CN104844993A - Semiconductor manufacture component - Google Patents
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- CN104844993A CN104844993A CN201510144427.3A CN201510144427A CN104844993A CN 104844993 A CN104844993 A CN 104844993A CN 201510144427 A CN201510144427 A CN 201510144427A CN 104844993 A CN104844993 A CN 104844993A
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08L27/18—Homopolymers or copolymers or tetrafluoroethene
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools, brushes, or analogous members
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
- C08J5/0405—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres
- C08J5/042—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres with carbon fibres
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
- C08J5/06—Reinforcing macromolecular compounds with loose or coherent fibrous material using pretreated fibrous materials
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/02—Fibres or whiskers
- C08K7/04—Fibres or whiskers inorganic
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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- D—TEXTILES; PAPER
- D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
- D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
- D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
- D21H13/36—Inorganic fibres or flakes
- D21H13/38—Inorganic fibres or flakes siliceous
- D21H13/44—Flakes, e.g. mica, vermiculite
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- D—TEXTILES; PAPER
- D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
- D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
- D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
- D21H13/36—Inorganic fibres or flakes
- D21H13/46—Non-siliceous fibres, e.g. from metal oxides
- D21H13/50—Carbon fibres
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/18—Homopolymers or copolymers of tetrafluoroethylene
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/014—Additives containing two or more different additives of the same subgroup in C08K
Abstract
Disclosed herein are processes for making a consolidated or densified composite article comprising polymer, particularly fluoropolymer, and oriented carbon fiber, which provides suitability for use in chemical-mechanical applications.
Description
The application is application number is 201080029578.X, and the applying date is on June 30th, 2010, and denomination of invention is the divisional application of the Chinese patent application of " semiconductor manufacture component ".
Technical field
Field of the present invention comprises the method for the preparation of the matrix material comprising strengthening graphite fibre and fluoropolymer, and described matrix material is for the preparation of semiconductor manufacture component.
Background technology
Comprise polymkeric substance (be generally external phase, and one or more fluoropolymers may be comprised) and fiber (such as glass fibre, carbon fiber and graphite fibre) or by polymkeric substance and fibrous composite product well known in the art.Fiber is added to some characteristic that matrix polymer can improve polymkeric substance.These characteristics can comprise creep resistance, tensile strength and modulus and flexural strength and modulus.Selected reinforcing fiber generally has the tensile modulus higher than independent polymkeric substance and intensity.As described herein, when fluoropolymer is used as matrix polymer, gained matrix material has many attributes of fluoropolymer usually, such as high thermal resistance and chemical-resistant, and described attribute makes this type of matrix material can be used as such as the parts of chemical process industry.An object of the present invention is to provide production, and this type of shows the method for the polymer composites improving characteristic and provides the goods be made up of described method.
Background of invention information about the matrix material producing polymkeric substance and one or more fibers is found in the Polymeric Materials Encyclopedia (on July 23rd, 1996) of Joseph C.Salamone, ISBN-10:084932470X, ISBN-13:978-0849324703,8327-8343 page.
Certain background of invention of double belt press lamination sees A.Trende, B.T.Astrom, A.Woginger, " the Modelling of heat transfer inthermoplastic composites manufacturing:double-belt press laminationin " of C.Mayer, M.Neitzel, Composites Part A:Applied Science and Manufacturing, 30th volume, 8th phase, in August, 1999,935-943 page.
Known methods involving and goods are the U.S. Patent Publication 5 of the people such as the Deakyne of " Process for making fluoropolymer composites " including but not necessarily limited to the exercise question that November 28 nineteen ninety-five announces, 470, 409, the exercise question announced on August 3rd, 1993 is the U.S. Patent Publication 5 of the Deakyne of " Preconsolidation processfor making fluoropolymer composites ", 232, 975, the exercise question announced on August 7th, 1979 is the U.S. Patent Publication 4 of the Mansure of " Process and product preparedfromtetrafluoroethylene polymer and graphite fibers ", 163, 742, the exercise question announced June 27 nineteen ninety-five is the U.S. Patent Publication 5 of the people such as the Chesna of " Compression molding ofstructures ", 427, 731, and the exercise question of announcement on March 14th, 2006 is the U.S. Patent Publication 7 of the people such as the Spiegl of " Sealing elements for compressor valves ", 011, 111.
Additional known methods involving and goods are the U.S. Patent Publication 5 of the Meeker of " Glass-fiber-containing non-woven polymer web; and process for preparingsame " including but not necessarily limited to the exercise question that on June 2nd, 1998 announces, 759,927, with the U.S. Patent Publication 5 that the exercise question announced October 24 nineteen ninety-five is the Held of " Method and apparatus for making highly densified sheets ", 460,764.
