CN104844993A - 半导体制造组件 - Google Patents

半导体制造组件 Download PDF

Info

Publication number: CN104844993A
Authority: CN; China
Prior art keywords: blank; weight; goods; fiber; polymkeric substance
Prior art date: 2009-07-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

CN201510144427.3A

Other languages

English (en)

Chinese (zh)

Inventor

J.D.布兹

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

EIDP Inc

Original Assignee

EI Du Pont de Nemours and Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-07-02

Filing date

2010-06-30

Publication date

2015-08-19

2010-06-30 Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co

2015-08-19 Publication of CN104844993A publication Critical patent/CN104844993A/zh

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 21
239000004065 semiconductor Substances 0.000 title claims description 14
229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 9
239000004917 carbon fiber Substances 0.000 claims abstract description 9
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 9
239000003795 chemical substances by application Substances 0.000 claims description 13
229920001577 copolymer Polymers 0.000 claims description 5
229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 5
235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 5
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 4
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 4
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 4
239000004411 aluminium Substances 0.000 claims description 4
229910052782 aluminium Inorganic materials 0.000 claims description 4
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
239000011575 calcium Substances 0.000 claims description 4
229910052791 calcium Inorganic materials 0.000 claims description 4
239000001267 polyvinylpyrrolidone Substances 0.000 claims description 4
229910052700 potassium Inorganic materials 0.000 claims description 4
239000011591 potassium Substances 0.000 claims description 4
229910052708 sodium Inorganic materials 0.000 claims description 4
239000011734 sodium Substances 0.000 claims description 4
239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
229920001169 thermoplastic Polymers 0.000 claims description 3
238000004140 cleaning Methods 0.000 claims description 2
CALWOYBZYFNRDN-UHFFFAOYSA-N ethenol;ethenyl acetate Chemical group OC=C.CC(=O)OC=C CALWOYBZYFNRDN-UHFFFAOYSA-N 0.000 claims description 2
230000000712 assembly Effects 0.000 claims 1
238000000429 assembly Methods 0.000 claims 1
238000007334 copolymerization reaction Methods 0.000 claims 1
238000000034 method Methods 0.000 abstract description 51
239000002131 composite material Substances 0.000 abstract description 36
229920000642 polymer Polymers 0.000 abstract description 19
239000004811 fluoropolymer Substances 0.000 abstract description 10
229920002313 fluoropolymer Polymers 0.000 abstract description 10
230000008569 process Effects 0.000 abstract description 10
239000000835 fiber Substances 0.000 description 60
239000000126 substance Substances 0.000 description 47
238000007596 consolidation process Methods 0.000 description 20
239000011159 matrix material Substances 0.000 description 14
230000006835 compression Effects 0.000 description 12
238000007906 compression Methods 0.000 description 12
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
238000002360 preparation method Methods 0.000 description 11
239000011347 resin Substances 0.000 description 9
229920005989 resin Polymers 0.000 description 9
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
238000010438 heat treatment Methods 0.000 description 8
229910052751 metal Inorganic materials 0.000 description 8
239000002184 metal Substances 0.000 description 8
239000002002 slurry Substances 0.000 description 8
238000012545 processing Methods 0.000 description 7
239000010439 graphite Substances 0.000 description 6
229910002804 graphite Inorganic materials 0.000 description 6
239000012535 impurity Substances 0.000 description 6
239000002245 particle Substances 0.000 description 6
238000001816 cooling Methods 0.000 description 5
238000005516 engineering process Methods 0.000 description 5
239000000463 material Substances 0.000 description 5
239000000203 mixture Substances 0.000 description 5
238000005520 cutting process Methods 0.000 description 4
239000012071 phase Substances 0.000 description 4
238000007789 sealing Methods 0.000 description 4
102100026256 Glycosylphosphatidylinositol-anchored high density lipoprotein-binding protein 1 Human genes 0.000 description 3
101001035846 Homo sapiens HMG box-containing protein 1 Proteins 0.000 description 3
239000011324 bead Substances 0.000 description 3
229910052799 carbon Inorganic materials 0.000 description 3
238000005189 flocculation Methods 0.000 description 3
230000016615 flocculation Effects 0.000 description 3
238000005259 measurement Methods 0.000 description 3
238000002156 mixing Methods 0.000 description 3
238000003825 pressing Methods 0.000 description 3
230000005855 radiation Effects 0.000 description 3
239000007787 solid Substances 0.000 description 3
239000002904 solvent Substances 0.000 description 3
238000005728 strengthening Methods 0.000 description 3
BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
OVGRCEFMXPHEBL-UHFFFAOYSA-N 1-ethenoxypropane Chemical compound CCCOC=C OVGRCEFMXPHEBL-UHFFFAOYSA-N 0.000 description 2
WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
239000000853 adhesive Substances 0.000 description 2
238000004026 adhesive bonding Methods 0.000 description 2
230000001070 adhesive effect Effects 0.000 description 2
238000004458 analytical method Methods 0.000 description 2
239000008346 aqueous phase Substances 0.000 description 2
239000007864 aqueous solution Substances 0.000 description 2
238000000748 compression moulding Methods 0.000 description 2
239000003822 epoxy resin Substances 0.000 description 2
NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
239000012634 fragment Substances 0.000 description 2
