WO2015043384A1 - Multi-line cutting guide wheel with customized groove type, and manufacturing method therefor - Google Patents

Multi-line cutting guide wheel with customized groove type, and manufacturing method therefor Download PDF

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Publication number
WO2015043384A1
WO2015043384A1 PCT/CN2014/086479 CN2014086479W WO2015043384A1 WO 2015043384 A1 WO2015043384 A1 WO 2015043384A1 CN 2014086479 W CN2014086479 W CN 2014086479W WO 2015043384 A1 WO2015043384 A1 WO 2015043384A1
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Prior art keywords
guide wheel
groove
wire
side wall
guide
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PCT/CN2014/086479
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French (fr)
Chinese (zh)
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钱海鹏
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凡登（江苏）新型材料有限公司
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Publication of WO2015043384A1 publication Critical patent/WO2015043384A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts

Definitions

  • the invention relates to a customized groove type multi-wire cutting guide wheel and a preparation method thereof, which are suitable for processing hard materials such as crystalline silicon, silicon carbide, crystal and sapphire by using a free abrasive and/or a fixed abrasive multi-wire cutting.
  • the guide wheel has a plurality of annular guide grooves that are parallel to each other.
  • the saw wire is first introduced into the guide groove A1 on one of the pair of guide wheels A, and then introduced into the guide groove B1 on the other side of the guide wheel B and A1 in the same plane; surrounded in the guide groove B1 After half a week of the guide wheel, on the other side opposite to the workpiece, the guide wheel groove A2 adjacent to the A1 is entered on the guide wheel A, and so on, and the entire wiring work is completed.
  • the guide wheel plays the role of driving and guiding the saw wire to pass through the machining area at a specified speed and tension state, and in the structure of the guide wheel, the direct action with the saw wire is the guide. Wheel groove. Therefore, the material and shape of the guide groove have a very significant impact on the quality and cost control of multi-wire cutting.
  • the cross-sectional shape of the multi-wire cutting machine guide groove used in the industry mainly has two types, a V-shaped section and a U-shaped section.
  • the main difference between the two sections is the bottom shape, the bottom of the V-shaped groove shape is a wedge shape, and the bottom of the U-shaped section groove shape is a rounded corner of a certain curvature.
  • V-grooves are the easiest to machine and are the most widely used troughs in use today.
  • the service life of the V-shaped groove fluctuates widely, and the bottom of the groove is more susceptible to stress damage.
  • the cause of the failure of the guide wheel groove is mainly the wear of the abrasive grains against the guide groove and the wire jumper.
  • wear generally occurs primarily at the bottom of the guide wheel groove.
  • the wire jumper occurs, that is, the wire enters the wrong wire slot for some reason, the structure of the guide groove is often permanently damaged and must be replaced immediately.
  • the current life of the general guide wheel fluctuates greatly between 20 and 150 cuttings, and the service life is heavily dependent on the material of the guide wheel groove, the shape of the guide groove, the stability of the machine and Process conditions for multi-line cutting.
  • the first 10 times of cutting is the running-in period, generally accompanied by a certain degree of yield fluctuation.
  • the alternate guide wheel must be replaced immediately.
  • the inspection, cleaning and usability evaluation of the guide wheel groove is currently a very important operation in multi-line cutting production, and generally takes more than 30% of the operation interval.
  • the wire When the saw wire with pre-tension is placed in the guide groove, the wire exerts a pressure on the guide groove.
  • the material of the guide wheel groove is subjected to tensile stress (tensih1e stress) at the point of action directly under the saw wire, and the magnitude of the stress depends on the magnitude of the stress.
  • the tension applied to the wire and the local curvature angle of the bottom The greater the tension, or the smaller the angle of curvature, the higher the value of the tensile stress.
  • the guide groove is V-shaped, or if the embedding of the abrasive particles in use creates a V-shaped tip, then there is a considerable concentration of stress at the apex. This concentration of stress reaches a certain level, or if subsequent abrasive particles are further embedded, the material in the center of the groove bottom will be destroyed.
  • the U-shaped cross-section guide groove has a lower stress concentration than the V-shaped groove, but due to the curvature of the concave surface, a large tensile stress is still generated at the bottom of the groove.
  • the saw wire will inevitably rub against the guide groove wall during the movement to the adjacent guide groove.
  • the currently used guide wheel groove walls are all at a fixed angle of inclination so that the wire will rub against the guide groove wall (generally 6-10 mm) over a considerable distance.
  • Such contact can cause vibration of the wire mesh and the guide wheel groove Wear and increase the probability of a jumper accident. Therefore, the contact between the saw wire and the guide groove other than the positioning requirement should be minimized.
  • the technical problem to be solved by the present invention is that in order to overcome the problem that the side wall of the guide wheel groove is easy to wear and the wire is easy to jump, the guide groove type multi-line cutting guide wheel and the preparation method thereof are provided.
  • the technical solution adopted by the present invention to solve the technical problem thereof is: a customized groove type multi-wire cutting guide wheel, the surface of the guide wheel has a wear-resistant coating, and the wear-resistant coating on the surface of the guide wheel is opened to each other Parallel guide groove for arranging the wire; the guide groove and the intersection of the plane passing through the axis of the guide wheel form a guide groove profile, the guide groove profile including a bottom edge and a side wall, the guide wheel
  • the sidewall of the groove profile includes a wire positioning sidewall connected to the bottom edge and a wire guiding sidewall positioned above the positioning sidewall, the positioning sidewall being a convex curve curved in a straight line or a center of the guide wheel groove profile,
  • a straight line perpendicular to the axis of the guide wheel on the plane of the guide groove contour is a contour normal, and the angle between the line connecting the two ends of the guide sidewall and the contour normal is larger than the line and contour method of the points at both ends of the positioning sidewall. The angle of the
  • the wear-resistant coating on the surface of the guide roller for multi-wire cutting has a Shore D hardness of 80-99 and a thickness of more than 0.3 mm, and the Shore D hardness of 80-99 can satisfy the strength of the guide wheel when used, and the thickness is greater than 0.3mm can make the repeating utilization rate of the guide wheel high. Within a certain range, the thicker the wear-resistant coating, the more times the recyclable can be used.
  • the bottom edge of the multi-wire cutting guide wheel may be a straight line or a curve having a radius of curvature greater than 1.6 times the diameter D of the saw wire, and the bottom edge is designed as a curve to minimize the stress concentration directly under the saw wire, and the guide wheel groove
  • the beveled side wall provides the positioning force of the saw wire, and the elastic modulus of the material of the guide wheel groove needs to be uniform to ensure that the saw wire is positioned at the center of the guide groove.
  • the width of the bottom edge is W, and the width W of the bottom edge is 40%-80% of the diameter D of the saw wire.
  • the angle and height of the machining can be made easier to handle.
  • the bottom edge portion and the side wall portion have a smooth transition bottom edge chamfering region.
  • the angle between the line connecting the two ends of the guide wheel of the multi-wire cutting guide and the contour normal is ⁇ , and the range of ⁇ is:
  • the main purpose is to minimize the wear of the saw wire by the positioning side wall and reduce the cause Yield fluctuations and jumper risk from friction.
  • the projection length of the positioning sidewall on the guide groove normal line is h1
  • the value range of h1 is:
  • the guide wire for multi-wire cutting has a radius r of the wear-resistant coating, the height of the groove wall is h, the contact distance between the guide sidewall and the saw wire is x, and the connection between the ends of the guide sidewall is The angle between the contour normals is ⁇ , among them
  • the rotation of the guide wheel drives the movement of the saw wire, and after the saw wire completes the processing action on the workpiece, it proceeds to the pair After the bottom of the corresponding guide wheel groove of the guide wheel, the direction of continuing travel will become the next adjacent guide groove plane on the other guide wheel, and after reaching another guide wheel, enter adjacent Guide wheel groove.