Still keep the demand of the improvement any one in these fields being improved or combines, include but not limited to: the manufacture method of simplification; Robust product can be prepared and/or the sane of product and/or reproducible manufacture method can be reproduced; Prepare the method strengthening dense product; Strengthen the goods of density; Preparation has the method for the product of less metal, metallic impurity, ionic impurity or related impurities, especially comprises the method for solvent or water; Utilize the method for the fiber maintaining staple length; Be prepared in the method in whole useful volume with the product of uniform properties; Preparation has any method of the composite products of directional characteristic (such as tensile strength, compressive strength or elongation at break), it is uniform or excellent (or even or excellent in a direction no matter described directional characteristic at which direction of measurement is, or in two orthogonal directions evenly or excellent), etc.
Utilize wherein in the field of composite product, such as in the equipment of semiconductor manufacturing, aircraft components, in automotive component, in packing ring, sealing member is medium seeks these and improve.
Summary of the invention
Disclosed herein is a kind of goods, wherein said goods are that semiconductor manufacture component comprises:
The thermoplastic polymer of (a) about 70 % by weight to about 90 % by weight;
The chopped carbon fiber of (b) about 10 to about 30 % by weight;
The tackiness agent of (c) .001% to about 10%, described tackiness agent is selected from polyvinylpyrrolidone, polyvinyl alcohol, vinyl alcohol copolymer, vinyl acetate copolymer, vinyl alcohol-vinyl acetate multipolymer and Xylo-Mucine, optionally also comprise (d) be less than 2000 nmoles/gram the sodium of combination, potassium, calcium and aluminium; Every % by weight be wherein gross weight based on described assembly in (a), (b) and (c).
Accompanying drawing explanation
Fig. 1 schematically shows some blanks of known art.
Fig. 2 shows the front view according to a blank of the present disclosure and two kinds of composite products.
Embodiment
Composite product for the preparation of the density D c comprising polymkeric substance and fiber is disclosed herein.Method disclosed herein comprises provides blank, and described blank comprises: the fiber of about 1 to about 91 % by weight and the described polymkeric substance of about 9 to about 99 % by weight.Blank has the density of Dm and is less than Dc, and wherein said polymkeric substance has softening temperature.Make described blank be densified to density by compression blank be greater than the Dm of 1.1 times and be less than the Dc of 0.999 times, being simultaneously at least partially at the temperature being less than described softening temperature to provide the blank of compression of described blank.Afterwards, the blank of compression entirety is heated to the temperature being greater than described softening temperature, simultaneously consolidated density be greater than the Dm of 1.1 times and the Dc being less than 0.999 times to provide the blank of preconsolidation.
The temperature that being cooled at least partially of preconsolidation blank is less than described softening temperature is to provide the blank of consolidation.Next step is for the blank along highly stacking multiple consolidation is to provide unconsolidated goods.Unconsolidated goods are then as follows by consolidation: compress the height of described unconsolidated goods and the temperature being heated to its entirety to be greater than described softening temperature to provide the composite product of consolidation.The composite product of consolidation be cooled to the temperature being less than described softening temperature at least partially.
In certain embodiments, the present invention can combine key element known in the art in new ways to realize one or more unexpected or uncertain result, may comprise combination that is unexpected or uncertain result.The independent key element in this type of field can comprise U.S. Patent Publication 5506052,6066395,20090062426,7094468,7150913,5589055,4420512,4975321,4555446,52272385,4448910,4,455,343,20070082199,6444187,4,448,911 or 5236982 or their combination; All these patents are openly incorporated herein by reference.
The density of composite product measures by ASTM D 792-08 standard method of test, and described method measures density and the proportion (relative density) of plastics by Shift Method.The thickness of blank by the TAPPI T411 thickness measurement of paper wood, cardboard or compoboard, and the weight of unit volume by cutting known dimensions (such as 16cm takes advantage of 16cm) and thickness (as by TAPPI T411 measure) region and this known volume weighing blank measure.