230000004927 fusion Effects 0.000 description 2
239000003365 glass fiber Substances 0.000 description 2
230000001788 irregular Effects 0.000 description 2
238000002844 melting Methods 0.000 description 2
230000008018 melting Effects 0.000 description 2
239000000178 monomer Substances 0.000 description 2
238000012856 packing Methods 0.000 description 2
239000000123 paper Substances 0.000 description 2
239000008188 pellet Substances 0.000 description 2
229920003023 plastic Polymers 0.000 description 2
239000004033 plastic Substances 0.000 description 2
229920000647 polyepoxide Polymers 0.000 description 2
238000007493 shaping process Methods 0.000 description 2
238000012360 testing method Methods 0.000 description 2
229920002803 thermoplastic polyurethane Polymers 0.000 description 2
-1 thin slice Substances 0.000 description 2
230000007704 transition Effects 0.000 description 2
238000005303 weighing Methods 0.000 description 2
KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
239000004962 Polyamide-imide Substances 0.000 description 1
239000004695 Polyether sulfone Substances 0.000 description 1
239000004697 Polyetherimide Substances 0.000 description 1
239000004793 Polystyrene Substances 0.000 description 1
150000001408 amides Chemical class 0.000 description 1
239000004760 aramid Substances 0.000 description 1
229920003235 aromatic polyamide Polymers 0.000 description 1
230000004888 barrier function Effects 0.000 description 1
230000008901 benefit Effects 0.000 description 1
150000001721 carbon Chemical group 0.000 description 1
238000005266 casting Methods 0.000 description 1
230000008859 change Effects 0.000 description 1
238000001311 chemical methods and process Methods 0.000 description 1
UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
238000010924 continuous production Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
150000001983 dialkylethers Chemical class 0.000 description 1
238000001035 drying Methods 0.000 description 1
238000010828 elution Methods 0.000 description 1
150000002118 epoxides Chemical class 0.000 description 1
239000004744 fabric Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
230000006872 improvement Effects 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
238000010030 laminating Methods 0.000 description 1
238000003475 lamination Methods 0.000 description 1
230000014759 maintenance of location Effects 0.000 description 1
239000000155 melt Substances 0.000 description 1
239000000693 micelle Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000000465 moulding Methods 0.000 description 1
239000005011 phenolic resin Substances 0.000 description 1
229920001568 phenolic resin Polymers 0.000 description 1
230000000704 physical effect Effects 0.000 description 1
238000005498 polishing Methods 0.000 description 1
229920002492 poly(sulfone) Polymers 0.000 description 1
229920006122 polyamide resin Polymers 0.000 description 1
229920002312 polyamide-imide Polymers 0.000 description 1
239000004431 polycarbonate resin Substances 0.000 description 1
229920005668 polycarbonate resin Polymers 0.000 description 1
229920000728 polyester Polymers 0.000 description 1
229920006393 polyether sulfone Polymers 0.000 description 1
229920001601 polyetherimide Polymers 0.000 description 1
229920001721 polyimide Polymers 0.000 description 1
239000009719 polyimide resin Substances 0.000 description 1
229920002223 polystyrene Polymers 0.000 description 1
239000000843 powder Substances 0.000 description 1
QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
238000004080 punching Methods 0.000 description 1
UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
239000012783 reinforcing fiber Substances 0.000 description 1
210000003660 reticulum Anatomy 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
238000002791 soaking Methods 0.000 description 1
229910000679 solder Inorganic materials 0.000 description 1
239000000243 solution Substances 0.000 description 1
238000009987 spinning Methods 0.000 description 1
239000007921 spray Substances 0.000 description 1
235000020354 squash Nutrition 0.000 description 1
238000010561 standard procedure Methods 0.000 description 1
MHSKRLJMQQNJNC-UHFFFAOYSA-N terephthalamide Chemical compound NC(=O)C1=CC=C(C(N)=O)C=C1 MHSKRLJMQQNJNC-UHFFFAOYSA-N 0.000 description 1
239000012815 thermoplastic material Substances 0.000 description 1
238000012546 transfer Methods 0.000 description 1
229920003169 water-soluble polymer Polymers 0.000 description 1
239000002023 wood Substances 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08L27/18—Homopolymers or copolymers or tetrafluoroethene
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
- C08J5/0405—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres
- C08J5/042—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres with carbon fibres
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
- C08J5/06—Reinforcing macromolecular compounds with loose or coherent fibrous material using pretreated fibrous materials
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/02—Fibres or whiskers
- C08K7/04—Fibres or whiskers inorganic
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- D—TEXTILES; PAPER
- D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
- D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
- D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
- D21H13/36—Inorganic fibres or flakes
- D21H13/38—Inorganic fibres or flakes siliceous
- D21H13/44—Flakes, e.g. mica, vermiculite
- D—TEXTILES; PAPER
- D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
- D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
- D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
- D21H13/36—Inorganic fibres or flakes
- D21H13/46—Non-siliceous fibres, e.g. from metal oxides
- D21H13/50—Carbon fibres
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/18—Homopolymers or copolymers of tetrafluoroethylene
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/014—Additives containing two or more different additives of the same subgroup in C08K

