CN104097269A - Guide wheel with customized groove type for multi-line cutting and preparation method thereof - Google Patents
Guide wheel with customized groove type for multi-line cutting and preparation method thereof Download PDFInfo
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- CN104097269A CN104097269A CN201310463516.5A CN201310463516A CN104097269A CN 104097269 A CN104097269 A CN 104097269A CN 201310463516 A CN201310463516 A CN 201310463516A CN 104097269 A CN104097269 A CN 104097269A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
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Abstract
The invention relates to a guide wheel with a customized groove type for multi-line cutting and a preparation method thereof. A guide wheel groove which is formed in the guide wheel and is used for arranging saw lines is provided with a flat bottom, a saw line positioning side wall and a saw line guide side wall, the width of the bottom accounts for 40%-80% of the diameter of the saw lines, the slopes and heights of the side walls are customized according to the width of the bottom, the diameter of the saw lines, the groove distance requirement, the diameter of the guide wheel and the distance between mutually-matched guide wheel shafts. According to the guide wheel with the customized groove type for multi-line cutting and the preparation method thereof, compared with a guide wheel with a traditional V-shaped or U-shaped cross section groove type, the guide wheel has the advantages that on the premise that the saw line positioning capability is not damaged, not only can the service life be obviously prolonged, but also the saw line jumping and shaking risks are greatly reduced, defective cutting such as line marks and TTV can be well reduced.
Description
Technical field
The present invention relates to a kind of multi-wire saw guide wheel that customizes grooved and preparation method thereof, be applicable to use the hard materials such as free abrasive and/or concretion abrasive multi-wire saw processing crystal silicon, carborundum, crystal, sapphire.Background technology
When come worked crystal silicon, sapphire and other high rigidity solid thin-sheet with multi-line cutting machine, mainly contain two kinds of process routes.A kind of is use smooth sawline and be dispersed in the free abrasive in liquid; Another is to use abrasive grain to be fixed on the fixed sawline on sawline.No matter any process route, all requires sawline to be wrapped on the guide wheel of pair of parallel.On guide wheel, have many annulars, and guided wheel slot parallel to each other.First sawline is introduced in a pair of guide wheel in the lip-deep guided wheel slot A1 of one of them A, is then imported into the upper and guided wheel slot B1 of A1 on isoplanar of other one side guide wheel B; In guided wheel slot B1, around after guide wheel half cycle, enter guided wheel slot A2 adjacent with A1 on guide wheel A in an other side relative with workpiece, the rest may be inferred, completes whole installation work.
In the process of multi-wire saw, guide wheel role is to drive and guiding sawline, make it pass through machining area with speed and the tension state of specifying, and in Guiding wheel structure, occurring direct acting with sawline is exactly guided wheel slot.Therefore, the material of guided wheel slot and pattern, the product quality on multi-wire saw and cost control have very great impact.
The guide roller of multi-line cutting machine slot cross-section shape of industry mainly contains two kinds, HeUXing cross section, V-arrangement cross section at present.The main distinction in two kinds of cross sections is bottom shape, and the bottom of V-arrangement cross section flute profile is wedge shape, the fillet that the bottom of U-shaped cross section flute profile is certain radian.The processing of V-shaped groove is the easiest, is also the flute profile the most widely of applying at present.But the fluctuation range in service life of V-shaped groove is very large, and the bottom of groove ratio is easier to be subject to stress rupture.
The reason that guided wheel slot lost efficacy is mainly wearing and tearing and the sawline wire jumper of abrasive grain to guided wheel slot.For the guide wheel that reaches normal service life, the general main bottom that occurs in guided wheel slot of wearing and tearing.Once and there is sawline wire jumper, sawline, because of some reason, has entered wrong metallic channel, often the structure of guided wheel slot can be subject to permanent damage, must change immediately.To process polysilicon chip as example with carborundum free abrasive, the at present general guide wheel life-span fluctuates widely between 20-150 cutting, and the process conditions that depend critically upon guided wheel slot material, guided wheel slot shape, board stability and multi-wire saw service life are set.In the work period of a guided wheel slot, front 10 left and right are cut into running-in period, are generally accompanied by yield fluctuation to a certain degree.Once guided wheel slot causes damage because of reasons such as wire jumpers, just must change immediately guide wheel for subsequent use.Although the processing of guided wheel slot and use cost account for the smaller portions of multi-wire saw production cost, its performance badly influences the effective time of yield and board.Inspection, cleaning and availability assessment to guided wheel slot is very important operation link during multi-wire saw is produced at present, generally will take the more than 30% operating interval time.