  • the trajectory of the saw wire on the back of the guide wheel is shown in Figure 4.
  • the travel angle of the saw wire on the back side of the guide wheel is determined by the distance between the two guide wheel shafts and the horizontal distance of the adjacent guide wheel grooves.
  • the angle ⁇ in Fig. 4 is the angle between the saw line and the plane of the guide wheel groove. In this case, the saw wire still moves in the plane formed by the lower end faces of the two guide wheels, but the angle of movement is ⁇ with the normal plane of the wire guide.
  • x is the distance that the saw wire moves from the tangent point to the bottom of the guide wheel groove. Since the depth of the guide groove is generally greater than several times the diameter of the wire, the wire needs to be moved a certain distance to escape the outer edge of the guide groove.
  • the saw wire will also enter the guide wheel groove in a symmetrical position.
  • the contact friction between the wire and the side wall of the guide groove does not normally occur.
  • the saw wire since the saw wire enters and leaves the guide groove at an angle of ⁇ , contact friction between the wire and the groove wall of the guide wheel occurs at a certain distance. Because the saw wire has high speed and cutting ability under working condition, the friction with the side wall of the guide wheel groove will destroy the structure of the guide wheel groove, increase the probability of jumper, and have a certain probability of causing the resonance of the wire mesh to cut The working condition of the machine deteriorated.
  • the projection side wall of the guide roller for multi-line cutting has a projection length of 100%-250% of the diameter D of the sawing groove, which can further reduce the risk of jumper.
  • the positioning side wall and the guiding side wall have a smooth transition side wall chamfering area.
  • a method for preparing a guide groove type multi-line cutting guide wheel comprising at least one grinding wheel, the surface of the grinding wheel is engraved with a protrusion matching with a shape of a required guide wheel groove shape, and the grinding wheel is pressed to make the grinding wheel contact
  • the surface is evenly flat coated with the coated guide body, and the axis of the grinding wheel is kept parallel to the axis of the guide body; Synchronously rotating the grinding wheel and the guide wheel body, and maintaining the pressure between the two during the whole process until the surface grinding depth of the guide wheel body reaches the required depth, and then moving the grinding wheel to the next slot position, repeating the above preparation, Until the entire guide wheel fills the required guide groove as needed.
  • the coating is a polyether polyurethane coating, which can improve the strength of the guide wheel, reduce the friction of the saw wire on the guide wheel, extend the service life of the guide wheel, and improve the work efficiency.
  • carbon fiber diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride, tungsten carbide, and graphite are blended in the coating material.
  • the contours of the bottom, the positioning side wall and the guiding side wall are straight, but generally the contour of the positioning side wall and the guiding side wall is curved to be a convex curve curved at the center of the guide wheel contour to facilitate processing.
  • the invention has the beneficial effects that the present invention provides a customized groove type multi-wire cutting guide wheel and a preparation method thereof, and the guide wheel is compared with a guide wheel adopting a conventional V-shaped or U-shaped cross-section groove type, Under the premise of losing the positioning ability of the saw wire, not only the life is significantly prolonged, but also the risk of the wire jumper and the jitter is greatly reduced, which is beneficial to reduce the cutting defects such as line marks and TTV.
  • Figure 1 is a perspective view of a custom groove type multi-wire cutting guide wheel of the present invention
  • Figure 2 is a partial enlarged view of the position "A" in Figure 1;
  • Figure 3 is a saw wire guide groove with a flat bottom
  • Figure 4 is a schematic view of the travel of the saw wire on the back side of the guide wheel
  • Figure 5 is a plan view of the guide wheel of Embodiment 1;
  • Figure 6 is a plan view of the guide wheel of Embodiment 2.
  • Figure 7 is a contour view of a guide wheel of Embodiment 3.
  • Figure 8 is a plan view of a guide wheel of Embodiment 4.
  • Figure 9 is a plan view of the guide wheel of the fifth embodiment.
  • Meyer Burger's DS271 model has a guide wheel wheelbase of 660mm and a 110 ⁇ m cutting steel wire, JIS#1500 silicon carbide sand, Shore D hardness of 95, and wear-resistant coating thickness. It is 0.8 mm and the groove pitch is 343 ⁇ m.
  • NTC's 442 multi-wire cutting machine has a guide wheel wheelbase of 600mm, using 110 ⁇ m cutting steel wire, JIS#2000 silicon carbide sand, Shore D hardness of 99, wear resistant coating of 0.9mm, groove 343 ⁇ m, the bottom W length is 40% wire diameter, that is 44 ⁇ m, the bottom radius of curvature is 2 times wire diameter, ie 220 ⁇ m.
  • two bevels are machined first, and then the bottom is chamfered with a radius of curvature of 220 ⁇ m.
  • the HCT B5 multi-wire cutting machine with Applied Materials has a guide wheel wheelbase of 660 mm, a 120 ⁇ m cutting steel wire, a Shore D hardness of 80, and a wear-resistant coating thickness of 1.1 mm.
  • a right angle chamfer is performed with a radius of curvature of 0.2 times the wire diameter, that is, 24 ⁇ m. That is, when machining the slotting tool, the bottom edge and the two angled bevels are first processed, and then the bottom corner is chamfered at a right angle with a radius of curvature of 24 ⁇ m. Between the positioning side wall and the guiding side wall, chamfering is performed with a radius of curvature of 360 ⁇ m, and then the positioning side wall and the guiding side wall are finally completed.
  • NTC's PV800 multi-wire cutting machine has a guide wheel wheelbase of 560mm, a 125 ⁇ m diamond saw wire, a Shore D hardness of 99, a wear-resistant coating thickness of 0.9mm, a groove pitch of 350 ⁇ m, and a bottom W.
  • the length is 62.4% of the wire diameter, that is, 78 ⁇ m.
  • a right angle chamfer is performed with a radius of curvature of 0.1 times the wire diameter, that is, 11 ⁇ m. That is in plus
  • the bottom edge and the two angled bevels are first machined, and then the bottom corner is chamfered at a right angle with a radius of curvature of 11 ⁇ m.
  • Meyer Burger's DS264 model has a guide wheel wheelbase of 660mm, a 110 ⁇ m cutting steel wire, a Shore D hardness of 88, and a wear-resistant coating thickness of 1.5mm, JIS. #1500 SiC sand with a groove spacing of 343 ⁇ m, the bottom W length is 80% wire diameter, ie 88 ⁇ m, and the bottom radius of curvature is 4 times wire diameter, ie 440 ⁇ m.
  • the calculation result is that the positioning side wall angle ⁇ is 18 degrees, and the correction is 75% to 13.5 degrees.
  • the height is 38 ⁇ m and the correction is increased by 25% to 47.5.
  • the height is 250% wire diameter and is 275 ⁇ m.
  • the invention relates to a method for preparing a guide groove type multi-line cutting guide wheel, which comprises a grinding wheel, the surface of the grinding wheel is engraved with a protrusion matched with the shape of the required guide wheel groove shape, and the grinding wheel is pressed to make the grinding wheel contact.
  • the surface is uniformly flat coated with the conductor body of the polyether polyurethane coating blended with carbon fiber, and the axis of the grinding wheel is kept parallel with the axis of the guide wheel body; the grinding wheel and the guide wheel body are synchronously rotated, and the two are maintained throughout the process.
  • the pressure is applied until the surface grinding depth of the guide body reaches the desired level, and then the grinding wheel is moved to the next slot position, and the above preparation is repeated until the entire guide wheel is filled with the required guide groove as needed.