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
Health & Medical Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Medicinal Chemistry (AREA)
Polymers & Plastics (AREA)
Manufacturing & Machinery (AREA)
Inorganic Chemistry (AREA)
Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Reinforced Plastic Materials (AREA)
Compositions Of Macromolecular Compounds (AREA)
Nonwoven Fabrics (AREA)

CN201510144427.3A 2009-07-02 2010-06-30 半导体制造组件 Pending CN104844993A (zh)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US22277009P	2009-07-02	2009-07-02
US61/222770		2009-07-02
CN201080029578.XA CN102471501B (zh)	2009-07-02	2010-06-30	半导体制造组件

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
CN201080029578.XA Division CN102471501B (zh)	2009-07-02	2010-06-30	半导体制造组件

Publications (1)

Publication Number	Publication Date
CN104844993A true CN104844993A (zh)	2015-08-19

Family

ID=42588264

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
CN201510144427.3A Pending CN104844993A (zh)	2009-07-02	2010-06-30	半导体制造组件
CN201080029578.XA Active CN102471501B (zh)	2009-07-02	2010-06-30	半导体制造组件

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
CN201080029578.XA Active CN102471501B (zh)	2009-07-02	2010-06-30	半导体制造组件

Country Status (6)

Country	Link
EP (1)	EP2449004A1 (ja)
JP (2)	JP2012532217A (ja)
KR (2)	KR20120106712A (ja)
CN (2)	CN104844993A (ja)
SG (1)	SG177442A1 (ja)
WO (1)	WO2011002867A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN109537161A (zh) *	2018-11-19	2019-03-29	扬州超峰汽车内饰件有限公司	一种热塑碳纤维复合板材及生产方法
JP6935841B2 (ja) *	2019-10-23	2021-09-15	ダイキン工業株式会社	半導体洗浄装置用部材
CN117412862A (zh)	2021-03-04	2024-01-16	杜邦特种产品美国有限公司	复合材料以及用于形成该复合材料的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1392569A (en) *	1971-11-24	1975-04-30	Du Pont	Composite structures
CN1962730A (zh) *	2005-11-11	2007-05-16	日信工业株式会社	热塑性树脂组合物及其制备方法
CN101163828A (zh) *	2005-04-19	2008-04-16	帝人株式会社	碳纤维复合片材、其传热体用途及其中所使用的沥青类碳纤维毡用片

