CN103311096A - 氮化物半导体的制造方法 - Google Patents
氮化物半导体的制造方法 Download PDFInfo
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- CN103311096A CN103311096A CN2013100574143A CN201310057414A CN103311096A CN 103311096 A CN103311096 A CN 103311096A CN 2013100574143 A CN2013100574143 A CN 2013100574143A CN 201310057414 A CN201310057414 A CN 201310057414A CN 103311096 A CN103311096 A CN 103311096A
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- nitride semiconductor
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- underlay substrate
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Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012051529A JP2013187366A (ja) | 2012-03-08 | 2012-03-08 | 窒化物半導体の製造方法 |
JP2012-051529 | 2012-03-08 |
Publications (1)
Publication Number | Publication Date |
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CN103311096A true CN103311096A (zh) | 2013-09-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2013100574143A Pending CN103311096A (zh) | 2012-03-08 | 2013-02-22 | 氮化物半导体的制造方法 |
Country Status (3)
Country | Link |
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JP (1) | JP2013187366A (zh) |
CN (1) | CN103311096A (zh) |
TW (1) | TW201338199A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6530356B2 (ja) * | 2016-09-01 | 2019-06-12 | 大陽日酸株式会社 | 窒化物半導体製造装置の洗浄方法 |
JP7377892B2 (ja) * | 2019-12-09 | 2023-11-10 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、およびプログラム |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587014A (en) * | 1993-12-22 | 1996-12-24 | Sumitomo Chemical Company, Limited | Method for manufacturing group III-V compound semiconductor crystals |
CN1618116A (zh) * | 2000-08-18 | 2005-05-18 | 昭和电工株式会社 | I i i族氮化物半导体晶体的制造方法、基于氮化镓的化合物半导体的制造方法、基于氮化镓化合物半导体、基于氧化镓的化合物半导体发光器件、以及使用半导体发光器件的光源 |
US20060261371A1 (en) * | 2005-05-19 | 2006-11-23 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20090146187A1 (en) * | 2007-12-07 | 2009-06-11 | Rohm Co., Ltd. | Nitride semiconductor element and process for producing the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63188938A (ja) * | 1987-01-31 | 1988-08-04 | Toyoda Gosei Co Ltd | 窒化ガリウム系化合物半導体の気相成長方法 |
JP3673541B2 (ja) * | 1993-12-22 | 2005-07-20 | 住友化学株式会社 | 3−5族化合物半導体結晶の製造方法 |
JP3198912B2 (ja) * | 1995-03-30 | 2001-08-13 | 住友化学工業株式会社 | 3−5族化合物半導体の製造方法 |
TW456052B (en) * | 1995-11-14 | 2001-09-21 | Sumitomo Chemical Co | Process for producing group III-V compound semiconductor |
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2012
- 2012-03-08 JP JP2012051529A patent/JP2013187366A/ja active Pending
-
2013
- 2013-02-22 CN CN2013100574143A patent/CN103311096A/zh active Pending
- 2013-03-01 TW TW102107313A patent/TW201338199A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587014A (en) * | 1993-12-22 | 1996-12-24 | Sumitomo Chemical Company, Limited | Method for manufacturing group III-V compound semiconductor crystals |
CN1618116A (zh) * | 2000-08-18 | 2005-05-18 | 昭和电工株式会社 | I i i族氮化物半导体晶体的制造方法、基于氮化镓的化合物半导体的制造方法、基于氮化镓化合物半导体、基于氧化镓的化合物半导体发光器件、以及使用半导体发光器件的光源 |
US20060261371A1 (en) * | 2005-05-19 | 2006-11-23 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20090146187A1 (en) * | 2007-12-07 | 2009-06-11 | Rohm Co., Ltd. | Nitride semiconductor element and process for producing the same |
Also Published As
Publication number | Publication date |
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TW201338199A (zh) | 2013-09-16 |
JP2013187366A (ja) | 2013-09-19 |
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Owner name: HITACHI METALS, LTD. Free format text: FORMER OWNER: HITACHI CABLE CO., LTD. Effective date: 20140321 |
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Effective date of registration: 20140321 Address after: Tokyo, Japan, Japan Applicant after: Hitachi Metals Co., Ltd. Address before: Tokyo, Japan, Japan Applicant before: Hitachi Cable Co., Ltd. |
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Effective date of registration: 20150818 Address after: Ibaraki Applicant after: Hitachi Cable Address before: Tokyo, Japan, Japan Applicant before: Hitachi Metals Co., Ltd. |
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Effective date of registration: 20160229 Address after: Tokyo, Japan, Japan Applicant after: Sumitomo Chemical Co., Ltd. Address before: Ibaraki Applicant before: Hitachi Cable |
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