  • the processing steps are the same as in Example 6.
  • the number of grinding wheels and the composition of the coating are as follows:
  • Example 7 Polyether polyurethane coating and carbon fiber blending
  • Example 8 3 Polyether polyurethane coatings and silicon carbide
  • Example 9 4 Polyether polyurethane coating, diamond and graphite
  • Example 10 2 Polyether polyurethane coating and alumina
  • Example 11 4 Polyether polyurethane coatings and silicon nitride
  • Example 12 1 Polyether polyurethane coating and boron nitride
  • Example 13 5 Polyether polyurethane coating and zirconia
  • Example 14 4 Polyether polyurethane coating and tungsten carbide
  • Example 15 1 Polyether polyurethane coating
  • Example 16 3 Polyether polyurethane coating
  • Example 17 4 Polyether polyurethane coating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention relates to a multi-line cutting guide wheel with a customized groove type, and a manufacturing method therefor. The guide wheel groove for arranging a saw line has a flat bottom, a saw line positioning sidewall, and a saw line orientation sidewall. The width of the bottom is 40 to 80 percent of the diameter of the saw line. The slope and the height of the sidewall can be customized according to the width of the bottom, the diameter of the saw line, groove spacing requirements, the diameter of the guide wheel and the guide wheel shaft for fitting with each other. According to the multi-line cutting guide wheel with a customized groove type and the manufacturing method therefor, compared with a conventional guide wheel with a V-shaped or U-shaped cross section groove type, the guide wheel of the present invention has a remarkably increased service life on the premise of not losing the positioning capability of the sawline; in addition, the risks of the jump and jitter of the saw line are greatly decreased, which helps to decrease poor cutting, such as a poor line mark and TTV.

Description

一种定制槽型的多线切割用导轮及其制备方法Custom groove type multi-wire cutting guide wheel and preparation method thereof 技术领域Technical field
本发明涉及一种定制槽型的多线切割用导轮及其制备方法，适用于使用游离磨料和/或固结磨料多线切割加工晶硅、碳化硅、水晶、蓝宝石等硬质材料。The invention relates to a customized groove type multi-wire cutting guide wheel and a preparation method thereof, which are suitable for processing hard materials such as crystalline silicon, silicon carbide, crystal and sapphire by using a free abrasive and/or a fixed abrasive multi-wire cutting.
背景技术Background technique
在使用多线切割机来加工晶体硅、蓝宝石以及其它高硬度固体薄片时，主要有两种工艺路线。一种是使用光滑的锯线与分散在液体里的游离磨料；另外一种是使用将磨料颗粒固定在锯线上的固结锯线。不管哪一种工艺路线，都要求把锯线缠绕在一对平行的导轮上。导轮上开有许多环形，且彼此平行的导轮槽。锯线首先被引入一对导轮中其中一个A表面上的导轮槽A1中，然后被导入另外一边导轮B上和A1在同平面上的导轮槽B1；在导轮槽B1中环绕导轮半周后，在和工件相对的另外一侧进入导轮A上和A1相邻的导轮槽A2，依此类推，完成整个布线工作。There are two main routes when using multi-wire cutters to process crystalline silicon, sapphire, and other high-hardness solid flakes. One is the use of a smooth saw wire with free abrasive dispersed in the liquid; the other is the use of a fixed saw wire that secures the abrasive particles to the wire. Regardless of the routing, it is required to wind the wire around a pair of parallel guide wheels. The guide wheel has a plurality of annular guide grooves that are parallel to each other. The saw wire is first introduced into the guide groove A1 on one of the pair of guide wheels A, and then introduced into the guide groove B1 on the other side of the guide wheel B and A1 in the same plane; surrounded in the guide groove B1 After half a week of the guide wheel, on the other side opposite to the workpiece, the guide wheel groove A2 adjacent to the A1 is entered on the guide wheel A, and so on, and the entire wiring work is completed.
在多线切割的加工过程中，导轮所起的作用是驱动和引导锯线，使其以指定的速度和张力状态通过加工区域，而导轮结构中，与锯线发生直接作用的就是导轮槽。因此，导轮槽的材质与形貌，对多线切割的产品质量和成本控制有非常重大的影响。In the process of multi-wire cutting, the guide wheel plays the role of driving and guiding the saw wire to pass through the machining area at a specified speed and tension state, and in the structure of the guide wheel, the direct action with the saw wire is the guide. Wheel groove. Therefore, the material and shape of the guide groove have a very significant impact on the quality and cost control of multi-wire cutting.
目前工业所用的多线切割机导轮槽截面形状主要有两种，V形截面和U形截面。两种截面的主要区别在于底部形状，V形截面槽形的底部为楔形，U形截面槽形的底部为一定弧度的圆角。V形槽的加工最容易，也是目前应用的最广泛的的槽形。但是V形槽的使用寿命波动范围很大，且槽的底部比较容易受到应力破坏。 At present, the cross-sectional shape of the multi-wire cutting machine guide groove used in the industry mainly has two types, a V-shaped section and a U-shaped section. The main difference between the two sections is the bottom shape, the bottom of the V-shaped groove shape is a wedge shape, and the bottom of the U-shaped section groove shape is a rounded corner of a certain curvature. V-grooves are the easiest to machine and are the most widely used troughs in use today. However, the service life of the V-shaped groove fluctuates widely, and the bottom of the groove is more susceptible to stress damage.
导轮槽失效的原因主要是磨料颗粒对导轮槽的磨损和锯线跳线。对于达到正常使用寿命的导轮，磨损一般主要发生在导轮槽的底部。而一旦发生锯线跳线，即锯线因某些原因，进入了错误的导线槽，往往导轮槽的结构会受到永久性的损坏，必须立即更换。以用碳化硅游离磨料加工多晶硅片为例，目前一般的导轮寿命在20-150次切割之间大幅度波动，使用寿命严重依赖于导轮槽材质、导轮槽形状、机台稳定性和多线切割的工艺条件设定。在一个导轮槽的工作周期中，前10次左右切割为磨合期，一般伴随着一定程度的良率波动。导轮槽一旦因跳线等原因造成损坏，就必须立即更换备用导轮。虽然导轮槽的加工和使用成本占多线切割生产成本的较小部分，但是其性能严重影响到良率和机台的有效工作时间。对导轮槽的检查、清洗和可用性评估目前是多线切割生产中非常重要的操作环节，一般要占用30％以上的操作间隔时间。The cause of the failure of the guide wheel groove is mainly the wear of the abrasive grains against the guide groove and the wire jumper. For guide wheels that reach normal service life, wear generally occurs primarily at the bottom of the guide wheel groove. Once the wire jumper occurs, that is, the wire enters the wrong wire slot for some reason, the structure of the guide groove is often permanently damaged and must be replaced immediately. Taking the processing of polycrystalline silicon wafers with silicon carbide free abrasives as an example, the current life of the general guide wheel fluctuates greatly between 20 and 150 cuttings, and the service life is heavily dependent on the material of the guide wheel groove, the shape of the guide groove, the stability of the machine and Process conditions for multi-line cutting. In the working cycle of a guide wheel groove, the first 10 times of cutting is the running-in period, generally accompanied by a certain degree of yield fluctuation. Once the guide groove is damaged due to a jumper or the like, the alternate guide wheel must be replaced immediately. Although the processing and use cost of the guide groove accounts for a small portion of the cost of multi-line cutting production, its performance seriously affects the yield and the effective working time of the machine. The inspection, cleaning and usability evaluation of the guide wheel groove is currently a very important operation in multi-line cutting production, and generally takes more than 30% of the operation interval.