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3159526A (en)	1960-11-21	1964-12-01	Hoover Ball & Bearing Co	Laminated board and method of making the same
US3458329A (en)	1963-02-13	1969-07-29	Minnesota Mining & Mfg	Ceramic greensheets
US3298887A (en)	1964-07-23	1967-01-17	Hoover Ball & Bearing Co	Method of manufacturing laminate sheet
US4163742A (en)	1978-02-09	1979-08-07	E. I. Du Pont De Nemours And Company	Process and product prepared from tetrafluoroethylene resin and graphite fibers
US4369083A (en)	1980-12-15	1983-01-18	Nazeer Ahmed	Method of forming composite laminates
US4455343A (en)	1980-12-29	1984-06-19	Ppg Industries, Inc.	Aqueous treating composition for glass fiber strands used to produce mats for thermoplastics
JPS5841973A (ja)	1981-09-07	1983-03-11	東邦レーヨン株式会社	炭素繊維用エマルジヨン型サイジング剤
JPS6047953B2 (ja)	1982-07-05	1985-10-24	東レ株式会社	高次加工性並びにコンポジツト物性に優れた炭素繊維
US4448911A (en)	1983-04-12	1984-05-15	Owens-Corning Fiberglas Corporation	Aqueous epoxy sizing composition for glass fibers and fibers sized therewith
US4448910A (en)	1983-04-25	1984-05-15	Owens-Corning Fiberglas Corporation	Aqueous compositions for sizing glass fibers containing emulsified epoxy resin and chloropropylsilane
JPS6440533A (en) *	1987-08-05	1989-02-10	Nippon Synthetic Chem Ind	Surface treating agent for glass fiber
DE3734180C2 (de)	1987-10-09	1998-01-29	Kuesters Eduard Maschf	Doppelbandpresse zur Herstellung von Holzspanplatten und dergleichen
US4975321A (en)	1988-06-20	1990-12-04	E. I. Du Pont De Nemours And Company	Structural composites of fluoropolymers reinforced with continuous filament fibers
US5227238A (en)	1988-11-10	1993-07-13	Toho Rayon Co., Ltd.	Carbon fiber chopped strands and method of production thereof
JPH02129229A (ja) *	1988-11-10	1990-05-17	Toho Rayon Co Ltd	炭素繊維チョップドストランド及びその製造法
US5253571A (en)	1990-06-01	1993-10-19	Maschinenfabrik J. Dieffenbacher Gmbh & Co.	Method for guiding steel bands about a longitudinal axis of a continuously working press
DE4042531C3 (de)	1990-10-15	2002-02-07	Dieffenbacher Gmbh Maschf	Kontinuierlich arbeitende Presse
JP2545171B2 (ja)	1991-12-16	1996-10-16	日東紡績株式会社	樹脂被覆炭素繊維チョップドストランド
US5470409A (en)	1992-01-16	1995-11-28	E. I. Du Pont De Nemours And Company	Process for making fluoropolymer composites
US5232975A (en)	1992-01-16	1993-08-03	E. I. Du Pont De Nemours And Company	Preconsolidation process for making fluoropolymer composites
ES2135478T3 (es) *	1992-01-16	1999-11-01	Du Pont	Proceso de fabricacion de compuestos de polimero fluorado.
US5506052A (en)	1992-01-16	1996-04-09	E. I. Du Pont De Nemours And Company	Fluoropolymer material
US5236982A (en)	1992-07-13	1993-08-17	Owens-Corning Fiberglas Technology, Inc.	Size composition
DE4301594C2 (de)	1993-01-21	2002-10-31	Dieffenbacher Gmbh Maschf	Verfahren und Anlage zur Herstellung von Spanplatten
DE4301844C2 (de)	1993-01-23	1996-10-02	Held Kurt	Verfahren und Vorrichtung zur Herstellung bahnförmiger Gemische bzw. Bahnen
US5427731A (en)	1993-01-28	1995-06-27	E. I. Du Pont De Nemours And Company	Compression molding of structures
DE9320609U1 (de)	1993-05-18	1994-10-20	Siempelkamp Gmbh & Co	Kontinuierlich arbeitende Presse für das Pressen von Preßgutmatten und Preßgutbahnen im Zuge der Herstellung von Spanplatten, Faserplatten, Laminatplatten u.dgl.
CA2130588A1 (en)	1993-08-25	1995-02-26	Masanobu Kobayashi	Carbon fibers and process for preparing same
ATA185093A (de)	1993-09-14	2000-06-15	Danubia Petrochem Polymere	Doppelbandpresse mit hydrostatischer bandstütze