The typical blank of polymer flake or particle and fiber (17 of Figure 1A and the 17' of Figure 1B) or composite product can have the density of about 0.2g/mL or less or about 1.9g/mL or larger, and this depends on the weighted density of polymkeric substance used and fiber to a certain extent.With the polymer flake of fiber combinations or the typical consolidation blank (in Fig. 1 C 17 " ' of particle) density that is greater than the blank be made up of it should be had and the density of about 0.3g/mL to about 2.9g/mL can be had, this depends on the weighted density of polymkeric substance used and fiber to a certain extent.Figure 1A-D represents prior art and contributes to understanding the present invention.Figure 1A shows the blank 17 of the polymer beads 102 and fiber 101 comprised between two pieces of templates 60,62.Antiadhesion barrier 61,63 is optionally placed in two pieces of templates 60,62 and between the blank 17 be made up of fiber 101 and polymer beads 102, or template is optionally processed to prevent blank from adhering in template in addition.Heat is optionally applied on blank by blank 17 under the initial low contact pressure carrying out self-template, and described heat applies such as to pass through template.Polymer product will soften when exceeding the softening temperature of polymkeric substance and usually change shape.Figure 1B shows and can go up the blank obtained when forming globule 102 by the fiber (optionally soaking) when temperature exceedes softening temperature and in layer 17'.And the original polymer particle of not all needs to be heated beyond its softening temperature.With regard in the real whole template of the consistent temperatures higher than polymkeric substance softening temperature to provide consolidation blank 17 " blank with regard to; pressure can being applied to template 60,62, making blank height reduce (optionally make its fine and close or to its compression) as shown in Figure 1 C for changing density.Blank as shown in the figure template edge (namely, planar on direction) be in relatively without restrained condition, therefore fiber can move up those sides together with polymkeric substance, make fiber more perpendicular to blank short transverse (short transverse is z direction) and be more parallel to template surface arrangement.
Because polymer-fibre mixtures can be unfettered in plane during any compacting, therefore do not need the force of compression perpendicular to z-axis, and do not need fastening occurs yet.The blank optionally pressurized cooling of consolidation, is especially cooled to lower than softening temperature.This identical sequence of events can utilize the belt press of heating or similar heating zone and nip rolls to realize in continuous foundation.The method can be included in the upper heated polymerizable thing of certain point and exceed softening temperature; This can occur before or after the pressure applying the remarkable compacting of generation.Matrix material can pressurized cooling.
Relatively existing spreader bar preconsolidation/compacting synusia method, blank or (synusia of compacting) of belt press preconsolidation cause extremely smooth product.Extremely smooth synusia be convenient to can the synusia of load compacting for molding step.
Significant compacting means that but compacting is described as density to be less than or equal to the density of expectation to be equal to or greater than initial density more than 10%.Such as, if the initial density of blank is about 0.586g/mL and is 2.1g/mL by the expectation density of the stacking composite product made of independent blank or this type of blank, then the density of the preconsolidation blank of 50% compacting is 0.586+ [0.50* (2.1-0.586)]=1.343g/mL.
The consolidation blank 17 of Fig. 1 C " can as mentioned above further compacting to form finer and close blank or the composite product 17 of Fig. 1 D " '.Equipment for further consolidation can be identical or different with the equipment for initial compacting.
Fig. 2 shows orientation blank and comprises the front view of two kinds of composite products of this type of orientation blank.Fig. 2 A shows the blank 2001 of orientation; For clarity sake, fiber is shown as and is embedded into.Definition coordinate axis group x-y-z 2002, so that the height of blank is parallel to z-axis orientation.Because fiber 2003 is on average along a direction arrangement perpendicular to z-axis, this direction therefore can be specified to correspond to x-axis.Perpendicular to z-axis and x-axis is y-axis.
Blank shown in Fig. 2 A has cut down to produce from larger blank and has been parallel to z-axis and two tangent planes (2006 and 2007) being parallel to y-axis and z-axis respectively.By this type of cutting, viewer can notice the cross-sectional cut of fiber 2004 by xz face 2006 opposing circular, and fiber 2005 is by cross section (or final close to the parallelogram) cutting of xz face 2006 with relative elliptical shape.
Fig. 2 B shows a part for the composite product of the orientation made by the stacking blank corresponding to Fig. 2 A.Composite product shows blank (such as 2022,2023) can have different orientations, such as parallel with each z-axis orientation (along highly stacking), and each direct neighbor contact the fiber orientation at a right angle of blank.If make blank have stacking fibre orientation at a right angle by consolidation two thin blanks, then this type of blank or similar blank can with each z-axis stacked in parallel (along highly stacking), to obtain the composite product of Fig. 2 B.If notice that the blank by consolidation two with the fibre orientation of stacked in parallel makes blank to obtain thicker blank, then the blank of consolidation or similar blank obviously can not with each z-axis stacked in parallel (along highly stacking), to obtain the composite product of Fig. 2 B.
Fig. 2 C shows a part for the composite product 2030 of the orientation made by the stacking blank (such as, 2031 and 2032) corresponding to Fig. 2 A.Note multiple blank groups point in groups (2037,2039,2035, wherein said multiple be the tlv triple of blank).Some blanks are parallel-oriented, some orientations at a right angle.This composite product demonstrates the stack pattern of the orientation pattern that can be called as 0 degree, 0 degree, 0 degree, 90 degree, 90 degree, 90 degree.