当带有预加张力的锯线被放置在导轮槽中时，锯线即对导轮槽的施加一个压力。根据材料力学，只要导轮槽与锯线的接触面呈现凹形的曲率，那么在锯线的正下方作用点处，导轮槽的材料就会受到拉应力(tensih1e stress)，应力的大小取决于锯线所施加的张力和底部的局部曲率角。张力越大，或者曲率角越小，拉应力的数值就越高。如果导轮槽为V形截面，或者在使用中磨料颗粒的嵌入造成了类似V形的尖端，那么在顶点处，就会存在相当大的应力集中。这种应力集中达到一定程度，或者有后续的磨料颗粒进一步嵌入，就会造成槽底中央的材料发生破坏。U形截面的导轮槽的应力集中程度比V形槽低，但因为其凹面的曲率，仍然会在槽底部产生较大的拉应力。When the saw wire with pre-tension is placed in the guide groove, the wire exerts a pressure on the guide groove. According to the material mechanics, as long as the contact surface of the guide wheel groove and the saw wire has a concave curvature, the material of the guide wheel groove is subjected to tensile stress (tensih1e stress) at the point of action directly under the saw wire, and the magnitude of the stress depends on the magnitude of the stress. The tension applied to the wire and the local curvature angle of the bottom. The greater the tension, or the smaller the angle of curvature, the higher the value of the tensile stress. If the guide groove is V-shaped, or if the embedding of the abrasive particles in use creates a V-shaped tip, then there is a considerable concentration of stress at the apex. This concentration of stress reaches a certain level, or if subsequent abrasive particles are further embedded, the material in the center of the groove bottom will be destroyed. The U-shaped cross-section guide groove has a lower stress concentration than the V-shaped groove, but due to the curvature of the concave surface, a large tensile stress is still generated at the bottom of the groove.
另外，锯线在向相邻的导轮槽运动中，不可避免地会与导轮槽壁发生摩擦。当前使用的导轮槽壁均为采用一个固定的倾角，这样锯线就会在相当长的距离上与导轮槽壁摩擦(一般在6-10mm)。这样的接触会造成线网的振动和导轮槽 的磨损，提高跳线事故发生的概率。所以，应该尽可能减小在定位需要以外的锯线与导轮槽的接触。In addition, the saw wire will inevitably rub against the guide groove wall during the movement to the adjacent guide groove. The currently used guide wheel groove walls are all at a fixed angle of inclination so that the wire will rub against the guide groove wall (generally 6-10 mm) over a considerable distance. Such contact can cause vibration of the wire mesh and the guide wheel groove Wear and increase the probability of a jumper accident. Therefore, the contact between the saw wire and the guide groove other than the positioning requirement should be minimized.
发明内容Summary of the invention
本发明要解决的技术问题是：为了克服现有技术中导轮槽侧壁易磨损、锯线易跳线的问题，提供一种定制槽型的多线切割用导轮及其制备方法。The technical problem to be solved by the present invention is that in order to overcome the problem that the side wall of the guide wheel groove is easy to wear and the wire is easy to jump, the guide groove type multi-line cutting guide wheel and the preparation method thereof are provided.
本发明解决其技术问题所采用的技术方案是：一种定制槽型的多线切割用导轮，所述导轮表面具有耐磨涂层，所述导轮表面耐磨涂层上开有彼此平行的用于排列锯线的导轮槽；所述导轮槽与通过导轮轴线的平面的交线形成导轮槽轮廓，所述导轮槽轮廓包括底边和侧壁，所述导轮槽轮廓的侧壁包括与底边相连的锯线定位侧壁和位于定位侧壁之上的锯线导向侧壁，所述定位侧壁为直线或向导轮槽轮廓中心弯曲的凸曲线，所述导轮槽轮廓所在平面上任一与导轮轴线垂直相交的直线为轮廓法线，所述导向侧壁两端点的连线与轮廓法线的夹角大于定位侧壁两端点的连线与轮廓法线的夹角。The technical solution adopted by the present invention to solve the technical problem thereof is: a customized groove type multi-wire cutting guide wheel, the surface of the guide wheel has a wear-resistant coating, and the wear-resistant coating on the surface of the guide wheel is opened to each other Parallel guide groove for arranging the wire; the guide groove and the intersection of the plane passing through the axis of the guide wheel form a guide groove profile, the guide groove profile including a bottom edge and a side wall, the guide wheel The sidewall of the groove profile includes a wire positioning sidewall connected to the bottom edge and a wire guiding sidewall positioned above the positioning sidewall, the positioning sidewall being a convex curve curved in a straight line or a center of the guide wheel groove profile, A straight line perpendicular to the axis of the guide wheel on the plane of the guide groove contour is a contour normal, and the angle between the line connecting the two ends of the guide sidewall and the contour normal is larger than the line and contour method of the points at both ends of the positioning sidewall. The angle of the line.
多线切割用导轮表面的耐磨涂层肖氏D硬度在80-99之间、厚度大于0.3mm，肖氏D硬度在80-99之间可以满足导轮在使用时的强度，厚度大于0.3mm可以使导轮的重复利用率高，在一定范围内，耐磨涂层越厚，可重复利用的次数越多。The wear-resistant coating on the surface of the guide roller for multi-wire cutting has a Shore D hardness of 80-99 and a thickness of more than 0.3 mm, and the Shore D hardness of 80-99 can satisfy the strength of the guide wheel when used, and the thickness is greater than 0.3mm can make the repeating utilization rate of the guide wheel high. Within a certain range, the thicker the wear-resistant coating, the more times the recyclable can be used.
多线切割用导轮的底边可以为直线或曲率半径大于锯线直径D的1.6倍的曲线，将底边设计成曲线，可以最大程度地降低锯线正下方的应力集中，导轮槽的侧壁斜边提供锯线的定位力，导轮槽材质的弹性模量需均匀，保证锯线定位于导轮槽的中心。The bottom edge of the multi-wire cutting guide wheel may be a straight line or a curve having a radius of curvature greater than 1.6 times the diameter D of the saw wire, and the bottom edge is designed as a curve to minimize the stress concentration directly under the saw wire, and the guide wheel groove The beveled side wall provides the positioning force of the saw wire, and the elastic modulus of the material of the guide wheel groove needs to be uniform to ensure that the saw wire is positioned at the center of the guide groove.
进一步地，所述底边宽度为W，所述底边宽度W为锯线直径D的40％-80％， 可以使加工的角度和高度更加容易处理。Further, the width of the bottom edge is W, and the width W of the bottom edge is 40%-80% of the diameter D of the saw wire. The angle and height of the machining can be made easier to handle.
为了消除底边与侧壁相连接部分的内应力集中点，所述底边与侧壁相接的部分存在平滑过渡的底边倒角区。In order to eliminate the internal stress concentration point of the portion where the bottom edge and the side wall are connected, the bottom edge portion and the side wall portion have a smooth transition bottom edge chamfering region.
多线切割用导轮的定位侧壁两端点的连线与轮廓法线的夹角为α，α的取值范围为：The angle between the line connecting the two ends of the guide wheel of the multi-wire cutting guide and the contour normal is α, and the range of α is:
Figure PCTCN2014086479-appb-000001
其中
Figure PCTCN2014086479-appb-000002
为在不损失导轮槽提供的锯线定位能力的前提下，定位侧壁可允许的最大夹角，也即临界定位夹角，主要为了最小化定位侧壁被锯线磨损，并减小因磨擦带来的良率波动和跳线风险。
Figure PCTCN2014086479-appb-000001
among them
Figure PCTCN2014086479-appb-000002
In order to minimize the allowable maximum angle of the side wall, that is, the critical positioning angle, without prejudice to the positioning capability of the saw wire provided by the guide wheel groove, the main purpose is to minimize the wear of the saw wire by the positioning side wall and reduce the cause Yield fluctuations and jumper risk from friction.