US5555799A (en)	1994-08-24	1996-09-17	Teledyne Industries, Inc.	Non-stick laminating endless belt press
DE4433641C1 (de)	1994-09-21	1995-11-02	Siempelkamp Gmbh & Co	Kontinuierliche Presse zum Verpressen von Preßgutmatten zu Preßgutplatten
US5451784A (en)	1994-10-31	1995-09-19	Applied Materials, Inc.	Composite diagnostic wafer for semiconductor wafer processing systems
DE19518879A1 (de)	1995-05-28	1996-12-05	Dieffenbacher Gmbh Maschf	Verfahren und Anlage zur Herstellung von Spanplatten
JP3496347B2 (ja)	1995-07-13	2004-02-09	株式会社デンソー	半導体装置及びその製造方法
JP3562152B2 (ja) *	1995-07-14	2004-09-08	三菱化学株式会社	炭素短繊維集合体及びその製造方法並びに繊維強化樹脂組成物
US5759927A (en)	1995-07-24	1998-06-02	Meeker; Brian L.	Glass-fiber-containing non-woven polymer web, and process for preparing same
US5803968A (en)	1995-08-21	1998-09-08	Schwartz; Vladimir	Compact disc spin coater
DE19627024B4 (de)	1996-07-04	2007-08-02	Dieffenbacher Gmbh + Co. Kg	Verfahren und Anlage zum kontinuierlichen Zusammenlegen und Verleimen von Furniertafeln zu Furnierschichtplatten
US6066395A (en)	1997-05-23	2000-05-23	Toray Industries, Inc.	Chopped carbon fibers and a production process there of
US6032446A (en)	1998-04-06	2000-03-07	Deere & Company	Densification method and apparatus for harvested cotton or other similar fibrous material
BR9915039B1 (pt)	1998-12-08	2010-10-05		esteira não intumescente e dispositivo para tratamento de gás de escape.
WO2000034369A2 (en) *	1998-12-09	2000-06-15	Kureha Kagaku Kogyo K.K.	Synthetic resin composition
CA2325374C (en)	1999-06-21	2007-11-27	Andrzej Marek Klemarewski	System and method for making compressed wood product
US6520843B1 (en)	1999-10-27	2003-02-18	Strasbaugh	High planarity chemical mechanical planarization
US20060105164A1 (en) *	2000-06-06	2006-05-18	Nitto Denko Corporation	Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
JP2002266173A (ja) *	2001-03-09	2002-09-18	Mitsubishi Rayon Co Ltd	炭素繊維および炭素繊維強化複合材料
TW591157B (en)	2001-05-25	2004-06-11	Mitsubishi Rayon Co	Sizing agent for carbon fiber, its water dispersing solution, carbon fiber with sizing handling, sheet matter with using the carbon fiber and carbon fiber reinforced composite
TWI220147B (en)	2001-07-24	2004-08-11	Mitsubishi Rayon Co	Sizing agent for carbon fibers and water dispersion thereof, sized carbon fibers, sheet-like articles using said carbon fibers, and carbon fiber enhanced composite material
ES2306775T3 (es)	2001-07-31	2008-11-16	Mitsubishi Rayon Co., Ltd.	Agente de encolado para fibra de carbono, procedimiento para encolar una fibra de carbono mediante dicho agente de encolado, fibra de carbono encolada y tejido de punto o textil que utiliza dicha fibra de carbono.
AT411258B (de)	2001-11-07	2003-11-25	Hoerbiger Kompressortech Serv	Dichtelemente für kompressorventile
US7255747B2 (en)	2004-12-22	2007-08-14	Sokudo Co., Ltd.	Coat/develop module with independent stations
US20090062426A1 (en)	2005-03-25	2009-03-05	Teijin Techno Products Limited	Carbon Fiber Strand for Reinforcing Thermoplastic Resins and Method of Producing the Same
US20070082199A1 (en)	2005-10-11	2007-04-12	Schweizer Robert A	Fiber size, sized reinforcements, and articles reinforced with such reinforcements
JP4891011B2 (ja) *	2006-09-13	2012-03-07	帝人株式会社	補強材・放熱材に適する炭素繊維集合体
JP4557309B2 (ja) *	2007-03-16	2010-10-06	日東電工株式会社	クリーニング部材又はシート、及びこれらを用いたクリーニング方法
US8080171B2 (en)	2007-06-01	2011-12-20	Ocv Intellectual Capital, Llc	Wet-laid chopped strand fiber mat for roofing mat
JP4900117B2 (ja)	2007-07-30	2012-03-21	東京エレクトロン株式会社	現像装置、現像方法及び記憶媒体

