CN104576788B - Enhanced Graphene/cadmium-Te solar battery of a kind of cadmium selenide and preparation method thereof - Google Patents

Enhanced Graphene/cadmium-Te solar battery of a kind of cadmium selenide and preparation method thereof Download PDF

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CN104576788B
CN104576788B CN201410827635.9A CN201410827635A CN104576788B CN 104576788 B CN104576788 B CN 104576788B CN 201410827635 A CN201410827635 A CN 201410827635A CN 104576788 B CN104576788 B CN 104576788B
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cadmium
layer
graphene
electrode
solar battery
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CN104576788A (en
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林时胜
李晓强
陈红胜
骆季奎
李尔平
王朋
章盛娇
徐志娟
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Zhejiang University ZJU
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/0296Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
    • H01L31/0725Multiple junction or tandem solar cells
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
    • H01L31/074Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a heterojunction with an element of Group IV of the Periodic System, e.g. ITO/Si, GaAs/Si or CdTe/Si solar cells
    • HELECTRICITY
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention relates to enhanced Graphene/cadmium-Te solar battery of a kind of cadmium selenide and preparation method thereof, Graphene/the cadmium-Te solar battery has substrate, conductive film plating layer, cadmium-telluride layer, graphene layer and cadmium selenide layer from bottom to top successively, described solar cell is additionally provided with first electrode and second electrode, first electrode is arranged on conductive film plating layer, and second electrode is arranged on graphene layer.Its preparation method is as follows:It is first that conductive film plating layer, redeposited cadmium-telluride layer are deposited on substrate;Then Graphene is transferred on cadmium-telluride layer;Cadmium selenide layer is prepared on graphene layer;Electrode is made respectively on graphene layer and conductive film plating layer after last, obtains solar cell.Obtaining the Graphene/cadmium-Te solar battery with high transformation efficiency, process is simple is easy to popularization to the photoproduction doping effect that the enhanced Graphene/cadmium-Te solar battery of cadmium selenide of the present invention is introduced using cadmium selenide.