在导轮槽底部宽度和锯线的直径确定的情况下，临界定位情况下导轮槽壁与锯线之间的关系如图3所示；其侧壁与水平线之间的角度β与锯线直径D与导轮槽底宽度W的几何关系为：
Figure PCTCN2014086479-appb-000003
In the case where the width of the bottom of the guide groove and the diameter of the saw wire are determined, the relationship between the groove wall of the guide wheel and the saw wire in the case of critical positioning is as shown in FIG. 3; the angle β between the side wall and the horizontal line and the saw line The geometric relationship between the diameter D and the width W of the guide groove bottom is:
Figure PCTCN2014086479-appb-000003
因此临界夹角α＝90°-β。Therefore, the critical angle α = 90 ° - β.
为了保证定位侧壁能够提供定位支持，所述定位侧壁在导轮槽法线上的投影长度为h1，h1的取值范围为：In order to ensure that the positioning sidewall can provide positioning support, the projection length of the positioning sidewall on the guide groove normal line is h1, and the value range of h1 is:
Figure PCTCN2014086479-appb-000004
Figure PCTCN2014086479-appb-000004
多线切割用导轮含耐磨涂层在内的半径为r，所述槽壁高度为h，所述导向侧壁与锯线间的接触距离为x，导向侧壁两端点的连线与轮廓法线的夹角为γ，
Figure PCTCN2014086479-appb-000005
其中
Figure PCTCN2014086479-appb-000006
The guide wire for multi-wire cutting has a radius r of the wear-resistant coating, the height of the groove wall is h, the contact distance between the guide sidewall and the saw wire is x, and the connection between the ends of the guide sidewall is The angle between the contour normals is γ,
Figure PCTCN2014086479-appb-000005
among them
Figure PCTCN2014086479-appb-000006
导轮的转动带动锯线的运动，在锯线完成对工件的加工动作后，行进到对 应导轮的对应导轮槽的底部后，继续行进的方向就会变为，向另外一个导轮上相邻的下一个导轮槽平面，并且在到达另外一个导轮后，进入相邻的导轮槽。锯线在导轮背面(即加工工件的另外一侧)的运动轨迹如图4所示。The rotation of the guide wheel drives the movement of the saw wire, and after the saw wire completes the processing action on the workpiece, it proceeds to the pair After the bottom of the corresponding guide wheel groove of the guide wheel, the direction of continuing travel will become the next adjacent guide groove plane on the other guide wheel, and after reaching another guide wheel, enter adjacent Guide wheel groove. The trajectory of the saw wire on the back of the guide wheel (ie the other side of the workpiece) is shown in Figure 4.
在导轮背面锯线的行进角度由两个导轮轴的距离和相邻导轮槽的水平距离决定，图4中的θ角即为锯线与导轮槽平面的夹角。在此情况下，锯线仍旧在两个导轮下端面所构成的平面上运动，但是运动方向与导线槽的法线平面的夹角为θ。图中x为锯线从与导轮槽底部的切点开始运动的距离。因为导轮槽的深度一般大于锯线直径的数倍，所以锯线需要运动一段距离才会脱离导轮槽的外沿。The travel angle of the saw wire on the back side of the guide wheel is determined by the distance between the two guide wheel shafts and the horizontal distance of the adjacent guide wheel grooves. The angle θ in Fig. 4 is the angle between the saw line and the plane of the guide wheel groove. In this case, the saw wire still moves in the plane formed by the lower end faces of the two guide wheels, but the angle of movement is θ with the normal plane of the wire guide. In the figure, x is the distance that the saw wire moves from the tangent point to the bottom of the guide wheel groove. Since the depth of the guide groove is generally greater than several times the diameter of the wire, the wire needs to be moved a certain distance to escape the outer edge of the guide groove.
然后在另外一边的导轮处，锯线也会在对称的位置上进入导轮槽。在有工件的一侧，因为导轮槽彼此对准，并且锯线正直通过，所以正常情况下不会发生锯线与导轮槽侧壁的接触磨擦。但是在没有工件的一侧，因为锯线要以θ角前进入和离开导轮槽，所以会在一定距离上发生锯线和导轮槽壁之间的接触磨擦。因为锯线在工作状态下具有很高的速度和切削能力，这种与导轮槽侧壁的磨擦会破坏导轮槽结构，增加跳线概率，并有一定概率引起线网的谐振，使切割机工作状态恶化。Then at the other side of the guide wheel, the saw wire will also enter the guide wheel groove in a symmetrical position. On the side with the workpiece, since the guide groove is aligned with each other and the wire passes straight, the contact friction between the wire and the side wall of the guide groove does not normally occur. However, on the side without the workpiece, since the saw wire enters and leaves the guide groove at an angle of θ, contact friction between the wire and the groove wall of the guide wheel occurs at a certain distance. Because the saw wire has high speed and cutting ability under working condition, the friction with the side wall of the guide wheel groove will destroy the structure of the guide wheel groove, increase the probability of jumper, and have a certain probability of causing the resonance of the wire mesh to cut The working condition of the machine deteriorated.
多线切割用导轮的导向侧壁在导轮槽法线上的投影长度为锯线直径D的100％-250％，可以进一步的降低跳线风险。The projection side wall of the guide roller for multi-line cutting has a projection length of 100%-250% of the diameter D of the sawing groove, which can further reduce the risk of jumper.
为了消除定位侧壁与导向侧壁相连接部分的内应力集中点，所述定位侧壁与导向侧壁相连部分存在平滑过渡的侧壁倒角区。In order to eliminate the internal stress concentration point of the connecting portion of the positioning side wall and the guiding side wall, the positioning side wall and the guiding side wall have a smooth transition side wall chamfering area.
一种定制槽型的多线切割用导轮的制备方法，包括至少一个磨轮，所述磨轮表面刻有与所需导轮槽型形状相适应配合的凸起，对磨轮施压，使磨轮接触表面均匀平整涂覆有涂料的导轮胚体，并保持磨轮轴线与导轮胚体轴线平行； 同步转动磨轮和导轮胚体，并在整个过程中保持二者之间的压力，直到导轮胚体的表面磨入深度达到要求，然后移动上述磨轮至下一个开槽位置，重复上述制备，直到整个导轮按需要布满所需导轮槽。A method for preparing a guide groove type multi-line cutting guide wheel, comprising at least one grinding wheel, the surface of the grinding wheel is engraved with a protrusion matching with a shape of a required guide wheel groove shape, and the grinding wheel is pressed to make the grinding wheel contact The surface is evenly flat coated with the coated guide body, and the axis of the grinding wheel is kept parallel to the axis of the guide body; Synchronously rotating the grinding wheel and the guide wheel body, and maintaining the pressure between the two during the whole process until the surface grinding depth of the guide wheel body reaches the required depth, and then moving the grinding wheel to the next slot position, repeating the above preparation, Until the entire guide wheel fills the required guide groove as needed.
进一步地，所述涂料为聚醚聚氨酯涂料，可以提高导轮的强度，降低锯线对导轮的摩擦，延长导轮的使用寿命，提高工作效率。Further, the coating is a polyether polyurethane coating, which can improve the strength of the guide wheel, reduce the friction of the saw wire on the guide wheel, extend the service life of the guide wheel, and improve the work efficiency.
进一步地，所述涂料材料中共混有碳纤维、金刚石、碳化硅、氮化硼、氧化铝、氧化锆、氮化硅、碳化钨、石墨中的一种或几种。Further, one or more of carbon fiber, diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride, tungsten carbide, and graphite are blended in the coating material.