In the time being placed in guided wheel slot with the sawline of pre-tension, sawline i.e. the pressure that applies to guided wheel slot.According to the mechanics of materials, as long as the contact-making surface of guided wheel slot and sawline presents the curvature of spill, application point place under sawline so, the material of guided wheel slot will be subject to tension (tensih1e stress), and the size of stress depends on tension force that sawline applies and the local curvature angle of bottom.Tension force is larger, or the angle of curvature is less, and the numerical value of tension is just higher.If guided wheel slot is V-arrangement cross section, or the tip that in use embedding of abrasive grain has caused similar V-arrangement, so at summit place, will exist sizable stress to concentrate.This stress is concentrated and is acquired a certain degree, or has follow-up abrasive grain further to embed, and will cause the material of bottom land central authorities to destroy.The stress concentration degree of the guided wheel slot in U-shaped cross section is lower than V-shaped groove, but because the curvature of its concave surface still can produce larger tension at trench bottom.
In addition, sawline, in the guided wheel slot motion to adjacent, inevitably can rub with guide wheel cell wall.The guide wheel cell wall of current use is and adopts a fixing inclination angle, and sawline will be in quite long distance and guided wheel slot wall friction (generally at 6-10mm) like this.Such contact can cause the vibration of gauze and the wearing and tearing of guided wheel slot, improves the probability that wire jumper accident occurs.So, should reduce as far as possible contacting of sawline and guided wheel slot beyond location needs.
Summary of the invention
The technical problem to be solved in the present invention is: in order to overcome, guided wheel slot sidewall in prior art is easy to wear, the problem of the easy wire jumper of sawline, and a kind of multi-wire saw guide wheel that customizes grooved and preparation method thereof is provided.
The technical solution adopted for the present invention to solve the technical problems is: a kind of multi-wire saw guide wheel that customizes grooved, and described guide pulley surface has wear-resistant coating, has parallel to each other for arranging the guided wheel slot of sawline on described guide pulley surface wear-resistant coating, described guided wheel slot forms guided wheel slot profile with the intersection of the plane by guide wheel axis, described guided wheel slot profile comprises base and sidewall, the sidewall of described guided wheel slot profile comprises the sawline location sidewall being connected with base and is positioned at the sawline guiding sidewall on the sidewall of location, described location sidewall is straight line or the convex curve to guided wheel slot profile center curvature, in the plane of described guided wheel slot profile place, arbitrary and straight line guide wheel intersect vertical axis are profile normal, the line of described guiding sidewall two-end-point and the angle of profile normal are greater than the line of location sidewall two-end-point and the angle of profile normal.
Multi-wire saw by the wear-resistant coating Shore D hardness of guide pulley surface between 80-99, thickness is greater than 0.3mm, Shore D hardness can meet guide wheel intensity in use between 80-99, thickness is greater than 0.3mm can make the recycling rate of waterused of guide wheel high, within the specific limits, wear-resistant coating is thicker, and the number of times that can reuse is more.
Multi-wire saw can be the curve of 1.6 times that straight line or radius of curvature are greater than sawline diameter D with the base of guide wheel, base is designed to curve, the stress that can farthest reduce under sawline is concentrated, the sidewall hypotenuse of guided wheel slot provides the detent force of sawline, the elastic modelling quantity of guided wheel slot material needs evenly, to ensure that sawline is positioned the center of guided wheel slot.
Further, described base width is W, and described base width W is the 40%-80% of sawline diameter D, can make the angle of processing and highly be more prone to process.
For eliminate base be connected with sidewall part stress concentration point, there is the chamfered region, base seamlessly transitting in the part that described base and sidewall join.
Multi-wire saw is α with the line of location sidewall two-end-point and the angle of profile normal of guide wheel, and the span of α is:
wherein
for not losing under the prerequisite of the sawline stationkeeping ability that guided wheel slot provides, the admissible maximum angle of location sidewall, is also critical location angle, is worn and torn, and reduce yield fluctuation and the wire jumper risk brought because of friction mainly for minimizing location sidewall by sawline.