Blank is prepared by any known technology.Such as, utilize papermaking process, fiber can with mixed with polymers to form mixture or slurries.Any hydrid component can be utilized, but optimum fiber component with about 0.001% to 5% denseness or solid content (such as, comprising 0.01-5 part solid to 99.009-95 part aqueous solution or water) mixing.Slurries then dilutable water to strengthen shaping, and its finally can utilize flocculation agent and drainage and retention chemical flocculation.Then the mixture of flocculation or slurries can be placed on paper machine to form wet hair base, fibre orientation may to be had or not there is fibre orientation, may during paper-making process in the direction of motion of blank orientation, or perpendicular to this direction orientation.Alternatively, blank is formed by vacuum casting slurries or other method.Blank by making dewatering slurries, such as, utilizes belt press to be formed.Belt press manufacturers is Bright Technologies (Hopkins, Michigan).Blank can be dried, such as in an oven, rotate rotating cylinder on or pass through air-flow.With regard to the more detailed description of some standard papermaking techniques that may be utilized, see United States Patent (USP) 3,458,329, its disclosure is incorporated herein by reference.
Compacting is undertaken by compression or other known method, and described compacting can on one or more axis simultaneously or carry out continuously.Described axis can be mutually orthogonal, such as x-axis, y-axis and z-axis.
Blank can have any length easily, width or height dimension.Blank in height can be greater than 1cm, or is in height less than 0.8,0.6,0.4,0.2,0.1,0.05 or 0.01cm.
Compacting can be low to moderate 100kPa and up to 100MPa, and carries out under about 100kPa and the interval pressure about between 100MPa.
Compacting, heating, cooling or this type of combination can carry out about 0.1 minute, 1 minute, 2 minutes, 5 minutes, 10 minutes, 20 minutes, 100 minutes or multiple hours, about 135 hours or more at the most.
Any method of compacting between processing period can and at least some fiber that may rupture.Therefore, the length of fiber can reduce.Usually advantageously maintain high microsteping length, but if other characteristic of composite product is enhanced, then this target advantageously can be traded off for some application.
Blank is made by other device, and the drying air stream that such as optionally there is polymer beads becomes net.Blank is by dry needle punching compacting.Some aspects of blank technology are present in U.S. Patent Publication 6855298, and its disclosure is incorporated herein by reference.
Polymkeric substance of the present invention can be fluoropolymer, and any polymkeric substance of the present invention can comprise the perfluor (alkoxy alkane) of 3-14 carbon atom of tetrafluoroethylene, such as perfluor (vinyl propyl ether), R 1216, chlorotrifluoroethylene, ethene, the repeating unit of propylene or their combination (multipolymer) or monomer.
Any polymkeric substance of the present invention can optionally flow when heating, and especially flows when exceeding melting point polymer or second-order transition temperature (Tg).Polymkeric substance optionally can soak fiber, especially after softening.
Can be used for polymkeric substance is herein thermoplastic material, and exists with the content of the gross weight based on described assembly about 70 % by weight to about 90 % by weight.
The softening temperature of polymkeric substance is that wherein polymkeric substance can slowly but permanently shaping and usually without fracture, the temperature peeling off or be separated.The example of softening temperature comprises fusing point, the minimum temperature of fusion range, the top temperature of fusion range or second-order transition temperature.
Particle is small pieces or widget, or is tiny segment or spot.Particle can unrestricted flow or adhere to fiber.The type of particle comprises thin slice, Grains, fragment, fragment, micelle, thin slice, pellet, spot, powder etc.
Fiber include but not limited to be made up of following those: glass; Graphite; Carbon; Fluorographite; Aromatic poly amide is poly-(poly P phenylene diamine terephthalamide) such as; Boron nitride; Silicon carbide; Polyester; And polymeric amide.Carbon fiber, graphite fibre and fluorographite fiber are preferred fiber.Fiber of the present disclosure also can be chopped strand.
The median length of fiber can be longer or shorter than or equal to the median elevation of the blank comprising described fiber.