实际加工中，并不需要保证底部、定位侧壁、导向侧壁的轮廓为直线，但一般会保证定位侧壁、导向侧壁的轮廓为向导轮轮廓中心弯曲的凸曲线，以便于加工。In the actual processing, it is not necessary to ensure that the contours of the bottom, the positioning side wall and the guiding side wall are straight, but generally the contour of the positioning side wall and the guiding side wall is curved to be a convex curve curved at the center of the guide wheel contour to facilitate processing.
本发明的有益效果是：本发明提供了一种定制槽型的多线切割用导轮及其制备方法，导轮与采用传统V形或U形横截面槽型的导轮相比，在不损失锯线定位能力的前提下，不仅寿命显著延长，且锯线跳线与抖动风险大幅降低，有利于降低切割不良如线痕、TTV等。The invention has the beneficial effects that the present invention provides a customized groove type multi-wire cutting guide wheel and a preparation method thereof, and the guide wheel is compared with a guide wheel adopting a conventional V-shaped or U-shaped cross-section groove type, Under the premise of losing the positioning ability of the saw wire, not only the life is significantly prolonged, but also the risk of the wire jumper and the jitter is greatly reduced, which is beneficial to reduce the cutting defects such as line marks and TTV.
附图说明DRAWINGS
下面结合附图和实施例对本发明进一步说明。The invention will now be further described with reference to the drawings and embodiments.
图1是本发明的一种定制槽型的多线切割用导轮的立体图；Figure 1 is a perspective view of a custom groove type multi-wire cutting guide wheel of the present invention;
图2是图1中“A”位置的局部放大图；Figure 2 is a partial enlarged view of the position "A" in Figure 1;
图3是底部为平面的锯线导轮槽；Figure 3 is a saw wire guide groove with a flat bottom;
图4是锯线在导轮背面的行进示意图；Figure 4 is a schematic view of the travel of the saw wire on the back side of the guide wheel;
图5是实施例1的导轮轮廓图； Figure 5 is a plan view of the guide wheel of Embodiment 1;
图6是实施例2的导轮轮廓图；Figure 6 is a plan view of the guide wheel of Embodiment 2;
图7是实施例3的导轮轮廓图；Figure 7 is a contour view of a guide wheel of Embodiment 3;
图8是实施例4的导轮轮廓图；Figure 8 is a plan view of a guide wheel of Embodiment 4;
图9是实施例5的导轮轮廓图。Figure 9 is a plan view of the guide wheel of the fifth embodiment.
图中：1.导轮，2.锯线，3.导轮槽，4.导轮槽轮廓，11.耐磨涂层，41.底边，42.侧壁，43.定位侧壁，44.导向侧壁，5.轮廓法线。In the figure: 1. guide wheel, 2. saw wire, 3. guide wheel groove, 4. guide wheel groove profile, 11. wear resistant coating, 41. bottom edge, 42. side wall, 43. positioning side wall, 44 . Guide side wall, 5. Contour normal.
具体实施方式detailed description
为了使本发明的设计思路、创作特征、达成功效易于明白了解，下面针对多种不同型号的多线切割机导轮参数，以及锯线类型，进行设计，进一步阐述本发明。In order to make the design idea, the authoring feature and the achievement effect of the present invention easy to understand, the following describes the invention by further designing a plurality of different types of multi-wire cutter guide wheel parameters and saw wire types.
实施例1Example 1
如图5所示，梅耶博格(Meyer Burger)的DS271机型，其导轮轴距为660mm在使用110μm切割钢线，JIS#1500碳化硅砂，肖氏D硬度为95，耐磨涂层厚度为0.8mm，槽距343μm。以底部直线部分长度W＝70μm(W＝63.6％*D)计算，定位侧壁夹角α＝25.1度，其法线方向上的高度为31.7μm。以摩擦控制距离x＝0.2mm的条件，计算得出此时的导向侧壁夹角γ＝42.8度，其垂直高度设计为160μm。As shown in Figure 5, Meyer Burger's DS271 model has a guide wheel wheelbase of 660mm and a 110μm cutting steel wire, JIS#1500 silicon carbide sand, Shore D hardness of 95, and wear-resistant coating thickness. It is 0.8 mm and the groove pitch is 343 μm. Calculated by the length of the bottom straight portion W = 70 μm (W = 63.6% * D), the positioning side wall angle α = 25.1 degrees, and the height in the normal direction was 31.7 μm. With the friction control distance x=0.2 mm, the angle of the guide sidewall at this time is calculated to be γ=42.8 degrees, and the vertical height is designed to be 160 μm.
实施例2Example 2
如图6所示，NTC的442型多线切割机，其导轮轴距为600mm，使用110μm切割钢线，JIS#2000碳化硅砂，肖氏D硬度为99，耐磨涂层为0.9mm，槽距343μm，底部W长度为40％线径，即44μm，底部曲率半径为 2倍线径，即220μm。计算结果为定位侧壁夹角α为46.4度，高度为31.7μm。以摩擦控制距离x＝0.1mm的条件，计算得出此时的导向侧壁夹角γ＝49.7度，高度为180μm。在加工开槽刀具时，先加工出两个斜边，然后底部以曲率半径220μm进行倒角。As shown in Figure 6, NTC's 442 multi-wire cutting machine has a guide wheel wheelbase of 600mm, using 110μm cutting steel wire, JIS#2000 silicon carbide sand, Shore D hardness of 99, wear resistant coating of 0.9mm, groove 343μm, the bottom W length is 40% wire diameter, that is 44μm, the bottom radius of curvature is 2 times wire diameter, ie 220μm. The calculation result is that the positioning side wall angle α is 46.4 degrees and the height is 31.7 μm. Under the condition of the friction control distance x=0.1 mm, the angle γ of the guide sidewall at this time was calculated to be 49.7 degrees, and the height was 180 μm. When machining a grooving tool, two bevels are machined first, and then the bottom is chamfered with a radius of curvature of 220 μm.
实施例3Example 3
如图7所示，应用材料(Applied Materials)的HCT B5型多线切割机，其导轮轴距为660mm，使用120μm切割钢线，肖氏D硬度为80，耐磨涂层厚度为1.1mm，JIS#1500碳化硅砂，槽距350μm，底部W长度为80％线径，即96μm。计算结果为定位侧壁夹角α为12.7度，高度为43.0μm，修正10％后为47.3μm。以摩擦控制距离x＝0.2mm的条件，导向侧壁夹角γ＝40.6度，高度为160μm。在底边与定位侧壁之间，以曲率半径为0.2倍锯线直径，即24μm进行直角倒角。即在加工开槽刀具时，先加工出底边及两段变角度斜边，然后底边角以曲率半径24μm进行直角边倒角。在定位侧壁与导向侧壁之间，以曲率半径为360μm进行倒角后，再最后完成定位侧壁与导向侧壁。As shown in Fig. 7, the HCT B5 multi-wire cutting machine with Applied Materials has a guide wheel wheelbase of 660 mm, a 120 μm cutting steel wire, a Shore D hardness of 80, and a wear-resistant coating thickness of 1.1 mm. JIS #1500 silicon carbide sand with a groove spacing of 350 μm and a bottom W length of 80% wire diameter, ie 96 μm. The calculation result is that the positioning side wall angle α is 12.7 degrees, the height is 43.0 μm, and the correction is 10% and 47.3 μm. Under the condition of the friction control distance x=0.2 mm, the guiding side wall angle γ=40.6 degrees and the height is 160 μm. Between the bottom edge and the positioning side wall, a right angle chamfer is performed with a radius of curvature of 0.2 times the wire diameter, that is, 24 μm. That is, when machining the slotting tool, the bottom edge and the two angled bevels are first processed, and then the bottom corner is chamfered at a right angle with a radius of curvature of 24 μm. Between the positioning side wall and the guiding side wall, chamfering is performed with a radius of curvature of 360 μm, and then the positioning side wall and the guiding side wall are finally completed.