Description

Enhanced Graphene/cadmium-Te solar battery of a kind of cadmium selenide and preparation method thereof
Technical field
The present invention relates to a kind of novel solar battery and its manufacture method, more particularly to the enhanced Graphene of cadmium selenide/ Cadmium-Te solar battery and preparation method thereof, belongs to technical field of solar batteries.
Background technology
Solaode, as a kind of new green power, is the most important regenerative resource of sustainable development of the mankind. At present, the share of crystal silicon solar energy battery occuping market ~ 90%.But compared with conventional power generation usage, solar cell cost of electricity-generating is still It is higher, limit its extensive application.One of the reason for solar cell cost of electricity-generating is higher is that battery manufacture is relatively costly and photoelectricity Transformation efficiency is relatively low.
Since finding from grapheme material, the excellent properties which is shown in electricity, optics, magnetics and terms of mechanics are such as New, high Young's moduluss of high carrier mobility, high printing opacity etc. have caused Graphene in the hope of numerous areas application.Its Middle Graphene opens gate in the application of energy field for Graphene in the applied research of area of solar cell.At present, There is researcher to make solaode using the hetero-junctions that Graphene and silicon materials are formed, highest transformation efficiency reaches 14.5%, And conventional solar cell manufacturing process is considerably simplify, manufacturing cost can be substantially reduced.For the sun Can be for battery applications, silicon materials energy gap is narrower, while be indirect forbidden band, less than optimal basic material.Cadmium telluride With appropriate energy gap, and direct band gap material, it is contemplated that higher transformation efficiency can be obtained.Graphene/telluride Up to the present the research of cadmium heterojunction solar battery also do not have been reported that on this basis, the present invention proposes cadmium selenide increasing Strong Graphene/cadmium telluride solaode, the addition of CdSe quantum dots layer or thin layer can greatly promote Graphene/tellurium The transformation efficiency of cadmium heterojunction solar battery.
The content of the invention
It is an object of the invention to provide the enhanced graphite of cadmium selenide of a kind of phototranstormation efficiency height and preparation process is simple Alkene/cadmium-Te solar battery and preparation method thereof.
Enhanced Graphene/the cadmium-Te solar battery of cadmium selenide of the present invention, has substrate, conductive plated film from bottom to top successively Layer, cadmium-telluride layer, graphene layer and cadmium selenide layer, described solar cell are additionally provided with first electrode and second electrode, and first is electric Pole is arranged on conductive film plating layer, and second electrode is arranged on graphene layer.
Described conductive film plating layer can be metal, ITO, FTO, N-shaped doping zinc-oxide or p-type doping zinc-oxide.
Graphene in described graphene layer is usually 1-10 layers.
Described cadmium selenide layer can be cadmium selenide thin film or CdSe quantum dots layer, described CdSe quantum dots diameter For 1nm-1 μm.
Described substrate can be rigid substrate or flexible substrate.
Described first electrode and second electrode can be the compound of one or more in gold, palladium, silver, titanium, chromium and nickel Electrode.
The method for preparing the enhanced Graphene/cadmium-Te solar battery of above-mentioned cadmium selenide, comprises the steps:
1)In clean Grown conduction film plating layer;
2)Cadmium-telluride layer is deposited on conductive film plating layer, and the face of growth first electrode is reserved in conductive plated film layer surface Product;
3)Graphene is transferred on cadmium-telluride layer;
4)Cadmium selenide layer is made on graphene layer, and the area of growth second electrode is reserved on graphene layer surface;
5)The deposition of first electrode on conductive film plating layer, and second electrode is deposited on graphene layer.
The present invention is had an advantageous effect in that compared with prior art:Enhanced Graphene/the telluride of cadmium selenide of the present invention Cadmium solar cell, by CdSe quantum dots layer or thin layer are added in Graphene/cadmium-Te solar battery, can play light and mix Miscellaneous effect so that the electricity conversion of the solar cell lifts 50% or so in original basis, additionally, with conventional crystal silicon too Positive energy battery manufacturing process is compared, and the preparation process is simple of the solar cell of the present invention, cost are relatively low, is easy to promote.
Description of the drawings:
Structural representations of the Fig. 1 for the enhanced Graphene/cadmium-Te solar battery of cadmium selenide;
Energy band schematic diagrams of the Fig. 2 for the enhanced Graphene/cadmium-Te solar battery of cadmium selenide.
Specific embodiment
The present invention will be further described with specific embodiment below in conjunction with the accompanying drawings.
With reference to Fig. 1, the enhanced Graphene/cadmium-Te solar battery of cadmium selenide of the present invention have successively from bottom to top substrate 1, Conductive film plating layer 2, cadmium-telluride layer 3, graphene layer 4 and cadmium selenide layer 6, described solar cell are additionally provided with first electrode 5 and Two electrodes 7, first electrode 5 are arranged on conductive film plating layer 2, and second electrode 7 is arranged on graphene layer 4.
Embodiment 1:
1)Polyimide flex substrate is cleaned up in deionized water and is dried up;
2)The indium doped tin oxide of 40 nanometer thickness of magnetron sputtering deposition is utilized on polyimide flex substrate;
3)6 microns of thick cadmium-telluride layers are deposited using physical gas phase deposition technology on indium doped tin oxide layer, and in ITO layer The area of upper reserved growth first electrode;
4)Single-layer graphene is transferred on cadmium-telluride layer;
5)The spin coating CdSe quantum dots solution on Graphene, and the area of growth second electrode is reserved on Graphene; The CdSe quantum dots are a diameter of 1nm-1 μm;
6)Reserve at the reserved area of Graphene and in ITO layer and coat at area silver paste and dry;Obtain cadmium selenide increasing Strong Graphene/cadmium telluride solaode.
The band structure schematic diagram of the enhanced Graphene/cadmium-Te solar battery of cadmium selenide for obtaining as shown in Figure 2, light The electronics produced in CdSe quantum dots and cadmium-telluride layer according in the case of is injected in Graphene, and cadmium-telluride layer collects empty Cave, so as to produce electric potential difference, as the photodoping effect of cadmium selenide layer is remarkably improved the electricity conversion of solar cell.
Embodiment 2:
1)Glass substrate is cleaned up in deionized water and is dried up;
2)On a glass substrate using the fluorine doped tin oxide of 200 nanometer thickness of magnetron sputtering deposition;
3)8 microns of thick cadmium-telluride layers are deposited using physical gas phase deposition technology on fluorine doped tin oxide layer, and in FTO layers The area of upper reserved growth first electrode;
4)Three layer graphenes are transferred on cadmium-telluride layer;
5)CdSe quantum dots solution is sprayed on Graphene, and the face of growth second electrode is reserved on graphene layer Product;The CdSe quantum dots are a diameter of 1nm-1 μm;
6)Thermal evaporation gold electrode at area is reserved at the reserved area of graphene layer and on fluorine doped tin oxide layer;Obtain selenium Enhanced Graphene/the cadmium-Te solar battery of cadmium.
Embodiment 3:
1)Ceramic substrate is cleaned up in deionized water and is dried up;
2)On a ceramic substrate using the nickel metal of 60 nanometer thickness of electron-beam evaporation;
3)5 microns of thick cadmium-telluride layers are deposited using chemical bath method on nickel metal layer, and is reserved on nickel metal layer The area of growth first electrode;
4)10 layer graphenes are transferred on cadmium-telluride layer;
5)Cadmium selenide thin film is prepared on Graphene, and the area of growth second electrode is reserved on graphene layer;
6)Silk screen printing silver electrode at area is reserved at the reserved area of graphene layer and on nickel metal layer;Obtain selenizing Enhanced Graphene/the cadmium-Te solar battery of cadmium.
Embodiment 4:
1)Ceramic substrate is cleaned up in deionized water and is dried;
2)On a ceramic substrate using the nickel metal of 60 nanometer thickness of electron-beam evaporation;
3)5 microns of thick cadmium-telluride layers are deposited using chemical bath method on nickel metal layer, and is reserved on nickel metal layer The area of growth first electrode;
4)10 layer graphenes are transferred on cadmium-telluride layer;
5)The drop coating CdSe quantum dots solution on Graphene, and the face of growth second electrode is reserved on graphene layer Product;The CdSe quantum dots are a diameter of 1nm-1 μm;
6)Reserve on Graphene at area and on nickel metal layer, reserve silk screen printing silver electrode at area;Obtain selenizing Enhanced Graphene/the cadmium-Te solar battery of cadmium.
Embodiment 5:
1)Polyethylene terephthalate substrate is cleaned up in deionized water and dried up;
2)The Al-Doped ZnO of 100 nanometer thickness of pulsed laser deposition is utilized on polyethylene terephthalate substrate;
3)10 microns of thick cadmium-telluride layers of vapour pressure techniques of deposition are utilized on Al-Doped ZnO layer, and is mixing alumina Change the area that growth first electrode is reserved on zinc;
4)8 layer graphenes are transferred on cadmium-telluride layer;
5)The spin coating CdSe quantum dots solution on Graphene, and the face of growth second electrode is reserved on graphene layer Product;The CdSe quantum dots are a diameter of 1nm-1 μm;
6)Thermal evaporation palladium, silver, titanium compound electric at the reserved area of graphene layer and at the reserved area of Al-Doped ZnO layer Pole;Obtain the enhanced Graphene/cadmium-Te solar battery of cadmium selenide.
Embodiment 6:
1)Silicon carbide substrates are cleaned up in deionized water and is dried up;
2)On silicon carbide substrates using the Al-Doped ZnO of 150 nanometer thickness of metal organic chemical vapor deposition;
3)3 microns of thick cadmium-telluride layers of vapour pressure techniques of deposition are utilized on Al-Doped ZnO layer, and is mixing alumina Change the area that growth first electrode is reserved in zinc layers;
4)6 layer graphenes are transferred on cadmium-telluride layer;
5)Cadmium selenide thin film is prepared on Graphene, and the area of growth second electrode is reserved on graphene layer;
6)Thermal evaporation chromium, nickel combination electrode at the reserved area of graphene layer and at the reserved area of Al-Doped ZnO layer; Obtain the enhanced Graphene/cadmium-Te solar battery of cadmium selenide.