Fiber can be gluing as known in the art.Tackiness agent can comprise such as epoxy resin or polymkeric substance, urethane-modified epoxy resin or polymkeric substance, vibrin or polymkeric substance, phenolic resin or polymkeric substance, polyamide resin or polymkeric substance, urethane resin or polymkeric substance, polycarbonate resin or polymkeric substance, polyetherimide resin or polymkeric substance, polyamide-imide resin or polymkeric substance, polystyrene pyridine resin or polymkeric substance, polyimide resin, bimaleimide resin or polymkeric substance, polysulfone resin or polymkeric substance, polyethersulfone resin or polymkeric substance, the urethane resin of epoxide modification or polymkeric substance, polyvinyl alcohol resin or polymkeric substance, polyvinyl pyrrolidone resin or polymkeric substance, resin or polymkeric substance and their mixture.Tackiness agent can be that the compatible or aqueous phase of solvent holds, and can be solvent-soluble solution or water miscible.Polyvinylpyrrolidone (PVP), a kind of known tackiness agent is the water-soluble polymers be made up of monomer N-vinyl pyrrolidone.Known tackiness agent is disclosed in the U.S. and announces 20080299852; U.S. Patent Publication 5,393,822 and 7,135, in 516.
Method for the preparation of polymer-fibre matrix material comprises a common dispersed copolymer thin slice, and described thin slice has certain the irregular fibrous texture extended by irregular periphery.For made blank by paper-making technique water in thin slice or altogether discrete sheet and fiber can have the Canadian Standard Freeness being greater than 200, the freeness test maximum value of 2000 at the most.For made blank by paper-making technique water in thin slice or altogether discrete sheet and fiber settling time that can to have 1 to 13000 second or more.The ratio of fibre content by weight that will be used in blank is optionally utilized in the aqueous solution to measure the settling time (namely, the polymer solids being suitable for being formed obvious homogeneous phase slurries being less than 1% based on weighing scale is observed until form a new layer or top naked eyes this type of time recognizable in bottom, and described slurries are suitable for feeding into screen cloth finally to form blank).Settling time can be greater than about 2 seconds to about 12000 seconds.
In any embodiment, most of water is removed to form wet hair base by blank; More water is removed to form dry blank by described layer; Dry described layer is to form self-supporting plane blank; Optionally fibrous reticulum described in thermal caking with improve for the treatment of dry tenacity and exceed blank described in polymer melting temperature preconsolidation to form different blanks by the described blank of heating, the pressure applying abundance perpendicular to the plane of described blank subsequently to form the blank of preconsolidation to make polymer flow; And cool this blank.Aqueous slurry can be substantially free of other component.
Fibre content in the present composition is the gross weight about 10 % by weight to about 30 % by weight based on described assembly.
Suitable belt press is well known, such as U.S. Patent Publication 3, and 159,526; 3,298,887; 4,369,083; 5,112,209; 5,433,145; 5,454,304; 5460764; 5,520,530; 5,546,857; 5,555,799; 5592874; 5759927; 5,895,546, each in these patents is incorporated in full with way of reference all accordingly.The manufacturers of suitable belt press, especially isobaric double belt press is Held Technologie GmbH, Germany.Manufacturers for the biobelt system of fibre reinforced thermoplasticity plastics is BerndorfBand GmbH, Austria.
Suitable spreader bar is well known, such as U.S. Patent Publication 5, and 775,214,5,253,571,5,323,696 and 5,333,541, each in these patents is incorporated in full with way of reference all accordingly.The manufacturers of suitable pressing machine comprises Maschinenfabrik Herbert MeyerGmbH, Germany (vertical press or laminating press, such as model APV, Fusing PressAHV-Bm, or there is 20 tons of pressure at the most and the AHV-S with 673K hot-plate at the most).
The compression that applying replaces and the appropriate method of heating phase are that people are known, such as U.S. Patent Publication 6,287,410, and each in patent is incorporated in full with way of reference all accordingly.
The appropriate method applying heat includes but not limited to blank or composite product are contacted with hot surface (such as conducting); Warm air is utilized to spray (such as convection current); And utilize radiation (such as infrared radiation or microwave radiation).
Debulking methods is well known, such as U.S. Patent Publication 6,032,446, and each in patent is incorporated in full with way of reference all accordingly.
Consolidation can be carried out under the condition identical with compacting.In addition, during consolidation, in multiple combination known in the art, be heated to exceed the temperature of softening temperature or be heated to all optionally carry out as herein defined lower than the temperature of softening temperature or both.Therefore, can prepare the density comprising polymkeric substance and fiber is the composite product of Dc, and described method comprises provides the first blank.First blank can be the material comprising thin blank.In any one situation, blank comprises the fiber of 1-91 % by weight and the polymkeric substance of 9-99 % by weight.First blank has the density D m being less than Dc.
By be compressed to the Dm that is greater than 1.1 times and density compacting first blank being less than the Dc of 0.999 times simultaneously the first blank be in the temperature being less than described softening temperature at least partially under.This will provide the blank of compression.Afterwards, the blank of compression entirety is heated to the temperature of the softening temperature being greater than polymkeric substance, and consolidated density is greater than the Dm of 1.1 times and is less than the Dc of 0.999 times simultaneously.This will provide the blank of preconsolidation, and it is cooled subsequently, or its temperature being cooled to the described softening temperature being less than polymkeric substance is at least partially to provide the blank of consolidation.