实施例4Example 4
如图8所示，NTC的PV800型多线切割机，其导轮轴距为560mm，使用125μm金刚石锯线，肖氏D硬度为99，耐磨涂层厚度为0.9mm，槽距350μm，底部W长度为62.4％线径，即78μm。计算结果为定位侧壁夹角α为24.0度，高度为32.7μm，进行5％的补偿后高度为34.3μm。以摩擦控制距离x＝0.2mm的条件，导向侧壁角γ＝45.4度，高度为125μm。在底边与定位侧壁之间，以曲率半径为0.1倍锯线直径，即11μm进行直角倒角。即在加 工开槽刀具时，先加工出底边及两段变角度斜边，然后底边角以曲率半径11μm进行直角边倒角。As shown in Figure 8, NTC's PV800 multi-wire cutting machine has a guide wheel wheelbase of 560mm, a 125μm diamond saw wire, a Shore D hardness of 99, a wear-resistant coating thickness of 0.9mm, a groove pitch of 350μm, and a bottom W. The length is 62.4% of the wire diameter, that is, 78 μm. The calculation results showed that the positioning side wall angle α was 24.0 degrees, the height was 32.7 μm, and the height after 5% compensation was 34.3 μm. With a friction control distance x = 0.2 mm, the guide side wall angle γ = 45.4 degrees and the height was 125 μm. Between the bottom edge and the positioning side wall, a right angle chamfer is performed with a radius of curvature of 0.1 times the wire diameter, that is, 11 μm. That is in plus When grooving the tool, the bottom edge and the two angled bevels are first machined, and then the bottom corner is chamfered at a right angle with a radius of curvature of 11 μm.
实施例5Example 5
如图9所示，梅耶博格(Meyer Burger)的DS264机型，其导轮轴距为660mm，在使用110μm切割钢线，肖氏D硬度为88，耐磨涂层厚度为1.5mm，JIS#1500碳化硅砂，槽距343μm，底部W长度为80％线径，即88μm，底部曲率半径为4倍线径，即440μm。计算结果为定位侧壁夹角α为18度，修正为75％为13.5度。高度为38μm，修正增加25％为47.5。以摩擦控制距离x＝0.1mm的条件，计算得出此时的导向侧壁夹角γ＝28.6度，修正增加25％为35.8度。高度为250％线径，为275μm。在加工开槽刀具时，先加工出两个斜边，然后底部以曲率半径440μm进行倒角。As shown in Figure 9, Meyer Burger's DS264 model has a guide wheel wheelbase of 660mm, a 110μm cutting steel wire, a Shore D hardness of 88, and a wear-resistant coating thickness of 1.5mm, JIS. #1500 SiC sand with a groove spacing of 343μm, the bottom W length is 80% wire diameter, ie 88μm, and the bottom radius of curvature is 4 times wire diameter, ie 440μm. The calculation result is that the positioning side wall angle α is 18 degrees, and the correction is 75% to 13.5 degrees. The height is 38μm and the correction is increased by 25% to 47.5. With the friction control distance x=0.1mm, the angle of the guide sidewall at this time is calculated as γ=28.6 degrees, and the correction is increased by 25% to 35.8 degrees. The height is 250% wire diameter and is 275 μm. When machining a grooving tool, two bevels are machined first, and then the bottom is chamfered with a radius of curvature of 440 μm.
实施例6Example 6
一种定制槽型的多线切割用导轮的制备方法，包括1个磨轮，所述磨轮表面刻有与所需导轮槽型形状相适应配合的凸起，对磨轮施压，使磨轮接触表面均匀平整涂覆共混有碳纤维的聚醚聚氨酯涂料的导轮胚体，并保持磨轮轴线与导轮胚体轴线平行；同步转动磨轮和导轮胚体，并在整个过程中保持二者之间的压力，直到导轮胚体的表面磨入深度达到要求，然后移动上述磨轮至下一个开槽位置，重复上述制备，直到整个导轮按需要布满所需导轮槽。The invention relates to a method for preparing a guide groove type multi-line cutting guide wheel, which comprises a grinding wheel, the surface of the grinding wheel is engraved with a protrusion matched with the shape of the required guide wheel groove shape, and the grinding wheel is pressed to make the grinding wheel contact. The surface is uniformly flat coated with the conductor body of the polyether polyurethane coating blended with carbon fiber, and the axis of the grinding wheel is kept parallel with the axis of the guide wheel body; the grinding wheel and the guide wheel body are synchronously rotated, and the two are maintained throughout the process. The pressure is applied until the surface grinding depth of the guide body reaches the desired level, and then the grinding wheel is moved to the next slot position, and the above preparation is repeated until the entire guide wheel is filled with the required guide groove as needed.
实施例7-17Example 7-17
加工步骤同实施例6，其磨轮数量、涂料组成如下：The processing steps are the same as in Example 6. The number of grinding wheels and the composition of the coating are as follows:
实施例Example 磨轮数量(个)Number of grinding wheels (a) 涂料组成Coating composition
实施例7Example 7 66 聚醚聚氨酯涂料和碳纤维共混Polyether polyurethane coating and carbon fiber blending
实施例8Example 8 33 聚醚聚氨酯涂料和碳化硅Polyether polyurethane coatings and silicon carbide
实施例9Example 9 44 聚醚聚氨酯涂料、金刚石和石墨Polyether polyurethane coating, diamond and graphite
实施例10Example 10 22 聚醚聚氨酯涂料和氧化铝Polyether polyurethane coating and alumina
实施例11Example 11 44 聚醚聚氨酯涂料和氮化硅Polyether polyurethane coatings and silicon nitride
实施例12Example 12 11 聚醚聚氨酯涂料和氮化硼Polyether polyurethane coating and boron nitride
实施例13Example 13 55 聚醚聚氨酯涂料和氧化锆Polyether polyurethane coating and zirconia
实施例14Example 14 44 聚醚聚氨酯涂料和碳化钨Polyether polyurethane coating and tungsten carbide
实施例15Example 15 11 聚醚聚氨酯涂料Polyether polyurethane coating
实施例16Example 16 33 聚醚聚氨酯涂料Polyether polyurethane coating
实施例17Example 17 44 聚醚聚氨酯涂料Polyether polyurethane coating
以上述依据本发明的理想实施例为启示，通过上述的说明内容，相关工作人员完全可以在不偏离本项发明技术思想的范围内，进行多样的变更以及修改。本项发明的技术性范围并不局限于说明书上的内容，必须要根据权利要求范围来确定其技术性范围。 In view of the above-described embodiments of the present invention, various changes and modifications may be made by those skilled in the art without departing from the scope of the invention. The technical scope of the present invention is not limited to the contents of the specification, and the technical scope thereof must be determined according to the scope of the claims.