2010
- 2010-06-30 JP JP2012517886A patent/JP2012532217A/ja active Pending
- 2010-06-30 WO PCT/US2010/040574 patent/WO2011002867A1/en active Application Filing
- 2010-06-30 EP EP10729044A patent/EP2449004A1/en not_active Ceased
- 2010-06-30 KR KR1020127002824A patent/KR20120106712A/ko not_active Application Discontinuation
- 2010-06-30 KR KR1020177003661A patent/KR20170018479A/ko not_active Application Discontinuation
- 2010-06-30 SG SG2011097458A patent/SG177442A1/en unknown
- 2010-06-30 CN CN201510144427.3A patent/CN104844993A/zh active Pending
- 2010-06-30 CN CN201080029578.XA patent/CN102471501B/zh active Active
2015
- 2015-04-24 JP JP2015089342A patent/JP2015131976A/ja active Pending

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1392569A (en) *	1971-11-24	1975-04-30	Du Pont	Composite structures
CN101163828A (zh) *	2005-04-19	2008-04-16	帝人株式会社	碳纤维复合片材、其传热体用途及其中所使用的沥青类碳纤维毡用片
CN1962730A (zh) *	2005-11-11	2007-05-16	日信工业株式会社	热塑性树脂组合物及其制备方法

Also Published As

Publication number	Publication date
JP2015131976A (ja)	2015-07-23
JP2012532217A (ja)	2012-12-13
CN102471501B (zh)	2015-04-29
WO2011002867A1 (en)	2011-01-06
EP2449004A1 (en)	2012-05-09
SG177442A1 (en)	2012-02-28
KR20120106712A (ko)	2012-09-26
CN102471501A (zh)	2012-05-23
KR20170018479A (ko)	2017-02-17

Legal Events

Date	Code	Title	Description
2015-08-19	C06	Publication
2015-08-19	PB01	Publication
2015-09-16	EXSB	Decision made by sipo to initiate substantive examination
2015-09-16	SE01	Entry into force of request for substantive examination
2019-07-05	WD01	Invention patent application deemed withdrawn after publication
2019-07-05	WD01	Invention patent application deemed withdrawn after publication	Application publication date: 20150819

Publication	Publication Date	Title
CN102471500B (zh)	2014-04-02	具有低金属含量的复合材料
CN102471501B (zh)	2015-04-29	半导体制造组件