In the case of the diameter of guided wheel slot bottom width and sawline is definite, the relation between critical location situation lower tumbler cell wall and sawline as shown in Figure 3; At the bottom of angle beta between its sidewall and horizontal line and sawline diameter D and guided wheel slot, the geometrical relationship of width W is:
Therefore critical angle α=90 °-β.
In order to ensure that oriented side wall energy enough provides location to support, the projected length of described location sidewall on guided wheel slot normal is h1, and the span of h1 is:
Multi-wire saw is r containing wear-resistant coating at interior radius with guide wheel, and described cell wall height is h, and described guiding sidewall is x with the distance that contacts between sawline, and the line of guiding sidewall two-end-point and the angle of profile normal are γ,
wherein
The rotation of guide wheel drives the motion of sawline, after sawline completes the processing action of workpiece, advance to behind the bottom of corresponding guided wheel slot of corresponding guide wheel, the direction that continues to advance will become, to adjacent next guided wheel slot plane on another one guide wheel, and arriving after another one guide wheel, enter adjacent guided wheel slot.Sawline at the guide wheel back side (being an other side of processing work) movement locus as shown in Figure 4.
Travel angle at guide wheel back side sawline determines by the distance of two guide wheel shafts and the horizontal range of adjacent guided wheel slot, and the θ angle in Fig. 4 is the angle of sawline and guided wheel slot plane.In the case, in the plane that sawline still forms two guide wheel lower surfaces, move, but the angle of the plane normal of the direction of motion and metallic channel is θ.In figure x be sawline from the distance of the point of contact setting in motion of guided wheel slot bottom.Because the degree of depth of guided wheel slot is generally greater than the several times of sawline diameter, so sawline need to move, a segment distance just can depart from the outer of guided wheel slot.
Then at other guide wheel place on one side, sawline also can enter guided wheel slot on symmetrical position.There being a side of workpiece because guided wheel slot is aligned with each other, and sawline just straight through, so can there is not under normal circumstances the friction that contacts of sawline and guided wheel slot sidewall.But there is no a side of workpiece, because sawline will advance into and leave guided wheel slot with θ angle, so can there is the contact friction between sawline and guide wheel cell wall on certain distance.Because sawline has down very high speed and cutting power in working order, this and friction guided wheel slot sidewall can destroy guided wheel slot structure, increases wire jumper probability, and has certain probability to cause the resonance of gauze, and cutting machine duty is worsened.
With the guiding sidewall of guide wheel, the projected length on guided wheel slot normal is the 100%-250% of sawline diameter D to multi-wire saw, can further reduce wire jumper risk.
In order to eliminate be connected with the guiding sidewall stress concentration point of part of location sidewall, the described location sidewall sidewall chamfered region that partly existence seamlessly transits that is connected with guiding sidewall.
A kind of multi-wire saw that customizes grooved preparation method of guide wheel, comprise at least one emery wheel, be carved with and the required guide wheel slot type shape projection coordinating that adapts on described emery wheel surface, emery wheel is exerted pressure, make the evenly smooth guide wheel idiosome that is coated with coating of emery wheel contact surface, and keep emery wheel axis parallel with guide wheel idiosome axis; Synchronous emery wheel and the guide wheel idiosome of rotating, and in whole process, keep the pressure between the two, and until being grinding into the degree of depth, the surface of guide wheel idiosome reaches requirement, then mobile above-mentioned emery wheel is to next slotting position, repeat above-mentioned preparation, until whole guide wheel is covered with required guided wheel slot on demand.
Further, described coating is polyether-polyurethane coating, can improve the intensity of guide wheel, reduces the friction of sawline to guide wheel, extends the service life of guide wheel, increases work efficiency.
Further, in described coating material, blend has one or more in carbon fiber, diamond, carborundum, boron nitride, aluminium oxide, zirconia, silicon nitride, tungsten carbide, graphite.
In actual processing, do not need to ensure that the profile of bottom, location sidewall, guiding sidewall is straight line, but generally can ensure that the profile of locating sidewall, leading sidewall is the convex curve to guide wheel outline center curvature, so that processing.
The invention has the beneficial effects as follows: the invention provides a kind of multi-wire saw guide wheel that customizes grooved and preparation method thereof, guide wheel is compared with adopting the guide wheel of traditional V-arrangement or U-shaped cross-section grooved, do not losing under the prerequisite of sawline stationkeeping ability, not only life-span significant prolongation, and sawline wire jumper significantly reduces with shake risk, is conducive to reduce cutting bad as stria, TTV etc.