Claims (13)

  1. 一种定制槽型的多线切割用导轮，其特征在于：所述导轮(1)表面具有耐磨涂层(11)，所述导轮(1)表面耐磨涂层(11)上开有彼此平行的用于排列锯线(2)的导轮槽(3)；所述导轮槽(3)与通过导轮(1)轴线的平面的交线形成导轮槽轮廓(4)，所述导轮槽轮廓(4)包括底边(41)和侧壁(42)，所述导轮槽轮廓(4)的侧壁(42)包括与底边相连的锯线定位侧壁(43)和位于定位侧壁(43)之上的锯线导向侧壁(44)，所述定位侧壁(43)为直线或向导轮槽轮廓中心弯曲的凸曲线，所述导向侧壁(44)为直线或向导轮槽轮廓中心弯曲的凸曲线，所述导轮槽轮廓(4)所在平面上任一与导轮轴线垂直相交的直线为轮廓法线(5)，所述定位侧壁(43)两端点的连线与轮廓法线(5)的夹角为α，所述导向侧壁(44)两端点的连线与轮廓法线(5)的夹角为γ，所述α<γ。A customized groove type multi-wire cutting guide wheel, characterized in that: the surface of the guide wheel (1) has an abrasion-resistant coating (11), and the surface of the guide wheel (1) is wear-resistant coating (11) a guide groove (3) for arranging the wire (2) parallel to each other; the guide groove (3) forms a guide groove profile with the intersection of the plane passing through the axis of the guide wheel (1) (4) The guide wheel groove profile (4) includes a bottom edge (41) and a side wall (42), and the side wall (42) of the guide wheel groove profile (4) includes a saw wire positioning side wall connected to the bottom edge ( 43) and a saw wire guiding sidewall (44) above the positioning sidewall (43), the positioning sidewall (43) being a convex curve curved in a straight line or a center of the guide wheel groove profile, the guiding sidewall (44) a convex curve curved at the center of the straight line or the guide wheel groove contour, and any straight line on the plane of the guide wheel groove contour (4) perpendicular to the axis of the guide wheel is a contour normal line (5), and the positioning side wall (43) The angle between the line connecting the two ends and the contour normal line (5) is α, and the angle between the line connecting the two ends of the guiding side wall (44) and the contour normal line (5) is γ, the α<γ .
  2. 如权利要求1所述的一种定制槽型的多线切割用导轮，其特征在于：所述耐磨涂层(11)肖氏D硬度在80-99之间、厚度大于0.3mm。A custom groove type multi-wire cutting guide wheel according to claim 1, wherein the wear resistant coating (11) has a Shore D hardness of between 80 and 99 and a thickness of more than 0.3 mm.
  3. 如权利要求2所述的一种定制槽型的多线切割用导轮，其特征在于：所述底边(41)为直线或曲率半径大于锯线直径D的1.6倍的曲线。A custom groove type multi-wire cutting guide wheel according to claim 2, wherein said bottom edge (41) is a straight line or a curve having a radius of curvature greater than 1.6 times the diameter D of the wire.
  4. 如权利要求1-3任一项所述的一种定制槽型的多线切割用导轮，其特征在于：所述底边(41)宽度为W，所述底边(41)宽度W为锯线(2)直径D的40％-80％。A custom groove type multi-wire cutting guide wheel according to any one of claims 1 to 3, wherein the bottom edge (41) has a width W and the bottom edge (41) has a width W The saw wire (2) is 40%-80% of the diameter D.
  5. 如权利要求4所述的一种定制槽型的多线切割用导轮，其特征在于：所述底边与侧壁相接的部分存在平滑过渡的底边倒角区。The guide groove type multi-wire cutting guide wheel according to claim 4, wherein the bottom edge portion and the side wall portion have a smooth transition bottom edge chamfering region.
  6. 如权利要求2所述的一种定制槽型的多线切割用导轮，其特征在于：所述定位侧壁(43)两端点的连线与轮廓法线(5)的夹角α的取值范围为： A custom groove type multi-wire cutting guide wheel according to claim 2, characterized in that: the angle between the line connecting the two ends of the positioning side wall (43) and the contour normal line (5) The range of values is:
    Figure PCTCN2014086479-appb-100001
    Figure PCTCN2014086479-appb-100001
  7. 如权利要求6所述的一种定制槽型的多线切割用导轮，其特征在于：所述定位侧壁(43)在导轮槽法线上的投影长度为h1，h1的取值范围为：A guide groove type multi-wire cutting guide wheel according to claim 6, wherein the projection side wall (43) has a projection length of h1 on the normal groove of the guide wheel groove, and a range of values of h1 for:
    Figure PCTCN2014086479-appb-100002
    Figure PCTCN2014086479-appb-100002
  8. 如权利要求2所述的一种定制槽型的多线切割用导轮，其特征在于：所述导轮(1)含耐磨涂层(11)在内的半径为r，所述槽壁高度为h，所述导向侧壁(44)与锯线(2)间的接触距离为x，
    Figure PCTCN2014086479-appb-100003
    Figure PCTCN2014086479-appb-100004
    其中
    Figure PCTCN2014086479-appb-100005
    A custom groove type multi-wire cutting guide wheel according to claim 2, wherein said guide wheel (1) has a radius r including a wear-resistant coating (11), said groove wall The height is h, and the contact distance between the guiding sidewall (44) and the saw wire (2) is x,
    Figure PCTCN2014086479-appb-100003
    Figure PCTCN2014086479-appb-100004
    among them
    Figure PCTCN2014086479-appb-100005
  9. 如权利要求8所述的一种定制槽型的多线切割用导轮，其特征在于：所述导向侧壁(44)在导轮槽法线上的投影长度为锯线(2)直径D的100％-250％。A custom groove type multi-wire cutting guide wheel according to claim 8, wherein the projection side wall (44) has a projection length on the guide groove normal line of the saw wire (2) diameter D. 100%-250%.
  10. 如权利要求6-9所述的一种定制槽型的多线切割用导轮，其特征在于：所述定位侧壁(43)与导向侧壁(44)相连部分存在平滑过渡的侧壁倒角区。A guide groove type multi-wire cutting guide wheel according to any of claims 6-9, characterized in that: the positioning side wall (43) and the guiding side wall (44) are connected to each other with a smooth transition side wall Corner area.
  11. 一种定制槽型的多线切割用导轮的制备方法，其特征在于：包括至少一个磨轮，所述磨轮表面刻有与所需导轮槽型形状相适应配合的凸起，对磨轮施压，使磨轮接触表面均匀平整涂覆有涂料的导轮胚体，并保持磨轮轴线与导轮胚体轴线平行；同步转动磨轮和导轮胚体，并在整个过程中保持二者之间的压力，直到导轮胚体的表面磨入深度达到要求，然后移动上述磨轮至下一个开槽位置，重复上述制备，直到整个导轮按需要布满所需导轮槽。The invention relates to a method for preparing a guide groove type multi-line cutting guide wheel, which comprises: at least one grinding wheel, the surface of the grinding wheel is engraved with a protrusion corresponding to the shape of the required guide wheel groove shape, and the grinding wheel is pressed , the grinding wheel contact surface is evenly flat coated with the coated guide body, and the axis of the grinding wheel is kept parallel with the axis of the guide wheel body; the grinding wheel and the guide wheel body are synchronously rotated, and the pressure between the two is maintained throughout the process. Until the surface grinding depth of the guide wheel body reaches the required depth, then the grinding wheel is moved to the next slot position, and the above preparation is repeated until the entire guide wheel is filled with the required guide groove as needed.
  12. 如权利要求11所述的一种定制槽型的多线切割用导轮的制备方法，其特征在于：所述涂料为聚醚聚氨酯涂料。The method for preparing a customized groove type multi-wire cutting guide wheel according to claim 11, wherein the coating material is a polyether polyurethane coating material.
  13. 如权利要求12所述的一种定制槽型的多线切割用导轮的制备方法，其 特征在于：所述聚醚型聚氨酯涂料中共混有碳纤维、金刚石、碳化硅、氮化硼、氧化铝、氧化锆、氮化硅、碳化钨、石墨中的一种或几种。 A method for preparing a customized groove type multi-wire cutting guide wheel according to claim 12, The polyether polyurethane coating is characterized by blending one or more of carbon fiber, diamond, silicon carbide, boron nitride, aluminum oxide, zirconium oxide, silicon nitride, tungsten carbide, and graphite.
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