Then the blank of multiple consolidation is along highly stacking to provide unconsolidated goods.The height of non-consolidation goods is compressed and entirety is heated to the temperature of the softening temperature being greater than polymkeric substance to provide the composite product of consolidation.The temperature being cooled to the softening temperature being less than polymkeric substance at least partially of the composite product of consolidation.
The method by preparation stacking described in preconsolidation with the composite product of orientation is disclosed herein, stackingly described in preconsolidation to carry out as follows: described in heating, be stacked to the melt temperature exceeding polymkeric substance, apply enough pressure perpendicular to the plane of blank subsequently and blank is planar unfettered to cause fluoropolymer to flow on direction, make fiber by orientation in the described plane being flowing in described layer substantially to form the thin slice of preconsolidation.
Composite product can be used for chuck, such as, for the rotary chuck in the coating machine of fixed wafer, or is used for the CMP chuck of fixed wafer or polishing pad in chemically machinery polished (CMP) period.Especially preferred is around z-axis with the chuck of high speed rotating, and the intensity in the X-Y plane of wherein matrix material allows to use higher diameter or higher speed, allows larger chuck or larger wafer or processes faster or more sane processing.The matrix material of preferably resistance to deformation in this external chuck, thus wafer is fixed in the planimetric position for accurately processing.In semiconductor manufacturing goods, also value degree of cleaning in matrix material (such as, low-metal content, low or metal or ion elution slowly), be included in rotation, rinsing and irradiation modules and chuck.Matrix material is be evaluated as the supporting structure for semiconductor wafer, and such as this type of supporting structure is also known as wafer chuck, crystal cup or wafer base.Semiconductor manufacturing goods are well known, such as, in U.S. Patent Publication 7357842; 20090033898; 5451784; 5824177; In 5803968 and 6520843, each in these patents is incorporated in full with way of reference all accordingly.
Composite product can be used for sealing element, such as, for U.S. Patent Publication 7, and 011, in compressor valve disclosed in 111; Each in patent is incorporated in full with way of reference all accordingly.
The present invention can be used for following at least one or combination (including but not limited to): the manufacture method of simplification; Robust product can be prepared and/or the sane of product and/or reproducible manufacture method can be reproduced; Prepare the method strengthening dense product; Strengthen the goods of density; Preparation has the method for the product of less metal, metallic impurity, ionic impurity or related impurities, especially comprises the method for solvent or water; Utilize the method for the fiber maintaining staple length; Be prepared in the method in whole useful volume with the product of uniform properties; Preparation has any method of the composite products of directivity characteristics (such as tensile strength, compressive strength or elongation at break), it is uniform or excellent (or even or excellent in one direction no matter described directivity characteristics at which direction of measurement is, or even or excellent in the two orthogonal directions), etc.
Composite product of the present invention can be used for known application, and such as, in the equipment of semiconductor manufacturing, in aircraft components, in automotive component, in packing ring, sealing member is medium.Goods of the present invention can be spinning disc.
embodiment
Be similar to following material and be specified in following patent for the preparation of the method for analog material and goods: the exercise question announced November 28 nineteen ninety-five is the U.S. Patent Publication 5 of the people such as the Deakyne of " Process for making fluoropolymercomposites ", 470, 409, the exercise question announced on August 3rd, 1993 is the U.S. Patent Publication 5 of the Deakyne of " Preconsolidation process for making fluoropolymer composites ", 232, 975, the exercise question announced June 27 nineteen ninety-five is the U.S. Patent Publication 5 of the people such as the Chesna of " Compression molding of structures ", 427, 731, and the exercise question of announcement on August 7th, 1979 is the U.S. Patent Publication 4 of the Mansure of " Process and productprepared from tetrafluoroethylene polymer and graphite fibers ", 163, 742, all these patents are all incorporated in full with way of reference.
In the examples below,
pFA is E.I.du Pont de Nemours and Company, Wilmington, the registered trademark of Delaware also derives from the said firm, and can comprise the polymkeric substance containing the have an appointment tetrafluoroethylene of 99 % by mole and the perfluor (propyl vinyl ether) of about 1 % by mole.
Carbon fiber CF1 used is polyacrylonitrile-radical, there is the length of about 6.0mm, the diameter of about 5-7 micron, the tap density of about 200g/L, the tackiness agent that about aqueous phase of 4 % by weight holds, according to the carbon density of about 1.8g/cm3 of ASTM D1505, according to the tensile strength at least about 500ksi (being greater than 3450MPa) of ASTM D4018 and the tensile modulus of at least about 31.6Msi.In fiber, the ultimate analysis (unit is nmole/gram fiber) of metal content demonstrates that sodium is about 170000, the result of potassium 770, calcium 180 and aluminium 22.