Brief description of the drawings
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is a kind of stereogram of guide wheel for the multi-wire saw of grooved that customizes of the present invention;
Fig. 2 is the partial enlarged drawing of " A " position in Fig. 1;
Fig. 3 is the sawline guided wheel slot of bottom for plane;
Fig. 4 is the advance schematic diagram of sawline at the guide wheel back side;
Fig. 5 is the guide wheel outline figure of embodiment 1;
Fig. 6 is the guide wheel outline figure of embodiment 2;
Fig. 7 is the guide wheel outline figure of embodiment 3;
Fig. 8 is the guide wheel outline figure of embodiment 4;
Fig. 9 is the guide wheel outline figure of embodiment 5.
In figure: 1. guide wheel, 2. sawline, 3. guided wheel slot, 4. guided wheel slot profile, 11. wear-resistant coatings, 41. ends
Limit, 42. sidewalls, 43. location sidewalls, 44. guiding sidewall, 5. profile normals.
Detailed description of the invention
In order to make mentality of designing of the present invention, creation characteristic, reach effect and be easy to understand, below for the guide roller of multi-line cutting machine parameter of multiple different model, and sawline type, design, further set forth the present invention.
Embodiment 1
As shown in Figure 5, the DS271 type of Mei Yeboge (Meyer Burger), its guide wheel shaft distance is that 660mm is using 110 μ m cutting steel wires, JIS#1500 silicon carbide sand, Shore D hardness is 95, wear-resistant coating thickness is 0.8mm, slot pitch 343 μ m.Calculate with bottom straight line portion length W=70 μ m (W=63.6%*D), sidewall angle α=25.1, location degree, the height in its normal direction is 31.7 μ m.Condition with friction control apart from x=0.2mm, calculates guiding sidewall angle γ=42.8 degree now, and its vertical height is designed to 160 μ m.
Embodiment 2
As shown in Figure 6, the 442 type multi-line cutting machines of NTC, its guide wheel shaft, apart from being 600mm, uses 110 μ m cutting steel wires, JIS#2000 silicon carbide sand, Shore D hardness is 99, and wear-resistant coating is 0.9mm, slot pitch 343 μ m, bottom W length is 40% wire diameter, i.e. 44 μ m, bottom curvature radius is 2 times of wire diameters, i.e. 220 μ m.Result of calculation, for location sidewall angle α is 46.4 degree, is highly 31.7 μ m.Condition with friction control apart from x=0.1mm, calculates guiding sidewall angle γ=49.7 degree now, is highly 180 μ m.In the time of processing grooving tool, first process two hypotenuses, then chamfering is carried out with radius of curvature 220 μ m in bottom.
Embodiment 3
As shown in Figure 7, the HCT B5 type multi-line cutting machine of application material (Applied Materials), its guide wheel shaft distance is 660mm, use 120 μ m cutting steel wires, Shore D hardness is 80, and wear-resistant coating thickness is 1.1mm, JIS#1500 silicon carbide sand, slot pitch 350 μ m, bottom W length is 80% wire diameter, i.e. 96 μ m.Result of calculation, for location sidewall angle α is 12.7 degree, is highly 43.0 μ m, after correction 10%, is 47.3 μ m.Condition with friction control apart from x=0.2mm, guiding sidewall angle γ=40.6 degree, is highly 160 μ m.Between base and location sidewall, taking radius of curvature as 0.2 times of sawline diameter, 24 μ m carry out right angle chamfering.In the time of processing grooving tool, first process base and two sections of varied angle hypotenuses, then right-angle side chamfering is carried out with radius of curvature 24 μ m in angle, base.Between location sidewall and guiding sidewall, carry out after chamfering taking radius of curvature as 360 μ m, more finally complete location sidewall and guiding sidewall.
Embodiment 4
As shown in Figure 8, the PV800 type multi-line cutting machine of NTC, its guide wheel shaft, apart from being 560mm, uses 125 μ m diamond saw wires, and Shore D hardness is 99, and wear-resistant coating thickness is 0.9mm, slot pitch 350 μ m, bottom W length is 62.4% wire diameter, i.e. 78 μ m.Result of calculation, for location sidewall angle α is 24.0 degree, is highly 32.7 μ m, and carrying out 5% compensation is highly 34.3 μ m afterwards.Condition with friction control apart from x=0.2mm, guiding side wall angle γ=45.4 degree, is highly 125 μ m.Between base and location sidewall, taking radius of curvature as 0.1 times of sawline diameter, 11 μ m carry out right angle chamfering.In the time of processing grooving tool, first process base and two sections of varied angle hypotenuses, then right-angle side chamfering is carried out with radius of curvature 11 μ m in angle, base.