Claims (7)

1. the enhanced Graphene/cadmium-Te solar battery of a kind of cadmium selenide, it is characterised in that have substrate from bottom to top successively(1)、 Conductive film plating layer(2), cadmium-telluride layer(3), graphene layer(4)And cadmium selenide layer(6), it is electric that described solar cell is additionally provided with first Pole(5)And second electrode(7), first electrode(5)It is arranged on conductive film plating layer(2)On, second electrode(7)It is arranged on graphene layer (4)On.
2. the enhanced Graphene/cadmium-Te solar battery of cadmium selenide according to claim 1, it is characterised in that described leads Plating film layer(2)For metal, ITO, FTO, N-shaped doping zinc-oxide or p-type doping zinc-oxide.
3. the enhanced Graphene/cadmium-Te solar battery of cadmium selenide according to claim 1, it is characterised in that described stone Black alkene layer(4)In Graphene be 1-10 layers.
4. the enhanced Graphene/cadmium-Te solar battery of cadmium selenide according to claim 1, it is characterised in that described selenium Cadmium layer(6)For cadmium selenide thin film or CdSe quantum dots layer, described CdSe quantum dots are a diameter of 1nm-1 μm.
5. the enhanced Graphene/cadmium-Te solar battery of cadmium selenide according to claim 1, it is characterised in that described lining Bottom(1)For rigid substrate or flexible substrate.
6. the enhanced Graphene/cadmium-Te solar battery of cadmium selenide according to claim 1, it is characterised in that described One electrode(5)For the combination electrode of one or more in gold, palladium, silver, titanium, chromium and nickel, described second electrode(7)For gold, The combination electrode of one or more in palladium, silver, titanium, chromium and nickel.
7. the method for preparing the enhanced Graphene/cadmium-Te solar battery of cadmium selenide as described in any one of claim 1 ~ 6, its It is characterised by comprising the steps:
1)In clean substrate(1)Upper growth conduction film plating layer(2);
2)In conductive film plating layer(2)Upper deposition cadmium-telluride layer(3), and in conductive film plating layer(2)The reserved growth first electrode in surface (5)Area;
3)Graphene is transferred to into cadmium-telluride layer(3)On;
4)In graphene layer(4)Upper making cadmium selenide layer(6), and in graphene layer(4)The reserved growth second electrode in surface(7)'s Area;
5)In conductive film plating layer(2)Upper deposition of first electrode(5), and in graphene layer(4)Upper deposition second electrode(7).
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