Similar fiber CF2 has lower metal content.In fiber, the ultimate analysis (unit is nmole/gram fiber) of metal content demonstrates the result that sodium is about 830, potassium 510, calcium are less than 10 and aluminium 3.Tensile strength is >500ksi (>3.45GPa), and tensile modulus is >30Msi (>207GPa), and fiber shows and is better than CF1 a little.Adhesive content is 3.8 % by weight; Adhesive characteristics is that it is water miscible.
The fiber CF3 that physical property is similar to CF2 also has the metal content being similar to CF2, but is substantially free of tackiness agent.
One class
pFA pellet PFAP1 (tetrafluoroethylene-perfluoro (propyl vinyl ether) multipolymer, CAS 26655-00-5) there is the fusing point of about 305C, the flow of 14g/ (10min) and the tensile yield strength of about 13.8MPa and according to ASTM D3307 tensile strength of 12MPa under about 25MPa and 250C under 25C, and the proportion of about 2.15g/mL.
The disc refiner utilizing Andritz Sprout (Muncy, PA) to manufacture type prepares PFA thin slice (PFAF1) by PFAP1, as in the Patent publication No US5506052A of Deakyne propose.
Wet hair base Mw1 according to the method for US5506052A by by weight 20% CF1 and by weight 80% PFAF1 make.
The dry blank Md1 be made up of Mw1 (before Mw1 compresses significantly) has the width of about 16.75 inches, more than the length of 18 inches, and the basic weight of about 0.12lb/ft2.
The bonding blank Mc1 be made up of Md1 (before Md1 compresses significantly) has the thickness of about 0.095 inch (about 2.4mm, 2400 microns) and approximately identical basic weight.
The goods CAp1-24 of preconsolidation is made up of the cutting part of bonding blank type Mc1 on spreader bar.Cut the square of about 16.5 inches, make the mark in initial length direction.By stacking on another for about 24 blanks one, wherein each all nearest with their one (for top or bottom blank) or two (for the inner blank) neighbours of length direction are orthogonally oriented, to prepare the stacking of about 2.2 inchs.Stacking at Essential Environment temperature to be positioned in temperature control spreader bar and to heat, so that whole stacking temperature is greater than 310C (583K, 590F) the simultaneously stacking minimally compression under the pressure being less than 90psi (4310Pa) along thickness (z) direction, and (x and y) direction are by the constraint of any impressed pressure at length and width.Subsequently stacking to compress further along thickness direction of heating completely is terminated heat and begin to cool down simultaneously.Stacking being therefore reduced to by the temperature of the thickness and whole goods that attach to about 0.285 inch is less than 290C (563K, 554F).Subsequently stacking temperature and pressure is reduced to envrionment conditions to obtain goods CA1-24.
By replacing CF1 with carbon fiber CF2 and CF3 respectively, prepare goods CA2-24 and CA3-24 with for CA1-24 is identical.As compared to Mw1 with Mw2 mixing CF2, the wet hair base Mw3 mixing CF3 (not containing tackiness agent) is processing with significantly different in appearance.The matrix material be made up of gluing carbon fiber CF2 shows excellent tensile strength and outward appearance.
Heatable belt press HBP1 or HPB2 is for making the blank of preconsolidation.HBP1 is continuous print double belt press, has the working width of about 30 inches and the processing length of about 10 feet.The working height adjustable of constant clearance.Belt press temperature is adjustable in multiple region.
Run BP1 time, the inlet region of HBP1 is set as 500F, and delivered inside district is set as 700F, and with water in processing length comparatively after cooling zone cool, water enters region with about 32F and leaves final cooling zone to be less than 100F.Gap between two bands is set as about 0.028 inch, as passed through being of uniform thickness after the solder linear measure outlet of pressing machine.Article two, band is all coated with antiseized preparation.Make the monolithic blank of highly about 0.095 inch through pressing machine with the blank of the preconsolidation of continuous production height about 0.015 inch.Blank is fed to belt press with 12 inch per minute clocks.In BP2 on probation, the feeding rate of blank is increased to 15 inch per minute clocks.
In BP3 on probation, three blanks continuously and be fed to the length parallel alignment that belt press makes them simultaneously simultaneously.Article two, the gap between band is about 0.084 inch, and the blank height of preconsolidation is about 0.045 inch.Feeding rate is 12 inch per minute clocks.