Embodiment 5
As shown in Figure 9, the DS264 type of Mei Yeboge (Meyer Burger), its guide wheel shaft, apart from being 660mm, is using 110 μ m cutting steel wires, Shore D hardness is 88, wear-resistant coating thickness is 1.5mm, JIS#1500 silicon carbide sand, slot pitch 343 μ m, bottom W length is 80% wire diameter, i.e. 88 μ m, bottom curvature radius is 4 times of wire diameters, i.e. 440 μ m.Result of calculation is 18 degree for locating sidewall angle α, and being modified to 75% is 13.5 degree.Be highly 38 μ m, revising increase by 25% is 47.5.Condition with friction control apart from x=0.1mm, calculates guiding sidewall angle γ=28.6 degree now, and revising increase by 25% is 35.8 degree.Being highly 250% wire diameter, is 275 μ m.In the time of processing grooving tool, first process two hypotenuses, then chamfering is carried out with radius of curvature 440 μ m in bottom.
Embodiment 6
A kind of multi-wire saw that customizes grooved preparation method of guide wheel, comprise 1 emery wheel, be carved with and the required guide wheel slot type shape projection coordinating that adapts on described emery wheel surface, emery wheel is exerted pressure, make the even smooth coating blend of emery wheel contact surface have the guide wheel idiosome of the polyether-polyurethane coating of carbon fiber, and keep emery wheel axis parallel with guide wheel idiosome axis; Synchronous emery wheel and the guide wheel idiosome of rotating, and in whole process, keep the pressure between the two, and until being grinding into the degree of depth, the surface of guide wheel idiosome reaches requirement, then mobile above-mentioned emery wheel is to next slotting position, repeat above-mentioned preparation, until whole guide wheel is covered with required guided wheel slot on demand.
Embodiment 7-17
Procedure of processing is with embodiment 6, and its emery wheel quantity, coating are composed as follows:
| Embodiment | Emery wheel quantity (individual) | Coating composition |
| Embodiment 7 | 6 | Polyether-polyurethane coating and carbon fiber blend |
| Embodiment 8 | 3 | Polyether-polyurethane coating and carborundum |
| Embodiment 9 | 4 | Polyether-polyurethane coating, diamond and graphite |
| Embodiment 10 | 2 | Polyether-polyurethane coating and aluminium oxide |
| Embodiment 11 | 4 | Polyether-polyurethane coating and silicon nitride |
| Embodiment 12 | 1 | Polyether-polyurethane coating and boron nitride |
| Embodiment 13 | 5 | Polyether-polyurethane coating and zirconia |
| Embodiment 14 | 4 | Polyether-polyurethane coating and tungsten carbide |
| Embodiment 15 | 1 | Polyether-polyurethane coating |
| Embodiment 16 | 3 | Polyether-polyurethane coating |
| Embodiment 17 | 4 | Polyether-polyurethane coating |
Taking above-mentioned foundation desirable embodiment of the present invention as enlightenment, by above-mentioned description, relevant staff can, not departing from the scope of this invention technological thought, carry out various change and amendment completely.The technical scope of this invention is not limited to the content on description, must determine its technical scope according to claim scope.
Claims (13)
1. a multi-wire saw guide wheel that customizes grooved, is characterized in that: described guide wheel (1) surface has wear-resistant coating (11), has parallel to each other for arranging the guided wheel slot (3) of sawline (2) on described guide wheel (1) surface wearable coating (11), described guided wheel slot (3) forms guided wheel slot profile (4) with the intersection of the plane by guide wheel (1) axis, described guided wheel slot profile (4) comprises base (41) and sidewall (42), the sidewall (42) of described guided wheel slot profile (4) comprises the sawline location sidewall (43) being connected with base and is positioned at the sawline guiding sidewall (44) on location sidewall (43), described location sidewall (43) is straight line or the convex curve to guided wheel slot profile center curvature, described guiding sidewall (44) is straight line or the convex curve to guided wheel slot profile center curvature, in the plane of described guided wheel slot profile (4) place, arbitrary and straight line guide wheel intersect vertical axis are profile normal (5), the line of described location sidewall (43) two-end-point and the angle of profile normal (5) are α, the line of described guiding sidewall (44) two-end-point and the angle of profile normal (5) are γ, described α < γ.
2. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 1, is characterized in that: described wear-resistant coating (11) Shore D hardness between 80-99, thickness is greater than 0.3mm.
3. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 2, is characterized in that: described base (41) are the curve of 1.6 times that straight line or radius of curvature are greater than sawline diameter D.
4. a kind of multi-wire saw guide wheel that customizes grooved as described in claim 1-3 any one, is characterized in that: described base (41) width is W, described base (41) width W is the 40%-80% of sawline (2) diameter D.
5. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 4, is characterized in that: the part that described base and sidewall join exists the chamfered region, base seamlessly transitting.
6. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 2, is characterized in that: the span of the line of described location sidewall (43) two-end-point and the angle α of profile normal (5) is:
7. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 6, is characterized in that: the projected length of described location sidewall (43) on guided wheel slot normal is h1, and the span of h1 is:
8. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 2, it is characterized in that: described guide wheel (1) is r containing wear-resistant coating (11) at interior radius, described cell wall height is h, and described guiding sidewall (44) is x with the distance that contacts between sawline (2)
wherein
9. a kind of multi-wire saw guide wheel that customizes grooved as claimed in claim 8, is characterized in that: the projected length of described guiding sidewall (44) on guided wheel slot normal is the 100%-250% of sawline (2) diameter D.
10. a kind of multi-wire saw guide wheel that customizes grooved as described in claim 6-9, is characterized in that: described location sidewall (43) is connected and partly has the sidewall chamfered region seamlessly transitting with guiding sidewall (44).
11. 1 kinds customize the preparation method of guide wheel for the multi-wire saw of grooved, it is characterized in that: comprise at least one emery wheel, be carved with and the required guide wheel slot type shape projection coordinating that adapts on described emery wheel surface, emery wheel is exerted pressure, make the evenly smooth guide wheel idiosome that is coated with coating of emery wheel contact surface, and keep emery wheel axis parallel with guide wheel idiosome axis; Synchronous emery wheel and the guide wheel idiosome of rotating, and in whole process, keep the pressure between the two, and until being grinding into the degree of depth, the surface of guide wheel idiosome reaches requirement, then mobile above-mentioned emery wheel is to next slotting position, repeat above-mentioned preparation, until whole guide wheel is covered with required guided wheel slot on demand.
12. a kind of preparation methods of guide wheel for the multi-wire saw of grooved that customize as claimed in claim 11, is characterized in that: described coating is polyether-polyurethane coating.
13. a kind of preparation methods of guide wheel for the multi-wire saw of grooved that customize as claimed in claim 12, is characterized in that: in described EU coating, blend has one or more in carbon fiber, diamond, carborundum, boron nitride, aluminium oxide, zirconia, silicon nitride, tungsten carbide, graphite.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310463516.5A CN104097269B (en) | 2013-09-30 | 2013-09-30 | A kind of multi-wire saw guide wheel customizing grooved and preparation method thereof |
| PCT/CN2014/086479 WO2015043384A1 (en) | 2013-09-30 | 2014-09-15 | Multi-line cutting guide wheel with customized groove type, and manufacturing method therefor |
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| CN201310463516.5A CN104097269B (en) | 2013-09-30 | 2013-09-30 | A kind of multi-wire saw guide wheel customizing grooved and preparation method thereof |
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| CN104097269B CN104097269B (en) | 2016-06-29 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105235079A (en) * | 2015-10-19 | 2016-01-13 | 天津市环欧半导体材料技术有限公司 | Silicon wafer slitting die of multi-wire sawing machine |
| CN106735316A (en) * | 2016-11-17 | 2017-05-31 | 重庆江增船舶重工有限公司 | A kind of method for turning of inner hole deep groove |
| CN112078041A (en) * | 2020-07-30 | 2020-12-15 | 长治高测新材料科技有限公司 | Cutting process for electroplated diamond wire after thinning |
| CN112078041B (en) * | 2020-07-30 | 2022-07-26 | 乐山高测新能源科技有限公司 | Cutting process for electroplated diamond wire after thinning |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104097269B (en) | 2016-06-29 |
| WO2015043384A1 (en) | 2015-04-02 |
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