎延伸至所述薄膜框架1，从而还尽可能避免了在旋转时所述溶剂22从所述溶剂容器20中逸出。
通过这些措施，通过从所述产品衬底4的外周4u开始来溶解所述连接层6，支持了所述产品衬底4从所述载体衬底2的分离、尤其是剥离，并通过施加在外周4u上的牵引力而对所述薄膜3的变形来轻柔地去除所述产品衬底4。
通过所述薄膜3的变形产生了槽9。在所述槽9中导入一种液体11，以借助声波生成工具、在此为声波发生器10把声波（超声波、兆声波）通过所述薄膜3传输到设置于所述薄膜对面的溶剂22中以及传输到所述产品衬底-载体衬底复合物中。所述溶剂22通过从边缘开始的声输入而加速作用于所述连接层6，使得所述薄膜3在薄膜框架1方向上的恢复力可以被减小，和/或支持分离，尤其在按照图2进行径向对称分离的情况下。
通过声的导入，所述溶剂22的溶剂分子经历振动，由此导致气蚀作用，这导致所述连接层6的溶解明显加速。
所述溶剂22有利地选择为与所述连接层6协调，并且所述粘合层3s不可被所述溶剂22腐蚀。
附图标记列表
A距离
D厚度
E平面
1薄膜框架
li内周
2载体衬底
3薄膜
3a分离片段
3b固定片段
3k接触面片段
3s粘合层
4产品衬底
4u外周
6连接层
7载体衬底接收器
8真空轨道
9槽
10声波发生器
11液体
20溶剂容器
21外周壁
22溶剂

Claims (13)

1.一种用于借助安装在薄膜框架（1）上的柔性薄膜（3）把产品衬底（4）从通过连接层（6）与所述产品衬底（4）相连接的载体衬底（2）分离的装置，所述薄膜包含粘合层（3s）以在所述薄膜（3）的接触面片段（3k）中容纳所述产品衬底（4），其中所述薄膜（3）在所述薄膜框架（1）上安装在薄膜（3）的围绕所述接触面片段（3k）的固定片段（3b）中，并且其中所述薄膜（3）包含位于所述接触面片段（3k）与所述固定片段（3b）之间的分离片段（3a），并且其中所述装置具有分离工具以引起所述产品衬底（4）从所述产品衬底（4）的外周（4u）开始从所述载体衬底（2）分离，其特征在于，
所述分离工具被构造为，使得从所述产品衬底（4）的外周（4u）向所述产品衬底（4）的中心（4z）同心地进行所述产品衬底（4）的分离。
2.根据权利要求1所述的装置，
其特征在于，
提供连接分离工具用于至少部分去除所述载体衬底（2）和所述产品衬底（4）之间由连接层（6）引起的连接。
3.根据权利要求2所述的装置，其中所述连接分离工具包含用于至少部分去除所述连接层的液体介质，所述液体介质包括尤其是有选择地溶解所述连接层的溶剂(22)。
4.根据权利要求2所述的装置，
其中，
所述连接分离工具还包含用于至少部分地去除所述连接层（6）的机械分离工具，尤其是用于切割所述连接层（6）的刀片。
5.根据权利要求2所述的装置，
其中，
所述连接分离工具还包含用于至少部分地去除所述连接层（6）的UV光源。
6.根据前述权利要求2-5之一所述的装置，
其特征在于，
在所述***（4u）的区域中尤其专有地制造所述连接分离工具。
7.根据前述权利要求之一所述的装置，
其特征在于，
所述分离片段（3a）位于所述产品衬底（4）的外轮廓之外，和/或与所述接触面片段（3k）邻接。
8.根据权利要求2或3所述的装置，
其特征在于，
为了给所述连接层（6）施加液体介质并为了容纳所述液体介质，设置固定在所述载体衬底或载体衬底接收器（7）上的、尤其是密封的溶剂容器（20），该溶剂容器的上边缘至少延伸至由所述产品衬底（4）所形成的平面。
9.根据前述权利要求之一所述的装置，
其特征在于，
所述分离工具设置为通过作用于所述载体衬底（2）上的力Fs以及与所述力Fs方向相反的、作用于所述薄膜框架（1）上的力Ff而进行分离。
10.根据权利要求9所述的装置，
其特征在于，
所述薄膜（3）能通过所述力Fs和力Ff而在所述分离片段（3a）中张紧。
11.根据权利要求9或10所述的装置，
其特征在于，
通过所述力Fs和力Ff能引起所述薄膜框架（1）相对于所述载体衬底（2）移动，其中由此在所述薄膜框架（1）内产生槽（9），所述槽为了把声波传输到所述产品衬底和/或所述溶剂（22）而具有声波生成工具，其尤其是由能容纳在所述槽（9）中的液体（11）以及淹没在所述液体（11）中的声波发生器（10）形成。
12.根据前述权利要求之一所述的装置，
其特征在于，
所述产品衬底（4）构造为在所述分离过程期间粘合在所述薄膜（3）上。
13.一种用于借助安装在薄膜框架（1）上的柔性薄膜（3）把产品衬底（4）从通过连接层（6）与所述产品衬底（4）相连接的载体衬底（2）分离的方法，所述薄膜包含粘合层（3s）以在所述薄膜（3）的接触面片段（3k）中容纳所述产品衬底（4），其中所述薄膜（3）在所述薄膜框架（1）上安装在薄膜（3）的围绕所述接触面片段（3k）的固定片段（3b）中，并且其中所述薄膜（3）包含位于所述接触面片段（3k）与所述固定片段（3b）之间的分离片段（3a），其特征在于，
从所述产品衬底（4）的外周（4a）向所述产品衬底（4）的中心（4z）同心地进行所述产品衬底（4）从所述载体衬底（2）的分离。
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