Similarly in BP4, five blanks continuously and be fed to the length parallel alignment that belt press makes them simultaneously simultaneously.Article two, the gap between band is about 0.10 inch, and the blank height of preconsolidation is about 0.075 inch.Feeding rate is 12 inch per minute clocks.
The blank of the preconsolidation deriving from often kind of belt press processing (BP1-4 etc.) is cut into separately a few part, identical with the material prepared for spreader bar be assembled into mutually orthogonally stacking, and final following compression.
Carry out the stacking final compression of preconsolidation blank to obtain the finished product of about 6.5 inch height.
The blank of the preconsolidation of 1.85g/mL density prepared by spreader bar has been noted and has been heated to be tied the expansion of [16 square inches upper 80 tons] period to reduce its density to about 1.4g/mL more than 300C simultaneously.The blank of preconsolidation prepared by the belt press of constant clearance has the density of about 1.4g/mL and do not experience significant expansion during being heated to the constraint of 300C simultaneously by uniform pressure.Under exposure pressure and temperature characteristic condition identical in goods compacting, higher in the blank situation of the preconsolidation that final compacting is prepared on the belt press of constant clearance.
Composite product can have the thermal expansivity of about 10ppm/K on XY direction; Thermal expansivity in Z-direction can be greater than or less than on XY direction.
Except as otherwise noted, all parts all by mass.
Claims (4)
1. goods, wherein said goods are semiconductor manufacture component, and described semiconductor manufacture component comprises:
The thermoplastic polymer of (a) 70 % by weight to 90 % by weight;
(b) 10 chopped carbon fiber of weight to 30 % by weight;
The tackiness agent of (c) 0.001 % by weight to 10 % by weight, described tackiness agent is selected from polyvinylpyrrolidone, polyvinyl alcohol, vinyl alcohol copolymer, vinyl acetate copolymer and Xylo-Mucine; With
(d) have be less than 2000 nmoles/gram the carbon fiber of the sodium of combination, potassium, calcium and aluminium;
Wherein each % by weight in (a), (b) and (c) is based on the gross weight of described assembly; And
The total amount of all components wherein used in this semiconductor manufacture component is 100%.
2. the goods of claim 1, wherein said thermoplastic polymer comprises copolymerization (tetrafluoroethylene-perfluoro [propyl vinyl ether]).
3. the goods of claim 1 or 2, wherein said goods are semiconductor manufacturing cleaning assemblies.
4. the goods of claim 1 or 2, wherein said tackiness agent is selected from vinyl alcohol-vinyl acetate multipolymer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22277009P | 2009-07-02 | 2009-07-02 | |
| US61/222770 | 2009-07-02 | ||
| CN201080029578.XA CN102471501B (en) | 2009-07-02 | 2010-06-30 | Semiconductor manufacture component |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080029578.XA Division CN102471501B (en) | 2009-07-02 | 2010-06-30 | Semiconductor manufacture component |
Publications (1)
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| CN104844993A true CN104844993A (en) | 2015-08-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201080029578.XA Active CN102471501B (en) | 2009-07-02 | 2010-06-30 | Semiconductor manufacture component |
| CN201510144427.3A Pending CN104844993A (en) | 2009-07-02 | 2010-06-30 | Semiconductor manufacture component |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201080029578.XA Active CN102471501B (en) | 2009-07-02 | 2010-06-30 | Semiconductor manufacture component |
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| EP (1) | EP2449004A1 (en) |
| JP (2) | JP2012532217A (en) |
| KR (2) | KR20170018479A (en) |
| CN (2) | CN102471501B (en) |
| SG (1) | SG177442A1 (en) |
| WO (1) | WO2011002867A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109537161A (en) * | 2018-11-19 | 2019-03-29 | 扬州超峰汽车内饰件有限公司 | A kind of thermoplastic carbon fiber composite board and production method |
| CN114556539A (en) * | 2019-10-23 | 2022-05-27 | 大金工业株式会社 | Member for semiconductor cleaning device |
| WO2022187782A1 (en) | 2021-03-04 | 2022-09-09 | Dupont Polymers, Inc. | Composite material and method for forming the composite material |
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Also Published As
| Publication number | Publication date |
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| CN102471501B (en) | 2015-04-29 |
| KR20120106712A (en) | 2012-09-26 |
| KR20170018479A (en) | 2017-02-17 |
| JP2012532217A (en) | 2012-12-13 |
| WO2011002867A1 (en) | 2011-01-06 |
| JP2015131976A (en) | 2015-07-23 |
| EP2449004A1 (en) | 2012-05-09 |
| CN102471501A (en) | 2012-05-23 |
| SG177442A1 (en) | 2012-02-28 |
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